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11 Reliability 

11.10

 

BTI2: Bias Temperature Instability test, 4 terminals (A.03.10) 

 
[Supported Analyzer] 
  B1500A 
 
[Description]   
  Performs the bias temperature instability test, and plots the accumulated stress time vs threshold voltage/drain 
current characteristics. 
  This test is performed as follows. 
  1. performs initial characterization 
  2. applies stress voltage 
  3. performs interim characterization 
  4. saves measurement data 
  5. repeats 2 to 4 until TotalStressTime elapses 
 
[Device Under Test] 
  MOSFET, 4 terminals 
 
[Device Parameters] 
  Polarity: Nch (SMUs force the specified value) or Pch (SMUs force the negative specified value) 
  Lg: Gate length 
  Wg: Gate width 
  Temp: Temperature (deg C) 
 
[Test Parameters] 
  IntegTime: Integration time (SHORT, MEDIUM, LONG) 
  TotalStressTime: Total stress time 
  Gate: SMU connected to Gate terminal, primary sweep voltage output 
  Drain: SMU connected to Drain terminal, constant voltage output 
  Subs: SMU connected to Substrate terminal, constant voltage output 
  Source: SMU connected to Source terminal, constant voltage output 
  VgStress: Gate terminal stress voltage 
  MeasConstId: Measurement by constant current method, Yes or No 
  MeasGmmax: Measurement by extrapolation method, Yes or No 
  MeasIds: Drain current measurement, Yes or No 
  MeasTiming: Timing to measure device parameter 
 
  [Test Parameters for IvSweep_ConstId] 
  Id@Vth: Drain current to decide the Vth, per unit area 
  VgStart1: Sweep start voltage for Gate terminal 
  VgStop1: Sweep stop voltage for Gate terminal 
  VgStep1: Sweep step voltage for Gate terminal 
  Vd1: Drain terminal voltage, constant value 
  VthStopRate: Vth_ConstId change rate to stop testing 
 
  [Test Parameters for IvSweep_gmmax] 
  VgStart2: Sweep start voltage for Gate terminal 
  VgStop2: Sweep stop voltage for Gate terminal 
  VgStep2: Sweep step voltage for Gate terminal 
  Vd2: Drain voltage 
  GmStopRate: Vth_GmMax change rate to stop testing 
 
  [Test Parameters for Sampling_Ids] 
  Vg3: Gate terminal voltage 

Agilent EasyEXPERT Application Library Reference, Edition 8 

11-28 

Summary of Contents for EasyEXPERT

Page 1: ...Agilent Technologies Agilent EasyEXPERT Application Library Reference ...

Page 2: ...on with the furnishing use or perfor mance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the sep arate agreement shall control Technology Licenses The hardware and or software described in this document are furnished...

Page 3: ...uch as CNT FET and so on The application library includes more than one hundred test definitions And they are classified into the following categories BJT CMOS Discrete GenericTest MCSMU_IV Memory MixedSignal NanoTech Organic PwrDevice Reliability Sample Solar Cell SPGU_PLSDIV Structure TFT Utility WGFMU WGFMU Utility WGFMU_IV GaN Diode GaN FET IGBT Interconnection MISCAP PowerBJT PowerDiode Power...

Page 4: ...vice Parameters area of the EasyEXPERT Application Test screen Test Parameters Lists the parameters changeable in the Test Parameters area of the EasyEXPERT Application Test screen Extended Test Parameters Lists the parameters changeable in the dialog box opened by clicking the Extended Setup button Measurement Parameters Lists the parameters measured by this test definition User Function and Anal...

Page 5: ...asyEXPERT Application Tests program folder Agilent B1500 EasyEXPERT Contribution Application Tests Revision Number Description A 01 xx Test definitions supported by EasyEXPERT A 01 xx and later A 01 20 Test definitions updated from A 01 xx or supported by EasyEXPERT A 02 00 and later A 02 00 This number is used by the Subsite move test definition only A 03 00 Test definitions supported by EasyEXPE...

Page 6: ...Cts B1500A MFCMU 1 EB Diode Fwd B1500A 4155B C 4156B C SMU 2 EB Diode Rev B1500A 4155B C 4156B C SMU 2 G Plot ConstVce Pulse B1500A 4155B C 4156B C SMU 4 G Plot ConstVce Pulse 3 B1500A 4155B C 4156B C SMU 3 G Plot ConstVce B1500A 4155B C 4156B C SMU 4 G Plot ConstVce 3 B1500A 4155B C 4156B C SMU 3 G Plot Vbc 0V Pulse B1500A 4155B C 4156B C SMU 4 G Plot Vbc 0V Pulse 3 B1500A 4155B C 4156B C SMU 3 G...

Page 7: ...c Vg B1500A MFCMU 1 SMU 1 Cgg Freq Linear B1500A MFCMU 1 Cgg Freq Log B1500A MFCMU 1 Cgg Vg 2Freq B1500A MFCMU 1 Cgg Vg B1500A MFCMU 1 IdRdsGds B1500A 4155B C 4156B C SMU 4 Id Vd pulse B1500A 4155B C 4156B C SMU 4 Id Vd pulse 3 B1500A 4155B C 4156B C SMU 3 Id Vd B1500A 4155B C 4156B C SMU 4 Id Vd 3 B1500A 4155B C 4156B C SMU 3 Id Vg pulse B1500A 4155B C 4156B C SMU 4 Id Vg Vpulse 3 B1500A 4155B C ...

Page 8: ... 2 and MP HP HRSMU 2 or MP HP HRSMU 1 and GNDU Id Vgs MCSMU B1500A Id Vgs MCSMU 2 stage B1500A Memory Flash Ccf V B1500A MFCMU 1 Flash Cfb V B1500A MFCMU 1 Flash Cgg Vcg B1500A MFCMU 1 NandFlash2 Endurance 3devices B1500A SMU 3 B2200A B2201A 1 81110A 2 outputs 1 NandFlash2 Endurance B1500A ASU SMU 3 81110A 2 outputs 1 NandFlash2 IV Erase IV B1500A SMU 1 ASU SMU 2 81110A 2 outputs 1 NandFlash2 IV W...

Page 9: ...00A SPGU 1 SMU 2 ASU SMU 1 or SPGU 1 SMU 3 16440A 16445A 1 NorFlash Endurance B1500A SPGU 2 SMU 1 ASU SMU 3 or SPGU 2 SMU 4 16440A 16445A 2 NorFlash IV Erase IV B1500A SPGU 1 SMU 2 ASU SMU 2 or SPGU 1 SMU 4 16440A 16445A 1 NorFlash IV Write IV B1500A SPGU 1 SMU 2 ASU SMU 2 or SPGU 1 SMU 4 16440A 16445A 1 NorFlash Retention ErasedCell B1500A SPGU 1 SMU 2 ASU SMU 2 or SPGU 1 SMU 4 16440A 16445A 1 No...

Page 10: ...00A SMU 5 Id Vd Mismatch 3 B1500A SMU 4 MIM CV Mismatch B1500A MFCMU 1 MOS Varactor CV Mismatch B1500A MFCMU 1 Poly R Mismatch B1500A SMU 7 NanoTech CNT Differential R AC B1500A MFCMU 1 CNT Gate Leak B1500A 4155B C 4156B C SMU 2 CNT Id Time B1500A 4156B C SMU 4 CNT Id Vd B1500A 4155B C 4156B C SMU 4 CNT Id Vg B1500A 4155B C 4156B C SMU 4 CNT Id Vg Time B1500A 4156B C SMU 4 CNT IV Sweep B1500A 4155...

Page 11: ...1 BTI 3devices 3 B1500A SMU 5 B2200A B2201A 1 BTI B1500A SMU 4 BTI2 B1500A SMU 4 BTI 3 B1500A SMU 3 BTI2 3 B1500A SMU 3 Charge Pumping B1500A SMU 2 81110A 2 outputs 1 Charge Pumping2 B1500A SMU 2 SPGU 1 EM Istress B1500A SMU 4 EM Istress2 B1500A SMU 4 EM Istress 2 B1500A SMU 2 EM Istress2 2 B1500A SMU 2 EM Istress 6 B1500A SMU 6 EM Istress2 6 B1500A SMU 6 EM Vstress B1500A SMU 4 EM Vstress2 B1500A...

Page 12: ...U 1 and GNDU or SMU 2 Solar Cell Cp V B1500A MFCMU 1 Solar Cell Nc W B1500A MFCMU 1 Solar Cell Cp Freq Log B1500A MFCMU 1 Solar Cell Nyquist Plot B1500A MFCMU 1 Solar Cell Cp AC Level B1500A MFCMU 1 Solar Cell DLCP B1500A MFCMU 1 SPGU_ PLSDIV SPGU PLSDIV B1500A SPGU 1 SPGU PLSDIV Id Vd B1500A SPGU 1 SPGU PLSDIV Id Vg B1500A SPGU 1 Structure BVgb ThinOx B1500A 4155B C 4156B C SMU 2 BVgb B1500A 4155...

Page 13: ...B1500A 4155B C 4156B C SMU 4 R I B1500A 4155B C 4156B C SMU 2 R V DVM B1500A SMU 2 3458A 1 R V kelvin B1500A 4155B C 4156B C SMU 4 R V B1500A 4155B C 4156B C SMU 2 VanDerPauw Square B1500A 4155B C 4156B C SMU 4 TFT TFT Id Vd B1500A 4155B C 4156B C SMU 3 TFT Id Vg B1500A 4155B C 4156B C SMU 3 Utility CV Curve Parameter Calculator B1500A B1505A 4155B C 4156B C CVSweep4284_a 4284A 1 or E4980A 1 Force...

Page 14: ...1500A WGFMU 1 RSU 2 WGFMU Id Vg DC B1500A WGFMU 1 RSU 2 WGFMU Id Vd pulse B1500A WGFMU 1 RSU 2 WGFMU Id Vg pulse B1500A WGFMU 1 RSU 2 GaN Diode Diode Current Collapse IV t Sampling B1505A N1267A 1 HVSMU 1 HCSMU 1 MCSMU 1 Diode Current Collapse Signal Monitor B1505A N1267A 1 HVSMU 1 HCSMU 1 MCSMU 1 GaN FET FET Current Collapse IV t Sampling I Force B1505A N1267A 1 HVSMU 1 HCSMU 1 MCSMU 2 SMU 1 FET ...

Page 15: ... G Plot for Expanders B1505A N1265A 1 MC HCSMU 2 SMU 1 Ic Ib for Expanders B1505A N1265A 1 MC HCSMU 2 SMU 1 PowerDiode Cj Vr B1505A MFCMU 1 HVSMU 1 Bias T 1 If Vf B1505A HCSMU 1 or SMU 1 Ir Vr B1505A SMU 1 Vf B1505A HCSMU 1 or SMU 1 Power MOSFET Vds Vgs B1505A HCSMU 1 SMU 1 Id Vgs for Expanders B1505A N1265A 1 MC HCSMU 2 SMU 1 See Note 1 Cds B1505A MFCMU 1 HVSMU 1 Bias T 1 Cgd B1505A MFCMU 1 HVSMU...

Page 16: ...NOTE Note 1 These test definitions belong to the categories PMIC PowerMOSFET and SiC NOTE Note 2 This test definition belongs to the categories IGBT MISCAP PMIC PowerMOSFET and SiC ...

Page 17: ...1 BJT ...

Page 18: ...lot Vbc 0V Pulse Ic Ve characteristics Vbc 0 SMU Pulse A 01 11 20 G Plot Vbc 0V Pulse 3 Ic Ve characteristics Vbc 0 3 terminal SMU Pulse A 01 11 21 G Plot Vbc 0V Gummel characteristics Vbc 0 A 01 20 22 G Plot Vbc 0V 3 Gummel characteristics Vbc 0 3 terminal A 01 20 23 hfe Vbe ConstVce hfe Ic characteristics Vce constant A 01 20 24 hfe Vbe Vbc 0V hfe Ic characteristics Vbc 0 A 01 20 25 Ic Vc Ib Ic ...

Page 19: ...t voltage for Collector terminal VcStop Sweep stop voltage for Collector terminal VcStep Sweep step voltage for Collector terminal Base SMU connected to Base terminal constant voltage output Extended Test Parameters Vb Base voltage HoldTime Hold time DelayTime Delay time BaseMinRng Minimum range for the base current measurement CollectorMinRng Minimum range for the collector current measurement Me...

Page 20: ...Sweep start voltage for Collector terminal VcStop Sweep stop voltage for Collector terminal VcStep Sweep step voltage for Collector terminal IcLimit Collector current compliance Base SMU connected to Base terminal constant voltage output Extended Test Parameters Vb Base voltage HoldTime Hold time DelayTime Delay time BaseMinRng Minimum range for the base current measurement CollectorMinRng Minimum...

Page 21: ...age for Collector terminal VcStep Sweep step voltage for Collector terminal Base SMU connected to Base terminal constant voltage output Extended Test Parameters Vb Base voltage HoldTime Hold time DelayTime Delay time CollectorMinRng Minimum range for the collector current measurement BaseMinRng Minimum range for the base current measurement Measurement Parameters Collector current Icollector Base ...

Page 22: ...for Collector terminal Base SMU connected to Base terminal constant current output Ib Base current VbLimit Base voltage compliance Emitter SMU connected to Emitter terminal constant voltage output Extended Test Parameters Ve Emitter voltage HoldTime Hold time DelayTime Delay time CollectorMinRng Minimum range for the collector current measurement Measurement Parameters Collector current Icollector...

Page 23: ...VcStop Sweep stop voltage for Collector terminal VcStep Sweep step voltage for Collector terminal Emitter SMU connected to Emitter terminal constant voltage output Extended Test Parameters Ve Emitter voltage HoldTime Hold time DelayTime Delay time CollectorMinRng Minimum range for the collector current measurement Measurement Parameters Collector current Icollector Emitter current Iemitter For the...

Page 24: ... voltage for Emitter terminal VeStep Sweep step voltage for Emitter terminal Base SMU connected to Base terminal constant voltage output Extended Test Parameters Vb Base voltage HoldTime Hold time DelayTime Delay time EmitterMinRng Minimum range for the emitter current measurement BaseMinRng Minimum range for the base current measurement Measurement Parameters Emitter current Iemitter Base current...

Page 25: ...art voltage for Substrate VsubsStop Sweep stop voltage for Substrate VsubsStep Sweep step voltage for Substrate Collector SMU connected to Collector terminal constant voltage output Extended Test Parameters Vc Collector voltage HoldTime Hold time DelayTime Delay time CollectorMinRng Minimum range for the collector current measurement SubsMinRng Minimum range for the substrate current measurement M...

Page 26: ...rt Sweep start voltage for Substrate VsubsStop Sweep stop voltage for Substrate VsubsStep Sweep step voltage for Substrate IsubsLimit Substrate current compliance Collector SMU connected to Collector terminal constant voltage output Extended Test Parameters Vc Collector voltage HoldTime Hold time DelayTime Delay time CollectorMinRng Minimum range for the collector current measurement SubsMinRng Mi...

Page 27: ...ow to the collector terminal and base terminal respectively For the emitter and substrate connect GNDU Required Modules and Accessories Agilent B1520A MFCMU 1 unit Device Parameters Polarity NPN CMU forces the specified value or PNP CMU forces the negative specified value Le Emitter length We Emitter width Temp Temperature Test Parameters IntegTime Integration time Base CMU connected between Base ...

Page 28: ...ance Rs Parallel resistance Rp Dissipation factor D Reactance X Impedance Z Phase Theta Collector voltage Vcollector Test Output X Y Graph X axis Frequency FreqList LOG Y1 axis Base Collector capacitance parallel capacitance CpList LINEAR Y2 axis Conductance GList LINEAR Test Output List Display Frequency FreqList Base Collector capacitance parallel capacitance CpList Conductance GList Series capa...

Page 29: ... Device Under Test Bipolar transistor Connect Base to the CMU Low Collector to the CMU High and the other terminals to the GNDU Device Parameters Polarity NPN CMU forces the specified value or PNP CMU forces the negative specified value Le Emitter length We Emitter width Lb Base length Wb Base width Temp Temperature Test Parameters IntegTime Integration time FREQ Measurement frequency OscLevel Mea...

Page 30: ...axis Conductance G LINEAR List Display Base Collector voltage Vcb Base Collector capacitance parallel capacitance Cp Conductance G Series capacitance Cs Series resistance Rs Parallel resistance Rp Dissipation factor D Reactance X Impedance Z Phase Theta Parameter Display Area Zero bias capacitance Cj0 Auto Analysis Line1 Horizontal line through Y1 data at Vcb 0 Agilent EasyEXPERT Application Libra...

Page 31: ... MHz Device Under Test Bipolar transistor Connect Base to the CMU Low Emitter to the CMU High and the other terminals to the GNDU Device Parameters Polarity NPN CMU forces the specified value or PNP CMU forces the negative specified value Le Emitter length We Emitter width Temp Temperature Test Parameters HoldTime Hold time DelayTime Delay time IntegTime Integration time FREQ Measurement frequency...

Page 32: ...List Display Base Emitter voltage Veb Base Emitter capacitance parallel capacitance Cp Conductance G Series capacitance Cs Series resistance Rs Parallel resistance Rp Dissipation factor D Reactance X Impedance Z Phase Theta Parameter Display Area Zero bias capacitance Cj0 Auto Analysis Line1 Horizontal line through Y1 data at Veb 0 Agilent EasyEXPERT Application Library Reference Edition 8 1 16 ...

Page 33: ...nder Test Bipolar transistor Connect Collector to the CMU Low Substrate to the CMU High and the other terminals to the GNDU Device Parameters Polarity NPN CMU forces the specified value or PNP CMU forces the negative specified value Le Emitter length We Emitter width Lc Collector length Wc Collector width Temp Temperature Test Parameters IntegTime Integration time FREQ Measurement frequency OscLev...

Page 34: ...Conductance G LINEAR List Display Collector Substrate voltage Vsc Collector Substrate capacitance parallel capacitance Cp Conductance G Series capacitance Cs Series resistance Rs Parallel resistance Rp Dissipation factor D Reactance X Impedance Z Phase Theta Parameter Display Area Zero bias capacitance Cj0 Auto Analysis Line1 Horizontal line through Y1 data at Vsub Vsc 0 Agilent EasyEXPERT Applica...

Page 35: ...art Sweep start voltage for Emitter terminal VeStop Sweep stop voltage for Emitter terminal VeStep Sweep step voltage for Emitter terminal Base SMU connected to Base terminal constant voltage output Extended Test Parameters Vb Base voltage HoldTime Hold time DelayTime Delay time EmitterMinRng Minimum range for the emitter current measurement BaseMinRng Minimum range for the base current measuremen...

Page 36: ...ut VeStart Sweep start voltage for Emitter terminal VeStop Sweep stop voltage for Emitter terminal VeStep Sweep step voltage for Emitter terminal IeLimit Emitter current compliance Base SMU connected to Base terminal constant voltage output Extended Test Parameters Vb Base voltage HoldTime Hold time DelayTime Delay time EmitterMinRng Minimum range for the emitter current measurement BaseMinRng Min...

