E1200 HT 260-3
2BSafety
23.04.07
3-8
00401010_41087
3.7.2
Maintenance and Preventive Maintenance
The equipment requires a controlled cool down period prior to any preventive
maintenance and maintenance to prevent quartz parts such as process tubes from
bursting. Please contact centrotherm and discuss the procedure to avoid damages.
Only trained workers may service the assembly group resp. the equipment. The trained
workers must be qualified for dealing with:
—
electrical voltage
—
high voltage
—
vacuum technology
—
toxic gases
—
gas systems
—
automatic control science and technology
Proceed as follows prior to any preventively maintaining:
—
If you have to work at the pneumatic system, exhaust the pneumatic system and
secure it against unintentional activation.
—
Put up an information sign, for example:
Do not switch on!
Men at work!
If you have to work at toxic gas lines, flush the lines. See chapter 9.10 Working on the
Gas System, page 9-65. Secure the toxic gas lines against restart.
Prior to servicing the process tubes, the gas cabinet and the toxic gas exhaust (TGA),
read the notes in chapter 3.7.5 Gas, page 3-10.
Ensure that the equipment will not move as long as there are people in dangerous
areas, e. g. with the help of a supervisor.
Always work with increased attention when security systems have been switched off.
Any servicing of the gas systems and its control system should be carried out by the
manufacturer or by trained workers according to instructions of the manufacturer!
Summary of Contents for E1200 HT 260-3
Page 1: ...Operating Instructions for Horizontal Furnace Equipment E1200 HT 260 3 Version 1 0 1_41087 11 ...
Page 2: ...E1200 HT 260 3 23 04 07 00401010_41087 ...
Page 4: ...E1200 HT 260 3 Document Information 23 04 07 00401010_41087 ...
Page 16: ...E1200 HT 260 3 Index 23 04 07 00401010_41087 ...
Page 18: ...E1200 HT 260 3 List of Figures 23 04 07 00401010_41087 ...
Page 20: ...E1200 HT 260 3 List of Tables 23 04 07 00401010_41087 ...
Page 26: ...E1200 HT 260 3 0BOperating Instruction Remarks 23 04 07 1 6 00401010_41087 ...
Page 34: ...E1200 HT 260 3 1BIntroduction 23 04 07 2 8 00401010_41087 ...
Page 50: ...E1200 HT 260 3 2BSafety 23 04 07 3 16 00401010_41087 ...
Page 78: ...E1200 HT 260 3 4BTransport 23 04 07 5 4 00401010_41087 ...
Page 180: ...E1200 HT 260 3 8BMaintenance 23 04 07 9 76 00401010_41087 ...
Page 228: ...E1200 HT 260 3 10BSpare and Wearing Parts 23 04 07 11 2 00401010_41087 ...