Tektronix 372, User Manual

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Overview
Getting Started
1Ć2
Test Fixture
The 372 measures a DUT via an externally connected test fixture, which is
provided as a standard accessory. The test fixture has five test adapters,
which allow for different measurement purposes as well as for mounting a
DUT with a different package type. These adapters, some of which have
KelvinĆsense DUT sockets, allow stable, highĆprecision measurement of very
small currents. The test fixture has a staticĆ proof cover with an interlock
mechanism so that, for the safety of the operator, no measurement can be
made with the cover open. In place of the test fixture, a wafer prober can be
connected to the instrument using an extension cable set (Option 20).
Acquisition, Display and Analysis
The 372 has a sweep measurement mode and time domain measurement
mode. In sweep measurement mode, the voltage and current can be meaĆ
sured in sweep steps. In time domain measurement mode the change in
voltage and current can be measured over time. In addition, a pulsed curĆ
rent and a pulsed voltage can be supplied to the DUT to avoid excessive
heating of the DUT.
Data are acquired and stored in the internal storage memory and displayed
on the CRT as characteristic curves.
The 372 is also provided with the features for processing of a graph on the
CRT:
H AutoĆscaling automatically adjusts the graph to the optimum scale,
H Zoom enlarges selected portions of the curves displayed on the CRT,
H Math allows the display to be switched to the data that was calculated
by a selected mathematical equation,
H Reference allows a curve stored in the storage memory to be compared
to a curve stored in reference memory for analysis, and
H Cursor allows the position of a point, a slope of cursor, intersection of
two slopes, interceptions with the X and Y axis, or gain between two
curves to be read for analysis of semiconductor parameters, and also
allows GO/NOGO testing to be performed.
User Interface
The 372 has a touchĆpanel and is menuĆdriven. The microprocessorĆbased
operating system provides a highĆlevel user interface so nearly all features
such as configuration, setup, measurement, analysis, disk operations,
program editing, debugging, and execution can be accessed by touching
options in the menus and/or popĆup menus displayed on the CRT.
The menus are classified according to function:the CONFIG menu is used
for configuration and setup, the MEASURE menu for displaying curves and
for analysis, the DISK menu for disk operations, the PROG menu for editing
and tracing a program, and UTILITY for miscellaneous functions. Elements