CENTROTHERM E1200 HT 260-3, Operating Instructions Manual

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E1200 HT 260-3
8BMaintenance
23.04.07
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9.8.5 Port Travel Alignment
1. Use the limit switches at the pneumatic cylinder to adjust the travel between upper
and lower end position.
2. Set the homing at the CMI system computer.
9.8.6 Adjusting the Flat Aligner
1. Lift the port and load the empty transport carrier onto it.
2. Swivel in the flat aligner and check whether it dips centrally into the transport
carrier. If not, realign the flat aligner using the slots of the flat aligner's arm.
3. Check if the arm of the flat aligner is in a horizontal position when the arm is
swiveled in. If not, use the upper limit switch to adjust the arm position.
4. Check if the flat aligner lifts up the transport carrier from the port seat. If not, adjust
the flat aligner in parallel to the port seat with the pressure screws of the support
frame.
5. Check if the transport carrier activates the flat aligner control switch.
6. Place a full transport carrier into the port seat. Check if all wafers are on the role
and that the wafer flats are aligned. The upper part of the wafer flats must be
horizontally aligned at the end of the procedure. If not, use the pushbutton on the
left sidewall of the flat aligner to adjust the flat aligner.