E1200 HT 260-3
3BFunctional Description
23.04.07
00401010_41087
4-21
4.9.4.1
CESAR Control Computer
The CESAR control computer is used for the following tasks:
—
to modify or to create recipes,
—
to define the recipe variables (process time, temperature, pressure, gas flows)
needed for recipe start,
—
to start, stop and cancel recipes,
—
to digitally control the temperature,
—
to control the gas flows,
—
to control the loading machine,
—
to communicate with the handling system (option),
—
to monitor alarm/abort levels (gas flows, temperature, pressure),
—
to control the temperature via cascade controller,
—
to carry out automatic profiling via cascade temperature control,
—
to store a nearly limitless amount of recipes,
—
to log user defined process data up to the capacity limit of the storage medium
(hard disk, NFS server PC),
—
to enable extensive testing of the running process (execution of individual process
steps, modification of variables, setting/resetting of breakpoints, etc.).
4.9.4.2
centrotherm Machine Safety (CMS)
The CMS system (option) is a fault indication unit. It monitors
—
the cooling water flow,
—
cooling system leaks,
—
the fuse of the main fan of the horizontal furnace,
—
the temperature in the heating zone,
—
the temperature on the outside wall of the heating cassette,
—
the temperature of the power electronics,
—
the temperature of the heating transformers.
The disturbances are displayed on the operating panel of the CMI user interface. The
system's response to a disturbance is configurable.
Summary of Contents for E1200 HT 260-3
Page 1: ...Operating Instructions for Horizontal Furnace Equipment E1200 HT 260 3 Version 1 0 1_41087 11 ...
Page 2: ...E1200 HT 260 3 23 04 07 00401010_41087 ...
Page 4: ...E1200 HT 260 3 Document Information 23 04 07 00401010_41087 ...
Page 16: ...E1200 HT 260 3 Index 23 04 07 00401010_41087 ...
Page 18: ...E1200 HT 260 3 List of Figures 23 04 07 00401010_41087 ...
Page 20: ...E1200 HT 260 3 List of Tables 23 04 07 00401010_41087 ...
Page 26: ...E1200 HT 260 3 0BOperating Instruction Remarks 23 04 07 1 6 00401010_41087 ...
Page 34: ...E1200 HT 260 3 1BIntroduction 23 04 07 2 8 00401010_41087 ...
Page 50: ...E1200 HT 260 3 2BSafety 23 04 07 3 16 00401010_41087 ...
Page 78: ...E1200 HT 260 3 4BTransport 23 04 07 5 4 00401010_41087 ...
Page 180: ...E1200 HT 260 3 8BMaintenance 23 04 07 9 76 00401010_41087 ...
Page 228: ...E1200 HT 260 3 10BSpare and Wearing Parts 23 04 07 11 2 00401010_41087 ...