Agilent Technologies EasyEXPERT, Manual, Page: 332 / 610

11 Reliability
11.19 EM Istress[6]: Electromigration test, current stressed, 6 SMUs (A.01.20)
[Supported Analyzer]
B1500A
[Description]
Performs the Electromigration (EM) test for a wiring device with extrusion lines, and plots the stress time vs
resistance characteristics. This test is performed by the sampling measurement mode as shown below.
1. applies stress current
2. performs measurement and saves measurement data
3. calculates the device failure time
[Device Under Test]
Wiring device with extrusion lines, 6 terminals
[Device Parameters]
D: Wiring pattern length
W: Wiring pattern width
Temp: Temperature (deg C)
[Test Parameters]
IntegTime: Integration time
TotalStressTime: Total stress time
StopCondition: Measurement stop condition 1 (%changes of wire resistance)
ExtCondition: Measurement stop condition 2 (current to extrusion line)
Port1: SMU connected to Port1, constant current output
Port2: SMU connected to Port2, constant voltage output
Port3: SMU connected to Extrusion Line, constant voltage output
Port4: SMU connected to Extrusion Line, constant voltage output
VM1: SMU for Port1 voltage monitoring, constant voltage output
VM2: SMU for Port2 voltage monitoring, constant voltage output
I1Stress: Port1 stress current
V1Limit: Port1 voltage compliance
[Extended Test Parameters]
V2: Port2 voltage
V3: Port3 voltage
V4: Port4 voltage
I2Limit: Port2 current compliance
I3Limit: Port3 current compliance
I4Limit: Port4 current compliance
HoldTime: Hold time
Port2MinRng: Minimum range for Port2 current measurement
Port3MinRng: Minimum range for Port3 current measurement
Port4MinRng: Minimum range for Port4 current measurement
R_Max: Y axis maximum value for resistance
[User Function]
Potential difference between lines DeltaV=Vm1-Vm2
Wiring resistance value R=DeltaV/Iport1
[Test Output: X-Y Graph]
X axis: Accumulated stresss time TimeList
Y1 axis: Wiring resistance value RList
Agilent EasyEXPERT Application Library Reference, Edition 8
11-48