E1200 HT 260-3
8BMaintenance
23.04.07
9-26
00401010_41087
9.2.10
Error Messages from the External Wafer Handler (EWH) at the CMI
Error message text
Cause
Troubleshooting
EWH: The communication
with the OPC server
reports an error.
Restart the faulty
procedure via Fault Repair.
EWH: The process data of
the external handler are
transmitted not at all or with
bad quality by the OPC
server
The transfer of process
data of the EWH is
disturbed or the control
system of the EWH is not
active.
Restart the faulty
procedure via Fault Repair.
EWH: The external wafer
handler is no longer active.
No update of the life
guarding information!
The external wafer handler
is switched off.
Check the state of
operation of the EWH.
EWH: The external wafer
handler signals the
termination of a procedure
step, although
HandlingJobRunning is still
active. (Internal error).
internal error
Notify the centrotherm
Service.
Is defined by the external
handler.
An empty boat was
received for "loading and
unloading" processing. The
order cannot be carried
out.
Redefine the loading via
the Boat Setup and restart
the handling procedure.
Is defined by the external
handler.
An empty boat was
received for "unloading"
processing. The order
cannot be carried out.
Redefine the loading via
the Boat Setup and restart
the handling procedure.
Is defined by the external
handler.
A filled boat was received
for "loading only"
processing. The order
cannot be carried out.
Redefine the loading via
the Boat Setup and restart
the handling procedure.
Is defined by the external
handler.
An empty boat which is
filled according to the EWH
status was received for
processing.
Redefine the loading via
the Boat Setup and restart
the handling procedure.
Is defined by the external
handler.
A filled boat which is empty
according to the EWH
status was received for
processing.
Redefine the loading via
the Boat Setup and restart
the handling procedure.
Summary of Contents for E1200 HT 260-3
Page 1: ...Operating Instructions for Horizontal Furnace Equipment E1200 HT 260 3 Version 1 0 1_41087 11 ...
Page 2: ...E1200 HT 260 3 23 04 07 00401010_41087 ...
Page 4: ...E1200 HT 260 3 Document Information 23 04 07 00401010_41087 ...
Page 16: ...E1200 HT 260 3 Index 23 04 07 00401010_41087 ...
Page 18: ...E1200 HT 260 3 List of Figures 23 04 07 00401010_41087 ...
Page 20: ...E1200 HT 260 3 List of Tables 23 04 07 00401010_41087 ...
Page 26: ...E1200 HT 260 3 0BOperating Instruction Remarks 23 04 07 1 6 00401010_41087 ...
Page 34: ...E1200 HT 260 3 1BIntroduction 23 04 07 2 8 00401010_41087 ...
Page 50: ...E1200 HT 260 3 2BSafety 23 04 07 3 16 00401010_41087 ...
Page 78: ...E1200 HT 260 3 4BTransport 23 04 07 5 4 00401010_41087 ...
Page 180: ...E1200 HT 260 3 8BMaintenance 23 04 07 9 76 00401010_41087 ...
Page 228: ...E1200 HT 260 3 10BSpare and Wearing Parts 23 04 07 11 2 00401010_41087 ...