CENTROTHERM E1200 HT 260-3 Operating Instructions Manual Download | Manualshive

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E1200 HT 260-3

3BFunctional Description

23.04.07

00401010_41087

4-1

4

Functional Description

The figure is a schematic drawing of the equipment. The position of certain assembly
groups in your equipment may vary from this drawing. For the specific arrangement of
your equipment, refer to the layout in chapter 12.2 Drawings, Circuit Diagrams,
Overviews, page 12-1.

Figure 4-1:

Schematic Total View

Description of items in figure 4-1:

1 control and operating elements

2 loading

station

3 exhaust system with TGA toxic gas exhaust

4 horizontal furnace with 3 stacks

5 gas

cabinet

The figure displays the main components of the system. The distributor cabinet and the
transformer box (option) are located at the rear side of the equipment. The TEOS
cabinet is mounted on the rear side of the equipment and is integrated in the TGA toxic
gas exhaust cabinet.

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Summary of Contents for E1200 HT 260-3

Page 1: ...Operating Instructions for Horizontal Furnace Equipment E1200 HT 260 3 Version 1 0 1_41087 11 ...

Page 2: ...E1200 HT 260 3 23 04 07 00401010_41087 ...

Page 3: ... on 4 16 2007 Current version 23 04 07 15 28 Legend of Amendments Version Date Name Description of Amendments V 1 0 04 16 07 Bangert Manual based on Master Document 1 9 Project spedific changes Cpt 3 7 5 Gas Cpt 3 8 Safety Labeling on the Equipment Cpt 4 Figure Overall View Cpt 4 3 TEOS Cabinet completely new Cpt 9 2 deleted error messages for stacks 4 and 5 ...

Page 4: ...E1200 HT 260 3 Document Information 23 04 07 00401010_41087 ...

Page 5: ...Cassette with Water Cooled Jacket 2 4 2 1 3 7 Control System 2 4 2 2 Process Overview 2 5 2 2 1 Diffusion 2 5 2 2 2 Oxidation 2 5 2 2 3 Chemical Vapor Deposition 2 5 2 2 4 Plasma Enhanced Chemical Vapor Deposition 2 6 2 3 Safety Concept 2 6 2 3 1 Safety relevant Aspects of the Mechanical Construction 2 6 2 3 2 Safety relevant Aspects of the System Functions 2 7 3 Safety 3 1 3 1 Correct Use 3 1 3 2...

Page 6: ...ion Box in the Gas Cabinet 4 16 4 9 Display and Operating Elements 4 16 4 9 1 Signal Lamp and Horn 4 16 4 9 2 Operating Panel 4 18 4 9 3 Buttons on the Touchscreen 4 19 4 9 4 User Interface of the CMI Computer 4 20 4 9 4 1 CESAR Control Computer 4 21 4 9 4 2 centrotherm Machine Safety CMS 4 21 4 9 5 Cell Controller 4 22 4 9 5 1 centrotherm cell control Recipe Manager CCC RM 4 22 4 9 5 2 ProtGraf 4...

Page 7: ...ssage 8 14 8 7 CESAR Control Computer User Interface 8 15 9 Maintenance 9 1 9 1 Safety Notes 9 1 9 2 Disturbance Diagnosis for Displays at the System Computer 9 3 9 2 1 ID 1000 3000 Error Messages CMI 9 4 9 2 2 ID 3001 3050 Error Messages CMS 9 6 9 2 3 ID 3051 3100 Error Messages CMS 9 9 9 2 4 ID 3101 3150 Error Messages CMS 9 11 9 2 5 ID 3151 3200 Error Messages CMS 9 13 9 2 6 ID 3201 3250 Error ...

Page 8: ...e 9 37 9 3 5 7 Incorrect Gas Flow Velocity Ratios 9 37 9 3 5 8 Overheating of Control Cabinet Interior 9 37 9 3 6 Cell Controller Disturbances 9 38 9 4 Replacing the Assembly Groups at the Horizontal Furnace 9 39 9 4 1 Replacing the Heating Cassette 9 40 9 4 2 Installing the Process Tube 9 41 9 4 2 1 Installing the Quartz Process Tube 9 41 9 4 2 2 Installing the SiC Process Tube 9 42 9 4 2 3 Insta...

Page 9: ... 10 5 10 5 Preventive Maintenance Intervals 10 5 10 6 Daily Procedures 10 7 10 6 1 Checking the Process Boat Contacts 10 7 10 6 2 Removing Broken Wafer Parts 10 7 10 6 3 Checking the Protocol Entries at the Cell Controller 10 7 10 6 4 Checking the Zone Heating Current on the CMI Operating Panel 10 7 10 7 Weekly Procedures 10 8 10 7 1 Checking the Distributor Cabinet Overtemp and Fan Function CAN C...

Page 10: ... Electronics 10 40 10 12 16 Checking the Safety Labels 10 41 10 13 Procedures for Every 4 Years 10 41 10 13 1 Inspections according to BGV ch A3 5 10 41 10 13 2 Inspections According to EN 60204 1 10 41 10 14 Process Dependent Measures 10 42 10 14 1 Cleaning resp Replacing SiC Quartz Process Tubes 10 42 10 14 2 Cleaning resp Replacing SiC Quartz Process Boats 10 43 10 14 3 Cleaning Titanium Proces...

Page 11: ...r DMC d c motor controller I O input output IHS integrated handling system LAN local area network MFC mass flow controller NO normally open NV RAM non volatile RAM OS2 operating system of the control computer PPS8 pulse package control system ProtGraf CESAR protocol analysis software on the CCC cell controller RCC Remote Control CESAR Software with which the control computer can be remote controll...

Page 12: ...s 23 04 07 00401010_41087 Abbreviation Meaning PLC programmable logic controller SSR solid state relay power circuit breaker TGA toxic gas exhaust TMM temperature measuring module UPS uninterrupted power supply WTS wafer transfer system ...

Page 13: ... TAB button 8 17 chemical vapor deposition 2 5 CMI 4 18 CMS 4 18 4 21 command bar 4 20 8 4 commissioning 7 2 computer state 8 18 condensation bottle 10 15 conditioning 7 3 connection state 8 4 control system 2 4 cooling system heating cassette 4 9 horizontal furnace 4 9 power electronics 4 8 air cooling 4 10 copyright 1 4 CVD 2 5 D date 8 2 DCE 3 10 decommissioning 7 5 diffusion 2 5 disposal 7 6 d...

Page 14: ...city 2 2 cooling water 2 1 oxygen 2 2 nitrogen 2 2 N navigation bar 4 20 8 5 O online help 8 5 operating company 1 4 operating instruction remarks 1 1 operating panel 4 18 operating personnel 1 4 8 1 operation alarm handling 8 13 startup 8 10 shutdown 8 11 process capability 8 12 responding to an alarm 8 14 oxidation 2 5 P packaging 5 1 paddle 4 5 PECVD 2 6 plasma enhanced chemical vapor depositio...

Page 15: ... 1 2 synthesis steam generator 4 13 system mode 8 4 system name 8 2 system ON 4 18 system status 8 3 8 16 8 17 8 18 system status 8 6 T TAB key 8 18 temperature control 4 7 temperature monitoring 3 4 TEOS cabinet 4 11 TEOS 3 10 thermocouples 2 3 time 8 2 title bar 4 20 8 2 toxic gas exhaust TGA 3 3 toxic gas exhaust 4 16 trained workers 1 4 8 1 transformer box 4 16 transport box storage 4 3 transp...

Page 16: ...E1200 HT 260 3 Index 23 04 07 00401010_41087 ...

Page 17: ...chscreen 4 19 Figure 4 11 Basic User Interface Layout 4 20 Figure 8 1 Basic User Interface Layout 8 1 Figure 8 2 Title Fields in the Title Bar 8 2 Figure 8 3 Information Field Buttons on the Navigation Bar 8 5 Figure 8 4 Example Display Jobs Information Field 8 6 Figure 8 5 Status of Process Tubes and Recipes 8 7 Figure 8 6 Buttons for Process Capability 8 7 Figure 8 7 User Login Dialog Box 8 9 Fi...

Page 18: ...E1200 HT 260 3 List of Figures 23 04 07 00401010_41087 ...

Page 19: ...Table 4 1 Display of Signal Lamp and Horn 4 17 Table 8 1 System Status Display 8 3 Table8 2 Function of the Login Logout Button 8 3 Table 8 3 Function of the Command Bar 8 4 Table 8 4 Description of Job List 8 6 Table 8 5 Status of Process Tubes 8 8 Table 8 6 Function of the Login Logout Button 8 9 ...

Page 20: ...E1200 HT 260 3 List of Tables 23 04 07 00401010_41087 ...

Page 21: ...pply to these operating instructions Abbreviations are used in the text Each abbreviation is explained when it appears for the first time in a chapter The abbreviation that is used for a term is written in parentheses behind the abbreviated term Example operating instructions OI The pages of each chapter are numbered consecutively The tables and figures of each chapter are numbered consecutively C...

Page 22: ... carried out by qualified workers Ensure that all national and local safety requirements are observed WARNING Explosive gas compounds This sign is used when there is a danger of explosion by using explosive and combustible gases or dust or when such explosive and combustible gases or dust can be formed in the exhaust gas pipes WARNING Toxic substances This sign is used when there is a danger of co...

Page 23: ...tip This sign is used when a tilting danger occurs CAUTION Environmental Damage This sign is used when there is any risk of polluting the environment due to ecological harmful materials that need to be disposed Use respiratory equipment with multi range filter Use protective suit Use eye protection Use protective gloves This pictogram is printed next to notes comprising specific information on key...

Page 24: ...ponsible for the required training The equipment user is responsible for the qualification of his trained workers Trained workers mount and maintain the system 1 2 3 Operating Personnel Operating personnel receive on the job instructions on the potential dangers of incorrect operation of the machinery Operating personnel are familiar with all required safety devices and measures applicable regulat...

