CENTROTHERM E1200 HT 260-3, Operating Instructions Manual

Page: 128 / 233

E1200 HT 260-3
8BMaintenance
23.04.07
9-24
00401010_41087
Error message text Cause Troubleshooting
The recipe was
terminated with error
status. Check loading! The process recipe was
terminated with an error
status, i. e. the recipe was not
executed properly. Use the Fault Repair
command to decide how to
proceed with the wafers.
The slider is not
positioned at the
handler. Move the slider
to the handler! At the start of the handling
procedure by the automatic
operation the slider is not in
the port position. Move the slider to the port
position and use the Fault
Repair to start the handling
procedure again.
A wafer crash in the
process boat was
detected. A process run
resp. handling
procedure cannot be
executed. There are defective wafers in
the process boat. Remove the defective wafer
from the process boat. For
PECVD processes, check
the process boat for
contamination, see chapter
10.6.1 Checking the Process
Boat Contacts, page 10-7.
Use the Fault Repair
command to determine the
further procedure.
The boat height detector
reports a boat that is not
positioned correctly on
the slider. If necessary,
remove wafer crash
debris and place the
process boat on the
slider again! The process boat is not
positioned properly on the
slider. There are broken
wafers under the process
boat. Remove the broken wafers
from the process boat and
use the Fault Repair
command to determine how
to proceed.
The process tube cannot
be approached. Possible
causes: No Tube Ready
signal, paddle occupied,
or the process tube is
used by another boat. The paddle of the process
tube cannot be approached,
as it is not ready. Wait for loading of the
process tube. If necessary,
execute reference run
(homing) of the loading
machine.
The loading trolley is not
positioned at the lift. Lift arm movement towards
the loading store is not
permitted with unlocked
loading trolley. Move the loading trolley to
the lift and lock it.