Page 37: ...tart voltage for Base terminal VbStop Sweep stop voltage for Base terminal VbStep Sweep step voltage for Base terminal Collector SMU connected to Collector terminal constant voltage output Vc Collector voltage PulsePeriod Pulse period PulseWidth Pulse width BaseValue Pulse base value Emitter SMU connected to Emitter terminal constant voltage output Subs SMU connected to Substrate terminal constant...

Page 38: ...connected to Base terminal primary sweep voltage output VbStart Sweep start voltage for Base terminal VbStop Sweep stop voltage for Base terminal VbStep Sweep step voltage for Base terminal Collector SMU connected to Collector terminal constant voltage output Vc Collector voltage PulsePeriod Pulse period PulseWidth Pulse width BaseValue Pulse base value Emitter SMU connected to Emitter terminal co...

Page 39: ...p voltage for Base terminal Collector SMU connected to Collector terminal constant voltage output Vc Collector voltage Emitter SMU connected to Emitter terminal constant voltage output Subs SMU connected to Substrate terminal constant voltage output Vsubs Substrate voltage IsubsLimit Substrate current compliance Extended Test Parameters Ve Emitter voltage HoldTime Hold time DelayTime Delay time Ba...

Page 40: ...e terminal VbStop Sweep stop voltage for Base terminal VbStep Sweep step voltage for Base terminal Collector SMU connected to Collector terminal constant voltage output Vc Collector voltage Emitter SMU connected to Emitter terminal constant voltage output Extended Test Parameters Ve Emitter voltage HoldTime Hold time DelayTime Delay time BaseMinRng Minimum range for the base current measurement Co...

Page 41: ...llector terminal constant voltage output Emitter SMU connected to Emitter terminal primary sweep voltage output VeStart Sweep start voltage for Emitter terminal VeStop Sweep stop voltage for Emitter terminal VeStep Sweep step voltage for Emitter terminal PulsePeriod Pulse period PulseWidth Pulse width Subs SMU connected to Substrate terminal constant voltage output Vsubs Substrate voltage IsubsLim...

Page 42: ... to Base terminal constant voltage output Collector SMU connected to Collector terminal constant voltage output Emitter SMU connected to Emitter terminal primary sweep voltage output VeStart Sweep start voltage for Emitter terminal VeStop Sweep stop voltage for Emitter terminal VeStep Sweep step voltage for Emitter terminal PulsePeriod Pulse period PulseWidth Pulse width Extended Test Parameters B...

Page 43: ... sweep voltage output VeStart Sweep start voltage for Emitter terminal VeStop Sweep stop voltage for Emitter terminal VeStep Sweep step voltage for Emitter terminal Subs SMU connected to Substrate terminal constant voltage output Vsubs Substrate voltage IsubsLimit Substrate current compliance Extended Test Parameters Vb Base voltage Vc Collector voltage HoldTime Hold time DelayTime Delay time Base...

Page 44: ...ge output Emitter SMU connected to Emitter terminal primary sweep voltage output VeStart Sweep start voltage for Emitter terminal VeStop Sweep stop voltage for Emitter terminal VeStep Sweep step voltage for Emitter terminal Extended Test Parameters Vb Base voltage Vc Collector voltage HoldTime Hold time DelayTime Delay time BaseMinRng Minimum range for the base current measurement CollectorMinRng ...

Page 45: ...nected to Collector terminal constant voltage output Vc Collector voltage Emitter SMU connected to Emitter terminal constant voltage output Subs SMU connected to Substrate terminal constant voltage output Vsubs Substrate voltage IsubsLimit Substrate current compliance Extended Test Parameters Ve Emitter voltage HoldTime Hold time DelayTime Delay time BaseMinRng Minimum range for the base current m...

Page 46: ... voltage for Emitter terminal VeStop Sweep stop voltage for Emitter terminal VeStep Sweep step voltage for Emitter terminal Subs SMU connected to Substrate terminal constant voltage output Vsubs Substrate voltage IsubsLimit Substrate current compliance Extended Test Parameters Vb Base voltage Vc Collector voltage HoldTime Hold time DelayTime Delay time BaseMinRng Minimum range for the base current...

Page 47: ...t IbStart Sweep start current for Base terminal IbStop Sweep stop current for Base terminal IbStep Sweep step current for Base terminal Emitter SMU connected to Emitter terminal constant voltage output Subs SMU connected to Substrate terminal constant voltage output Vsubs Substrate voltage IsubsLimit Substrate current compliance Extended Test Parameters Ve Emitter voltage VbLimit Base voltage comp...

Page 48: ...VcStep Sweep step voltage for Collector terminal Base SMU connected to Base terminal secondary sweep voltage output IbStart Sweep start current for Base terminal IbStop Sweep stop current for Base terminal IbStep Sweep step current for Base terminal Emitter SMU connected to Emitter terminal constant voltage output Extended Test Parameters Ve Emitter voltage VbLimit Base voltage compliance HoldTime...

Page 49: ...tage for Collector terminal PulsePeriod Pulse period PulseWidth Pulse width Base SMU connected to Base terminal secondary sweep voltage output IbStart Sweep start current for Base terminal IbStop Sweep stop current for Base terminal IbStep Sweep step current for Base terminal Emitter SMU connected to Emitter terminal constant voltage output Subs SMU connected to Substrate terminal constant voltage...

Page 50: ... VcStop Sweep stop voltage for Collector terminal VcStep Sweep step voltage for Collector terminal PulsePeriod Pulse period PulseWidth Pulse width Base SMU connected to Base terminal secondary sweep voltage output IbStart Sweep start current for Base terminal IbStop Sweep stop current for Base terminal IbStep Sweep step current for Base terminal Emitter SMU connected to Emitter terminal constant v...

Page 51: ...p Sweep step voltage for Collector terminal PulsePeriod Pulse period PulseWidth Pulse width Base SMU connected to Base terminal secondary sweep voltage output VbStart Sweep start voltage for Base terminal VbStop Sweep stop voltage for Base terminal VbStep Sweep step voltage for Base terminal Emitter SMU connected to Emitter terminal constant voltage output Subs SMU connected to Substrate terminal ...

Page 52: ...llector terminal VcStop Sweep stop voltage for Collector terminal VcStep Sweep step voltage for Collector terminal PulsePeriod Pulse period PulseWidth Pulse width Base SMU connected to Base terminal secondary sweep voltage output VbStart Sweep start voltage for Base terminal VbStop Sweep stop voltage for Base terminal VbStep Sweep step voltage for Base terminal Emitter SMU connected to Emitter ter...

Page 53: ... VbStart Sweep start voltage for Base terminal VbStop Sweep stop voltage for Base terminal VbStep Sweep step voltage for Base terminal Emitter SMU connected to Emitter terminal constant voltage output Subs SMU connected to Substrate terminal constant voltage output Vsubs Substrate voltage IsubsLimit Substrate current compliance Extended Test Parameters Ve Emitter voltage HoldTime Hold time DelayTi...

Page 54: ...step voltage for Collector terminal Base SMU connected to Base terminal secondary sweep voltage output VbStart Sweep start voltage for Base terminal VbStop Sweep stop voltage for Base terminal VbStep Sweep step voltage for Base terminal Emitter SMU connected to Emitter terminal constant voltage output Extended Test Parameters Ve Emitter voltage HoldTime Hold time DelayTime Delay time CollectorMinR...

Page 55: ...terminal IbStop Sweep stop current for Base terminal IbStep Sweep step current for Base terminal VbLimit Base voltage compliance Collector SMU connected to Collector terminal constant current output VcLimit Collector voltage compliance Emitter SMU connected to Emitter terminal constant voltage output Subs SMU connected to Substrate constant voltage output Vsubs Substrate voltage IsubsLimit Substra...

Page 56: ...weep step current for Collector terminal VcLimit Collector voltage compliance Base SMU connected to Base terminal constant current output Ib Base current Emitter SMU connected to Emitter terminal constant voltage output Subs SMU connected to Substrate constant voltage output Vsubs Substrate voltage IsubsLimit Substrate current compliance Extended Test Parameters Ve Emitter voltage VbLimit Base vol...

Page 57: ...tor terminal constant current output Ic Collector current VcLimit Collector voltage compliance Emitter SMU connected to Emitter terminal constant voltage output Subs SMU connected to Substrate constant voltage output Vsubs Substrate voltage IsubsLimit Substrate current compliance Extended Test Parameters Ve Emitter voltage HoldTime Hold time DelayTime Delay time EmitterMinRng Minimum range for the...

Page 58: ...cified for NPN device under test Description of Measurement Base and Collector voltage referenced to emitter voltage 0 V sweeps synchronously in accordance with the test parameter setting Currents flowing in base and collector terminals are measured while the synchronized voltages sweep Plot Display Collector and base currents in log scale as well as the current amplification factor Beta in linear...

Page 59: ...B base C collector E emitter Sb substrate Le1 lt Le2 lt Le3 must be satisfied Enter zero for a field with no device Device Parameters Polarity NPN SMUs force the specified value or PNP SMUs force the negative specified value Temp Temperature IcMax Collector current compliance Test Parameters IntegTime Integration time BaseSMU SMU connected to Base terminal constant voltage output CollectorSMU SMU ...

Page 60: ...Plot X axis Emitter voltage Vemitter LINEAR Y1 axis Base current Ibase LOG Y2 axis Current amplification factor hfe LINEAR Y3 axis Collector current Icollector LOG Y4 axis Emitter current Iemitter LOG List Display Emitter voltage Vemitter Collector current Icollector Emitter current Iemitter Base current Ibase Current amplification factor hfe Parameters Display Area Collector current determining t...

Page 61: ...h B base C collector E emitter Sb sub strate We1 lt We2 lt We3 must be satisfied Enter zero for a field with no device Device Parameters Polarity NPN SMUs force the specified value or PNP SMUs force the negative specified value Temp Temperature IcMax Collector current compliance Test Parameters IntegTime Integration time BaseSMU SMU connected to Base terminal constant voltage output CollectorSMU S...

Page 62: ... Plot X axis Emitter voltage Vemitter LINEAR Y1 axis Base current Ibase LOG Y2 axis Current amplification factor hfe LINEAR Y3 axis Collector current Icollector LOG Y4 axis Emitter current Iemitter LOG List Display Emitter voltage Vemitter Collector current Icollector Emitter current Iemitter Base current Ibase Current amplification factor hfe Parameters Display Area Collector current determining ...

Page 63: ...2 CMOS ...

Page 64: ...Id Vd Id Vd Characteristics A 01 20 17 Id Vd 3 Id Vd Characteristics 3 terminal A 01 20 18 Id Vg pulse Id Vg characteristics SMU Pulse A 01 12 19 Id Vg Vpulse 3 Id Vg characteristics 3 terminal SMU Pulse A 01 11 20 Id Vg Id Vg Characteristics A 01 20 21 Id Vg 3 Id Vg Characteristics 3 terminal A 01 20 22 IonIoffSlope On current off current and subthreshold slope A 01 20 23 Isub Vg Isub Lg characte...

Page 65: ... output Subs SMU connected to Substrate constant voltage output Source SMU connected to Source constant voltage output Extended Test Parameters Vg Gate voltage Vs Source voltage Vsubs Substrate voltage HoldTime Hold time DelayTime Delay time DrainMinRng Minimum range for the drain current measurement GateMinRng Minimum range for the gate current measurement SubsMinRng Minimum range for the substra...

Page 66: ...rce LOG List Display Gate current Igate Substrate current Isubs Parameters Display Area Breakdown voltage between source and drain BVdss Auto Analysis Line1 Vertical line through Y2 data at Isource Is BVdss Agilent EasyEXPERT Application Library Reference Edition 8 2 4 ...

Page 67: ... constant voltage output Extended Test Parameters Vsubs Substrate voltage Vs Source voltage HoldTime Hold time DelayTime Delay time GateMinRng Minimum range for the gate current measurement SourceMinRng Minimum range for the source current measurement SubsMinRng Minimum range for the substrate current measurement Measurement Parameters Source current Isource Gate current Igate Substrate current Is...

Page 68: ...00 k 500 k 1 M 1 2 M 1 5 M 2 M 2 5 M 2 7 M 3 M 3 2 M 3 5 M 3 7 M 4 M 4 2 M 4 5 M 5 MHz Device Under Test MOSFET 4 terminals Connect Gate to the CMU Low and Substrate to the CMU High And connect Drain and Source to the specified SMU Device Parameters Polarity Nch CMU SMU forces the specified value or Pch CMU SMU forces the negative specified value Lg Gate length Wg Gate width Temp Temperature Test ...

Page 69: ...r level Vosc Gate Substrate capacitance parallel capacitance cp Conductance g Gate Substrate voltage V_gs Test Output X Y Graph X axis Oscillator level OSCLEVEL LINEAR Y1 axis Gate Substrate capacitance parallel capacitance Cp LINEAR Y2 axis Conductance G LINEAR Test Output List Display Oscillator level OSCLEVEL Parallel capacitance Cp Conductance G Series capacitance Cs Series resistance Rs Paral...

Page 70: ... High And connect Drain and Source to the GNDU Required Modules and Accessories Agilent B1520A MFCMU 1 unit Device Parameters Polarity Nch CMU forces the specified value or Pch CMU forces the negative specified value Lg Gate length Wg Gate width Temp Temperature Test Parameters IntegTime Integration time Gate CMU connected to Gate terminal CV sweep measurement Source SMU connected to Source termin...

Page 71: ...ance Rs Parallel resistance Rp Dissipation factor D Reactance X Impedance Z Phase Theta Substrate voltage Vsubs Conductance G Test Output X Y Graph X axis Frequency list FreqList LOG Y1 axis Gate Substrate capacitance parallel capacitance list CpList LINEAR Y2 axis Conductance list GList LINEAR Test Output List Display Frequency FreqList Gate Substrate capacitance parallel capacitance CpList Condu...

Page 72: ...2 M 4 5 M 5 MHz Device Under Test MOSFET 4 terminals Connect Gate and Substrate to the SCUU And connect Drain and Source to the specified SMU Required Modules and Accessories One MFCMU module three SMU modules and a set of SCUU GSWU are required SCUU connections Output1 Substrate Output2 Gate Connection wire must be connected between the GSWU and the DUT interface High Low guard lines Device Param...

Page 73: ...ate voltage Vgate Gate Substrate capacitance parallel capacitance Cp Test Output X Y Graph X axis Gate voltage VgList LINEAR Y1 axis Gate Substrate capacitance parallel capacitance CpList LINEAR Y2 axis Conductance GList LINEAR Test Output List Display Gate voltage VgList Gate Substrate capacitance parallel capacitance CpList Conductance GList Series capacitance CsList Series resistance RsList Par...

Page 74: ...M 2 M 2 5 M 2 7 M 3 M 3 2 M 3 5 M 3 7 M 4 M 4 2 M 4 5 M 5 MHz Device Under Test MOSFET 4 terminals Connect Gate to the CMU Low and Substrate to the CMU High And connect Drain and Source to the specified SMU Device Parameters Polarity Nch CMU SMU forces the specified value or Pch CMU SMU forces the negative specified value Lg Gate length Wg Gate width Temp Temperature Test Parameters IntegTime Inte...

Page 75: ...bstrate capacitance parallel capacitance Cp Test Output X Y Graph X axis Gate voltage VgList LINEAR Y1 axis Gate Substrate capacitance parallel capacitance CpList LINEAR Y2 axis Conductance GList LINEAR Test Output List Display Gate voltage VgList Gate Substrate capacitance parallel capacitance CpList Conductance GList Series capacitance CsList Series resistance RsList Parallel resistance RpList D...

Page 76: ...gh And connect Substrate to the GNDU Required Modules and Accessories Agilent B1520A MFCMU 1 unit Device Parameters Polarity Nch CMU forces the specified value or Pch CMU forces the negative specified value Lg Gate length Wg Gate width Temp Temperature Test Parameters IntegTime Integration time Gate CMU connected to Gate terminal CV sweep measurement Subs SMU connected to Substrate terminal consta...

Page 77: ...s Series resistance Rs Parallel resistance Rp Dissipation factor D Reactance X Impedance Z Phase Theta Source voltage Vsource Test Output X Y Graph X axis Frequency list FreqList LOG Y1 axis Gate Channel capacitance parallel capacitance list CpList LINEAR Y2 axis Conductance list GList LINEAR Test Output List Display Frequency FreqList Gate Channel capacitance parallel capacitance CpList Conductan...

Page 78: ...uencies 1 k 2 k 5 k 10 k 20 k 50 k 100 k 200 k 500 k 1 M 1 2 M 1 5 M 2 M 2 5 M 2 7 M 3 M 3 2 M 3 5 M 3 7 M 4 M 4 2 M 4 5 M 5 MHz Device Under Test MOSFET 4 terminals Connect Gate to the CMU Low and Drain Source to the CMU High And connect Substrate to the specified SMU Device Parameters Polarity Nch CMU SMU forces the specified value or Pch CMU SMU forces the negative specified value Lg Gate lengt...

Page 79: ...annel capacitance parallel capacitance Cp Conductance G Test Output X Y Graph X axis Gate voltage VgList LINEAR Y1 axis Gate Channel capacitance parallel capacitance CpList LINEAR Y2 axis Conductance GList LINEAR Test Output List Display Gate voltage VgList Channel Substrate voltage VbsList Gate Channel capacitance parallel capacitance CpList Conductance GList Series capacitance CsList Series resi...

Page 80: ...o the CMU High Required Modules and Accessories Agilent B1520A MFCMU 1 unit Device Parameters Polarity Nch CMU forces the specified value or Pch CMU forces the negative specified value Lg Gate length Wg Gate width Temp Temperature Test Parameters IntegTime Integration time FreqStart Sweep start frequency NoOfPoint Number of measurement points OscLevel Measurement signal level Gate CMU connected to...

Page 81: ...ipation factor D Reactance X Impedance Z Phase Theta Substrate voltage Vsubs Test Output X Y Graph X axis Frequency list FreqList LINEAR Y1 axis Gate capacitance parallel capacitance list CpList LINEAR Y2 axis Conductance list GList LINEAR Test Output List Display Frequency FreqList Gate capacitance parallel capacitance CpList Conductance GList Series capacitance CsList Series resistance RsList Pa...

Page 82: ... Low and Drain Source Substrate to the CMU High Required Modules and Accessories Agilent B1520A MFCMU 1 unit Device Parameters Polarity Nch CMU forces the specified value or Pch CMU forces the negative specified value Lg Gate length Wg Gate width Temp Temperature Test Parameters IntegTime Integration time FreqStart Sweep start frequency NoOfDecade Number of decades for data collection OscLevel Mea...

Page 83: ...e Rp Dissipation factor D Reactance X Impedance Z Phase Theta Substrate voltage Vsubs Test Output X Y Graph X axis Frequency measurement list FreqList LOG Y1 axis Gate capacitance parallel capacitance list CpList LINEAR Y2 axis Conductance list GList LINEAR Test Output List Display Frequency FreqList Gate capacitance parallel capacitance CpList Conductance GList Series capacitance CsList Series re...