Page 25: ...ual agreements The manufacturer will not accept warranties or liabilities for personal injuries or damage to property which are based on one or several of the following causes The system was not used correctly not used according to these operating instructions used after safety devices were disabled operated with inadmissible consumables structurally and or functionally modified without prior cons...

Page 26: ...E1200 HT 260 3 0BOperating Instruction Remarks 23 04 07 1 6 00401010_41087 ...

Page 27: ...9 and correspond to the demands for semiconductor technology 2 1 2 1 Cooling Water The technical specifications for the production facility and for the individual stacks are listed in the layout in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 Designation Requirement cooling water inlet 15 25 C min 65 l min free of suspended matter and particles max 8 bar absolute cooling water outlet...

Page 28: ...and for the individual stacks are listed in the layout in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 2 1 2 4 Oxygen and Other Gases Option The technical specifications for the production facility and for the individual stacks are listed in the layout in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 2 1 2 5 Exhaust Air Removal The technical specifications for the produc...

Page 29: ... specification The wafers must be free of contamination No foreign atoms which could react with the wafer under process conditions may contaminate the process tube 2 1 3 3 Thermocouples For data on platinum rhodium platinum thermocouples option refer to the fixpoint table in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 For data on nickel chrome nickel thermocouples option refer to ch...

Page 30: ...6 Heating Cassette with Water Cooled Jacket The instructions refer to the water cooled jacket Designation Requirement water filling quantity 3 l max water pressure 7 bar max water temperature 40 C The water cooled jacket is filled with water and pressurized with 10 bar compressed air The water cooled jacket is leak proof if within 4 hours no pressure drop occurs 2 1 3 7 Control System The control ...

Page 31: ...es from the surface of the wafer to the inside The high doping material concentration on the surface of the wafer is reduced This step is carried out in oxidizing atmosphere This prevents an out diffusion of doping atoms 2 2 2 Oxidation Thermal oxidation generates silicon dioxide SiO2 The oxidation method can be dry or wet In the dry oxidation method a chemical reaction between silicon substrate a...

Page 32: ...le operation of the system is ensured 2 3 1 Safety relevant Aspects of the Mechanical Construction All gas lines have been tested for leaks The gases are conducted in stainless steel pipes connected by screw joints with metallic seals KF resp ISO K connections are used in vacuum systems Cutting ring screw joints are used in the cooling water supply lines The system includes a toxic gas exhaust TGA...

Page 33: ...rature of the solid state relays in the power electronics the overtemperature of the transformers the function of the main fan the sequences of the lift slider wafer handling system port and loading machine movements the water flow in the outlet lines of the cooling circuits the water pressure option the safety relevant water flows of tube closures back flanges the cooling system of the solid stat...

Page 34: ...E1200 HT 260 3 1BIntroduction 23 04 07 2 8 00401010_41087 ...

Page 35: ...bility for personal injuries or damages resulting from such use 3 3 General Safety Instructions The equipment was built in correspondence with all binding regulations in law and all safety regulations It is state of the art and fulfills the EC conformity requests Nevertheless the system can endanger people and assets when it is used improperly or for other purposes than intended The user has to ma...

Page 36: ...is in operation all safety devices must be fully operative When a safety device is defective the assembly group resp equipment may not be put into operation If a safety device fails during operation the system has to be stopped and may only be put into operation again when the safety device functions again Only remove a safety device when the assembly group or equipment is at standstill and secure...

Page 37: ...t additional power supply are only voltage free behind mains disconnecting equipment Protection for persons and property toxic gas exhaust TGA Collecting chamber from which reactive toxic hot or flammable gases are conducted into the operating company s exhaust system Protection for persons and property TGA casing Protection against causticization burns and inhaling toxic gases Protection for pers...

Page 38: ...ring of leak water tub Monitors cooling system leaks Reports errors to the CMS control system Protection for persons and property heating cassette casing Protection against burns and electrocution Protection for persons heating zone temperature monitoring Limits the process tube temperature Switches the heating current of the corresponding heating cassette off when errors occur Reports errors to t...

Page 39: ...gas system option and synthesis steam generator option Monitors two independent gas flows and closes the valve of the monitored gases in case of disturbance Protection for persons and property flame monitoring within the synthesis steam generator option Monitors the H2 flame of the synthesis steam generator Closes H2 valve as soon as errors occur Protection for persons and property temperature mon...

Page 40: ...ng For the exact position of assembly groups in your equipment refer to the layout in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 The workstations of the operating and service personnel are the same for every assembly group regardless of the assembly group s position DIF00278 1 4 2 3 5 7 8 9 6 Figure 3 2 Workstations for Operation and Preventive Maintenance Description of items in f...

Page 41: ...th one or multiple water cooled heating cassettes The overpressure line must be resistant to hot water steam of max 150 C take measures against electrostatic charging take care that only trained persons work with the equipment The operating personnel must report every relevant change within the functional process of the equipment Never put objects into the process tube which could endanger people ...

Page 42: ... you have to work at the pneumatic system exhaust the pneumatic system and secure it against unintentional activation Put up an information sign for example Do not switch on Men at work If you have to work at toxic gas lines flush the lines See chapter 9 10 Working on the Gas System page 9 65 Secure the toxic gas lines against restart Prior to servicing the process tubes the gas cabinet and the to...

Page 43: ... relevant defect is visible Use lubricants with care and dispose them as hazardous waste Dispose of environmentally hazardous operating materials without polluting the environment Pump oil can be contaminated by toxic process media Check the operativeness of the protective equipment after servicing 3 7 3 Electrical Engineering The primary contacts of the main power switch still carry voltage after...

Page 44: ...ut listed in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 Maintain the set working pressure Too high working pressure leads to increased material wear Too low working pressure impairs the operatability Material fatigue impairs the safety and the operatability of the equipment Replace hose pipes according to specification in suppliers documents even if no safety relevant defect is vis...

Page 45: ...ocation and secure against accidents If silane escapes close the gas outlet and ensure sufficient ventilation Cool the container with water while remaining in a protected position Dichlorethylene DCE is highly flammable and harmful to health when breathed in Be extra cautious when replacing the DCE bottle Wear a respirator with multi range filter and safety gloves DCE and ammonia are water polluti...

Page 46: ...ot surface 3 Equipment door loading box Danger of hand injuries 4 Equipment door TGA toxic gas exhaust cabinet Toxic inflammable substances 5 Equipment door gas panel Hazardous electrical voltage 6 Equipment door gas panel Toxic inflammable substances 7 Equipment door gas panel Noxious or irritating substances 8 Equipment door gas panel Caustic substances 9 Heating cassette Hot surface 10 Removabl...

Page 47: ...abinet Noxious or irritating substances 3 Equipment door TEOS cabinet Caustic substances 4 Equipment door TEOS cabinet Hot surface 5 Equipment door distributor cabinet Hazardous electrical voltage 6 Equipment door gas cabinet Toxic inflammable substances 7 Equipment door gas cabinet Noxious or irritating substances 8 Equipment door gas cabinet Caustic substances 9 Equipment door gas cabinet Hot su...

Page 48: ...ety Labeling View 3 Description of items in figure 3 5 1 Equipment door Toxic inflammable substances 2 Door Hazardous electrical voltage If the system is equipped with one or more bubblers option every bubbler is marked with the safety labeling toxic and caustic substances or gases ...

Page 49: ...he entire system Switch off and disconnect power from the system and secure the main power switch against accidental switch on before starting to extinguish the fire Using CO2 fire extinguishers in small and badly ventilated rooms may pose asphyxiation hazards Therefore provide sufficient ventilation Extinguish the source of the fire from below the main source at first then possible further source...

Page 50: ...E1200 HT 260 3 2BSafety 23 04 07 3 16 00401010_41087 ...

Page 51: ...s Circuit Diagrams Overviews page 12 1 Figure 4 1 Schematic Total View Description of items in figure 4 1 1 control and operating elements 2 loading station 3 exhaust system with TGA toxic gas exhaust 4 horizontal furnace with 3 stacks 5 gas cabinet The figure displays the main components of the system The distributor cabinet and the transformer box option are located at the rear side of the equip...

Page 52: ...7 operating panel 2 loading box side casing 8 wafer detection 3 lift 9 slider 4 tube closure 10 loading machine EFM 5 loading box casing 11 paddle 6 TGA The loading station is used to load the wafers into the process boat which is moved into the horizontal furnace for processing The wafers are unloaded after processing Depending on the equipment options the following components are used ...

Page 53: ... consists of port and wafer handler The WTS is used to move wafers from the transport carrier into the process boat The operator starts the loading process by taking the transport carrier with the wafers out of the transport box putting the transport carrier on the port and closing the port cover In the port the transport carrier is lowered to the wafer handler To load the process boat the wafer h...

Page 54: ...by a scanner option The scanner is installed below the slider A yellow signal lamp is right resp left of the slider It shines if the scanner is active If a person enters the supervision range or an object is moved into it the movements of the lift and the slider are stopped 4 1 6 Lift and Storage The lift is used to automatically move the process boat from the slider into the storage resp from the...

Page 55: ...ols the drives of the loading machine Due to specific technological reasons the opening and closing movements of the tube closure and the movements of the loading machine are synchronized The loading machine may never move towards the process tube during a running process For processes without vacuum this movement would trigger an opening of the tube closure The process sequence would be interrupt...

Page 56: ...ooled jacket is mounted in the equipment there is no stack heat exchanger The process tube is supplied with process specific gases and heated through the surrounding heating element Each stack of the horizontal furnace is controlled by a CESAR control computer with CAN bus 4 2 1 Heating Cassette Figure 4 4 Schematic Heating Cassette without Water Cooled Jacket Description of items in figure 4 4 1 ...

Page 57: ...tion The two spike thermocouples are mounted in a ceramic pipe This ceramic pipe is inserted into the heating cassette through a ceramic tube case The profiling thermocouples option lie in the process tube protected by a quartz tube case They are used to measure the inside temperature of the individual heating zones within the process tube The profiling thermocouples are mounted in a ceramic pipe ...

