E1200 HT 260-3
9BPreventive Maintenance
23.04.07
00401010_41087
10-25
10.9.4
Carrying Out Temperature Profiling of the Heating Cassette
WARNING!
The temperature profiling must be carried out very carefully. Adjustment errors
occurring during the profiling can only be recognized regarding the process result.
Only the load temperature is profiled with a tolerance of ± 5°C for systems with
permanent internal thermocouples which use spike control only for process tube
loading/unloading.
Systems with spike control must be profiled across the entire used temperature range,
see Manual for Temperature Controller of the Horizontal Furnace in chapter
12.3 Information on the Control System, page 12-2.
1. Check the temperature profiling (only necessary when the temperature is
controlled externally, option):
—
Set the equipment to process condition, i. e. carry out all settings as for a
manufacturing process. Load the process boat, evacuate the process tube (for
vacuum systems) and approximately set the gas flow.
—
Heat up the equipment to the temperature to be checked using the cascade
control and stabilize the temperature.
—
Switch the system to spike control.
—
Check the temperature profiling. The displayed outside temperatures may not
differ more than ± 1-2 °C from the inside temperature. The tolerance depends
on the process temperature. Carry out a new temperature profiling if the
values are out of tolerance, see chapter 9.12 Temperature Profiling,
page 9-71.
2. Check the MV5/TMM6 measuring amplifier using the centrotherm adjustment kit.
Recalibrate or replace the measuring amplifier if the values are out of tolerance.
10.10
Eight Weeks Procedures
10.10.1
Replacing the Condensate Line Components
The following condensate line components (option) for POCL
3
equipment must be
replaced every two months or after 800 runs when cleaning, see chapter
10.8 Procedures Every Two Weeks, page 10-14:
—
precipitation container
—
spherical sleeves.
Summary of Contents for E1200 HT 260-3
Page 1: ...Operating Instructions for Horizontal Furnace Equipment E1200 HT 260 3 Version 1 0 1_41087 11 ...
Page 2: ...E1200 HT 260 3 23 04 07 00401010_41087 ...
Page 4: ...E1200 HT 260 3 Document Information 23 04 07 00401010_41087 ...
Page 16: ...E1200 HT 260 3 Index 23 04 07 00401010_41087 ...
Page 18: ...E1200 HT 260 3 List of Figures 23 04 07 00401010_41087 ...
Page 20: ...E1200 HT 260 3 List of Tables 23 04 07 00401010_41087 ...
Page 26: ...E1200 HT 260 3 0BOperating Instruction Remarks 23 04 07 1 6 00401010_41087 ...
Page 34: ...E1200 HT 260 3 1BIntroduction 23 04 07 2 8 00401010_41087 ...
Page 50: ...E1200 HT 260 3 2BSafety 23 04 07 3 16 00401010_41087 ...
Page 78: ...E1200 HT 260 3 4BTransport 23 04 07 5 4 00401010_41087 ...
Page 180: ...E1200 HT 260 3 8BMaintenance 23 04 07 9 76 00401010_41087 ...
Page 228: ...E1200 HT 260 3 10BSpare and Wearing Parts 23 04 07 11 2 00401010_41087 ...