Page 84: ...ion window Default frequencies 1 k 2 k 5 k 10 k 20 k 50 k 100 k 200 k 500 k 1 M 1 2 M 1 5 M 2 M 2 5 M 2 7 M 3 M 3 2 M 3 5 M 3 7 M 4 M 4 2 M 4 5 M 5 MHz Device Under Test MOSFET 4 terminals Connect Gate to the CMU Low and the other terminals to the CMU High Device Parameters Polarity Nch CMU forces the specified value or Pch CMU forces the negative specified value Lg Gate length Wg Gate width Temp ...

Page 85: ...LINEAR Y1 axis Gate capacitance parallel capacitance Cgg LINEAR Y2 axis Gate capacitance parallel capacitance Cp_FREQ1 LINEAR Y3 axis Gate capacitance parallel capacitance Cp_FREQ2 LINEAR Test Output List Display Gate voltage VGS Gate capacitance parallel capacitance Cgg Gate capacitance parallel capacitance Cp_FREQ1 Gate capacitance parallel capacitance Cp_FREQ2 Dissipation factor D_FREQ1 Dissipa...

Page 86: ...st MOSFET 4 terminals Connect Gate to the CMU Low and the other terminals to the CMU High Device Parameters Polarity Nch CMU forces the specified value or Pch CMU forces the negative specified value Lg Gate length Wg Gate width Temp Temperature Test Parameters IntegTime Integration time FREQ Measurement frequency OscLevel Measurement signal level Gate CMU connected to Gate terminal CV sweep measur...

Page 87: ...ductance Gval LINEAR List Display Gate voltage Vgateval Gate capacitance parallel capacitance Cpval Conductance Gval Series capacitance Csval Series resistance Rsval Parallel resistance Rpval Dissipation factor Dval Reactance Xval Impedance Zval Phase Thetaval Agilent EasyEXPERT Application Library Reference Edition 8 2 25 ...

Page 88: ...minal secondary sweep voltage output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Subs SMU connected to Substrate constant voltage output Vsubs Substrate voltage Source SMU connected to Source terminal constant voltage output Extended Test Parameters Vs Source voltage IgLimit Gate current compliance IsubsLimit...

Page 89: ...ePeriod Pulse period PulseWidth Pulse width Gate SMU connected to Gate terminal secondary sweep voltage output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal IgLimit Gate current compliance Subs SMU connected to Substrate constant voltage output Vsubs Substrate voltage IsubsLimit Substrate current compliance Sou...

Page 90: ...ain terminal VdStep Sweep step voltage for Drain terminal PulsePeriod Pulse period PulseWidth Pulse width Gate SMU connected to Gate terminal secondary sweep voltage output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal IgLimit Gate current compliance Source SMU connected to Source terminal constant voltage outp...

Page 91: ... sweep voltage output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Subs SMU connected to Substrate constant voltage output Vsubs Substrate voltage Source SMU connected to Source terminal constant voltage output Extended Test Parameters Vs Source voltage IgLimit Gate current compliance IsubsLimit Substrate curr...

Page 92: ...e for Drain terminal Gate SMU connected to Gate terminal secondary sweep voltage output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Source SMU connected to Source terminal constant voltage output Extended Test Parameters Vs Source voltage IgLimit Gate current compliance IntegTime Integration time HoldTime Hol...

Page 93: ...MU connected to Substrate secondary sweep voltage output VsubsStart Sweep start voltage for Substrate terminal VsubsStop Sweep stop voltage for Substrate terminal VsubsStep Sweep step voltage for Substrate terminal Source SMU connected to Source terminal constant voltage output Extended Test Parameters Vs Source voltage BaseValue Pulse base voltage IgLimit Gate current compliance IsubsLimit Substr...

Page 94: ... VdStart Sweep start voltage for Drain terminal VdStop Sweep stop voltage for Drain terminal VdStep Sweep step voltage for Drain terminal PulsePeriod Pulse period PulseWidth Pulse width Source SMU connected to Source terminal constant voltage output Extended Test Parameters Vs Source voltage BaseValue Pulse base voltage IgLimit Gate current compliance HoldTime Hold time DelayTime Delay time Measur...

Page 95: ...ge output VsubsStart Sweep start voltage for Substrate terminal VsubsStop Sweep stop voltage for Substrate terminal VsubsStep Sweep step voltage for Substrate terminal Source SMU connected to Source terminal constant voltage output Extended Test Parameters Vs Source voltage IgLimit Gate current compliance IsubsLimit Substrate current compliance HoldTime Hold time DelayTime Delay time DrainMinRng M...

Page 96: ...EAR Y4 axis Substrate current Isubs LOG List Display Drain current per unit gate width IdrainPerWg Substrate current per unit gate width IsubsPerWg Transconductance gm Transconductance per unit gate width gmPerWg Agilent EasyEXPERT Application Library Reference Edition 8 2 34 ...

Page 97: ...tput VdStart Sweep start voltage for Drain terminal VdStop Sweep stop voltage for Drain terminal VdStep Sweep step voltage for Drain terminal Source SMU connected to Source terminal constant voltage output Extended Test Parameters Vs Source voltage IgLimit Gate current compliance HoldTime Hold time DelayTime Delay time DrainMinRng Minimum range for the drain current measurement Measurement Paramet...

Page 98: ...te terminal VgStop Vd VgStep Sweep step voltage for Gate terminal Drain SMU connected to Drain terminal constant voltage output Vd Drain voltage Subs SMU connected to Substrate constant voltage output Vsubs Substrate voltage Source SMU connected to Source terminal constant voltage output Extended Test Parameters Vs Source voltage IgLimit Gate current compliance IsubsLimit Substrate current complia...

Page 99: ...current at Vg VgStop Ioff off current drain current at Vg 0 Auto Analysis Line1 Horizontal line through the Y1 data at Vgate Vd VgStop Line2 Horizontal line through the Y1 data at Vgate 0 Marker Point of Slope SlopeMin Agilent EasyEXPERT Application Library Reference Edition 8 2 37 ...

Page 100: ...start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal VdStart Sweep start voltage for Drain terminal VdStop Sweep stop voltage for Drain terminal VdStep Sweep step voltage for Drain terminal Extended Test Parameters HoldTime Hold time DelayTime Delay time Vsubs Substrate terminal voltage IgLimit Gate current compliance IdLimit Drain...

Page 101: ...ep step voltage QSCVMeasV QSCV measurement voltage I_Comp Current compliance LeakCompen Leakage current compensation on off MeasRange Current measurement range used for the QSCV measurement fixed range Integ_C Integration time for the capacitance measurement Integ_L Integration time for the leakage current measurement HoldTime Hold time DelayTime Delay time IOffsetCancel QSCV smart operation enabl...

Page 102: ...t IgLeak X Y Graph X axis Gate Voltage Vg LINEAR Y1 axis Capacitance C LINEAR Y2 axis Leakage current Ig LINEAR List Display Gate voltage Vg Capacitance C Leakage current Ig Agilent EasyEXPERT Application Library Reference Edition 8 2 40 ...

Page 103: ...value Lg Gate length Wg Gate width Temp Temperature Test Parameters IMeasSMU SMU to measure current and capacitance connected to Gate terminal or Substrate terminal MeasRange Current measurement range used for the QSCV measurement fixed range Integ_C Integration time for the capacitance measurement Integ_L Integration time for the leakage current measurement HoldTime Hold time DelayTime Delay time...

Page 104: ... Calibration window Default frequencies 1 k 2 k 5 k 10 k 20 k 50 k 100 k 200 k 500 k 1 M 1 2 M 1 5 M 2 M 2 5 M 2 7 M 3 M 3 2 M 3 5 M 3 7 M 4 M 4 2 M 4 5 M 5 MHz Device Measured Single device with four terminals Parameter Setting Test parameters are specified for NMOS device under test Swept bias voltage parameters are specified by the gate voltage referenced to the source voltage Vgs Description o...

Page 105: ...e gate voltage referenced to the source voltage Vg Description of Measurement Gate voltage Vg sweeps in accordance with the test parameter setting Currents flowing in drain terminal are measured while the gate voltage sweeps Plot Display Measured drain currents and transconductance in linear scale are plotted versus gate voltage on the linear horizontal axis Maximum transconductance value Gmmax an...

Page 106: ...tep Sweep step voltage for Gate terminal Drain SMU connected to Drain terminal constant voltage output Vd Drain voltage Subs SMU connected to Substrate constant voltage output Vsubs Substrate voltage Source SMU connected to Source terminal constant voltage output Extended Test Parameters Vs Source voltage IgLimit Gate current compliance IsubsLimit Substrate current compliance HoldTime Hold time De...

Page 107: ...tage for Gate terminal VgStep Sweep step voltage for Gate terminal Drain SMU connected to Drain terminal constant voltage output Vd Drain voltage Subs SMU connected to Substrate constant voltage output Vsubs Substrate voltage Source SMU connected to Source terminal constant voltage output Extended Test Parameters Vs Source voltage IgLimit Gate current compliance IsubsLimit Substrate current compli...

Page 108: ...nt Idrain LINEAR Y2 axis Transconductance gm LINEAR Y3 axis Drain current Idrain LOG Parameters Display Area Threshold voltage Vth Maximum gm value gmMax Auto Analysis Line1 Tangent line for Y1 at gm gmMax Agilent EasyEXPERT Application Library Reference Edition 8 2 46 ...

Page 109: ...U High ASU 2 connections for Id Vg Output Source and Substrate SMU HRSMU AUX MFCMU High Connection wire must be connected between the CMU Return terminals of ASUs Setting of ASU I O Path ASU tab Configuration window AUX Device Parameters Polarity Nch CMU SMU forces the specified value or Pch CMU SMU forces the negative specified value Lg Gate length Wg Gate width Temp Temperature Test Parameters G...

Page 110: ...e Vgate LINEAR Y1 axis Gate capacitance parallel capacitance Cp LINEAR Y2 axis Conductance G LINEAR Cgg Vg List Display Gate voltage Vgate Parallel capacitance Cp Conductance G Series capacitance Cs Series resistance Rs Parallel resistance Rp Dissipation factor D Reactance X Impedance Z Phase Theta Id Vg Measurement Parameters Drain current Idrain Id Vg User Function gm delta Idrain delta Vgate gm...

Page 111: ...splay Gate current Igate Id Vg Parameters Display Area Maximum gm value gmMax Threshold voltage Vth Id Vg Auto Analysis Line1 Tangent line for Y1 at gm gmMax Agilent EasyEXPERT Application Library Reference Edition 8 2 49 ...

Page 112: ...d Vg Output1 Source and Substrate Output2 Gate Connection wire must be connected between the GSWU and the DUT interface High Low guard lines for the capacitance measurements Device Parameters Polarity Nch CMU SMU forces the specified value or Pch CMU SMU forces the negative specified value Lg Gate length Wg Gate width Temp Temperature Test Parameters GateAC CMU connected to Gate terminal CV sweep ...

Page 113: ...axis Gate capacitance parallel capacitance Cp LINEAR Y2 axis Conductance G LINEAR Cgg Vg List Display Gate voltage Vgate Parallel capacitance Cp Conductance G Series capacitance Cs Series resistance Rs Parallel resistance Rp Dissipation factor D Reactance X Impedance Z Phase Theta Id Vg Measurement Parameters Drain current Idrain Id Vg User Function gm delta Idrain delta Vgate gmMax max gm Id Vg A...

Page 114: ...e current Igate Id Vg Parameters Display Area Maximum gm value gmMax Threshold voltage Vth Id Vg Auto Analysis Line1 Tangent line for Y1 at gm gmMax Agilent EasyEXPERT Application Library Reference Edition 8 2 52 ...

Page 115: ...e device for Lg gate length G gate D drain S source Sb substrate Lg1 lt Lg2 lt Lg3 must be satisfied Enter zero for a field with no device Device Parameters Polarity Nch SMUs force the specified value or Pch SMUs force the negative specified value Temp Temperature deg C IdMax Drain current compliance Test Parameters IntegTime Integration time GateSMU SMU connected to Gate terminal primary sweep vo...

Page 116: ...m of Vd in the theoretical formula Auto Analysis Line1 Tangent line for Y1 at gm gmMax X Y Plot X axis Gate voltage Vgate LINEAR Y1 axis Drain current Idrain LINEAR Y2 axis Transconductance gm LINEAR Y3 axis Drain current Idrain LOG List Display Gate voltage Vgate Source voltage Vsource Drain voltage Vdrain Substrate voltage Vsubs Drain current Idrain Transconductance gm Parameters Display Area Th...

Page 117: ...e device for Wg gate width G gate D drain S source Sb substrate Wg1 lt Wg2 lt Wg3 must be satisfied Enter zero for a field with no device Device Parameters Polarity Nch SMUs force the specified value or Pch SMUs force the negative specified value Temp Temperature deg C IdMax Drain current compliance Test Parameters IntegTime Integration time GateSMU SMU connected to Gate terminal primary sweep vol...

Page 118: ...rm of Vd in the theoretical formula Auto Analysis Line1 Tangent line for Y1 at gm gmMax X Y Plot X axis Gate voltage Vgate LINEAR Y1 axis Drain current Idrain LINEAR Y2 axis Transconductance gm LINEAR Y3 axis Drain current Idrain LOG List Display Gate voltage Vgate Source voltage Vsource Drain voltage Vdrain Substrate voltage Vsubs Drain current Idrain Transconductance gm Parameters Display Area T...

Page 119: ...3 Discrete ...

Page 120: ...tor Ic Vc characteristics A 01 20 3 Diode IV Fwd Diode forward bias characteristics A 01 20 4 Diode IV Rev Diode reverse bias characteristics A 01 20 5 FET Id Vd MOSFET Id Vd characteristics A 01 20 6 FET Id Vg MOSFET Id Vg characteristics A 01 20 Agilent EasyEXPERT Application Library Reference Edition 8 3 2 ...

Page 121: ...voltage output Vc Collector voltage Emitter SMU connected to Emitter terminal constant voltage output Extended Test Parameters Ve Emitter voltage HoldTime Hold time DelayTime Delay time BaseMinRng Minimum range for the base current measurement CollectorMinRng Minimum range for the collector current measurement Measurement Parameters Base current Ibase Collector current Icurrent User Function IePer...

Page 122: ...ep voltage for Collector terminal Base SMU connected to Base terminal secondary sweep voltage output IbStart Sweep start current for Base terminal IbStop Sweep stop current for Base terminal IbStep Sweep step current for Base terminal VbLimit Base voltage compliance Emitter SMU connected to Emitter terminal constant voltage output Extended Test Parameters Ve Emitter voltage HoldTime Hold time Dela...

Page 123: ... output VanodeStart Sweep start voltage for Anode terminal VanodeStop Sweep stop voltage for Anode terminal VanodeStep Sweep step voltage for Anode terminal Cathode SMU connected to Cathode terminal constant voltage output Extended Test Parameters Vcathode Cathode voltage HoldTime Hold time DelayTime Delay time AnodeMinRng Minimum range for the anode current measurement Measurement Parameters Anod...

Page 124: ...deStart Sweep start voltage for Anode terminal VanodeStop Sweep stop voltage for Anode terminal VanodeStep Sweep step voltage for Anode terminal IanodeLimit Anode current compliance Cathode SMU connected to Cathode terminal constant voltage output Extended Test Parameters Vcathode Cathode voltage HoldTime Hold time DelayTime Delay time AnodeMinRng Minimum range for the anode current measurement Me...

Page 125: ...Drain terminal VdStop Sweep stop voltage for Drain terminal VdStep Sweep step voltage for Drain terminal Gate SMU connected to Gate terminal secondary sweep voltage output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal IgLimit Gate current compliance Source SMU connected to Source terminal constant voltage outpu...

Page 126: ...p Sweep step voltage for Gate terminal IgLimit Gate current compliance Drain SMU connected to Drain terminal secondary sweep voltage output VdStart Sweep start voltage for Drain terminal VdStop Sweep stop voltage for Drain terminal VdStep Sweep step voltage for Drain terminal Source SMU connected to Source terminal constant voltage output Extended Test Parameters Vs Source voltage HoldTime Hold ti...

Page 127: ...4 GenericTest ...

Page 128: ...nericTest 1 Generic C f C f characteristics of capacitor 2 terminals A 03 00 2 Generic C t C t characteristics of capacitor 2 terminals A 03 00 Agilent EasyEXPERT Application Library Reference Edition 8 4 2 ...

Page 129: ...te measurement connect CMU High to device s Low and CMU Low to device s High Required Modules and Accessories Agilent B1520A MFCMU 1 unit Test Parameters Port1 CMU connected between capacitance Vbias DC bias voltage FreqStart Sweep start frequency FreqStop Sweep stop frequency NoOfSteps Number of measurements OscLevel Measurement signal level Single_Double Sweep direction Single Double Linear_Log ...

Page 130: ...hase Theta atan X Rs X Y Plot X axis Frequency Freq LINEAR LOG Y1 axis Parallel capacitance Cp LINEAR Y2 axis Conductance G LINEAR List Display Frequency Freq Parallel capacitance Cp Conductance G DC bias voltage Vbias Series capacitance Cs Series resistance Rs Parallel resistance Rp Dissipation factor D Reactance X Impedance Z Phase Theta DC bias monitor data DcMon AC level monitor data AcMon Agi...

Page 131: ...ect CMU High to device s Low and CMU Low to device s High Required Modules and Accessories Agilent B1520A MFCMU 1 unit Test Parameters Port1 CMU connected between capacitance Vbias Bias voltage Vbase Voltage before measurement Freq Measurement frequency OscLevel Measurement signal level IntegTime Integration time BiasHoldTime Vbias hold time BaseHoldTime Vbase hold time Interval Sampling interval ...

Page 132: ...Theta atan X Rs X Y Plot X axis Time LINEAR Y1 axis Parallel capacitance Cp LINEAR Y2 axis Conductance G LINEAR List Display Time Time Parallel capacitance Cp Conductance G Frequency Freq Series capacitance Cs Series resistance Rs Parallel resistance Rp Dissipation factor D Reactance X Impedance Z Phase Theta DC bias monitor data DcMon AC level monitor data AcMon Agilent EasyEXPERT Application Lib...

Page 133: ...5 MCSMU_IV ...

Page 134: ...ics SMU Pulse A 05 50_2013 04 10 1 2 Id Vgs MCSMU Id Vgs characteristics MCSMU Pulse A 05 50_2013 04 10 1 3 Id Vgs MCSMU 2 stage Id Vgs characteristics MCSMU Pulse A 05 50_2013 04 10 1 Agilent EasyEXPERT Application Library Reference Edition 8 5 2 ...

Page 135: ...fective only for MCSMU Source COMMON connected to source terminal 0 V voltage output Drain SMU connected to drain terminal primary sweep voltage output VdStart Sweep start voltage for drain terminal VdStop Sweep stop voltage for drain terminal VdLinearStep Sweep step voltage for drain terminal effective if Scale LINEAR IdLimit Drain current compliance DrainPulseWidth Drain pulse width PdLimit Drai...

Page 136: ... voltage Vdrain LINEAR Y axis Drain current Idrain LINEAR For Scale LOG10 LOG25 or LOG50 X axis Drain voltage Vdrain LOG Y axis Drain current Idrain LOG List Display Drain voltage Vdrain Drain current Idrain Gate voltage Vgate Parameter Display Area Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 5 4 ...