Page 58: ...the system stopper closed tube cold zone vacuum The rear side of the process tube is made in accordance with the process the tube is intended for The process tube is tapered to a socket In atmospheric processes process gases are injected through the socket In vacuum processes the vacuum inside the process tube is generated via the socket In PECVD processes a back flange closes the process tube For...

Page 59: ...ack of the horizontal furnace If a stack is equipped with a water cooled heating cassette this stack heat exchanger is omitted Each stack is equipped with its own cooling cycle to reduce the thermal interference between heating cassettes Each cooling cycle can be switched on and of individually The water flow rates of the stack heat exchangers and of the main cooler 4 6 2 are regulated individuall...

Page 60: ...st stack The main fan 4 7 2 is mounted on the rear side of the cooler to pull the warm air above the heating cassettes upwards The warm air flows through the main cooler and is cooled the cooled air is lead through a shaft 4 7 3 on the back of the horizontal furnace down to the power electronics 4 7 5 from where it rises through the individual stacks of the horizontal furnace back to the main cool...

Page 61: ...cription 23 04 07 00401010_41087 4 11 4 3 TEOS Cabinet Figure 4 8 TEOS Cabinet The TEOS cabinet is mounted on the rear side of the equipment next to the TGA cabinet A bubbler in the TEOS cabinet is used to supply the TEOS process gas ...

Page 62: ...er down to the process tube The part of the process gas line which runs to the nitrogen valve is also heated The temperature of the process gas line is raised in three steps from the TEOS bubbler to the process tube to prevent condensation of TEOS Nitrogen is used to purge the process gas line after every TEOS process to avoid having residual TEOS in the process gas line or in the mass flow contro...

Page 63: ...ss tubes into the exhaust suction box The gas outlet of a stack is e g equipped with a cooling spiral option or a cooling spiral and a condensation bottle option The vacuum valve the pressure control device and the cold trap or particle trap option of vacuum process tubes are mounted in the gas cabinet This is where the pipe of the external vacuum pump connects All process gas and vacuum valves ex...

Page 64: ...f the equipment For additional information on the DCE switching please refer to the process technology documentation see chapter 12 6 Information on Process Technology page 12 2 For further information on the bubbler please refer to the suppliers document on the bubbler see chapter 12 10 Suppliers Documents page 12 4 4 4 3 Flaring Unit The flaring unit is installed if hydrogen is used in the proce...

Page 65: ...n as soon as the power supply is restored provided the recipe contains no contrary commands The processing is terminated if the temperature has fallen too far and an abort tolerance is programmed If the equipment has an uninterrupted power supply option the equipment will continue to function for eight minutes after a failure of the main power supply The uninterrupted power supply decouples the fo...

Page 66: ...Cabinet The process gas exhaust suction box transfers all waste gases of the manufacturing process into the customer s gas exhaust system The case exhaust in the gas cabinet prevents the enrichment and the escape of process gases into the environment in case of leakages 4 9 Display and Operating Elements 4 9 1 Signal Lamp and Horn The equipment contains a signal lamp option with a horn The signal ...

Page 67: ...ready to operate green blinks horn off pause blue shines horn off user interaction required Table 4 1 Display of Signal Lamp and Horn The following signal color combinations are possible red excludes green and yellow green and yellow can appear together blue and yellow can appear together blue and red can appear together ...

Page 68: ...ns the following pushbuttons are installed Handling Stop Safety catch pushbutton All mechanical movements in the loading box are switched off Pneumatically driven movements are completed Pushbutton Switches the light in the loading box on resp off Emergency off pushbutton Safety catch pushbutton De energizes the equipment All mechanical movements in the load zone are switched off Pneumatically dri...

Page 69: ...Calls up closes the keyboard on the touchscreen Keyboard entries can be carried out directly on the touchscreen pushbutton task change Changes a task in Windows pushbutton brightness Press this button together with the Shift button to increase the brightness of the touchscreen pushbutton right mouse button Opens right mouse button context menu Press this button together with the Shift button to re...

Page 70: ...r contains title fields with general information about the currently executed program as well as status information and the login logout button The command bar contains the most important buttons needed for operation of the equipment The information fields of the individual functional areas and the online help are called up by pressing the corresponding button in the navigation bar The information...

Page 71: ...ature control to store a nearly limitless amount of recipes to log user defined process data up to the capacity limit of the storage medium hard disk NFS server PC to enable extensive testing of the running process execution of individual process steps modification of variables setting resetting of breakpoints etc 4 9 4 2 centrotherm Machine Safety CMS The CMS system option is a fault indication u...

Page 72: ...otocol analysis can be carried out The CESAR control computer remote control is used for remote control of the CESAR control computer processes via cell controller For further information on the recipe manager please refer to the CCC FL centrotherm cell control Recipe Manager documentation see chapter 12 3 Information on the Control System page 12 2 4 9 5 2 ProtGraf The ProtGraf program is used to...

Page 73: ...3 Ramp up The temperature within the process tube is incrementally increased to process temperature The ramp up slope is defined in the respective recipe 4 Reaction phase The process tube is flooded with process gases and the desired reaction takes place on the wafers In the process process gases are steadily conducted into the process tube and after passing through the process tube they are lead ...

Page 74: ...acuation During this time the temperature in the process tube is regulated and set to setpoint temperature 4 Reaction phase The process tube is flooded with process gases Defined temperature resp plasma conditions are set and the desired reaction takes place on the wafers In the process process gases are conducted into the process tube for a defined amount of time After passing through the process...

Page 75: ...the equipment CAUTION The equipment may only be transported with suitable equipment Due to the ratio between base area and height the system may tip over 5 2 Packaging The equipment is dismounted in several segments Trained workers package the segments using foils and wooden boxes The accessories are added to the boxes Each packing unit has a designation Remove the transport foils only after clean...

Page 76: ...erviews page 12 1 The customer is to supply the means of transport Type condition and capacity of the route of transportation must be rated for the assembly groups and must be smooth and horizontal Due to the size of the system units you have to pay attention to possible dangers of hands getting squeezed in doorways Wear protective gloves Use the provided transport bore holes with ring bolts accor...

Page 77: ...43 Blaubeuren Germany Phone 49 7344 9186 0 Fax 49 7344 9186 3 88 eMail diff centrotherm de 5 5 Storage Measures Always store the equipment in a dust free dry environment at an ambient temperature between 25 C and 55 C 5 When the equipment is put out of service and placed in storage after operation we recommend flushing the water pipes with antifreeze to prevent damages in case of frost Type condit...

Page 78: ...E1200 HT 260 3 4BTransport 23 04 07 5 4 00401010_41087 ...

Page 79: ...d must be smooth and horizontal The factory floor must be marked dust free by the customer For equipment dimensions refer to the layout in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 The alignment is done by setting the dimensions into relationship to each other For documents to be used for assembly refer to chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 6 2 Equipment Ch...

Page 80: ...ained by centrotherm The equipment s media supply connections are prepared After set up of the equipment these must be connected to the house internal supply lines by the customer For position of the media supply connections and technical specifications refer to the layout in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 ...

Page 81: ...m is equipped with one or several water cooled heating cassettes check if the overpressure line is connected to the overpressure valve in the gas cabinet The overpressure line must be resistant to hot water steam of max 150 C 4 Check if all screw connections are firmly tightened 5 Check for full operativeness of safety measures against hazardous contact voltage according to valid regulations 6 Che...

Page 82: ...ts of the individual stacks compressed air supply 4 Check the connections and lines for leaks 5 Check the gas lines for leaks 6 Open the main taps of the gas lines 7 Use the main power switch at the distributor cabinet to switch on the power supply see chapter 3 4 1 Emergency Stop Switch page 3 3 The CESAR control computer and the CMI computer are booted Enter the corresponding passwords and press...

Page 83: ...es and the process boats for visible damages Replace damaged process boats resp process tubes The heating cycles may cause the process tubes to shift their position Check the settings of the soft landing systems SLS after the initial run and adjust if necessary Carry out test processing after conditioning Proceed as follows Load the process boat with a minimum of five dummy wafers at the ends of t...

Page 84: ...er disturbance messages are displayed at the CMI computer During operation simulate the breakdown of the following assembly groups process gases heating horizontal furnace cooling power supply only if an uninterrupted power supply UPS mains supply is available Synthesis Steam Generator option bubbler option Errors must be displayed on the operating panel of the CMI user interface The recipe is abo...

Page 85: ...the temperature of all stacks to 20 C Continue to switch off the equipment only after the inside temperature of the heating cassettes has dropped below 50 C 3 Terminate the system at the CESAR control computers and at the CMI computer 4 Close the main taps of the main gas lines of the individual process gases at the upper part of the gas cabinet The inert gas line can remain open 5 Switch off the ...

Page 86: ... supply system Disconnect equipment from the electric mains Close the cooling water supply after all heating cassettes have cooled down max temperature per heating cassette 50 C In case the storage place is not free of frost purge the cooling circuits with antifreeze 7 5 Waste Disposal The machine must be disposed of in accordance with the relevant recycling laws A disposal proof must be maintaine...

Page 87: ...to the CMI and CESAR control computer documentation see chapter 12 3 Information on the Control System page 12 2 8 1 User Interface Arrangement of the CMI Computer The user interface of the CMI computer is subdivided into individual areas Figure 8 1 Basic User Interface Layout 1 title bar 3 navigation bar 2 command bar 4 information field with variable field areas The display of a command bar depe...

Page 88: ... 8 additional information 4 current display area in the information field 9 system mode 5 system status 10 connection state with SECS GEM The name defined for the horizontal furnace is shown as system name Date and time are taken over from the operating system software The centrotherm logo is a button which can be used to call up system information With this button a window with information about ...

Page 89: ...t alarm error Table 8 1 System Status Display Depending on login state the login logout button shows the following icons Button Function No user logged in Touching the button calls up the login dialog After successful login icon and function of the button are set to logout see below The user with the name operator is logged in After touching the button this user is logged out and icon and function...

