CENTROTHERM E1200 HT 260-3, Operating Instructions Manual

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E1200 HT 260-3
8BMaintenance
23.04.07
00401010_41087
9-25
9.2.9 Error Messages from Slider and Wafer Handler at the CMI
Error message text Cause Troubleshooting
WHS: Slider timeout.
Remove blocking or
increase travel speed! The slider movement is not
completed resp. not
started. Increase 'timeout' time for
slow travel speed. Check
communication cable,
power cable and
connections.
WHS: emergency stop loop
interrupted: Was handling
stop pushbutton pressed? Unlatch emergency stop
pushbutton.
WHS: The door was
opened! ...during a
movement! Door opened during a
movement of the automatic
operation. Close door or carry out
movements in manual
operation.
The lift impedes the slider
movement! Move the lift to
store position! The lift grip is positioned
beneath the blocking store. Move the lift to the height
of the blocking store.
The external wafer handler
is not ready! Slider cannot
be moved. The handler is busy with
loading resp. unloading or
is not in waiting position. Wait for loading and
unloading. Move handler to
'Wait for Slider' position.
The tilting device is not in
center position! The slider
cannot be moved. The slider is tilted or in
undefined position. The
Bebro motor controller
does not supply a signal. Tilt the slider to center
position.
The tilting device cannot be
moved, because the slider
is not at the port. The slider can only be tilted
at the port. Move slider to the port.
Check actual position and
compare to 'Slider at Port'
position.
The slider is positioned at a
mechanical limit switch.
Move slider to a defined
position! Limit switch within the
travel paths between lift
position and port position.
Possibly loss of absolute
position of the motor
controller. Check seating of the limit
switches. Check actual and
target position of the slider.