Page 137: ... width GateDelay Gate pulse delay Effective only for MCSMU Source COMMON connected to source terminal 0 V voltage output Drain SMU connected to drain terminal secondary sweep voltage output VdStart Sweep start voltage for drain terminal VdStop Sweep stop voltage for drain terminal VdPoint Sweep step point for drain terminal IdLimit Drain current compliance DrainPulseWidth Drain pulse width EnableS...

Page 138: ...point of gfs gfsMax X Y Plot X axis Gate voltage Vgate LINEAR Y1 axis Forward transconductance gfs LINEAR Y2 axis Drain current Idrain LINEAR Y3 axis Drain current Idrain LOG List Display Drain voltage Vdrain Drain current Idrain Gate voltage Vgate Forward transconductance gfs Parameter Display Area Temperature Ta Temp Maximum value of forward transconductance gfsMax Threshold voltage Vth Agilent ...

Page 139: ...ulseWidth Gate pulse width GateDelay Gate pulse delay Effective only for MCSMU GatePulseWidth2 Gate pulse width for lower current measurement GateDelay2 Gate Pulse delay for lower current measurement Effective only for MCSMU Source COMMON connected to source terminal 0 V voltage output Drain SMU connected to drain terminal secondary sweep voltage output VdStart Sweep start voltage for drain termin...

Page 140: ...n Vgate Ta Temperature Ta Temp Analysis Function gfsMax max gfs Vth L1X X intercept of Line1 Auto Analysis Line1 Tangent for Y2 data at the point of gfs gfsMax X Y Plot X axis Gate voltage Vgate LINEAR Y1 axis Forward transconductance gfs LINEAR Y2 axis Drain current Idrain LINEAR Y3 axis Drain current Idrain LOG List Display Drain voltage Vdrain Drain current Idrain Gate voltage Vgate Forward tra...

Page 141: ...6 Memory ...

Page 142: ...l Id Vg Write Id Vg A 03 10 17 NandFlash3 Retention ErasedCell NAND flash memory cell Data retention test after Erase A 03 10 18 NandFlash3 Retention WrittenCell NAND flash memory cell Data retention test after Write A 03 10 19 NandFlash3 Vth ErasingTimeDependence NAND flash memory cell erasing time dependence test A 03 10 20 NandFlash3 Vth WritingTimeDependence NAND flash memory cell writing time...

Page 143: ...6 Memory 33 NorFlash DataDisturb WrittenCell NOR flash memory cell data disturb test after Write A 03 10 Agilent EasyEXPERT Application Library Reference Edition 8 6 3 ...

Page 144: ...3 M 3 2 M 3 5 M 3 7 M 4 M 4 2 M 4 5 M 5 MHz Device Under Test Flash memory cell Connect the Control Gate to CMU High and the Floating Gate to CMU Low Connect the other terminals to the ground unit GNDU Device Parameters Lg Gate length Wg Gate width Temp Temperature M Number of cells connected in parallel M 1 for the single cell Test Parameters IntegTime Integration time FREQ Measurement frequency ...

Page 145: ... Y3 axis Conductance G LINEAR List Display Measurement frequency Freq DC bias Vcontrolgate Control Gate to Floating Gate capacitance parallel capacitance Cp Conductance G Series capacitance Cs Series resistance Rs Parallel resistance Rp Dissipation factor D Reactance X Impedance Z Phase Theta Series capacitance per cell CsPerCell Parallel capacitance per cell CpPerCell Agilent EasyEXPERT Applicati...

Page 146: ... k 500 k 1 M 1 2 M 1 5 M 2 M 2 5 M 2 7 M 3 M 3 2 M 3 5 M 3 7 M 4 M 4 2 M 4 5 M 5 MHz Device Under Test Flash memory cell Connect the Control Gate to ground unit GNDU the Floating Gate to CMU Low and the other terminals to CMU High Device Parameters Lg Gate length Wg Gate width Temp Temperature M Number of cells connected in parallel M 1 for the single cell Test Parameters IntegTime Integration tim...

Page 147: ...r D LINEAR Y3 axis Conductance G LINEAR List Display Measurement frequency Freq DC bias Vfb Floating Gate Substrate capacitance parallel capacitance Cp Conductance G Series capacitance Cs Series resistance Rs Parallel resistance Rp Dissipation factor D Reactance X Impedance Z Phase Theta Series capacitance per cell CsPerCell Parallel capacitance per cell CpPerCell Agilent EasyEXPERT Application Li...

Page 148: ... M 2 7 M 3 M 3 2 M 3 5 M 3 7 M 4 M 4 2 M 4 5 M 5 MHz Device Under Test Flash memory cell Open the Floating Gate and connect the Control Gate to CMU Low and the other terminals to CMU High Device Parameters Lg Gate length Wg Gate width Temp Temperature M Number of cells connected in parallel M 1 for the single cell Test Parameters IntegTime Integration time FREQ Measurement frequency OscLevel Measu...

Page 149: ...nductance G LINEAR List Display Measurement frequency Freq DC bias Vcs Gate capacitance parallel capacitance Cp Conductance G Series capacitance Cs Series resistance Rs Parallel resistance Rp Dissipation factor D Reactance X Impedance Z Phase Theta Series capacitance per cell CsPerCell Parallel capacitance per cell CpPerCell Agilent EasyEXPERT Application Library Reference Edition 8 6 9 ...

Page 150: ...t Parameters area Set B2200A B2201A input ports connected to the output channel of a gate pulse and drain pulse in these fields Set the output channel number of B2200A B2201A connected to each terminal of a measured device properly in the Tr Gate Tr Drain Tr Source Tr Subs field is an integer from 1 to 3 of the Test Parameters area Device Parameters Lg Gate length Wg Gate width Temp Temperature de...

Page 151: ...urement Parameters Measurement Paramaters for Vth Acquisition after Write Operation Drain current Idrain Measurement Parameters for Vth Acquisition after Erase Operation Drain current Idrain Analysis Function Analysis Function for Vth Acquisition after Write Operation Vth Id L1X X intercept of Line1 Analysis Function for Vth Acquisition after Erase Operation Vth Id L1X X intercept of Line1 Auto An...

Page 152: ...rase operation on device 2 Dev2_VthErasedList LINEAR Y6 axis Vth value after erase operation on device 3 Dev3_VthErasedList LINEAR Test Output List Display Number of write erase cycles CycleList Vth value after write operation on device 1 Dev1_VthWrittenList Vth value after write operation on device 2 Dev2_VthWrittenList Vth value after write operation on device 3 Dev3_VthWrittenList Vth value aft...

Page 153: ...pliance Test Parameters Gate SMU connected to Gate terminal primary sweep voltage output Drain SMU connected to Drain terminal constant voltage output Source SMU connected to Source and Substrate terminals constant voltage output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Vd Drain voltage Id Vth Drain curren...

Page 154: ...value NoOfPulse Number of output pulses Test Output X Y Graph X axis Number of write erase operation LOG Y1 axis Threshold voltage after write VthWrittenList LINEAR Y2 axis Threshold voltage after erase VthErasedList LINEAR Test Setup Details See NandFlash2 IV Write IV and NandFlash2 IV Erase IV Agilent EasyEXPERT Application Library Reference Edition 8 6 14 ...

Page 155: ...ource and Substrate SMU HRSMU AUX PGU1 Setting of ASU I O Path ASU tab Configuration window AUX PGU1 is connected to keep the setup for the data write operation Device Parameters Lg Gate length Wg Gate width Temp Temperature IdMax Drain current compliance Test Parameters IntegTime Integration time Gate SMU connected to Gate terminal primary sweep voltage output Drain SMU connected to Drain termina...

Page 156: ...ent Idrain defined in Id Vg_Initial and Id Vg_Erased setup User Function IdrainPerWg Idrain Wg defined in Id Vg_Initial and Id Vg_Erased setup Analysis Function VthBefore L1X X intercept of Line1 defined in Id Vg_Initial setup VthAfter L1X X intercept of Line1 defined in Id Vg_Erased setup Auto Analysis Line1 Vertical line for Y1 at Idrain Id Vth Test Output X Y Graph X axis Gate voltage VgateList...

Page 157: ...O Path ASU tab Configuration window AUX Device Parameters Lg Gate length Wg Gate width Temp Temperature IdMax Drain current compliance Test Parameters IntegTime Integration time Gate SMU connected to Gate terminal primary sweep voltage output Drain SMU connected to Drain terminal constant voltage output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgSte...

Page 158: ...itten setup User Function IdrainPerWg Idrain Wg defined in Id Vg_Initial and Id Vg_Written setup Analysis Function VthBefore L1X X intercept of Line1 defined in Id Vg_Initial setup VthAfter L1X X intercept of Line1 defined in Id Vg_Written setup Auto Analysis Line1 Vertical line for Y1 at Idrain Id Vth Test Output X Y Graph X axis Gate voltage VgateList LINEAR Y1 axis Drain current before Write op...

Page 159: ...Under Test NAND type flash memory cell Connect the Source and Substrate to the ASU1 Output and the Drain to the ASU2 Output Open the Floating Gate and connect the other terminals to the PGU2 output terminal Required Modules and Accessories Agilent 81110A pulse generator 2 output PGU1 and PGU2 1 unit HRSMU ASU 2 sets ASU1 and ASU2 ASU1 connections Output Source and Substrate SMU HRSMU AUX PGU1 ASU2...

Page 160: ...onds Extended Test Parameters IgLimit Gate current compliance HoldTime Hold time DelayTime Delay time BaseValue Erase pulse base value PgAdd GPIB address of pulse generator NoOfPulse Number of output pulses for the erase operation Test Output X Y Graph X axis Time TimeList LOG Y1 axis Threshold voltage VthList LINEAR Test Setup Details See NandFlash2 IV Erase IV Agilent EasyEXPERT Application Libr...

Page 161: ...le TotalRetentionTime value is 10 to 10000 seconds Device Under Test NAND type flash memory cell Connect the Control Gate to the ASU Output and the Drain to a SMU Open the Floating Gate and connect the other terminals to a SMU Required Modules and Accessories Agilent 81110A pulse generator 2 output PGU1 and PGU2 1 unit HRSMU ASU 1 set ASU connections Output Control Gate SMU HRSMU AUX PGU1 Setting ...

Page 162: ...gLimit Gate current compliance HoldTime Hold time DelayTime Delay time PgAdd GPIB address of pulse generator BaseValue Write pulse base value NoOfPulse Number of output pulses for the write operation Test Output X Y Graph X axis Time TimeList LOG Y1 axis Threshold voltage VthList LINEAR Test Setup Details See NandFlash2 IV Write IV Agilent EasyEXPERT Application Library Reference Edition 8 6 22 ...

Page 163: ...Device Parameters Lg Gate length Wg Gate width Temp Temperature IdMax Drain current compliance Test Parameters Gate SMU connected to Gate terminal primary sweep voltage output Drain SMU connected to Drain terminal constant voltage output Source SMU connected to Source terminal constant voltage output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep S...

Page 164: ... Parameters Drain current Idrain Analysis Function Vth L1X X intercept of Line1 Auto Analysis Line1 Vertical line for Y1 at Idrain Id Vth Test Output X Y Graph X axis Accumulated erasing pulse width EraseTimeList LOG Y1 axis Threshold voltage Vth LINEAR Agilent EasyEXPERT Application Library Reference Edition 8 6 24 ...

Page 165: ...re IdMax Drain current compliance Test Parameters Gate SMU connected to Gate terminal primary sweep voltage output Drain SMU connected to Drain terminal constant voltage output Source SMU connected to Source terminal constant voltage output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Vd Drain voltage Vs Sourc...

Page 166: ...urrent Idrain Analysis Function Vth L1X X intercept of Line1 Auto Analysis Line1 Vertical line for Y1 at Idrain Id Vth Test Output X Y Graph X axis Accumulated writing pulse width WriteTimeList LOG Y1 axis Threshold voltage Vth LINEAR Agilent EasyEXPERT Application Library Reference Edition 8 6 26 ...

Page 167: ... Configuration window AUX Device Parameters Lg Gate length Wg Gate width Temp Temperature IdMax Drain current compliance Test Parameters Gate SMU connected to Gate terminal primary sweep voltage output Drain SMU connected to Drain terminal constant voltage output Source SMU connected to Source terminal constant voltage output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage ...

Page 168: ...ber of output pulses for the erase operation Measurement Parameters Drain current Idrain Analysis Function Vth L1X X intercept of Line1 Auto Analysis Line1 Vertical line for Y1 at Idrain Id Vth Test Output X Y Graph X axis Accumulated stress time StressTimeList LOG Y1 axis Threshold voltage Vth LINEAR Agilent EasyEXPERT Application Library Reference Edition 8 6 28 ...

Page 169: ...liance Test Parameters Gate SMU connected to Gate terminal primary sweep voltage output Drain SMU connected to Drain terminal constant voltage output Source SMU connected to Source terminal constant voltage output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal VgStress Stress voltage for Gate terminal Vd Drain v...

Page 170: ...peration Measurement Parameters Drain current Idrain Analysis Function Vth L1X X intercept of Line1 Auto Analysis Line1 Vertical line for Y1 at Idrain Id Vth Test Output X Y Graph X axis Accumulated stress time StressTimeList LOG Y1 axis Threshold voltage Vth LINEAR Agilent EasyEXPERT Application Library Reference Edition 8 6 30 ...

Page 171: ...rce and Substrate via Selector VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Vd Drain voltage Id Vth Drain current to decide the Vth IntegTime Integration time TotalWriteAndEraseCycles Total number of write erase operation WritePulsePeriod Write pulse period WritePulseDelay Write pulse delay WritePulseWidth Wri...

Page 172: ...urrent Idrain Test Output X Y Graph X axis Number of write erase cycles CycleList LOG Y1 axis Threshold voltage after write VthWrittenList LINEAR Y2 axis Threshold voltage after erase VthErasedList LINEAR Test Output List Display Number of write erase cycles CycleList Threshold voltage after write VthWrittenList Threshold voltage after erase VthErasedList Test Setup Details See NandFlash3 IV Write...

Page 173: ...nnected to Drain terminal constant voltage output Source SMU connected to Source and Substrate terminals constant voltage output PSource SPGU channel connected to Drain and Source via Selector VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Vd Drain voltage Id Vth Drain current to decide the Vth IntegTime Integra...

Page 174: ...tage Vdrain Drain current Idrain Test Output X Y Graph X axis Gate voltage VgateList LINEAR Y1 axis Drain current before Erase operation IdInitialList LOG Y2 axis Drain current after Erase operation IdErasedList LOG Test Output List Display Gate voltage VgateList Drain current before Erase operation IdInitialList Drain current after Erase operation IdErasedList Test Output Parameters Threshold vol...

Page 175: ...connected to Drain terminal constant voltage output Source SMU connected to Source and Substrate terminals constant voltage output Pgate SPGU channel connected to Gate terminal via Selector VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Vd Drain voltage Id Vth Drain current to decide the Vth IntegTime Integratio...

Page 176: ...age Vdrain Drain current Idrain Test Output X Y Graph X axis Gate voltage VgateList LINEAR Y1 axis Drain current before Write operation IdInitialList LOG Y2 axis Drain current after Write operation IdWrittenList LOG Test Output List Display Gate voltage VgateList Drain current before Write operation IdInitialList Drain current after Write operation IdWrittenList Test Output Parameters Threshold vo...

Page 177: ...e output Psource SPGU channel connected to Drain Source and Substrate via Selector VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Vd Drain voltage Id Vth Drain current to decide the Vth IntegTime Integration time PulsePeriod Erase pulse period PulseDelay Erase pulse delay PulseWidth Erase pulse width Verase Eras...

Page 178: ...INEAR Y1 axis Drain current Idrain LINEAR Y2 axis Drain current Idrain LOG List Display Gate voltage Vgate Drain voltage Vdrain Drain current Idrain Test Output X Y Graph X axis Time TimeList LOG Y1 axis Threshold voltage VthList LINEAR Test Output List Display Time TimeList Threshold voltage VthList Test Setup Details See NandFlash3 IV Erase IV Agilent EasyEXPERT Application Library Reference Edi...

Page 179: ...t voltage output Pgate SPGU channel connected to Gate terminal via Selector VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Vd Drain voltage Id Vth Drain current to decide the Vth IntegTime Integration time PulsePeriod Write pulse period PulseDelay Write pulse delay PulseWidth Write pulse width Vwrite Write pulse...

Page 180: ...INEAR Y1 axis Drain current Idrain LINEAR Y2 axis Drain current Idrain LOG List Display Gate voltage Vgate Drain voltage Vdrain Drain current Idrain Test Output X Y Graph X axis Time TimeList LOG Y1 axis Threshold voltage VthList LINEAR Test Output List Display Time TimeList Threshold voltage VthList Test Setup Details See NandFlash3 IV Write IV Agilent EasyEXPERT Application Library Reference Edi...

Page 181: ...Selector 16440A 16445A 1 set or HRSMU ASU 2 set Device Parameters Lg Gate length Wg Gate width Temp Temperature IdMax Drain current compliance Test Parameters Gate SMU connected to Gate terminal primary sweep voltage output Drain SMU connected to Drain terminal constant voltage output Source SMU connected to Source terminal constant voltage output Psource SPGU channel connected to Drain Source and...

Page 182: ...tage Vgate LINEAR Y1 axis Drain current Idrain LINEAR Y2 axis Drain current Idrain LOG List Display Gate voltage Vgate Drain voltage Vdrain Drain current Idrain Test Output X Y Graph X axis Accumulated erasing pulse width EraseTimeList LOG Y1 axis Threshold voltage VthList LINEAR Test Output List Display Accumulated erasing pulse width EraseTimeList Threshold voltage VthList Agilent EasyEXPERT App...

Page 183: ...lent B1525A SPGU 1 unit Selector 16440A 16445A 1 set or HRSMU ASU 1 set Device Parameters Lg Gate length Wg Gate width Temp Temperature IdMax Drain current compliance Test Parameters Gate SMU connected to Gate terminal primary sweep voltage output Drain SMU connected to Drain terminal constant voltage output Source SMU connected to Source terminal constant voltage output Pgate SPGU channel connect...

Page 184: ...t X axis Gate voltage Vgate LINEAR Y1 axis Drain current Idrain LINEAR Y2 axis Drain current Idrain LOG List Display Gate voltage Vgate Drain voltage Vdrain Drain current Idrain Test Output X Y Graph X axis Accumulated writing pulse width WriteTimeList LOG Y1 axis Threshold voltage VthList LINEAR Test Output List Display Accumulated writing pulse width WriteTimeList Threshold voltage VthList Agile...

Page 185: ...ia Selector Psource SPGU channel connected to Drain Source and Substrate via Selector VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal VgStress Stress voltage for Gate terminal Vd Drain voltage Id Vth Drain current to decide the Vth IntegTime Integration time TotalStressTime Total accumulated stress time CheckNoOf...

