CENTROTHERM E1200 HT 260-3, Operating Instructions Manual

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E1200 HT 260-3
9BPreventive Maintenance
23.04.07
00401010_41087
10-27
10.12 Semi-Annual Procedures
WARNING - High Voltage!
All electrical works at the system may only be carried out by qualified workers. Ensure
that all national and local safety requirements are observed.
Allow the equipment to cool down to room temperature before starting on the semi-
annual preventive maintenance. To preventively maintain a process stack in which
doping processes are carried out, lower the temperature within the process tube to
400 °C for the maintenance procedure.
Take care to avoid touching surfaces that could be hot! Avoid touching the hot parts.
Wear heat protecting gloves to avoid burns.
10.12.1 Checking the CMS Function
WARNING - Toxic substances!
The bubbler (option) can contain toxic substances.
Always wear protective clothing, respirator and safety gloves during operation at the
bubbler.
Simulate the following failures and check the failure alarm contacts. The respective
alarm or warning message must be displayed at the CMS display field at the CMI:
1. Remove the temperature switch of the heating cassettes and heat them up
externally with hot air to max. 150°C to check their operativeness.
2. Remove the temperature switch of the transformers, then heat it up externally via
hot air to max. 150°C to check the operativeness (option).
3. Exit the CESAR program and wait for three minutes to simulate a disturbance of
the CESAR control computer.