Page 90: ...on mode When a state is caused by actuating one of the hardware switches the field is highlighted in blue The connection state shows the communication state of the interface for the SEMI Equipment Communication Standard Generic Equipment Model SECS GEM interface not connected connected 8 1 2 Command Bar The command bar is displayed on the right hand side of the information field The command bar co...

Page 91: ...e user can call up the following information fields via buttons in the navigation bar Jobs Contains information for monitoring the system The screen shows the current states of the process tubes the data entry fields for material loading and the Job List System Contains the status view of the system components a boat overview showing condition and position of the boats and recipes used and the han...

Page 92: ...s the following information Line Meaning Job ID No of the production cycle batch Boat ID No of the boat Place Current position of the boat to MTN Number of production cycles until preventive maintenance Type Production or preventive maintenance Load Wafer Dummies Empty Run State See 8 1 4 4 Status of Process Tubes page 8 8 Ready in Timer countdown production time cooling time Tube Current tube rec...

Page 93: ...ayed in the Process tubes area Figure 8 5 Status of Process Tubes and Recipes 8 1 4 3 Process Capability Figure 8 6 Buttons for Process Capability The button with the green walking man indicates that the process tube can be used The button with the red standing man indicates that the process tube is blocked The button with the green question mark indicates that the process tube is not available ...

Page 94: ...automatic operation no error blue ready to unload no error yellow standby tube ready no error loading possible red error observe alarm list eliminate fault black tube cannot be addressed gray tube is not defined white simulation mode Table 8 5 Status of Process Tubes The colored process tube icon is a button Pressing this button switches directly to the corresponding CESAR control system ...

Page 95: ...gout see below The user with the name operator is logged in After touching the button this user is logged out and icon and function of the button is reset to log in see above Table 8 6 Function of the Login Logout Button Click the corresponding button to log on as user The following dialog box is displayed Figure 8 7 User Login Dialog Box 11 Select your user name 12 Enter your password 13 Select O...

Page 96: ...larm display 3 Load and empty the equipment according to production schedule 8 3 2 Startup from Break Status 1 Press the Break button The break mode is canceled 2 Press the Run button 3 Check the startup by means of the signal lamp and the alarm display 4 Load and empty the equipment according to production schedule 8 3 3 Startup from Empty Status 1 Press the Alarms button on the navigation bar 2 ...

Page 97: ...Press the Jobs button on the navigation bar 2 Press the Break button The equipment operates in break mode all internal processes are continued until all boats are available for the next process or until all boats with processed wafers are available to be unloaded Handling the wafers is possible 8 4 3 Running the Equipment to Empty Status 1 Press the Jobs button on the navigation bar 2 Press the Em...

Page 98: ... The following confirmation prompt is displayed Figure 8 8 Blocking a Process Tube Accept the confirmation prompt and the process tube is blocked The button with the red standing man indicates that the process tube is blocked Press the button to release the process tube The following confirmation prompt is displayed Figure 8 9 Releasing a Process Tube Accept the confirmation prompt and the process...

Page 99: ...Jobs information field When the Alarm Error system status is displayed you can call up the Alarms information field with the Alarm button in the navigation bar Figure 8 10 Alarm List The colored background of the alarm line has the following meaning RED Error not eliminated error message not acknowledged YELLOW Error not eliminated error message acknowledged GRAY Error eliminated fault message not...

Page 100: ...Report the problem to our Technical Support and wait for further instructions 8 6 2 2 Lift Alarm Message 1 Acknowledge the alarm s by actuating the Acknowledge All button 2 Actuate the Rotating Light button The Boat Overview tabstrip is displayed 3 Start to carry out the suggested measures 4 Actuate the Fault Repair button in the Error column on the right behind the respective error message The CM...

Page 101: ...ally control the temperature to control the gas flows to control the loading machine to communicate with the handling system option to monitor alarm abort levels gas flows temperature pressure to control the temperature via cascade controller to carry out automatic profiling via cascade temperature control to store a nearly limitless amount of recipes to log user defined process data up to the cap...

Page 102: ...ing of a stopped recipe STOP button Stops a running recipe The execution of the recipe can be continued at any time by actuating the START button STANDBY button Terminates a recipe on hold if the STOP button was pressed before If a recipe is active in which a termination was configured pressing this button will lead to an automatic termination If no recipe is active all device parameters are set t...

Page 103: ... tree ESC button Causes the termination resp exits a dialog box or menu option INS button Switches between insert and overwrite mode Figure 8 12 Example Status and Function Key Bar Description of items in figure 8 12 1 name of the current menu 8 symbol continuation of the function key bar 2 system status 9 screen view right 3 name of carried out recipe 10 screen view left 4 name of the process tub...

Page 104: ...er F1 STATUS System status visualization Shows the process parameters Use the cursor keys to scroll F2 MANUAL Parameters for bubbler option synthesis steam generator option gases wafer storage lift option settings for heating cassette temperatures outside and inside for controllers time changes and manual loading machine operation F3 STOP Terminates running recipe sets standby values F4 RECIPE Cal...

Page 105: ...or dealing with electrical voltage high voltage and automatic control science and technology Ensure that all national and local safety requirements are observed WARNING Explosive gas compounds The media pipelines can contain flammable gases When the pipelines are opened explosive compounds can be formed which may ignite when getting into contact with air or an ignition source Purge the pipelines w...

Page 106: ...m Purge the pipelines with sufficient inert gas after maintenance work Carry out leakage tests on the media pipelines before restarting the equipment Log the test results Use the formsheets stipulated in the preventive maintenance log checklist see preventive maintenance log checklist in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 CAUTION Hot Surfaces The thermocouples the paddle an...

Page 107: ...ssages on the system computer control panel and on the CMI user interface Each disturbance must be acknowledged Disturbances concerning the running process are logged in the batch protocol The CMS messages which were generated during a running process are also logged in the batch protocol The two alarm limits and the abort level are connected to every device listed in the device table The alarm to...

Page 108: ...from external wafer handler Check external wafer handler status 1354 EWH OPC Server of external wafer handler terminated see error text Terminate CMI application restart CMI 1355 Wafer handler in ColdZone collision range Move wafer handler out of danger zone in manual see error text see error text 1356 Time sync with cell controller failed Clock drift too large Use AlarmAcknowledge for time sync s...

Page 109: ...r Cesar stack 1 1361 STANDBY recipe recipe name on Cesar stack2 not defined The recipe defined for standby does not exist for Cesar stack 2 1362 STANDBY recipe recipe name on Cesar stack3 not defined The recipe defined for standby does not exist for Cesar stack 3 1400 1999 PLC CAN Node Nodename unknown status The CAN Node is not in Running status Check CAN network connection 2100 2199 PLC CAN Node...

Page 110: ...d in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 3015 3016 3017 3018 water flow toxic gas exhaust side stack insufficient water flow for flanges on toxic gas exhaust side of equipment Open cooling water inlet resp outlet at flange and check flow Check switching point of sensor Check electrical output of sensor Check input module connection see gas and electrical circuit diagrams lis...

Page 111: ... than 7 5 bar Check cooling water pressure Check if the stop valve of the system exchanger cooling water inlet and outlet is completely open Check if the water pressure of the house internal supply lines is too high Check switching point of sensor Check contact of overpressure switch Check input module connection see gas and electrical circuit diagrams listed in chapter 12 2 Drawings Circuit Diagr...

Page 112: ...d in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 3045 bubbler filling level stack1 filling level in bubbler of stack is too low For further information refer to the bubbler manual listed in chapter 12 10 Suppliers Documents page 12 4 Check filling level Check input module connection see gas and electrical circuit diagrams listed in chapter 12 2 Drawings Circuit Diagrams Overviews pa...

Page 113: ... media supply connections Check media pressures see operating instructions listed in chapter 12 10 Suppliers Documents page 12 4 Check input module connection see gas and electrical circuit diagrams listed in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 3061 collective alarm pump stack 2 see ID No 3059 see ID No 3059 3062 collective warning pump stack 2 see ID No 3060 see ID No 3060 ...

Page 114: ...rams Overviews page 12 1 3089 3090 3091 3092 disturbance clean room release stack see ID No 3085 see ID No 3085 3098 disturbance compressed air supply insufficient compressed air pressure Check compressed air supply Check input module connection see gas and electrical circuit diagrams listed in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 Check switching point of sensor 3099 disturba...

Page 115: ... 3108 collective failure temperature control unit stack Check TCU connections Check temperature control unit see operation instructions for the temperature control unit in chapter 12 10 Suppliers Documents page 12 4 Check input module connection see water connection and electrical circuit diagrams listed in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 3112 3113 3114 3115 3116 overtem...

Page 116: ...er Check if heating cassette thermocouple is broken Check input module connection see gas and electrical circuit diagrams listed in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 3128 3129 3130 3131 3132 3133 overtemp heating waste gas line stack1 see ID No 3120 see ID No 3120 3134 3135 3136 3137 3138 3139 3140 3141 overtemp heating zone stack2 see ID No 3120 see ID No 3120 3142 3143 3...

Page 117: ...ed ID No Error message text Cause Troubleshooting 3151 3152 3153 3154 3155 overtemp heating zone stack3 see ID No 3120 see ID No 3120 3156 3157 3158 3159 3160 3161 overtemp heating waste gas line stack3 see ID No 3120 see ID No 3120 3196 3197 3198 3199 overtemp heating exhaust gas line zone see ID No 3120 see ID No 3120 ...

Page 118: ...o high see ID No 3112 3218 overtemp transformer plasma stack1 see ID No 3116 see ID No 3112 3219 3220 overtemp transformer stack2 see ID No 3116 see ID No 3112 3221 overtemp transformer plasma stack2 see ID No 3116 see ID No 3112 3222 3223 overtemp transformer stack3 see ID No 3116 see ID No 3112 3224 overtemp transformer plasma stack3 see ID No 3116 see ID No 3112 3228 overtemp control transforme...

Page 119: ...trical circuit diagrams listed in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 Check fan relay see gas and electrical circuit diagrams listed in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 Check input module connection see gas and electrical circuit diagrams listed in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 3247 handling stop handling stop pushbutton...