Page 186: ...Display Gate voltage Vgate Drain voltage Vdrain Drain current Idrain Test Contents Auto Analysis Line1 Vertical line for Y1 at Idrain Id Vth Test Output X Y Graph X axis Accumulated erasing pulse width EraseTimeList LOG Y1 axis Threshold voltage VthList LINEAR Test Output List Display Accumulated erasing pulse width EraseTimeList Threshold voltage VthList Agilent EasyEXPERT Application Library Ref...

Page 187: ...l connected to Gate terminal via Selector VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal VgStress Stress voltage for Gate terminal Vd Drain voltage Id Vth Drain current to decide the Vth IntegTime Integration time TotalStressTime Total accumulated stress time CheckNoOfTimes Number of Vth measurement operation Pu...

Page 188: ...t Display Gate voltage Vgate Drain voltage Vdrain Drain current Idrain Test Contents Auto Analysis Line1 Vertical line for Y1 at Idrain Id Vth Test Output X Y Graph X axis Accumulated writing pulse width WriteTimeList LOG Y1 axis Threshold voltage Vth LINEAR Test Output List Display Accumulated writing pulse width WriteTimeList Threshold voltage VthList Agilent EasyEXPERT Application Library Refer...

Page 189: ...ce terminal via Selector VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Vd Drain voltage Id Vth Drain current to decide the Vth IntegTime Integration time TotalWriteAndEraseCycles Total number of write erase operation WritePeriod Write pulse period WriteGateDelay Gate write pulse delay WriteGateWidth Gate write ...

Page 190: ...nt Parameters Drain current Idrain Analysis Function Vth Id L1X X intercept of Line1 X Y Plot X axis Gate voltage Vgate LINEAR Y1 axis Drain current Idrain LOG List Display Gate voltage Vgate Drain current Idrain Test Contents Auto Analysis Line1 Vertical line for Y1 at Idrain Id Vth Test Output X Y Graph X axis Number of write erase cycles CycleList LOG Y1 axis Threshold voltage after write VthWr...

Page 191: ...Subs SMU connected to Substrate terminal constant voltage output Pgate SPGU channel connected to Gate terminal via Selector Psource SPGU channel connected to Source terminal via Selector VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Vd Drain voltage Id Vth Drain current to decide the Vth IntegTime Integration t...

Page 192: ...e voltage Vgate Drain voltage Vdrain Drain current Idrain Test Contents Auto Analysis Line1 Vertical line for Y1 at Idrain Id Vth Test Output X Y Graph X axis Gate voltage VgateList LINEAR Y1 axis Drain current before Erase operation IdInitialList LOG Y2 axis Drain current after Erase operation IdErasedList LOG Test Output List Display Gate voltage VgateList Drain current before Erase operation Id...

Page 193: ...utput Subs SMU connected to Substrate terminal constant voltage output Pgate SPGU channel connected to Gate terminal via Selector Pdrain SPGU channel connected to Drain terminal via Selector VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Vd Drain voltage Id Vth Drain current to decide the Vth IntegTime Integrati...

Page 194: ... voltage Vgate Drain voltage Vdrain Drain current Idrain Test Contents Auto Analysis Line1 Vertical line for Y1 at Idrain Id Vth Test Output X Y Graph X axis Gate voltage VgateList LINEAR Y1 axis Drain current before Write operation IdInitialList LOG Y2 axis Drain current after Write operation IdWrittenList LOG Test Output List Display Gate voltage VgateList Drain current before Write operation Id...

Page 195: ...nected to Gate terminal via Selector Psource SPGU channel connected to Source terminal via Selector VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Vd Drain voltage Id Vth Drain current to decide the Vth IntegTime Integration time PulsePeriod Erase pulse period GateDelay Gate erase pulse delay GateWidth Gate eras...

Page 196: ...ntercept of Line1 X Y Plot X axis Gate voltage Vgate LINEAR Y1 axis Drain current Idrain LINEAR Y2 axis Drain current Idrain LOG List Display Gate voltage Vgate Drain voltage Vdrain Drain current Idrain Test Contents Auto Analysis Line1 Vertical line for Y1 at Idrain Id Vth Test Output X Y Graph X axis Time TimeList LOG Y1 axis Threshold voltage VthList LINEAR Test Output List Display Time TimeLis...

Page 197: ...el connected to Gate terminal via Selector Pdrain SPGU channel connected to Drain terminal via Selector VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Vd Drain voltage Id Vth Drain current to decide the Vth IntegTime Integration time PulsePeriod Write pulse period GateDelay Gate write pulse delay GateWidth Gate ...

Page 198: ...ntercept of Line1 X Y Plot X axis Gate voltage Vgate LINEAR Y1 axis Drain current Idrain LINEAR Y2 axis Drain current Idrain LOG List Display Gate voltage Vgate Drain voltage Vdrain Drain current Idrain Test Contents Auto Analysis Line1 Vertical line for Y1 at Idrain Id Vth Test Output X Y Graph X axis Time TimeList LOG Y1 axis Threshold voltage VthList LINEAR Test Output List Display Time TimeLis...

Page 199: ...Drain current compliance Test Parameters Gate SMU connected to Gate terminal primary sweep voltage output Drain SMU connected to Drain terminal constant voltage output Source SMU connected to Source terminal constant voltage output Subs SMU connected to Substrate terminal constant voltage output Pgate SPGU channel connected to Gate terminal via Selector Psource SPGU channel connected to Source ter...

Page 200: ...ot X axis Gate voltage Vgate LINEAR Y1 axis Drain current Idrain LINEAR Y2 axis Drain current Idrain LOG List Display Gate voltage Vgate Drain voltage Vdrain Drain current Idrain Test Contents Auto Analysis Line1 Vertical line for Y1 at Idrain Id Vth Test Output X Y Graph X axis Accumulated erasing pulse width EraseTimeList LOG Y1 axis Threshold voltage VthList LINEAR Test Output List Display Accu...

Page 201: ...dMax Drain current compliance Test Parameters Gate SMU connected to Gate terminal primary sweep voltage output Drain SMU connected to Drain terminal constant voltage output Source SMU connected to Source terminal constant voltage output Subs SMU connected to Substrate terminal constant voltage output Pgate SPGU channel connected to Gate terminal via Selector Pdrain SPGU channel connected to Drain ...

Page 202: ...ot X axis Gate voltage Vgate LINEAR Y1 axis Drain current Idrain LINEAR Y2 axis Drain current Idrain LOG List Display Gate voltage Vgate Drain voltage Vdrain Drain current Idrain Test Contents Auto Analysis Line1 Vertical line for Y1 at Idrain Id Vth Test Output X Y Graph X axis Accumulated writing pulse width WriteTimeList LOG Y1 axis Threshold voltage VthList LINEAR Test Output List Display Accu...

Page 203: ...ected to Gate terminal via Selector Psource SPGU channel connected to Source terminal via Selector VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal VgStress Stress voltage for Gate terminal Vd Drain voltage Id Vth Drain current to decide the Vth IntegTime Integration time PulsePeriod Erase pulse period GateDelay G...

Page 204: ...1 X Y Plot X axis Gate voltage Vgate LINEAR Y1 axis Drain current Idrain LINEAR Y2 axis Drain current Idrain LOG List Display Gate voltage Vgate Drain voltage Vdrain Drain current Idrain Test Contents Auto Analysis Line1 Vertical line for Y1 at Idrain Id Vth Test Output X Y Graph X axis Accumulated erasing pulse width EraseTimeList LOG Y1 axis Threshold voltage VthList LINEAR Test Output List Disp...

Page 205: ...el connected to Gate terminal via Selector Pdrain SPGU channel connected to Drain terminal via Selector VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal VgStress Stress voltage for Gate terminal Vd Drain voltage Id Vth Drain current to decide the Vth IntegTime Integration time PulsePeriod Write pulse period GateDe...

Page 206: ...ne1 X Y Plot X axis Gate voltage Vgate LINEAR Y1 axis Drain current Idrain LINEAR Y2 axis Drain current Idrain LOG List Display Gate voltage Vgate Drain voltage Vdrain Drain current Idrain Test Contents Auto Analysis Line1 Vertical line for Y1 at Idrain Id Vth Test Output X Y Graph X axis Accumulated writing pulse width WriteTimeList LOG Y1 axis Threshold voltage Vth LINEAR Test Output List Displa...

Page 207: ...ected to Source terminal via Selector Pdrain SPGU channel connected to Drain terminal via Selector VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal VdStress Stress voltage for Drain terminal Vd Drain voltage Id Vth Drain current to decide the Vth IntegTime Integration time PulsePeriod Erase pulse period GateDelay ...

Page 208: ...nalysis Function Vth Id L1X X intercept of Line1 X Y Plot X axis Gate voltage Vgate LINEAR Y1 axis Drain current Idrain LINEAR Y2 axis Drain current Idrain LOG List Display Gate voltage Vgate Drain voltage Vdrain Drain current Idrain Test Contents Auto Analysis Line1 Vertical line for Y1 at Idrain Id Vth Test Output X Y Graph X axis Accumulated erasing pulse width EraseTimeList LOG Y1 axis Thresho...

Page 209: ...l connected to Gate terminal via Selector Pdrain SPGU channel connected to Drain terminal via Selector VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal VdStress Stress voltage for Drain terminal Vd Drain voltage Id Vth Drain current to decide the Vth IntegTime Integration time PulsePeriod Write pulse period GateDe...

Page 210: ...ne1 X Y Plot X axis Gate voltage Vgate LINEAR Y1 axis Drain current Idrain LINEAR Y2 axis Drain current Idrain LOG List Display Gate voltage Vgate Drain voltage Vdrain Drain current Idrain Test Contents Auto Analysis Line1 Vertical line for Y1 at Idrain Id Vth Test Output X Y Graph X axis Accumulated writing pulse width WriteTimeList LOG Y1 axis Threshold voltage Vth LINEAR Test Output List Displa...

Page 211: ...7 MixedSignal ...

Page 212: ... 20 9 Ic Vc Ib Mismatch Ic Vce characteristics mismatch Ib sweep A 01 20 10 Ic Vc Ib Mismatch 3 Ic Vce characteristics mismatch Ib sweep 3 terminal A 01 20 11 Ic Vc Vb Mismatch Ic Vce characteristics mismatch Vb sweep A 01 20 12 Ic Vc Vb Mismatch 3 Ic Vce characteristics mismatch Vb sweep 3 terminal A 01 20 13 Id Vd Mismatch Id Vd characteristics mismatch A 01 20 14 Id Vd Mismatch 3 Id Vd characte...

Page 213: ... Advanced Options for CMU Calibration window Default frequencies 1 k 2 k 5 k 10 k 20 k 50 k 100 k 200 k 500 k 1 M 1 2 M 1 5 M 2 M 2 5 M 2 7 M 3 M 3 2 M 3 5 M 3 7 M 4 M 4 2 M 4 5 M 5 MHz Device Under Test Bipolar junction transistor 4 terminals 2 ea Connect Base to the CMU Low Collector to the CMU High and the other terminals to the GNDU Device Parameters Polarity NPN CMU forces the specified value...

Page 214: ...LINEAR List Display To specify the device A or B is added to the actual variable names Collector Emitter voltage Vceval Parallel capacitance Cpval Conductance Gval Series capacitance Csval Series resistance Rsval Parallel resistance Rpval Dissipation factor Dval Reactance Xval Impedance Zval Phase Thetaval Test Output X Y Graph X axis Collector Emitter voltage VceList LINEAR Y1 axis Collector capa...

Page 215: ...1 Port2 sweep step current Port3 SMU connected to device A B low terminal constant voltage output Subs SMU connected to Substrate constant voltage output VM1 SMU connected to device A high terminal constant current output VM2 SMU connected to device A low terminal constant current output VM3 SMU connected to device B high terminal constant current output VM4 SMU connected to device B low terminal ...

Page 216: ... Y Plot X axis Device input current Iport1 LINEAR Y1 axis Device A voltage between terminals DeltaV_A LINEAR Y2 axis Device B voltage between terminals DeltaV_B LINEAR Y3 axis Device A resistance R_A LINEAR Y4 axis Device A resistance R_B LINEAR Y5 axis Rate of change between R_A and R_B Delta_R LINEAR Agilent EasyEXPERT Application Library Reference Edition 8 7 6 ...

Page 217: ...synchronous sweep voltage output VanodeStart Sweep start voltage for Anode terminal VanodeStop Sweep stop voltage for Anode terminal VanodeStep Sweep step voltage for Anode terminal Cathode SMU connected to Cathode terminal constant voltage output Extended Test Parameters Vcathode Cathode voltage HoldTime Hold time DelayTime Delay time AnodeMinRng Minimum range for the anode current measurement Me...

Page 218: ...ut VanodeStart Sweep start voltage for Anode terminal VanodeStop Sweep stop voltage for Anode terminal VanodeStep Sweep step voltage for Anode terminal IanodeLimit Anode current compliance Cathode SMU connected to Cathode terminal constant voltage output Extended Test Parameters Vcathode Cathode voltage HoldTime Hold time DelayTime Delay time AnodeMinRng Minimum range for the anode current measure...

Page 219: ...e terminal VbStop Sweep stop voltage for Base terminal VbStep Sweep step voltage for Base terminal Emitter SMU connected to Emitter terminal constant voltage output CollectorA SMU connected to Device A Collector terminal constant voltage output CollectorB SMU connected to Device B Collector terminal constant voltage output Vc Collector voltage Subs SMU connected to Substrate constant voltage outpu...

Page 220: ...G Y2 axis Base current IbaseA LOG Y3 axis Collector current IcollectorB LOG Y4 axis Base current IbaseB LOG Y5 axis Current amplification factor hfe_A LINEAR Y6 axis Current amplification factor hfe_B LINEAR Y7 axis Differences of hfe Delta_hfe LINEAR Agilent EasyEXPERT Application Library Reference Edition 8 7 10 ...

Page 221: ...weep voltage output VbStart Sweep start voltage for Base terminal VbStop Sweep stop voltage for Base terminal VbStep Sweep step voltage for Base terminal Emitter SMU connected to Emitter terminal constant voltage output CollectorA SMU connected to Device A Collector terminal constant voltage output CollectorB SMU connected to Device B Collector terminal constant voltage output Vc Collector voltage...

Page 222: ...Base current IbaseA LOG Y3 axis Collector current IcollectorB LOG Y4 axis Base current IbaseB LOG Y5 axis Current amplification factor hfe_A LINEAR Y6 axis Current amplification factor hfe_B LINEAR Y7 axis Differences of hfe Delta_hfe LINEAR Agilent EasyEXPERT Application Library Reference Edition 8 7 12 ...

Page 223: ...ltage for Emitter terminal BaseA SMU connected to Device A Base terminal constant voltage output BaseB SMU connected to Device B Base terminal constant voltage output CollectorA SMU connected to Device A Collector terminal constant voltage output CollectorB SMU connected to Device B Collector terminal constant voltage output Vc Collector voltage Subs SMU connected to Substrate constant voltage out...

Page 224: ...OG Y2 axis Base current IbaseA LOG Y3 axis Collector current IcollectorB LOG Y4 axis Base current IbaseB LOG Y5 axis Current amplification factor hfe_A LINEAR Y6 axis Current amplification factor hfe_B LINEAR Y7 axis Differences of hfe Delta_hfe LINEAR Agilent EasyEXPERT Application Library Reference Edition 8 7 14 ...

Page 225: ...stop voltage for Emitter terminal VeStep Sweep step voltage for Emitter terminal BaseA SMU connected to Device A Base terminal constant voltage output BaseB SMU connected to Device B Base terminal constant voltage output CollectorA SMU connected to Device A Collector terminal constant voltage output CollectorB SMU connected to Device B Collector terminal constant voltage output Extended Test Param...

Page 226: ...Base current IbaseA LOG Y3 axis Collector current IcollectorB LOG Y4 axis Base current IbaseB LOG Y5 axis Current amplification factor hfe_A LINEAR Y6 axis Current amplification factor hfe_B LINEAR Y7 axis Differences of hfe Delta_hfe LINEAR Agilent EasyEXPERT Application Library Reference Edition 8 7 16 ...

Page 227: ...VcStart Sweep start voltage for Collector terminal VcStop Sweep stop voltage for Collector terminal VcStep Sweep step voltage for Collector terminal BaseA SMU connected to Device A Base terminal secondary sweep current output BaseB SMU connected to Device B Base terminal secondary sweep current output IbStart Sweep start current for Base terminal IbStop Sweep stop current for Base terminal IbStep ...

Page 228: ...Collector voltage VcollectorB LINEAR Y1 axis Collector current IcollectorB LINEAR Test Output X Y Graph X axis Collector Emitter voltage Vce LINEAR Y1 axis Collector current Icollector_A LINEAR Y2 axis Collector current Icollector_B LINEAR Y3 axis Differences between Ic Delta_Ic LINEAR Agilent EasyEXPERT Application Library Reference Edition 8 7 18 ...

Page 229: ...nected to Device B Collector terminal primary sweep voltage output VcStart Sweep start voltage for Collector terminal VcStop Sweep stop voltage for Collector terminal VcStep Sweep step voltage for Collector terminal BaseA SMU connected to Device A Base terminal secondary sweep current output BaseB SMU connected to Device B Base terminal secondary sweep current output IbStart Sweep start current fo...

Page 230: ...Collector voltage VcollectorB LINEAR Y1 axis Collector current IcollectorB LINEAR Test Output X Y Graph X axis Collector Emitter voltage Vce LINEAR Y1 axis Collector current Icollector_A LINEAR Y2 axis Collector current Icollector_B LINEAR Y3 axis Differences between Ic Delta_Ic LINEAR Agilent EasyEXPERT Application Library Reference Edition 8 7 20 ...

Page 231: ...VcStart Sweep start voltage for Collector terminal VcStop Sweep stop voltage for Collector terminal VcStep Sweep step voltage for Collector terminal BaseA SMU connected to Device A Base terminal secondary sweep voltage output BaseB SMU connected to Device B Base terminal secondary sweep voltage output VbStart Sweep start voltage for Base terminal VbStop Sweep stop voltage for Base terminal VbStep ...

Page 232: ... IbaseB Device B X Y Plot X axis Collector voltage VcollectorB LINEAR Y1 axis Collector current IcollectorB LINEAR Test Output X Y Graph X axis Collector Emitter voltage Vce LINEAR Y1 axis Collector current Icollector_A LINEAR Y2 axis Collector current Icollector_B LINEAR Y3 axis Differences between Ic Delta_Ic LINEAR Agilent EasyEXPERT Application Library Reference Edition 8 7 22 ...

Page 233: ...ector terminal primary sweep voltage output VcStart Sweep start voltage for Collector terminal VcStop Sweep stop voltage for Collector terminal VcStep Sweep step voltage for Collector terminal BaseA SMU connected to Device A Base terminal secondary sweep voltage output BaseB SMU connected to Device B Base terminal secondary sweep voltage output VbStart Sweep start voltage for Base terminal VbStop ...

Page 234: ...ot X axis Collector voltage VcollectorB LINEAR Y1 axis Collector current IcollectorB LINEAR Test Output X Y Graph X axis Collector Emitter voltage Vce LINEAR Y1 axis Collector current Icollector_A LINEAR Y2 axis Collector current Icollector_B LINEAR Y3 axis Differences between Ic Delta_Ic LINEAR Agilent EasyEXPERT Application Library Reference Edition 8 7 24 ...

