E1200 HT 260-3
Index
23.04.07
00401010_41087
Index
A
alarm display............................................. 8-13
alarm message ......................................... 8-13
ambient air .................................................. 2-3
ambient temperature................................... 5-2
ammonia ................................................... 3-10
antifreeze .................................................... 7-6
assembly..................................................... 6-1
automatic loading........................................ 4-4
automatic operation .................................... 8-4
B
back flange.................................................. 4-8
breakdown
power supply ........................................ 4-15
bubbler system.......................................... 4-14
button
alarms............................................8-5, 8-13
datalog.................................................... 8-5
help......................................................... 8-5
jobs......................................................... 8-5
setup....................................................... 8-5
system ...........................................8-5, 8-15
C
cell control computer................................. 4-22
CCC-RM............................................... 4-22
Protgraf................................................. 4-22
centrotherm machine safety...................... 4-21
CESAR control computer.................4-21, 8-15
CESAR control system ............................... 8-8
CESAR
ALARM button ...................................... 8-16
ENTER button ...................................... 8-17
ESC button ........................................... 8-17
INS button ............................................ 8-17
OPTION button..................................... 8-16
STANDBY button ................................. 8-16
START button ...................................... 8-16
STATUS button .................................... 8-16
STOP button......................................... 8-16
TAB button ........................................... 8-17
chemical vapor deposition .......................... 2-5
CMI ........................................................... 4-18
CMS .................................................4-18, 4-21
command bar .....................................4-20, 8-4
commissioning ............................................ 7-2
computer state .......................................... 8-18
condensation bottle................................. 10-15
conditioning ................................................ 7-3
connection state ......................................... 8-4
control system ............................................ 2-4
cooling system
heating cassette..................................... 4-9
horizontal furnace .................................. 4-9
power electronics ................................... 4-8
air cooling............................................. 4-10
copyright ..................................................... 1-4
CVD ............................................................ 2-5
D
date............................................................. 8-2
DCE .......................................................... 3-10
decommissioning........................................ 7-5
diffusion ...................................................... 2-5
disposal ...................................................... 7-6
distributor cabinet ..................................... 4-15
disturbance ............................................... 8-13
door .......................................................... 4-14
E
emergency cooling shutter ......................... 3-3
emergency inert gas purging ...................... 3-4
emergency stop pushbutton ..................... 4-18
emergency stop switch ...................... 3-3, 4-15
exhaust lance ......................................... 10-15
exhaust system......................................... 4-16
F
F1 STATUS .............................................. 8-18
F2 MANUAL ............................................. 8-18
F3 STOP................................................... 8-18
F4 RECIPE ............................................... 8-18
F5 PROTOCOL ........................................ 8-18
F6 USER .................................................. 8-18
F7 SERVICE............................................. 8-18
F8 LOGOUT ............................................. 8-18
filter............................................................. 4-5
fire extinguisher ........................................ 3-15
fire extinguishing substances ................... 3-15
firefighting ................................................. 3-15
flaring unit ................................................. 4-14
function key bar ........................................ 8-18
fuses ......................................................... 4-15
Summary of Contents for E1200 HT 260-3
Page 1: ...Operating Instructions for Horizontal Furnace Equipment E1200 HT 260 3 Version 1 0 1_41087 11 ...
Page 2: ...E1200 HT 260 3 23 04 07 00401010_41087 ...
Page 4: ...E1200 HT 260 3 Document Information 23 04 07 00401010_41087 ...
Page 16: ...E1200 HT 260 3 Index 23 04 07 00401010_41087 ...
Page 18: ...E1200 HT 260 3 List of Figures 23 04 07 00401010_41087 ...
Page 20: ...E1200 HT 260 3 List of Tables 23 04 07 00401010_41087 ...
Page 26: ...E1200 HT 260 3 0BOperating Instruction Remarks 23 04 07 1 6 00401010_41087 ...
Page 34: ...E1200 HT 260 3 1BIntroduction 23 04 07 2 8 00401010_41087 ...
Page 50: ...E1200 HT 260 3 2BSafety 23 04 07 3 16 00401010_41087 ...
Page 78: ...E1200 HT 260 3 4BTransport 23 04 07 5 4 00401010_41087 ...
Page 180: ...E1200 HT 260 3 8BMaintenance 23 04 07 9 76 00401010_41087 ...
Page 228: ...E1200 HT 260 3 10BSpare and Wearing Parts 23 04 07 11 2 00401010_41087 ...