Page 120: ...f there is an electrical connection between the heating cassette connections and the silicon carbide tube If so replace heating cassette Check faulty contact see gas and electrical circuit diagrams listed in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 Check input module connection see gas and electrical circuit diagrams listed in chapter 12 2 Drawings Circuit Diagrams Overviews page...

Page 121: ...ings Circuit Diagrams Overviews page 12 1 Check the unit which was connected by the customer to the contacts provided by centrotherm 3284 disturbance gas supply system external external status signal missing see ID No 3099 3285 disturbance gas supply system H2 external status signal missing see ID No 3099 3286 disturbance gas supply system NH3 external status signal missing see ID No 3099 3287 H2 ...

Page 122: ...ID No 3290 3296 3297 overpressure 15 mbar 25 mbar stack 3 see ID No 3288 see ID No 3288 3298 error pH value stack 3 see ID No 3290 see ID No 3290 3470 3471 3472 3473 3474 error heating circuit zone L stack1 3 LM stack 1 3 M stack 1 3 GM stack1 3 G stack 1 3 error in power supply circuit or control circuit Check power supply circuit and control circuit ...

Page 123: ...rly Check sensors relays and motors Function cannot be executed in the current lift position Lift in incorrect position for this command Clamp position undefined Move lift to correct position Check grip and clamp position The store cannot be approached as it is already occupied A boat is already in the store Possibly a sensor error Move to other store shelf check sensors if necessary The paddle ca...

Page 124: ...ation file of motor controller Servostar400 WSL The addressed channel does not exist The variables of the control system cannot be accessed Internal error the control system was stopped In this case reboot the CMI computer If the problem persists notify the centrotherm Service Lift Driver was addressed by undefined function An undefined command was sent to the lift driver or the driver forwarded a...

Page 125: ...was made to move the lift to the slider position although the slider is not at the lift resp not within the set position tolerance Move slider to the lift Compare actual position with position Slider am Lift The lift is positioned at a mechanical limit switch Move lift to a defined position Lift limit switch at incorrect position Possibly loss or distortion of the internal absolute position of the...

Page 126: ...ocess tube was not received The process run is not permitted CESAR recipe status cannot be read Repeats automatically While waiting for the recipe to terminate the status of the CESAR control computer s process interpreter cannot be read via the network No boat detected in the grip although a boat was to be picked up Check boat seating and try again When lifting the process boat from the store or ...

Page 127: ...tic operation attempts to start the handling procedure but there is no process boat on the slider Check the Boat on Slider sensor The selected boat is blocked The process boat is blocked via CMM definition and may not be used for process runs The selected boat is in preventive maintenance condition The process boat is in preventive maintenance condition via the CMM definition and may not be used f...

Page 128: ...ess boat for contamination see chapter 10 6 1 Checking the Process Boat Contacts page 10 7 Use the Fault Repair command to determine the further procedure The boat height detector reports a boat that is not positioned correctly on the slider If necessary remove wafer crash debris and place the process boat on the slider again The process boat is not positioned properly on the slider There are brok...

Page 129: ... lift to the height of the blocking store The external wafer handler is not ready Slider cannot be moved The handler is busy with loading resp unloading or is not in waiting position Wait for loading and unloading Move handler to Wait for Slider position The tilting device is not in center position The slider cannot be moved The slider is tilted or in undefined position The Bebro motor controller ...

Page 130: ...ror internal error Notify the centrotherm Service Is defined by the external handler An empty boat was received for loading and unloading processing The order cannot be carried out Redefine the loading via the Boat Setup and restart the handling procedure Is defined by the external handler An empty boat was received for unloading processing The order cannot be carried out Redefine the loading via ...

Page 131: ...t start the handling procedure The slider is not correctly on the port position Move to the port position by manual operation and restart the handling procedure via Fault Repair command Is defined by the external handler The slider at the port sensor of the EWH does not detect any boat at the start of the handling procedure The slider is not correctly on the port position Move to the port position...

Page 132: ... values in the temperature controller of the horizontal furnace refer to the manuals for CESAR control computer and REG97 temperature controller listed in chapter 12 3 Information on the Control System page 12 2 2 Check the position of the thermocouples in the heating cassette 3 Check the power controller of the heating zone 4 Check the power the current and the voltage of the heating zone 5 Check...

Page 133: ...quipment configuration were changed and if so correct the calibration values 9 2 11 8 SLS Display Remains Undefined No handling is performed by the loading machine 1 Use the CESAR control computer to check the entries refer to the CESAR control computer manual listed in chapter 12 3 Information on the Control System page 12 2 2 Check if someone pressed the handling stop pushbutton If so eliminate ...

Page 134: ... Replace pneumatic valve if damaged see chapter 9 10 Working on the Gas System page 9 65 7 Check the MFC Replace MFC if damaged see chapter 9 10 Working on the Gas System page 9 65 8 Check the interlocks ratio monitoring Hydrox LPCVD toxic gases Incorrect equipment operation use the CESAR control computer to check manual entries or recipe entries refer to the CESAR control computer manual in chapt...

Page 135: ...noperative Loading Machine EFM 1 Use the CESAR control computer to check the entries for process boat position and speed refer to the CESAR control computer manual listed in chapter 12 3 Information on the Control System page 12 2 2 Check if the lift is ready if not eliminate cause 3 Check if the tube door is closed If so open the tube door 4 Check if someone pressed the handling stop pushbutton I...

Page 136: ...itch if damaged 9 3 2 5 Loading Machine Operation in One Direction Only Check the limit switch at the loading machine Replace the limit switch if damaged 9 3 2 6 Inoperative Lift Up Motor of the Soft Landing System SLS 1 Use the CESAR control computer to check the entries refer to the CESAR control computer manual listed in chapter 12 3 Information on the Control System page 12 2 2 Check if someon...

Page 137: ...ystems with vacuum equipment check if atmospheric pressure has been reached If not the tube door interlock is active 9 3 3 2 Tube Door Will Not Close 1 Check the limit switch and the limit switch connections 2 Check the compressed air 3 Check if someone pressed the handling stop pushbutton 4 Check if the tube door is mechanically blocked 5 Use the CESAR control computer s status screen to check th...

Page 138: ...maged see chapter 9 5 Installing Replacing a Thermocouple page 9 53 9 3 4 3 Entire Heating Cassette Inoperative 1 Check if disturbances are indicated in the CMS display at the CMI system computer and if yes eliminate the disturbance 2 Check the transformer fuses see gas and electrical circuit diagrams listed in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 3 Check the fuses in the hea...

Page 139: ... page 9 65 6 Check if the gas flow velocity setpoint for this gas line is displayed at the rack of the mass flow controller MFC option If the setpoint is not displayed Check if mains switch on the fuse card is switched on Check the fuses of the transformer PCB in the MFC Check if all connectors are plugged in correctly on the rear wall of the MFC rack Check if all connectors are plugged in correct...

Page 140: ... be replaced see chapter 9 10 Working on the Gas System page 9 65 9 3 5 4 Pneumatic Valves Do Not Switch CAN Control 1 Check if all connectors are plugged in correctly on the front side of the CESAR control computer 2 Check the compressed air resp nitrogen hoses between solenoid valve and pneumatic valves 9 3 5 5 Pneumatic Valves Do Not Switch 19 Rack Check if the LED for these gas lines which is ...

Page 141: ...uter manual listed in chapter 12 3 Information on the Control System page 12 2 2 Check if the displayed current gas flow velocity deviates from the set gas flow velocity at the CESAR control computer If so check if the shut off valves are completely open and if the pneumatic valves have switched through 9 3 5 8 Overheating of Control Cabinet Interior 1 Check if all fans in the fan racks are operat...

Page 142: ...data concentrator position in gas cabinet door One LED per connected channel must continuously light up If the LED does not shine continuously wire breakage or network card damaged 2 Reboot the computer if there is no connection A damaged network card triggers a fault message refer to the CESAR control computer manual listed in chapter 12 3 Information on the Control System page 12 2 ...

Page 143: ... dust particles Working on the insulating rings can cause emission of noxious dust particles Always observe the Technical Rules for Hazardous Materials TRGS 521 valid for Germany for work on the insulating rings Maintenance work may only be carried out by specialized authorized and trained workers Block off the working area during maintenance work and make sure unauthorized persons have no access ...

Page 144: ...mperature profile becomes inhomogeneous resulting in a greater process result scattering 9 Put the heating cassette onto the cassette adjustment device and move it into the furnace 10 Adjust the heating cassette at the toxic gas exhaust and gas cabinet side to the center The height is adjusted using the 13 mm screws mounted at the cassette adjustment device The lateral adjustment is realized by si...

Page 145: ...the toxic gas exhaust edge the position of the connections at the process tube aligned according to drawing see chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 at the backside centrically towards the covering plate horizontally aligned use spirit level to check 6 Install the insulating ring at the toxic gas exhaust side Avoid hollows to achieve good insulation 7 Install the insulating r...

Page 146: ...eep ready for the installation quartz parts for thermocouple and tube case insulating rings insulating package of plies 5 slices per process tube ceramic liner Proceed as follows to install the process tube 1 De energize the heating after baking out the heating cassette then wait until the heating cassette has cooled down to room temperature 2 Pull the spike thermocouples back by 10 mm at the heat...

Page 147: ... cassette until they touch the process tube Use spring clips to secure the spike thermocouples against sliding out 14 Install the tube case 15 Install the profiling thermocouple see chapter 9 5 2 Installing a Profiling Thermocouple with Inserted Tube Case page 9 53 16 Push the distance plate between profiling thermocouple and tube case option 17 Connect all components in the gas cabinet e g synthe...

Page 148: ...void process tube contamination 4 Install the insulating ring at the toxic gas exhaust side 5 Slide the process tube into the heating cassette 6 The process tube must be positioned in the heating cassette as follows centrically towards the flange on the toxic gas exhaust side protruding 15 mm over the vacuum base flange into the toxic gas exhaust the position of the connections at the process tube...