Page 235: ...nected to Gate terminal secondary sweep voltage output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal IgLimit Gate current compliance Subs SMU connected to Substrate constant voltage output Vsubs Substrate voltage IsubsLimit Substrate current compliance Source SMU connected to Source terminal constant voltage ou...

Page 236: ...EAR Y2 axis Device B Drain current IdrainB LINEAR Y3 axis Difference of Drain current Delta_Ids LINEAR List Display Drain voltage VdrainA Gate voltage Vgate Device A Drain current IdrainA Device B Drain current IdrainB Differences of Drain current Delta_Ids Substrate current Isubs Source current Isource Agilent EasyEXPERT Application Library Reference Edition 8 7 26 ...

Page 237: ...rt voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal IgLimit Gate current compliance Source SMU connected to Source terminal constant voltage output VdStart Sweep start voltage for Drain terminal VdStop Sweep stop voltage for Drain terminal VdStep Sweep step voltage for Drain terminal Extended Test Parameters Vs Source voltage HoldTim...

Page 238: ...nt IdrainB LINEAR Y3 axis Difference of Drain current Delta_Ids LINEAR List Display Drain voltage VdrainA Gate voltage Vgate Device A Drain current IdrainA Device B Drain current IdrainB Differences of Drain current Delta_Ids Agilent EasyEXPERT Application Library Reference Edition 8 7 28 ...

Page 239: ...rainB SMU connected to the device B Drain terminal constant voltage output Vd Drain voltage Subs SMU connected to Substrate secondary sweep voltage output VsubsStart Sweep start voltage for Substrate terminal VsubsStop Sweep stop voltage for Substrate terminal VsubsStep Sweep step voltage for Substrate terminal IsubsLimit Substrate current compliance Source SMU connected to Source terminal constan...

Page 240: ...ent IdrainB LINEAR Y3 axis Difference of Drain current Delta_Id LINEAR List Display Gate voltage Vgate Drain voltage VdrainA Device A Drain current IdrainA Device B Drain current IdrainB Differences of Drain current Delta_Id Gate current Igate Substrate current Isubs Agilent EasyEXPERT Application Library Reference Edition 8 7 30 ...

Page 241: ...or Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal IgLimit Gate current compliance Source SMU connected to Source terminal constant voltage output Vd Drain voltage Extended Test Parameters Vs Source voltage HoldTime Hold time DelayTime Delay time DrainMinRng Minimum range for the drain current measurement Measurement Parameters Device A Drain c...

Page 242: ...ist Display Drain voltage VdrainA Gate voltage Vgate Device A Drain current IdrainA Device B Drain current IdrainB Differences of Drain current Delta_Ids Agilent EasyEXPERT Application Library Reference Edition 8 7 32 ...

Page 243: ...measurement frequency on the Frequency area of the Advanced Options for CMU Calibration window Default frequencies 1 k 2 k 5 k 10 k 20 k 50 k 100 k 200 k 500 k 1 M 1 2 M 1 5 M 2 M 2 5 M 2 7 M 3 M 3 2 M 3 5 M 3 7 M 4 M 4 2 M 4 5 M 5 MHz Device Under Test MIM capacitor 2 terminals 2 ea Device Parameters Lg Device length Wg Device width Temp Temperature Test Parameters IntegTime Integration time FREQ...

Page 244: ...ice A or B is added to the actual variable names DC bias Vport1 Parallel capacitance Cpval Conductance Gval Series capacitance Csval Series resistance Rsval Parallel resistance Rpval Dissipation factor Dval Reactance Xval Impedance Zval Phase Thetaval Test Output X Y Graph X axis DC bias Vport1List LINEAR Y1 axis MIM capacitance parallel capacitance CpAList LINEAR Y2 axis MIM capacitance parallel ...

Page 245: ...on the Frequency area of the Advanced Options for CMU Calibration window Default frequencies 1 k 2 k 5 k 10 k 20 k 50 k 100 k 200 k 500 k 1 M 1 2 M 1 5 M 2 M 2 5 M 2 7 M 3 M 3 2 M 3 5 M 3 7 M 4 M 4 2 M 4 5 M 5 MHz Device Under Test MOSFET 4 terminals 2 ea Connect Gate to the CMU Low and the other terminals to the CMU High Device Parameters Polarity Nch CMU forces the specified value or Pch CMU for...

Page 246: ...e Gval LINEAR List Display To specify the device A or B is added to the actual variable names Gate voltage Vgateval Parallel capacitance Cpval Conductance Gval Series capacitance Csval Series resistance Rsval Parallel resistance Rpval Dissipation factor Dval Reactance Xval Impedance Zval Phase Thetaval Test Output X Y Graph X axis Gate voltage VgList LINEAR Y1 axis Gate capacitance parallel capaci...

Page 247: ...ent V1Limit Maximum voltage Port3 SMU connected to device A B low terminal constant voltage output VM1 SMU connected to device A high terminal constant current output VM2 SMU connected to device A low terminal constant current output VM3 SMU connected to device B high terminal constant current output VM4 SMU connected to device B low terminal constant current output Extended Test Parameters V3 Por...

Page 248: ...xis Device A resistance R_A LINEAR Y2 axis Device B resistance R_B LINEAR Y3 axis Rate of change between R_A and R_B Delta_R LINEAR Y4 axis Device A voltage between terminals DeltaV_A LINEAR Y5 axis Device B voltage between terminals DeltaV_B LINEAR Agilent EasyEXPERT Application Library Reference Edition 8 7 38 ...

Page 249: ...8 NanoTech ...

Page 250: ...0 5 CNT Id Vg Carbon Nano Tube FET Id Vg characteristics A 01 20 6 CNT Id Vg Time CNT FET Ig Vg characteristics A 01 20 7 CNT IV Sweep CNT Differential I V characteristics A 01 20 8 CNT R I Kelvin 2SMU CNT R I characteristics Kelvin connection A 01 20 9 CNT R V Kelvin 2SMU CNT R V characteristics Kelvin connection A 01 20 10 CNT Vth gmMax CNT FET linear region Vth A 01 20 Agilent EasyEXPERT Applic...

Page 251: ... 10 k 20 k 50 k 100 k 200 k 500 k 1 M 1 2 M 1 5 M 2 M 2 5 M 2 7 M 3 M 3 2 M 3 5 M 3 7 M 4 M 4 2 M 4 5 M 5 MHz Device Under Test Carbon Nano Tube FET 2 terminals Required Modules and Accessories Agilent B1520A MFCMU 1 unit Device Parameters Temp Temperature Test Parameters IntegTime Integration time Port1 CMU connected to device under test CV sweep measurement V1Start Sweep output start voltage V1S...

Page 252: ...o Side Gate terminal constant voltage output VbgStart Pulse peak start sweep start voltage for Back Gate terminal VbgStop Pulse peak stop sweep stop voltage for Back Gate terminal VbgStep Pulse peak step sweep step voltage for Back Gate terminal VbgLow Pulse base voltage primary sweep start voltage Extended Test Parameters HoldTime Hold time DelayTime Delay time Vsg Side Gate terminal voltage IbgL...

Page 253: ...ckgate LowVbg Back Gate current with pulse base voltage applied Test Output Parameters V_backgate Back Gate voltage I_backgate Back Gate current I_backgate LowVbg Back Gate current with pulse base voltage applied Agilent EasyEXPERT Application Library Reference Edition 8 8 5 ...

Page 254: ...nected to Source terminal constant voltage output Drain SMU connected to Drain terminal primary sweep voltage output SideGate SMU connected to Sidegate constant voltage output VbgStart Sweep start voltage for Backgate terminal VbgStop Sweep stop voltage for Backgate terminal VbgStep Sweep step voltage for Backgate terminal VdStart Sweep start voltage for Drain terminal VdStop Sweep stop voltage fo...

Page 255: ...8 NanoTech X Y Plot X axis Drain voltage Vdrain LINEAR Y1 axis Drain current Idrain LINEAR Agilent EasyEXPERT Application Library Reference Edition 8 8 7 ...

Page 256: ...oltage for Drain VdStop Sweep stop voltage for Drain VdStep Sweep step voltage for Drain BackGate SMU connected to Backgate secondary sweep voltage output VbgStart Sweep start voltage for Backgate VbgStop Sweep stop voltage for Backgate VbgStep Sweep step voltage for Backgate IgLimit Backgate current compliance SideGate SMU connected to Sidegate constant voltage output Source SMU connected to Sour...

Page 257: ...for Backgate VbgStop Sweep stop voltage for Backgate VbgStep Sweep step voltage for Backgate IgLimit Backgate current compliance Drain SMU connected to Drain secondary sweep voltage output VdStart Sweep start voltage for Drain VdStop Sweep stop voltage for Drain VdStep Sweep step voltage for Drain SideGate SMU connected to Sidegate constant voltage output Source SMU connected to Source constant vo...

Page 258: ...start voltage for Drain VdStop Sweep stop voltage for Drain VdStep Sweep step voltage for Drain BackGate SMU connected to Back Gate secondary sweep voltage output VbgStart Sweep start voltage for Back Gate VbgStop Sweep stop voltage for Back Gate VbgStep Sweep step voltage for Back Gate SideGate SMU connected to Side Gate constant voltage output Vsg Side Gate voltage Source SMU connected to Source...

Page 259: ...ltage Vbackgate LINEAR Y1 axis Drain current Idrain LINEAR List Display Vbackgate Back Gate voltage Idrain Drain current Vsidegate Side Gate voltage ACC_TIME Elapsed time Test Setup Details Refer to CNT Id_Vg Agilent EasyEXPERT Application Library Reference Edition 8 8 11 ...

Page 260: ...tput Port2 SMU connected to device under test constant voltage output V1Start Sweep output start voltage V1Stop Sweep output stop voltage V1Step Sweep output step voltage I1Limit Port1 current compliance SweepDirection Sweep direction Extended Test Parameters HoldTime Hold time DelayTime Delay time V2 Port2 voltage Y_Min Minimum Y axis value Y_Max Maximum Y axis value R_Max Maximum Y axis resistan...

Page 261: ...nnected to resistor primary sweep current output I1Start Sweep output start current I1Stop Sweep output stop current I1Step Sweep output step current V1Limit Port1 voltage compliance Port2 SMU connected to resistor constant voltage output Extended Test Parameters HoldTime Hold time DelayTime Delay time V2 Port2 voltage Measurement Parameters Vport1 Port1 voltage User Function Circular constant PI ...

Page 262: ...imary sweep voltage output V1Start Sweep output start voltage V1Stop Sweep output stop voltage V1Step Sweep output step voltage I1Limit Port1 current compliance Port2 SMU connected to resistor constant voltage output V2 Port2 voltage Extended Test Parameters HoldTime Hold time DelayTime Delay time Port1MinRng Minimum range for Port1 current measurement Measurement Parameters Iport1 Port1 current U...

Page 263: ...bgStep Sweep step voltage for Back Gate Drain SMU connected to Drain constant voltage output Vd Drain voltage ideally at around 100mV SideGate SMU connected to Side Gate constant voltage output Source SMU connected to Source constant voltage output Extended Test Parameters Vsg Side Gate voltage Vs Source voltage IbgLimit Back Gate current compliance HoldTime Hold time DelayTime Delay time gm_Min M...

Page 264: ...Transconductance gm LINEAR Y3 axis Drain current Idrain LOG List Display Vbackgate Back Gate voltage Vsource Source voltage Vdrain Drain voltage Vsidegate Side Gate voltage Idrain Drain current gm Transconductance Parameters Display Area Threshold voltage Vth Maximum transconductance value gmMax Agilent EasyEXPERT Application Library Reference Edition 8 8 16 ...

Page 265: ...9 Organic ...

Page 266: ...9 Organic 1 2 terminal dual IV sweep 2 terminal dual IV sweep A 05 03 2013 0124_2013 01 28 1 Agilent EasyEXPERT Application Library Reference Edition 8 9 2 ...

Page 267: ...rt voltage Vstop1 Sweep stop1 voltage Vstep1 Sweep step1 voltage Vstop2 Sweep stop2 voltage Vstep2 Sweep step2 voltage IntegTime Integration time HoldTime Hold time DelayTime Delay time Compliance Port1 current compliance Extended Test Parameters N A Measurement Parameters Port1 measurement current I1 User Function N A Analysis Function N A X Y Plot X axis V1 Port1 output voltage LINEAR Y1 axis I1...

Page 268: ...9 Organic Vstart voltage holes between each tests by Bias Hold function Agilent EasyEXPERT Application Library Reference Edition 8 9 4 ...

Page 269: ...10 PwrDevice ...

Page 270: ...cs 3 terminal SMU Pulse A 01 20 4 Id Vd 3 PwrDevice Id Vd Characteristics 3 terminal A 01 20 5 Id Vg pulse 3 PwrDevice Id Vg characteristics 3 terminal SMU Pulse A 01 20 6 Id Vg 3 PwrDevice Id Vg Characteristics 3 terminal A 01 20 7 Vth Const Id 3 PwrDevice Constant current Vth A 01 20 8 Vth gmMax 3 PwrDevice Linear region Vth A 01 20 Agilent EasyEXPERT Application Library Reference Edition 8 10 2...

Page 271: ...r Drain VdStep Sweep step voltage for Drain Gate SMU connected to Gate constant voltage output Vg Gate voltage Source SMU connected to Source constant voltage output BaseOffsetV Base offset voltage Base offset voltage is added to the specified voltage For example the gate start voltage will be VgStart BaseOffsetV Extended Test Parameters Vs Source voltage HoldTime Hold time DelayTime Delay time Dr...

Page 272: ...in LINEAR Y1 axis Drain current Idrain LOG Y2 axis Source current Isource LOG List Display Drain voltage Vdrain Drain current Idrain Source current Isource Gate current Igate Gate voltage Vgate Source voltage Vsource Parameters Display Area Source Drain breakdown voltage BVdss Agilent EasyEXPERT Application Library Reference Edition 8 10 4 ...

Page 273: ... for Gate VgStop Sweep stop voltage for Gate VgStep Sweep step voltage for Gate Source SMU connected to Source constant voltage output BaseOffsetV Base offset voltage Base offset voltage is added to the specified voltage For example the gate start voltage will be VgStart BaseOffsetV Extended Test Parameters Vs Source voltage HoldTime Hold time DelayTime Delay time GateMinRng Minimum range for gate...

Page 274: ...ent Isource LOG Y2 axis Gate current Igate LOG List Display Gate voltage Vgate Source current Isource Gate current Igate Source voltage Vsource Parameters Display Area Gate Source breakdown voltage BVgso Agilent EasyEXPERT Application Library Reference Edition 8 10 6 ...

Page 275: ...nected to Gate terminal secondary sweep voltage output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Source SMU connected to Source terminal constant voltage output BaseOffsetV Base offset voltage Base offset voltage is added to the specified voltage For example the gate start voltage will be VgStart BaseOffset...

Page 276: ...ge output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Source SMU connected to Source terminal constant voltage output BaseOffsetV Base offset voltage Base offset voltage is added to the specified voltage For example the gate start voltage will be VgStart BaseOffsetV Extended Test Parameters Vs Source voltage ...

Page 277: ...nected to Drain terminal secondary sweep voltage output VdStart Sweep start voltage for Drain terminal VdStop Sweep stop voltage for Drain terminal VdStep Sweep step voltage for Drain terminal PulsePeriod Pulse period PulseWidth Pulse width Source SMU connected to Source terminal constant voltage output BaseOffsetV Base offset voltage Base offset voltage is added to the specified voltage For examp...

Page 278: ...in current Idrain LOG List Display Gate voltage Vgate Source voltage Vsource Drain voltage Vdrain Drain current Idrain Transconductance gm Drain current per unit gate width IdrainPerWg Transconductance per unit gate width gmPerWg Agilent EasyEXPERT Application Library Reference Edition 8 10 10 ...

Page 279: ...output VdStart Sweep start voltage for Drain terminal VdStop Sweep stop voltage for Drain terminal VdStep Sweep step voltage for Drain terminal Source SMU connected to Source terminal constant voltage output BaseOffsetV Base offset voltage Base offset voltage is added to the specified voltage For example the gate start voltage will be VgStart BaseOffsetV Extended Test Parameters Vs Source voltage ...

Page 280: ...te Source voltage Vsource Drain voltage Vdrain Drain current Idrain Transconductance gm Drain current per unit gate width IdrainPerWg Transconductance per unit gate width gmPerWg Agilent EasyEXPERT Application Library Reference Edition 8 10 12 ...

Page 281: ...art voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Drain SMU connected to Drain terminal constant voltage output Vd Drain voltage Source SMU connected to Source terminal constant voltage output BaseOffsetV Base offset voltage Base offset voltage is added to the specified voltage For example the gate start voltage will be VgStart Ba...

Page 282: ...rain LINEAR Y2 axis Drain current Idrain LOG List Display Gate voltage Vgate Drain current Idrain Source voltage Vsource Drain voltage Vdrain Transconductance gm Parameters Display Area Threshold voltage Vth Agilent EasyEXPERT Application Library Reference Edition 8 10 14 ...

Page 283: ...minal VgStep Sweep step voltage for Gate terminal Drain SMU connected to Drain terminal constant voltage output Vd Drain voltage ideally at around 100mV Source SMU connected to Source terminal constant voltage output BaseOffsetV Base offset voltage Base offset voltage is added to the specified voltage For example the gate start voltage will be VgStart BaseOffsetV Extended Test Parameters Vs Source...

Page 284: ...te voltage Vgate LINEAR Y1 axis Drain current Idrain LINEAR Y2 axis Transconductance gm LINEAR Y3 axis Drain current Idrain LOG List Display Gate voltage Vgate Source voltage Vsource Drain voltage Vdrain Drain current Idrain Transconductance gm Parameters Display Area Threshold voltage Vth Maximum transconductance value gmMax Agilent EasyEXPERT Application Library Reference Edition 8 10 16 ...

Page 285: ...11 Reliability ...

Page 286: ...ed 2 SMUs A 03 10 19 EM Istress 6 Electromigration test current stressed 6 SMUs A 01 20 20 EM Istress2 6 Electromigration test current stressed 6 SMUs A 03 10 21 EM Vstress Electromigration test voltage stressed 4 SMUs A 01 20 22 EM Vstress2 Electromigration test voltage stressed 4 SMUs A 03 10 23 EM Vstress 2 Electromigration test voltage stressed 2 SMUs A 01 20 24 EM Vstress2 2 Electromigration ...

Page 287: ...er of B2200A B2201A connected to each terminal of a device under test properly in the Tr Base Tr Collector Tr Emitter Tr Subs field is an integer from 1 to 3 of Test Parameters area Device Parameters Polarity NPN SMUs force the specified value or PNP SMUs force the negative specified value Le Emitter length We Emitter width Temp Temperature deg C IcMax Maximum collector current value Test Paramete...

Page 288: ...ldTime Hold time DelayTime Delay time BaseMinRng1 Minimum range for base current measurement on device 1 BaseMinRng2 Minimum range for base current measurement on device 2 BaseMinRng3 Minimum range for base current measurement on device 3 CollectorMinRng1 Minimum range for collector current measurement on device 1 CollectorMinRng2 Minimum range for collector current measurement on device 2 Collect...

