CENTROTHERM E1200 HT 260-3, Operating Instructions Manual

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E1200 HT 260-3
1BIntroduction
23.04.07
00401010_41087
2-1
2 Introduction
2.1 Technical Data
You will find the information necessary to identify the system on the nameplate listed in
chapter 12.1 Declaration of Conformity, Nameplate, Test Report , page 12-1.
2.1.1 Dimensions and Weight
Dimensions and weights of the individual equipment components are listed in the
layout, see chapter 12.2 Drawings, Circuit Diagrams, Overviews, page 12-1.
2.1.2 Media Supply Connections
The purity percentage of all process gases used in the system must reach at least
99.9999% and correspond to the demands for semiconductor technology.
2.1.2.1 Cooling Water
The technical specifications for the production facility and for the individual stacks are
listed in the layout in chapter 12.2 Drawings, Circuit Diagrams, Overviews, page 12-1.
Designation Requirement
cooling water inlet 15 – 25°C
min. 65 l/min
free of suspended matter and particles
max. 8 bar, absolute
cooling water outlet min. 4 bars less than cooling water inlet
pH value > 7 < 9
total chloride content < 20 ppm
total nitrate content < 10 ppm
total sulfate content < 100 ppm
total dissolved solids < 250 ppm
total water hardness < 250 ppm (demonstrated in calcium
carbonate)
resistivity (25 °C) > 2500 Ω cm
total dissolved solids (TDS); estimated 640.000/resistivity (in Ω cm)
max. particle size < 50 µm