Page 149: ...ube case 20 Install the profiling thermocouple see chapter 9 5 3 Installing a Profiling Thermocouple in Vacuum Systems page 9 54 21 Use VCR seals when connecting the gas supply to the connections at the process tube 22 Install the suction flange 23 Install the bellow and the seals of the vacuum suction pipe 24 Install the tube door see chapter 9 4 3 3 Installing the Tube Closure Vacuum System page...

Page 150: ...assette as follows centrically towards the flange on the toxic gas exhaust side protruding 15 mm over the vacuum base flange into the toxic gas exhaust centrically towards the rear flange the flange can be adjusted horizontally aligned use spirit level to check 5 Clean all flange parts and O rings before installing them 6 Slide the O ring over the process tube 7 Insert packing cord into the flange...

Page 151: ... inside profiling thermocouple see chapter 9 5 3 Installing a Profiling Thermocouple in Vacuum Systems page 9 54 21 Connect the gas supply to the back flange 22 Install the bellow and the seals of the vacuum suction pipe 23 Install the tube door see chapter 9 4 3 3 Installing the Tube Closure Vacuum System page 9 52 24 Install the paddle and adjust the position with regard to the process tube see ...

Page 152: ... positioned in the heating cassette as follows centrically towards the flange on the toxic gas exhaust side protruding 15 mm over the vacuum base flange into the toxic gas exhaust centrically towards the rear flange the flange can be adjusted horizontally aligned use spirit level to check 5 Install the insulating rings on the gas cabinet and toxic gas exhaust side Avoid hollows to achieve good ins...

Page 153: ... secure the spike thermocouples against sliding out 21 Install the tube case 22 Install the profiling thermocouple see chapter 9 5 3 Installing a Profiling Thermocouple in Vacuum Systems page 9 54 23 Connect the gas supply to the back flange 24 Install the bellow and the seals of the vacuum suction pipe 25 Install the tube door see chapter 9 4 3 3 Installing the Tube Closure Vacuum System page 9 5...

Page 154: ...he quartz stopper with the quartz stopper support onto the tube closure lever The quartz stopper must be adjusted centrally to the process tube The adjustment is done through left and right slots and through fixing screws with locknuts in prolongation of the swiveling cylinder 6 Check the position of the quartz stopper The distance between process tube end and tube door must be at least 1 cm when ...

Page 155: ...equired 6 Use the stops to adjust the tube closure The tube closure should hang down slightly to the right resp left The adjustment must be carried out for all directions so that the quartz stopper will settle firmly against the tube closure 7 Manually close the tube closure Set the Boat SETPOINT ACTUAL 0 command at the CESAR control computer i e the tube closure is closed 8 Close all throttle val...

Page 156: ...e too strongly The adjustment is done through left and right slots and through fixing screws with locknuts in prolongation of the swiveling cylinder 5 Use the pressure screws to adjust the tube closure position The contact pressure must be the same at each point 6 Manually close the tube closure Set the Boat SETPOINT ACTUAL 0 command at the CESAR control computer i e the tube closure is closed 7 C...

Page 157: ... the welding beads and the positions of the individual capillaries Do not use force when sliding the thermocouple into the tube case 1 Check the alignment between cover plate and quartz process tube 2 Slide the profiling thermocouples into the quartz process tube The centerlines of profiling thermocouples and heating cassettes must have the same height 9 5 2 Installing a Profiling Thermocouple wit...

Page 158: ...e cases into the heating cassette until they touch the process tube Three to five pairs of thermocouples are installed in the equipment depending on the number of heating zones 2 Use spring clips to secure the spike thermocouples against sliding out 3 Connect the first spike thermocouple to the temperature measuring module TMM6 4 Connect the second spike thermocouple used for temperature monitorin...

Page 159: ...RNING Toxic substances The bubbler option can contain toxic substances Always wear protective clothing respirator and safety gloves during operation at the bubbler The assembly of the bubbler is described in the operating instructions of the bubbler see chapter 12 10 Suppliers Documents page 12 4 ...

Page 160: ...r clutch disk upwards 7 Moisten clean room paper with isopropanol and put it into the space between the clutch disks Press the clutch disks together Repeat the procedure 2 3 times 8 Put unused clean room paper between the clutch disks 9 Close the clutch 10 Firmly press the upper clutch disk 11 Firmly tighten the stud screw Do not move the clean room paper as you tighten the screw 12 Loosen the clu...

Page 161: ...d to adjust the port cover 4 Adjust the Port closed limit switch 9 8 3 Adjusting the Swivel Motion of the Port Cover 1 Press both pushbuttons at the port plate at the same time to manually open the port cover 2 Vertically align the switching cam on the shaft with the sensor 3 Press both pushbuttons at the port plate at the same time to manually close the port cover 9 8 4 Port Travel Alignment Comp...

Page 162: ...he arm of the flat aligner is in a horizontal position when the arm is swiveled in If not use the upper limit switch to adjust the arm position 4 Check if the flat aligner lifts up the transport carrier from the port seat If not adjust the flat aligner in parallel to the port seat with the pressure screws of the support frame 5 Check if the transport carrier activates the flat aligner control swit...

Page 163: ...ier and move the slider into boat position 1 The grip head is roughly aligned Lower the wafers into the process boat and check whether the pick up elevator lowers down the wafers exactly into the grooves of the boat If not use the reference bolt to adjust the slider position Adjust the reference bolt so that five grooves remain free for the dummy loading in boat position 1 Check the 3 slope when l...

Page 164: ... Use the slotted disk at the top level holder axis to adjust the vertical top level holder positions for HOLD_0 command 6 Adjust the top level holder slot positions as follows Move the loaded pick up elevator into the upper end position Turn the top level holders into the position at HOLD25 command Lower the pick up elevator until it reaches the top level holder position Adjust the top level holde...

Page 165: ...beam is reflected when there are no wafers in the process boat Use the serial commands to check the sensor monitoring range The sensor position results from this setting procedure because the scanning or moving distances are fixed in an EPROM Check if the sensor recognizes the wafers in the process boat when the slider or wafer handler is moved at high speed 4 Check the Pick up elevator overload L...

Page 166: ...the operator The LED is switched off 3 Adjust the Wafer in process boat sensor as follows The sensor operates with a higher degree of reliability if it is slightly inclined during adjustment This directs the sensor towards the wafer surface and not towards the wafer circumference The sensor is mounted to the holding arm of the top level holders the reflex foil is below the opposite top level holde...

Page 167: ...Use a machine spirit level and the knurled screw to horizontally align the paddle at the support Tighten the locknut at the knurled screw Check that the paddle is firmly fixed 7 Move the paddle tip to the opening of the tube Loosen the four screws of the support and place the paddle tip in central position towards the tube Retighten the screws and check the center position 8 Move the loading machi...

Page 168: ...ct if necessary 14 Use the CESAR control computer to move the paddle to the 100 mm position then lift the SLS Manually slide the process boat to the start of the tube The reference dimension between the inner upper edges of the process tube and the wafer must be approx 15 mm The distance between the lower edges of the process boat feet and the inside of the process tube must be 20 mm when entering...

Page 169: ...e media pipelines can contain noxious or irritating dust particles and or gases Purge the pipelines with sufficient inert gas prior to opening and after preventive maintenance work When opening and cleaning the media gas pipes wear safety gloves safety glasses and a respirator with multi range filter if the process gases and or the reaction products are unknown or toxic WARNING Inflammable gases A...

Page 170: ...gas at the CESAR control computer as defined The process gas overpressure is decreased 4 Set the process gas at the CESAR control computer to zero 5 Open the inert gas valve for this process gas line 6 Set the process gas at the CESAR control computer as defined The process gas line is purged with inert gas 7 The process gas line is free of hydrogen when the flame at the synthesis steam generator ...

Page 171: ...uum pump to pump the process gas line down 4 Set the process gas at the CESAR control computer to zero 5 Open the inert gas valve for this process gas line and fill the process gas line with inert gas 6 Close the inert gas valve 7 Use the vacuum pump to pump the process gas line down 8 Repeat steps 4 to 7 another nine times to remove toxic and or reactive gases from dead areas within the process g...

Page 172: ...ontains a toxic and or reactive process gas 4 Dismount the assembly group and replace it 5 Mount the assembly group and connect it 6 Carry out leakage test see chapter 9 11 2 Leakage Test for Vacuum Systems page 9 69 7 Purge the process gas line according to process type 8 Lower inert gas pressure 9 Open process gas valve 10 Start up the assembly groups of the process gas line and the assembly gro...

Page 173: ... process temperature is lower then carry out the test at this temperature 5 If overpressure is not reached locate the leaking quartz connection and replace the damaged part 9 11 2 Leakage Test for Vacuum Systems 9 11 2 1 Test for External Leaks 1 Thoroughly purge the gas system for two hours at 200 to 500 mTorr 2 Connect the leak tester to the gas system s gas outlet at the process tube connection...

Page 174: ... lower the leakage test is passed If the leak rate is higher repair the leak and repeat from step 3 9 Log the leak rate 10 Close valve 2 of gas line 1 counted from the gas inlet and open valve 1 11 Wait for one minute Check the leak rate The leak rate must be below 3 10 8 l mbar s If the leak rate lower the leakage test is passed If the leak rate is higher repair the leak and repeat from step 9 12...

Page 175: ...controller before carrying out the profiling if the temperature controller of the horizontal furnace operates incorrectly see Temperature Controller Manual in chapter 12 3 Information on the Control System page 12 2 Proceed as follows Slide the profiling thermocouple which was supplied for the process tube into the process tube optional To reinitialize the temperature controller of the horizontal ...

Page 176: ... the CESAR control computer manual listed in chapter 12 3 Information on the Control System page 12 2 Check the thermocouple connecting points if a new profiling element is used see chapter 9 12 5 Checking the Calibration Points of the Thermocouple page 9 74 or enter new connecting points see chapter 9 12 6 Entering the Calibration Points of the Thermocouple page 9 75 6 If variable is NewProf 0 th...