Page 289: ...Collector current for device 1 Dev2_IcList Collector current for device 2 Dev3_IcList Collector current for device 3 Dev1_hfe IcList Y3 accumulation data at Icollector Ic hfe for device 1 Dev2_hfe IcList Y3 accumulation data at Icollector Ic hfe for device 2 Dev3_hfe IcList Y3 accumulation data at Icollector Ic hfe for device 3 Dev1_Ib IcList Y1 accumulation data at Icollector Ic hfe for device 1 ...

Page 290: ...1A connected to each terminal of a device under test properly in the Tr Base Tr Collector Tr Emitter field is an integer from 1 to 3 of Test Parameters area Device Parameters Polarity NPN SMUs force the specified value or PNP SMUs force the negative specified value Le Emitter length We Emitter width Temp Temperature deg C IcMax Maximum collector current value Test Parameters IntegTime Integration ...

Page 291: ...t on device 1 CollectorMinRng2 Minimum range for collector current measurement on device 2 CollectorMinRng3 Minimum range for collector current measurement on device 3 User Function User Function for Sampling_Stress Maximum elapsed time value MaxTime max Time Stress time StressTime AccTime Time User Function for IvSweep_hfe Current amplification factor hfe Icollector Ibase Analysis Function Analys...

Page 292: ...collector Ic hfe for device 1 Dev2_hfe IcList Y3 accumulation data at Icollector Ic hfe for device 2 Dev3_hfe IcList Y3 accumulation data at Icollector Ic hfe for device 3 Dev1_Ib IcList Y1 accumulation data at Icollector Ic hfe for device 1 Dev2_Ib IcList Y1 accumulation data at Icollector Ic hfe for device 2 Dev3_Ib IcList Y1 accumulation data at Icollector Ic hfe for device 3 Agilent EasyEXPERT...

Page 293: ...alue Test Parameters IntegTime Integration time SHORT MEDIUM LONG TotalStressTime Total stress time Collector SMU connected to Collector terminal constant voltage output Base SMU connected to Base terminal constant voltage output Emitter SMU connected to Emitter terminal primary sweep voltage output Subs SMU connected to Substrate terminal constant voltage output Test Parameters for Sampling_Stres...

Page 294: ...hfe Icollector Ibase Analysis Function Analysis Function for IvSweep_hfe Ib Ic L1X X intercept of Line1 hfe Ic L2Y3 X intercept of Line2 Auto Analysis Auto Analysis for IvSweep_hfe Line1 Horizontal line for Y1 at Icollector Ic hfe Line2 Horizontal line for Y3 at Icollector Ic hfe Test Output X Y Graph X axis Accumulated stress time TimeList LOG Y1 axis Collector current IcList LOG Y2 axis Y1 accum...

Page 295: ...EDIUM LONG TotalStressTime Total stress time Collector SMU connected to Collector terminal constant voltage output Base SMU connected to Base terminal constant voltage output Emitter SMU connected to Emitter terminal primary sweep voltage output Subs SMU connected to Substrate terminal constant voltage output MeasTiming Timing to measure device parameter hfeStopRate Hfe change rate to stop measure...

Page 296: ...lector Ibase Analysis Function Analysis Function for IvSweep_hfe Ib Ic L1X X intercept of Line1 hfe Ic L2Y3 X intercept of Line2 Auto Analysis Auto Analysis for IvSweep_hfe Line1 Horizontal line for Y1 at Icollector Ic hfe Line2 Horizontal line for Y3 at Icollector Ic hfe X Y Graph X Y Graph for Sampling_Stress X axis Stress time StressTime LINEAR Y1 axis Emitter current Iemitter LOG X Y Graph for...

Page 297: ... Y Graph X axis Accumulated stress time TimeList LOG Y1 axis Collector current IcList LINEAR Y2 axis Y1 accumulation data at Icollector Ic hfe Ib IcList LOG Y3 axis Y3 accumulation data at Icollector Ic hfe Ihfe IcList LINEAR Test Output List Display Accumulated stresss time TimeList Collector current IcList Y1 accumulation data at Icollector Ic hfe Ib IcList Y3 accumulation data at Icollector Ic ...

Page 298: ...Parameters IntegTime Integration time SHORT MEDIUM LONG TotalStressTime Total stress time Collector SMU connected to Collector terminal constant voltage output Base SMU connected to Base terminal constant voltage output Emitter SMU connected to Emitter terminal primary sweep voltage output Test Parameters for Sampling_Stress VeStress Stress voltage for Emitter terminal Test Parameters for IvSweep_...

Page 299: ...3 X intercept of Line2 Auto Analysis Auto Analysis for IvSweep_hfe Line1 Horizontal line for Y1 at Icollector Ic hfe Line2 Horizontal line for Y3 at Icollector Ic hfe Test Output X Y Graph X axis Accumulated stress time TimeList LOG Y1 axis Collector current IcList LOG Y2 axis Y1 accumulation data at Icollector Ic hfe Ib IcList LOG Y3 axis Y3 accumulation data at Icollector Ic hfe Ihfe IcList LINE...

Page 300: ...Time Integration time SHORT MEDIUM LONG TotalStressTime Total stress time Collector SMU connected to Collector terminal constant voltage output Base SMU connected to Base terminal constant voltage output Emitter SMU connected to Emitter terminal primary sweep voltage output MeasTiming Timing to measure device parameter hfeStopRate Hfe change rate to stop measurement Test Parameters for Sampling_St...

Page 301: ...s Auto Analysis for IvSweep_hfe Line1 Horizontal line for Y1 at Icollector Ic hfe Line2 Horizontal line for Y3 at Icollector Ic hfe X Y Graph X Y Graph for Sampling_Stress X axis Stress time StressTime LINEAR Y1 axis Emitter current Iemitter LOG X Y Graph for IvSweep_hfe X axis Base voltage Vbase LINEAR Y1 axis Base current Ibase LOG Y2 axis Collector current Icollector LOG Y3 axis Current amplifi...

Page 302: ...ector current IcList LINEAR Y2 axis Y1 accumulation data at Icollector Ic hfe Ib IcList LOG Y3 axis Y3 accumulation data at Icollector Ic hfe Ihfe IcList LINEAR Test Output List Display Accumulated stresss time TimeList Collector current IcList Y1 accumulation data at Icollector Ic hfe Ib IcList Y3 accumulation data at Icollector Ic hfe hfe IcList Agilent EasyEXPERT Application Library Reference E...

Page 303: ...r of B2200A B2201A connected to each terminal of a device under test properly in the Tr Gate Tr Drain Tr Source Tr Subs field is an integer from 1 to 3 of Test Parameters area Device Parameters Polarity Nch SMUs force the specified value or Pch SMUs force the negative specified value Lg Gate length Wg Gate width Temp Temperature deg C Test Parameters IntegTime Integration time SHORT MEDIUM LONG Tr...

Page 304: ...tics acquisition Gate terminal primary sweep voltage output MeasDrain SMU connected to the basic characteristics acquisition Drain terminal constant voltage output MeasSource SMU connected to the basic characteristics acquisition Source terminal constant voltage output Vg3 Gate terminal voltage Vd3 Drain terminal voltage Extended Test Parameters Extended Test Parameters for IvSweep_ConstId HoldTim...

Page 305: ...ne1 Tangent line for Y1 at gm gmMax Test Output X Y Graph X axis Elapsed time TimeList LOG Y1 axis Drain current for device 1 Dev1_IdsList LOG Y2 axis Drain current for device 2 Dev2_IdsList LOG Y3 axis Drain current for device 3 Dev3_IdsList LOG Y4 axis Maximum transconductance value for device 1 Dev1_GmMaxList LINEAR Y5 axis Maximum transconductance value for device 2 Dev2_GmMaxList LINEAR Y6 ax...

Page 306: ...ach terminal of a device under test properly in the Tr Gate Tr Drain Tr Source field is an integer from 1 to 3 of Test Parameters area Device Parameters Polarity Nch SMUs force the specified value or Pch SMUs force the negative specified value Lg Gate length Wg Gate width Temp Temperature deg C Test Parameters IntegTime Integration time SHORT MEDIUM LONG Tr Gate SWM Pin Assign settings for Gate te...

Page 307: ...t voltage output MeasSource SMU connected to the basic characteristics acquisition Source terminal constant voltage output Vg3 Gate terminal voltage Vd3 Drain terminal voltage Extended Test Parameters Extended Test Parameters for IvSweep_ConstId HoldTime Hold time DelayTime Delay time Vs Source terminal voltage constant voltage IgLimit Gate current compliance IdLimit Drain current compliance Drain...

Page 308: ...me TimeList LOG Y1 axis Drain current for device 1 Dev1_IdsList LOG Y2 axis Drain current for device 2 Dev2_IdsList LOG Y3 axis Drain current for device 3 Dev3_IdsList LOG Y4 axis Maximum transconductance value for device 1 Dev1_GmMaxList LINEAR Y5 axis Maximum transconductance value for device 2 Dev2_GmMaxList LINEAR Y6 axis Maximum transconductance value for device 3 Dev3_GmMaxList LINEAR Test O...

Page 309: ...age output Drain SMU connected to Drain terminal constant voltage output Subs SMU connected to Substrate terminal constant voltage output Source SMU connected to Source terminal constant voltage output VgStress Gate terminal stress voltage Test Parameters for IvSweep_ConstId Id Vth Drain current to decide the Vth per unit area VgStart1 Sweep start voltage for Gate terminal VgStop1 Sweep stop volta...

Page 310: ...ed Test Parameters for Sampling_Ids IgLimit Gate current compliance IdLimit Drain current compliance IsubsLimit Substrate current compliance Vs Source terminal voltage constant voltage Vsubs Substrate terminal voltage constant voltage DrainMinRng Minimum range for drain current measurement User Function User Function for Sampling_Stress Maximum elapsed time value MaxTime max Time Stress time Stres...

Page 311: ... Y2 axis Vth by constant current method VthIdList LINEAR Y3 axis Vth by extrapolation method VthGmList LINEAR Y4 axis Drain current IdsList LOG Test Output List Display Elapsed time TimeList Vth by constant current method VthIdList Vth by extrapolation method VthGmList Drain current IdsList Maximum transconductance value gmMaxList Agilent EasyEXPERT Application Library Reference Edition 8 11 27 ...

Page 312: ...tage output Subs SMU connected to Substrate terminal constant voltage output Source SMU connected to Source terminal constant voltage output VgStress Gate terminal stress voltage MeasConstId Measurement by constant current method Yes or No MeasGmmax Measurement by extrapolation method Yes or No MeasIds Drain current measurement Yes or No MeasTiming Timing to measure device parameter Test Parameter...

Page 313: ... Drain current compliance IsubsLimit Substrate current compliance Vs Source terminal voltage constant voltage Vsubs Substrate terminal voltage constant voltage Vth_Min Minimum Vth value for graph scale Vth_Max Maximum Vth value for graph scale gmMax_Min Minimum gmMax value for graph scale gmMax_Max Maximum gmMax value for graph scale DrainMinRng Minimum range for drain current measurement DrainMin...

Page 314: ...or Y1 at Idrain Id Vth Auto Analysis for IvSweep_gmmax Line1 Tangent line for Y1 at gm gmMax X Y Graph X Y Graph for Sampling_Stress X axis Stress time StressTime LINEAR Y1 axis Gate current Igate LOG X Y Graph for IvSweep_ConstId X axis Gate voltage Vgate LINEAR Y1 axis Drain current Idrain LINEAR Y2 axis Drain current Idrain LOG X Y Graph for IvSweep_gmmax X axis Gate voltage Vgate LINEAR Y1 axi...

Page 315: ...ed time TimeList LOG Y1 axis Maximum transconductance value gmMaxList LINEAR Y2 axis Vth by constant current method VthIdList LINEAR Y3 axis Vth by extrapolation method VthGmList LINEAR Y4 axis Drain current IdsList LOG Test Output List Display Elapsed time TimeList Vth by constant current method VthIdList Vth by extrapolation method VthGmList Drain current IdsList Maximum transconductance value g...

Page 316: ...primary sweep voltage output Drain SMU connected to Drain terminal constant voltage output Source SMU connected to Source terminal constant voltage output VgStress Gate terminal stress voltage Test Parameters for IvSweep_ConstId Id Vth Drain current to decide the Vth per unit area VgStart1 Sweep start voltage for Gate terminal VgStop1 Sweep stop voltage for Gate terminal VgStep1 Sweep step voltage...

Page 317: ... Function User Function for Sampling_Stress Maximum elapsed time value MaxTime max Time Stress time StressTime AccTime Time User Function for IvSweep_ConstId Maximum drain current value IdMax max abs Idrain For initial measurement only User Function for IvSweep_gmmax Maximum drain current value IdMax max abs Idrain For initial measurement only Transconductance gm diff Idrain Vgate Maximum transcon...

Page 318: ...rain current IdsList LOG Test Output List Display Elapsed time TimeList Vth by constant current method VthIdList Vth by extrapolation method VthGmList Drain current IdsList Maximum transconductance value gmMaxList Agilent EasyEXPERT Application Library Reference Edition 8 11 34 ...

Page 319: ...inal constant voltage output Source SMU connected to Source terminal constant voltage output VgStress Gate terminal stress voltage IdLimit Drain current compliance MeasConstId Measurement by constant current method Yes or No MeasGmmax Measurement by extrapolation method Yes or No MeasIds Drain current measurement Yes or No MeasTiming Timing to measure device parameter Test Parameters for IvSweep_C...

Page 320: ... measurement Extended Test Parameters for Sampling_Ids IgLimit Gate current compliance Vs Source terminal voltage constant voltage DrainMinRng Minimum range for drain current measurement Measurement Parameters Measurement Parameters by Sampling_Stress Gate current Igate Measurement Parameters by IvSweep_ConstId Drain current Idrain Measurement Parameters by IvSweep_gmmax Drain current Idrain Measu...

Page 321: ...s Drain current Idrain LINEAR Y2 axis Transconductance gm LINEAR X Y Graph for Sampling_Ids X axis Elapsed time Time LINEAR Y1 axis Drain current Idrain LOG List Display List Display for Sampling_Stress Stress time StressTime Elapsed time Time Gate voltage Vgate Drain voltage Vdrain Gate current Igate List Display for IvSweep_ConstId Gate voltage Vgate Drain voltage Vdrain Drain current Idrain Lis...

Page 322: ...d VthGmList LINEAR Y4 axis Drain current IdsList LOG Test Output List Display Elapsed time TimeList Vth by constant current method VthIdList Vth by extrapolation method VthGmList Drain current IdsList Maximum transconductance value gmMaxList Agilent EasyEXPERT Application Library Reference Edition 8 11 38 ...

Page 323: ... Source constant voltage output Vs Source voltage IsLimit Source current compliance Subs SMU connected to Substrate constant voltage output Vsubs Substrate voltage IsubsLimit Substrate current compliance Extended Test Parameters SubsMinRng Minimum range for the substrate current measuremnent Test Parameters for Gate Pulse PulseLevel Pulse output level VbaseStart Sweep start value of Gate pulse bas...

Page 324: ...e constant voltage output Gate SPGU connected to Gate pulse voltage output PulsePeriod Pulse period PulseDelay Pulse delay DutyCycle Duty cycle PulseLevel Pulse output level LeadingTime Leading transition time TrailingTime Trailing transition time VbaseStart Sweep start value of Gate pulse base voltage VbaseStop Sweep stop value of Gate pulse base voltage VbaseStep Sweep step value of Gate pulse b...

Page 325: ...List LINEAR Y1 axis Substrate current IcpList LOG Test Output List Display Gate pulse base voltage VbaseList Substrate current IcpList Test Output Parameters Maximum substrate current IcpMax Interface state density Nss Nss calculation Nss IcpMax q PulsePeriod Lg Wg Agilent EasyEXPERT Application Library Reference Edition 8 11 41 ...

Page 326: ...itor TotalStressTime Total stress time StopCondition Measurement stop condition changes of wire resistance I1Stress Port1 stress current IntegTime Integration time Extended Test Parameters V2 Port2 terminal voltage V1Limit Port1 voltage compliance I2Limit Port2 current compliance HoldTime Hold time User Function IPort1PerArea A cm2 Port1 terminal current per unit area IPort2PerArea A cm2 Port2 ter...

Page 327: ...FailureCondition Measurement stop condition changes of wire resistance I1Stress Port1 stress current NoOfSamples Number of samples IntegTime Integration time PointPerDecade Number of samples in 1 decade Interval Sampling interval Extended Test Parameters V2 Port2 terminal voltage I2Limit Port2 current compliance HoldTime Hold time R_Max Y axis maximum value for resistance StoringRuntimeData Data s...

Page 328: ...ice DeltaVList LINEAR Y2 axis Resistance of wiring device RList LINEAR Y3 axis Difference from initial resistance DeltaRList LINEAR Test Output List Display Accumulated stress time TimeList Voltage between terminals of wiring device DeltaVList Resistance of wiring device RList Difference from initial resistance DeltaRList Test Output Parameters Time to failure FailureTime Agilent EasyEXPERT Applic...

Page 329: ...p condition changes of wire resistance Port1 SMU connected to Port1 constant current output Port2 SMU connected to Port2 constant voltage output I1Stress Port1 stress current Extended Test Parameters V2 Port2 voltage V1Limit Port1 voltage compliance I2Limit Port2 current compliance HoldTime Hold time DelayTime Delay time User Function Wiring resistance value R Vport1 Iport1 Test Output X Y Graph X...

Page 330: ...tressTime Total stress time FailureCondition Measurement stop condition changes of wire resistance I1Stress Port1 stress current V1Limit Port1 voltage compliance IntegTime Integration time PointPerDecade Number of samples in 1 decade Interval Sampling interval Extended Test Parameters V2 Port2 terminal voltage I2Limit Port2 current compliance HoldTime Hold time R_Max Y axis maximum value for resis...

Page 331: ...ce RList LINEAR Y3 axis Difference from initial resistance DeltaRList LINEAR Test Output List Display Accumulated stress time TimeList Port1 voltage Vport1List Resistance of wiring device RList Difference from initial resistance DeltaRList Test Output Parameters Time to failure FailureTime Agilent EasyEXPERT Application Library Reference Edition 8 11 47 ...

Page 332: ... current output Port2 SMU connected to Port2 constant voltage output Port3 SMU connected to Extrusion Line constant voltage output Port4 SMU connected to Extrusion Line constant voltage output VM1 SMU for Port1 voltage monitoring constant voltage output VM2 SMU for Port2 voltage monitoring constant voltage output I1Stress Port1 stress current V1Limit Port1 voltage compliance Extended Test Paramete...

Page 333: ...mulated stresss time TimeList Wiring resistance value RList Offset from initial resistance value DeltaRList Port2 current Iport2List Port3 current Iport3List Port4 current Iport4List Test Output Parameters Time to failure given by rate of resistance change R_FailureTime Time to failure given by monitoring extrusion lines E_FailureTime Agilent EasyEXPERT Application Library Reference Edition 8 11 4...