Page 177: ...b Save Standard T_Cntrl Profilng NewProf 0 Profiling at 900 C T_Paddle All Setpoint 900 C While T_Cntrl Profilng NewProf 2 EndWhile T_Cntrl ProfTab Save Standard T_Cntrl Profilng NewProf 0 Profiling at 1000 C T_Paddle All Setpoint 1000 C While T_Cntrl Profilng NewProf 2 EndWhile T_Cntrl ProfTab Save Standard T_Cntrl Profilng NewProf 0 End Recipe Profiling 2 Start the recipe To terminate the softwa...

Page 178: ...rol software of the control computer To terminate the software call the Exit menu option in the service menu refer to the CESAR control computer manual listed in chapter 12 3 Information on the Control System page 12 2 The control computer is now available at the operating system s command level 2 Enter the REG command to start the Regpanel program 3 Call up the Command menu option in the Controll...

Page 179: ...To save the current controller data in a file call up the Save all menu option from the File menu and select a name for the file The necessary check is carried out later 4 Enter the calibration points in the Command submenu of the Controller menu Type N199 calibration point 1 temperature of all zones or N101 calibration point 1 temperature of zone 01 5 Press Return zone 00 04 profiling element zon...

Page 180: ...E1200 HT 260 3 8BMaintenance 23 04 07 9 76 00401010_41087 ...

Page 181: ...e qualified for dealing with electrical voltage high voltage and automatic control science and technology Ensure that all national and local safety requirements are observed WARNING Explosive gas compounds The media pipelines can contain flammable gases When the pipelines are opened explosive compounds can be formed which may ignite when getting into contact with air or an ignition source Purge th...

Page 182: ...ia pipelines before restarting the equipment Log the test results Use the formsheets stipulated in the preventive maintenance log checklist see preventive maintenance log checklist in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 WARNING Caustic chemicals There are caustic and hygroscopic chemicals in and around the components of the condensate line They can cause serious burns to the...

Page 183: ...ing at the emergency cooling shutter hang in the cover retention Retighten loosened connections at the gas cabinet and at the horizontal furnace after preventive maintenance and maintenance works CAUTION Chemicals and waste material can be harmful to the environment and to living creatures Dispose of all cleaning materials contaminated by chemical substances used chemicals as well as waste substan...

Page 184: ...centrotherm service department Please contact us using the following address centrotherm thermal solutions GmbH Co KG Johannes Schmid Str 8 89143 Blaubeuren Germany Phone 49 0 7344 9186 600 eMail sfe centrotherm de 10 3 Preventive Maintenance Checklist The Preventive Maintenance Log Checklist is given in chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 Recommendation Copy the tables and ...

Page 185: ...ngent on the accuracy and completeness of the furnace logbook 10 5 Preventive Maintenance Intervals Time Period Activity check process boat contacts remove broken wafer parts check protocol entries at the cell controller daily measures check the zone heating current on the CMI operating panel weekly measures check the distributor cabinet for overtemperature and function of the fan CAN control opti...

Page 186: ...heck loading machine check tube closure check process tube check cooling water system check gas system check synthesis steam generator check PECVD vacuum system check safety labels clean the water cooler power and control electronics measures for every 4 years inspections according to BGV A3 5 inspections acc to EN 60204 1 process dependent clean resp exchange SiC quartz process tubes measure clea...

Page 187: ...ts of DIN EN 60335 2 69 IEC 60335 3 69 safety cleaner or cleaner for dangerous materials with an efficiency rate of 99 995 to clean the equipment If the equipment is operated in a clean room the vacuum cleaner also has to meet all applicable clean room requirements Use a vacuum cleaner to remove broken wafers from within the equipment s loading station 10 6 3 Checking the Protocol Entries at the C...

Page 188: ...ious or irritating dust particles and or gases Always wear protective gloves and a respirator during preventive maintenance work Wear heat protecting gloves if it is not possible to cool the components down to room temperature WARNING Caustic chemicals The toxic gas exhaust can contain caustic chemicals Avoid eye and skin contact Always wear protective gloves and safety glasses during preventive m...

Page 189: ...ess tube Wear heat protecting gloves to avoid burns Place the thermocouples upon a particle free nonflammable surface CAUTION Hot Surfaces To avoid burns allow the components to cool down to room temperature prior to checking them If processes with dopant gas do not allow cooling down to room temperature wear heat protecting gloves to avoid burns ...

Page 190: ...g must switch off Observe the power display The heating relay switch must switch off listen for switching sound 4 Check the overtemperature controller for heating cassette The heating power must be switched off in case of a heating cassette overtemperature Unplug the cable from the temperature controller The heating must switch off Observe the power display The heating relay switch must switch off...

Page 191: ...e temperature in relation to the setpoint value 3 Check the heating power switch off in case of overtemperature The heating must switch off when the limiting value is set below the actual temperature Check the power display listen for a switching sound 4 Check the function of the fans between the plug in units Exchange defective fans immediately Insufficient cooling leads to locally increased temp...

Page 192: ...the nuts and locknuts of process boats for PECVD processes see chapter 12 4 Information on the Load Unit page 12 2 10 7 5 Checking the Filter of the Laminar Flow Box Check the filter contamination level and the set flow rate 10 7 6 Checking the Toxic Gas Exhaust 1 Clean process gas residues off the tube door sealing faces and the toxic gas exhaust then check 2 Use a flow meter to check the exhaust...

Page 193: ... check the downwards directed air stream of the cooling cycle at both sides using a flow meter Exchange damaged main fans immediately 10 7 8 Checking the Gas Cabinet 1 Use a flow meter to check the exhaust suction adjustment 2 Check the pressure regulator settings at each pressure gauge 2 3 bars for atmospheric processes H2 O2 N2 N2O 1 1 5 bars for LPCVD SiH4 PH3 NH3 Bottle pressure approx 0 5 bar...

Page 194: ... skin and eyes Avoid eye and skin contact Before working at the condensate line read the Material Safety Data Sheets for POLC3 and phosphoric acid Always wear protective clothing safety glasses a chemical apron and acid proof safety gloves during preventive maintenance work CAUTION Hot Surfaces The components may be hot during disassembly particularly the exhaust lance You can burn yourself In add...

Page 195: ...ation container centrotherm recommends to have the components in stock as wearing parts Replace the components to be cleaned by new or cleaned components After this the system can be immediately put into operation again minimizing downtimes If the cleaned components do not show any damages they can be used again in the next cleaning interval Pay attention to the state of the precipitation containe...

Page 196: ...ive clothing safety glasses a chemical apron and acid proof safety gloves during preventive maintenance work CAUTION Hot Surfaces The components may be hot during disassembly particularly the exhaust lance You can burn yourself In addition to the acid proof protective gloves you should also wear heat resistant protective gloves over these when touching the parts in order to avoid burns Figure 10 1...

Page 197: ...he running process Only start to disassemble the components when the process boat is driven out of the process tube and the tube closure is once more closed 3 Seal the POCL3 bottle in the bubbler in the gas cabinet 4 Select the following menu path on the CESAR control computer to set the N2 gas to Minimum Manual Gas N2 Volume Minimum Figure 10 2 Connections of the Precipitation Container and the E...

Page 198: ...tle and exhaust air at the condensation bottle outlet 8 Loosen the fork grip between condensation bottle and precipitation container 9 Pull out the precipitation container with fixing device Caution etching fluid phosphoric acid may drip out of the precipitation container Wear acid resistant safety gloves when touching it 10 Close the holes with a suitable stopper 11 Lay down the precipitation con...

Page 199: ...xhaust lance Caution the exhaust lance is very hot Wear heat protecting gloves when pulling out the exhaust lance 15 Lay down the exhaust lance on a heat resistant and metal free pad until it has cooled down 16 Lay down the exhaust lance and the spherical sleeve in an acid proof container The exhaust lance must not touch any metal 17 Clean contamination in the drip pan using a dry cloth Then dispo...

Page 200: ...he precipitation container Dispose of the phosphoric acid correctly 3 Empty the phosphoric acid from the condensation bottle through an acid proof metal free sieve Pay attention to the Raschig rings Place any Raschig rings that have fallen out back into the condensation bottle Dispose of the phosphoric acid correctly 4 Purge the precipitation container the condensation bottle the exhaust lance and...

Page 201: ...eves are installed correctly to prevent the quartz parts from sticking together Proceed as follows to install the components 1 Insert the exhaust lance into the socket at the process tube and fasten the exhaust lance Make sure that the spherical sleeve is installed correctly Tighten the adjusting screw of the fork grip Caution If the process tube has not cooled down before maintenance then it may ...

Page 202: ...s 2 Check the gaskets for leakage and wear 3 Check the cylinder collars for wear 4 Check the reed contact positions at the tube closure 5 Check the air hoses for damages and fold cracks or abrasions 10 9 2 Checking the Process Tube WARNING Noxious or irritating gases The process tube can contain noxious or irritating gases Purge the process tube with sufficient inert gas before opening CAUTION Hot...

Page 203: ...for breakage cracks and correct position and repair or replace as necessary Defective insulating rings must be replaced in good time to prevent the temperature profile within the process tube from becoming inhomogeneous which causes scattering within the process results 10 9 3 Checking the Vertical Lift Axes Built up to 05 2003 In systems built in 05 2003 and before the vertical axes of the lift m...

Page 204: ... The grip must be aligned horizontally If the alignment is incorrect check toothed belt and clutch 7 Check the shaft clutches at the drive side and at the locator side If necessary tighten the screws 8 Check the upper and lower screw bearings for abrasion or running noise 9 Check the upper and lower lift support for loose joining elements and correct alignment 10 Check the magnetic sensor cams of ...

Page 205: ...ettings as for a manufacturing process Load the process boat evacuate the process tube for vacuum systems and approximately set the gas flow Heat up the equipment to the temperature to be checked using the cascade control and stabilize the temperature Switch the system to spike control Check the temperature profiling The displayed outside temperatures may not differ more than 1 2 C from the inside...

Page 206: ...and reed contacts The signal is present as soon as the control lights light up at the respective input board 2 Check the function of the illumination 10 11 2 Cleaning the Riser of the Exhaust Suction Box POCL3 Systems WARNING Caustic chemicals The riser of the exhaust suction box contains caustic and hygroscopic chemicals Avoid eye and skin contact Always wear protective clothing safety glasses an...

Page 207: ...uching the hot parts Wear heat protecting gloves to avoid burns 10 12 1 Checking the CMS Function WARNING Toxic substances The bubbler option can contain toxic substances Always wear protective clothing respirator and safety gloves during operation at the bubbler Simulate the following failures and check the failure alarm contacts The respective alarm or warning message must be displayed at the CM...

Page 208: ...lub paste for lubricating the subassemblies If you use other lubricants the components will become gummy This will impair the operation of the subassembly 1 Lubricate the right and the left guide carriage 2 Check the alignment of the horizontal axes with a spirit level The grip must be aligned horizontally If the alignment is incorrect check the clutch 3 Check the shaft clutches at the drive side ...

Page 209: ...e toothed belts for abrasion or damage Replace damaged toothed belts 3 Check the belt tension of the toothed belts Readjust the belt tension if there is too much slack To do this move the tension pulley The loose side of the belt can be displaced about 5 mm in the center 4 Check the lifting and lowering motions of the lift for evenness when loaded 5 Check the belt pulleys for damage to teeth and s...

Page 210: ...tentiometers mounted on the printed circuit boards in the drawers below the wafer storage lift 10 12 4 Checking the Lift Grip CAUTION Use only Metaflux Biolub paste for lubricating the subassemblies If you use other lubricants the components will become gummy This will impair the operation of the subassembly 1 Check the motions of the lift grip for evenness and noise emissions If necessary clean a...

Page 211: ... the slider is not at the lift If necessary adjust the Slider not at the lift sensors 5 Check if the lift is locked when the paddle is not in position 0 mm or when the loading machine is not in top position 6 Check if all movements including loading machine movements are interrupted as soon as the handling stop button is pressed 10 12 6 Checking the WTS WHS Check the WHS WTS option alignment see c...

Page 212: ...agnetic clutch as follows Open the clutch using the switch and move the paddle manually back and forth Look out for increased friction This can be caused by insufficient opening of the clutch Close the clutch and measure the force for moving the paddle The force should be 3 10 N If necessary readjust the distance between the clutch disks roughen the friction flats or replace the clutch 5 Check the...

Page 213: ...ides shafts and push bars for corrosion and abrasion If necessary clean lubricate or replace the linear guides shafts and push bars 2 Clean the cylinder collars of the pneumatic cylinders with a clean room cloth 3 Check the alignment of tube door and process tube The closed tube door must be in a coaxial position towards the process tube 4 Check the tube door mechanism for sufficient play when the...

Page 214: ... process tube or change the heating cassette height adjustment 2 Check the lower SLS position When the SLS is lowered the paddle must have sufficient play under the process boat If necessary move the SLS cams 3 Check the alignment of the coldzone tube option The axis of the coldzone tube must be aligned in parallel towards the loading machine s shafts The tube must be aligned vertically and horizo...

Page 215: ...losive gas compounds The media pipelines can contain flammable gases When the pipelines are opened explosive compounds can be formed which may ignite when getting into contact with air or an ignition source Purge the pipelines with sufficient inert gas prior to opening and after preventive maintenance work When opening the pipelines make sure that the room is ventilated sufficiently to prevent the...

Page 216: ... the reaction products are unknown or toxic 1 Purge the equipment gas lines see chapter 9 10 Working on the Gas System page 9 65 2 Check all PTFE hoses for fold cracks or other damages 3 Check if all screw joints are firmly tightened 4 Check the calibration of the mass flow controller MFC as follows separate the gas line to the process tube behind the MFC connect the MFC output to a calibrated flo...

Page 217: ...ples 3 Check the ultraviolet sensor 10 12 14 Checking the PECVD Vacuum System WARNING Noxious or irritating dust particles and or gases The vacuum tubing can contain noxious or irritating dust particles and or gases Always wear safety gloves during preventive maintenance work Always wear a respirator during preventive maintenance work Carry out the following tests check HF lances check main butter...

Page 218: ...F lances Figure 10 5 Back flange with HF lances 1 lance base 3 back flange 2 HF lance 4 HF contact tip Proceed as follows 1 Switch off the plasma generator via the main fuse 2 Unplug the HF cable 3 Loosen the inner screws at a lance base 4 Pull out the lance base holding the HF lance 5 Check the HF lance tube case Replace the tube case if it damaged 6 Unscrew the HF contact tip of the HF lance ...

Page 219: ...10 Check the red O ring at the lance base for damage and replace if necessary 11 Install the HF lance with the tube case and the lance base 12 To check the second HF lance proceed as described in point 3 to 11 13 Adjust the HF lances 10 12 14 2 Checking the Main Butterfly and Softpump Valve 1 Dismount the main butterfly and softpump valve of the vacuum system 2 Visually inspect them for contaminat...

Page 220: ...l all components 2 When installing a new butterfly valve teach in the valve see operating instructions for butterfly valve in chapter 12 10 Suppliers Documents page 12 4 3 Heat the system up to process temperature according to the recipe 4 Flush with nitrogen N2 several times 5 Carry out the PNITTEST PRZ recipe to check the system function 6 Carry out an extended leakage test to check the system f...

Page 221: ...d stationary electrical equipment must be inspected at least every 4 years These inspections must be carried out by authorized and skilled personnel using the prescribed test equipment We recommend that you request trained centrotherm workers for this inspection The operating company is responsible for observation of these inspection intervals 10 13 2 Inspections According to EN 60204 1 Tests equi...

Page 222: ...than 150 200 nm deposition thickness are deposited upon the wafer during a process run the larger value of the stated range is valid If more than 150 200 nm deposition thickness are deposited upon the wafer during a process run the smaller value of the stated range is valid Process tube material Process Etching according to deposition thickness Replacing according to deposition thickness polysilic...

Page 223: ... does not have to be carried out if other chlorine guiding processes are carried out periodically For information on the cleaning recipe see chapter 12 6 Information on Process Technology page 12 2 Exchange the quartz resp SiC process boats if their mechanical function i e their ability to hold the wafers in the process is endangered by breakage or repeated etching an irreversible contamination mu...

Page 224: ...VD TEOS oxide 10 µm graphite PECVD oxide 10 µm The plasma process boat is chemically etched during the etchback process with the dry in situ method C2F6 O2 or NF3 Air is used for this method The process boat surface is attacked and slightly roughened The process boat is etched in hydrofluoric acid HF during an etchback process with the wet chemical ex situ method All piece parts of the process boa...

Page 225: ... of the cold and particle trap must be periodically cleaned because the vacuum pumps service live can be considerably reduced by particle introduction The following diffusion thicknesses between the cold and particle trap cleaning processes are permissible cold trap LPCVD silicon nitride process 5 20 μm particle trap LPCVD TEOS oxidation process 5 15 μm particle trap LPCVD LTO process 20 50 μm The...

Page 226: ...sation bottle with a cleaned condensation bottle 3 Empty the condensation bottle in a chemical fume exhaust and clean with DI water 10 15 Measures after a Fire Repair or replace all assembly groups damaged by fire heat or contamination Dispose of components contaminated by residues of combustion as hazardous waste Ask the local authorities for information Exchange safety relevant components after ...

Page 227: ...ren Germany Phone 49 0 7344 9186 600 eMail sfe centrotherm de 11 2 List of Spare and Wearing Parts The list of electrical spare parts is part of the bill of materials printed on the gas and electrical circuit diagrams see chapter 12 2 Drawings Circuit Diagrams Overviews page 12 1 The list of the mechanical wear and spare parts can be found in the spare parts identification sheet see chapter 12 7 S...

Page 228: ...E1200 HT 260 3 10BSpare and Wearing Parts 23 04 07 11 2 00401010_41087 ...

Page 229: ... the entire production facility 00301051 Test chart for the acceptance or monitoring measurement of pure space plants Flowbox_test chart_41087 IBT check list IBT check list_41087 12 2 Drawings Circuit Diagrams Overviews Designation File Layout 00101011 Gas and electrical circuit diagram 00300011 PLC interlocking diagram 41087_V01_ET 1 PLC interlocking diagram 41087_V01_ET 2 PLC interlocking diagra...

Page 230: ...3e REG97 ctREG97_06e TMM6 ctTMM6_02e 12 4 Information on the Load Unit Designation File Preventive maintenance for PECVD boats ctPBWartung_02e 12 5 Information on the Gas System Designation File not in use 12 6 Information on Process Technology The information on process technology are part of the training material This material is handed over to you after the training according to your equipment ...

Page 231: ...tion If you send back components to centrotherm please enclose the filled in declaration of contamination of compressors vacuum pumps and components centrotherm will accept only components with a fully filled in declaration of contamination signed by an authorized trained worker Please hand in a separate declaration of contamination for each component Enclose one copy of the declaration of contami...

Page 232: ...Flow Switch PF2A_W_7xx_Series Technical Form SMC 162024 Power Supply 24V 5A PHOENIX Contact 162025 Power Supply 24V 10A PHOENIX Contact 162347 Safety Relais SNV 4063KL Schleicher 166898 Flow monitor SA 3010 IFM 177027 Frequency Inverter SINAMICS G110 includes 177027 Operating Instruction Siemens 177027 Parameter List Siemens 177027 Short manual Getting Started Guide Siemens 184152 Vakuum switch 10...

Page 233: ...Manufacturer 211121 High Vakuum_Angle _In line Valve Series XMD XYD SMC 215140 SITOP modular 5A_10A_d uk f i e Siemens Digital Mass Flow Controller Catalogue Horiba 12 11 Licenses Designation File LicenceOS 2 WARP Licence certification OS2 Licence VxWorks Licence certification VxWorks ...

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