Page 334: ...voltage monitoring constant voltage output VM2 SMU for Port2 voltage monitoring constant voltage output TotalStressTime Total stress time FailureCondition Measurement stop condition 1 changes of wire resistance ExtCondition Measurement stop condition 2 current to extrusion line I1Stress Port1 stress current IntegTime Integration time V1Limit Port1 voltage compliance I3Limit Port3 current complianc...

Page 335: ... Port4 current Iport4 Test Output X Y Graph X axis Accumulated stress time TimeList LOG Y1 axis Resistance of wiring device RList LINEAR Y2 axis Difference from initial resistance DeltaRList LINEAR Y3 axis Port2 current Iport2List LOG Y4 axis Port3 current Iport3List LOG Y5 axis Port4 current Iport4List LOG Test Output List Display Accumulated stress time TimeList Resistance of wiring device RList...

Page 336: ...ress time StopCondition Measurement stop condition changes of wire resistance V1Stress Port1 stress voltage NoOfSamples Number of samples IntegTime Integration time Extended Test Parameters V2 Port2 terminal voltage I1Limit Port1 current compliance HoldTime Hold time Port1MinRng Minimum range for the port1 current measurement User Function IPort1PerArea A cm2 Port1 terminal current per unit area I...

Page 337: ...rrent compliance IntegTime Integration time PointPerDecade Number of samples in 1 decade Interval Sampling interval Extended Test Parameters V2 Port2 terminal voltage HoldTime Hold time Port1MinRng Minimum range for the port1 current measurement R_Max Y axis maximum value for resistance StoringRuntimeData Data save during stress output Yes or No Measurement Parameters Port1 current Iport1 Port2 cu...

Page 338: ... Port1 current Iport1List LINEAR Y2 axis Resistance of wiring device RList LINEAR Y3 axis Difference from initial resistance DeltaRList LINEAR Test Output List Display Accumulated stress time TimeList Port1 current Iport1List Resistance of wiring device RList Difference from initial resistance DeltaRList Test Output Parameters Time to failure FailureTime Agilent EasyEXPERT Application Library Refe...

Page 339: ... condition changes of wire resistance Port1 SMU connected to Port1 constant voltage output Port2 SMU connected to Port2 constant voltage output V1Stress Port1 stress voltage Extended Test Parameters V2 Port2 voltage I1Limit Port1 current compliance HoldTime Hold time Port1MinRng Minimum range for Port1 current measurement User Function Wiring resistance value R Vport1 Iport1 Test Output X Y Graph ...

Page 340: ...sTime Total stress time FailureCondition Measurement stop condition changes of wire resistance V1Stress Port1 stress voltage I1Limit Port1 current compliance IntegTime Integration time PointPerDecade Number of samples in 1 decade Interval Sampling interval Extended Test Parameters V2 Port2 terminal voltage HoldTime Hold time Port1MinRng Minimum range for the port1 current measurement R_Max Y axis ...

Page 341: ...ce RList LINEAR Y3 axis Difference from initial resistance DeltaRList LINEAR Test Output List Display Accumulated stress time TimeList Port1 current Iport1List Resistance of wiring device RList Difference from initial resistance DeltaRList Test Output Parameters Time to failure FailureTime Agilent EasyEXPERT Application Library Reference Edition 8 11 57 ...

Page 342: ...n line Port1 SMU connected to Port1 constant voltage output Port2 SMU connected to Port2 constant voltage output Port3 SMU connected to Extrusion Line constant voltage output Port4 SMU connected to Extrusion Line constant voltage output VM1 SMU for Port1 voltage monitoring constant voltage output VM2 SMU for Port2 voltage monitoring constant voltage output V1Stress Port1 stress voltage Extended Te...

Page 343: ...lay Accumulated stresss time TimeList Port1 current Iport1List Wiring resistance value RList Port3 current Iport3List Port4 current Iport4List Offset from initial resistance value DeltaRList Test Output Parameters R_FailureTime Time to failure Resistance E_FailureTime Time to failure Extrusion Agilent EasyEXPERT Application Library Reference Edition 8 11 59 ...

Page 344: ...onstant voltage output VM1 SMU for Port1 voltage monitoring constant voltage output VM2 SMU for Port2 voltage monitoring constant voltage output TotalStressTime Total stress time FailureCondition Measurement stop condition 1 changes of wire resistance ExtCondition Measurement stop condition 2 current to extrusion line V1Stress Port1 stress voltage I1Limit Port1 current compliance I3Limit Port3 cur...

Page 345: ...nt Iport4 Voltage between terminals of wiring device DeltaV Test Output X Y Graph X axis Accumulated stress time TimeList LOG Y1 axis Resistance of wiring device RList LINEAR Y2 axis Port1 current Iport1List LINEAR Y3 axis Port3 current Iport3List LINEAR Y4 axis Port4 current Iport4List LINEAR Y5 axis Difference from initial resistance DeltaRList LINEAR Test Output List Display Accumulated stress ...

Page 346: ...1 to 3 of Test Parameters area Device Parameters Polarity Nch SMUs force the specified value or Pch SMUs force the negative specified value Lg Gate length Wg Gate width Temp Temperature deg C Test Parameters IntegTime Integration time SHORT MEDIUM LONG Tr Gate SWM Pin Assign settings for Gate terminal of devices Tr Drain SWM Pin Assign settings for Drain terminal of devices Tr Source SWM Pin Assig...

Page 347: ... Sweep step voltage for Gate terminal Vd2 Drain voltage Test Parameters for Sampling_Ids MeasGate SMU connected to the basic characteristics acquisition Gate terminal primary sweep voltage output MeasDrain SMU connected to the basic characteristics acquisition Drain terminal constant voltage output MeasSource SMU connected to the basic characteristics acquisition Source terminal constant voltage o...

Page 348: ... only User Function for IvSweep_gmmax Maximum drain current value IdMax max abs Idrain For initial measurement only Transconductance gm diff Idrain Vgate Maximum transconductance value gmMax max gm Analysis Function Analysis Function for IvSweep_ConstId Vth Id L1X X intercept of Line1 Analysis Function for IvSweep_gmmax Vth Gm L1X X intercept of Line1 Auto Analysis Auto Analysis for IvSweep_ConstI...

Page 349: ...rent method Dev1_VthGmList Vth for device 1 determined by extrapolation method Dev2_VthGmList Vth for device 2 determined by extrapolation method Dev3_VthGmList Vth for device 3 determined by extrapolation method Dev1_gmMaxList Maximum transconductance value for device 1 Dev2_gmMaxList Maximum transconductance value for device 2 Dev3_gmMaxList Maximum transconductance value for device 3 Agilent Ea...

Page 350: ...age output Drain SMU connected to Drain terminal constant voltage output Subs SMU connected to Substrate terminal constant voltage output Source SMU connected to Source terminal constant voltage output VgStress Gate terminal stress voltage VdStress Drain terminal stress voltage VsubsStress Substrate terminal stress voltage Vsubs Substrate terminal voltage Test Parameters for IvSweep_ConstId Id Vth...

Page 351: ...rminal voltage IgLimit Gate current compliance IdLimit Drain current compliance IsubsLimit Substrate current compliance DrainMinRng Minimum range for drain current measurement User Function User Function for Sampling_Stress Maximum elapsed time value MaxTime max Time Stress time StressTime AccTime Time User Function for IvSweep_ConstId Maximum drain current value IdMax max abs Idrain For initial m...

Page 352: ...thod VthIdList LINEAR Y3 axis Vth by extrapolation method VthGmList LINEAR Y4 axis Drain current IdsList LOG Test Output List Display Elapsed time TimeList Vth by constant current method VthIdList Vth by extrapolation method VthGmList Drain current IdsList Maximum transconductance value gmMaxList Agilent EasyEXPERT Application Library Reference Edition 8 11 68 ...

Page 353: ...strate terminal constant voltage output Source SMU connected to Source terminal constant voltage output VgStress Gate terminal stress voltage VdStress Drain terminal stress voltage VsubsStress Substrate terminal stress voltage IdLimit Drain current compliance MeasConstId Measurement by constant current method Yes or No MeasGmmax Measurement by extrapolation method Yes or No MeasIds Drain current m...

Page 354: ...th_Min Minimum Vth value for graph scale Vth_Max Maximum Vth value for graph scale gmMax_Min Minimum gmMax value for graph scale gmMax_Max Maximum gmMax value for graph scale DrainMinRng Minimum range for drain current measurement Extended Test Parameters for Sampling_Ids Vs Source terminal voltage Vsubs Substrate terminal voltage IgLimit Gate current compliance IsubsLimit Substrate current compli...

Page 355: ... StressTime LINEAR Y1 axis Drain current Idrain LOG X Y Graph for IvSweep_ConstId X axis Gate voltage Vgate LINEAR Y1 axis Drain current Idrain LINEAR Y2 axis Drain current Idrain LOG X Y Graph for IvSweep_gmmax X axis Gate voltage Vgate LINEAR Y1 axis Drain current Idrain LINEAR Y2 axis Transconductance gm LINEAR X Y Graph for Sampling_Ids X axis Elapsed time Time LINEAR Y1 axis Drain current Idr...

Page 356: ...lue gmMaxList LINEAR Y2 axis Vth by constant current method VthIdList LINEAR Y3 axis Vth by extrapolation method VthGmList LINEAR Y4 axis Drain current IdsList LOG Test Output List Display Elapsed time TimeList Vth by constant current method VthIdList Vth by extrapolation method VthGmList Drain current IdsList Maximum transconductance value gmMaxList Agilent EasyEXPERT Application Library Referenc...

Page 357: ...ry sweep current output IgStart Sweep start current IgStop Sweep stop current VgLimit Gate voltage compliance Subs SMU connected to Substrate constant voltage output Extended Test Parameters Vsubs Substrate voltage HoldTime Hold time DelayTime Delay time SubsMinRng Minimum range for the substrate current measurement User Function IgatePerArea Igate Lg Wg IsubsPerArea Isubs Lg Wg Qbdi integ Igate T...

Page 358: ... to Port4 terminal TotalStressTime Total stress time StopCondition Terminal voltage to decide the breakdown I1Stress Port1 stress current I2Stress Port2 stress current I3Stress Port3 stress current NoOfSamples Number of samples IntegTime Integration time Extended Test Parameters V4 Port4 terminal voltage V1Limit Port1 Port2 Port3 voltage compliance I4Limit Port4 current compliance HoldTime Hold ti...

Page 359: ...ce1 time to breakdown Tbd1 Device2 time to breakdown Tbd2 Device3 time to breakdown Tbd3 Device1 charge to breakdown Qbd1 Device2 charge to breakdown Qbd2 Device3 charge to breakdown Qbd3 Agilent EasyEXPERT Application Library Reference Edition 8 11 75 ...

Page 360: ...t3 terminal Port4 SMU connected to Port4 terminal TotalStressTime Total stress time I1Stress Port1 stress current I2Stress Port2 stress current I3Stress Port3 stress current IntegTime Integration time PointPerDecade Number of samples in 1 decade Interval Sampling interval FailureCondition Measurement stop condition Extended Test Parameters V4 Port4 terminal voltage V1Limit Port1 Port2 Port3 voltag...

Page 361: ...Vport1List LOG Y2 axis Port2 terminal voltage Vport2List LOG Y3 axis Port3 terminal voltage Vport3List LOG Test Output List Display Stress time Time Port1 terminal voltage Vport1 Port2 terminal voltage Vport2 Port3 terminal voltage Vport3 Test Output Parameters Device1 breakdown voltage Vbd1 Device2 breakdown voltage Vbd2 Device3 breakdown voltage Vbd3 Device1 time to breakdown Tbd1 Device2 time t...

Page 362: ...ime 10 to 10000 seconds NoOfSamples Number of samples Port1 SMU connected to Port1 terminal I1Stress Port1 stress current Port2 SMU connected to Port2 terminal Extended Test Parameters V2 Port2 terminal voltage V1Limit Port1 voltage compliance I2Limit Port2 current compliance HoldTime Hold time Port2MinRng Minimum range for the port2 current measurement User Function I1PerArea Iport1 L W I2PerArea...

Page 363: ...00 seconds I1Stress Port1 stress current V1Limit Port1 voltage compliance I2Limit Port2 current compliance IntegTime Integration time PointPerDecade Number of samples in 1 decade Interval Sampling interval FailureCondition Measurement stop condition Extended Test Parameters V2 Port2 terminal voltage HoldTime Hold time Port2MinRng Minimum range for the port2 current measurement StoringRuntimeData D...

Page 364: ...ess time TimeList Port1 terminal voltage Vport1List Test Output Parameters Breakdown voltage Vbd Time to breakdown Tbd Charge to breakdown Qbd Qbd calculation Qbd I1Stress Tbd L W Agilent EasyEXPERT Application Library Reference Edition 8 11 80 ...

Page 365: ... Port4 SMU connected to Port4 terminal TotalStressTime Total stress time StopCondition Terminal current to decide the breakdown V1Stress Port1 stress voltage V2Stress Port2 stress voltage V3Stress Port3 stress voltage NoOfSamples Number of samples IntegTime Integration time Extended Test Parameters V4 Port4 terminal voltage I1Limit Port1 Port2 Port3 current compliance HoldTime Hold time Port1MinRn...

Page 366: ...ent Iport2List LOG Y3 axis Port3 terminal current Iport3List LOG Test Output Parameters Device1 time to breakdown Tbd1 Device2 time to breakdown Tbd2 Device3 time to breakdown Tbd3 Device1 charge to breakdown Qbd1 Device2 charge to breakdown Qbd2 Device3 charge to breakdown Qbd3 Agilent EasyEXPERT Application Library Reference Edition 8 11 82 ...

Page 367: ...otal stress time FailureCondition Measurement stop condition V1Stress Port1 stress voltage V2Stress Port2 stress voltage V3Stress Port3 stress voltage IntegTime Integration time PointPerDecade Number of samples in 1 decade Interval Sampling interval Extended Test Parameters V4 Port4 terminal voltage I1Limit Port1 Port2 Port3 current compliance HoldTime Hold time Port1MinRng Minimum range for the p...

Page 368: ...Graph X axis Stress time TimeList LOG Y1 axis Port1 current Iport1List LOG Y2 axis Port2 current Iport2List LOG Y3 axis Port3 current Iport3List LOG Test Output List Display Stress time TimeList Port1 current Iport1List Port2 current Iport2List Port3 current Iport3List Device1 charge to breakdown Qbd1List Device2 charge to breakdown Qbd2List Device3 charge to breakdown Qbd3List Test Output Paramet...

Page 369: ...00 seconds StopCondition Port1 terminal current to decide the breakdown NoOfSamples Number of samples Port1 SMU connected to Port1 terminal V1Stress Port1 stress voltage Port2 SMU connected to Port2 terminal Extended Test Parameters V2 Port2 terminal voltage I1Limit Current compliance HoldTime Hold time Port1MinRng Minimum range for the port1 current measurement User Function IPort1PerArea Iport1 ...

Page 370: ...Stress Port1 stress voltage IntegTime Integration time PointPerDecade Number of samples in 1 decade Interval Sampling interval Extended Test Parameters V2 Port2 terminal voltage I1Limit Current compliance HoldTime Hold time Port1MinRng Minimum range for the port1 current measurement StoringRuntimeData Data save during stress output Yes or No Measurement Parameters Port1 current Iport1 User Functio...

Page 371: ...sampling time interval for Id characterizes SamplingNumber Set sampling number for sampling measurements NegativeHoldTime Set sampling time under the negative bias stress before starting the id sampling characterization Id sampling characterization is made by the parameters Vg Vd Vsubs and Vs Negative Bias Stress Apply a specified stress for NBTI degradation test TotalStressTime Specify the maximu...

Page 372: ...r adjusting the stress time accuracy which depends on the measurement setup or a PC speed used for Desktop EasyEXPERT Note Stress_T_adj parameter is adjusted so as the Stree_time_at_ display in the Sampling_Ids graph becomes closer to the end value of the previous stress time Default value is tuned for the use on the B1500A EasyEXPERT and the RecordSamplingData ON condition Test Output X Y plot X ...

Page 373: ...n SMUs if used more than one SMU is used for Id measurements Reference Multi Channel Parallel Timing on the fly NBTI Characterization Using Agilent B1500A http cp literature agilent com litweb pdf 5989 6526EN pdf Device Under test MOSFET 4 terminals or Commonn gate common Source and common subs with independent 4 Drain device The drain measurements acn be selected from one of 1 for single Dr SMU c...

Page 374: ...aplay in the Results area is made as New_Device_Id Measured time if this parameter is set to Y Sampling Timing adjustment SamplingDelay Adjust this parameter so as the start timing of the sampling measurement observed in the oscilloscope becomes the same as the sampling start display is stress_time_at in the Parameter display Note Recommend to use the default 200 ms Stress_T_adj Time negative for ...

Page 375: ...ted to Gate primary sweep voltage output VgStart Sweep start voltage VgStop Sweep stop voltage VgStep Sweep step voltage IgLimit Gate current compliance Subs SMU connected to Substrate constant voltage output Extended Test Parameters Vsubs Substrate voltage HoldTime Hold time DelayTime Delay time GateMinRng Minimum range for the gate current measurement SubsMinRng Minimum range for the substrate c...

Page 376: ...weep stop voltage VgStep Sweep step voltage Ibd Gate current to decide the breakdown Subs SMU connected to Substrate constant voltage output Extended Test Parameters Vsubs Substrate voltage HoldTime Hold time DelayTime Delay time GateMinRng Minimum range for the gate current measurement SubsMinRng Minimum range for the substrate current measurement User Function IgatePerArea Igate Lg Wg IsubsPerAr...

Page 377: ...12 Sample ...

Page 378: ...12 Sample 1 Vth gmMax and Id Extrapolation Vth and Constant Vth A 04 00 Agilent EasyEXPERT Application Library Reference Edition 8 12 2 ...

Page 379: ...e output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Drain SMU connected to Drain terminal constant voltage output Vd Drain voltage Subs SMU connected to Substrate constant voltage output Vsubs Substrate voltage Source SMU connected to Source terminal constant voltage output Extended Test Parameters Vs Source...

Page 380: ...in LOG Parameters Display Area Threshold voltage by extrapolation method Vth Maximum gm value gmMax Threshold voltage by constant current method Vth Id Auto Analysis set in Vth_gmMax and Id test definition Line1 Tangent line for Y1 at gm gmMax Auto Analysis set after Vth_gmMax and Id test definition Marker Data point specified by Idrain Id Vth Polarity Agilent EasyEXPERT Application Library Refere...

Page 381: ...13 Solar Cell ...

Page 382: ...e profiling A 05 03 2013 0124_2013 02 27 1 5 Solar Cell IV Solar Cell IV characteristics A 05 03 2013 0124_2013 02 27 1 6 Solar Cell IV Fwd Solar Cell forward bias characteristics A 05 03 2013 0124_2013 02 27 1 7 Solar Cell IV Rev Solar Cell reverse bias characteristics A 05 03 2013 0124_2013 02 27 1 8 Solar Cell Nc W Nc W characteristics of Solar Cell A 05 03 2013 0124_2013 02 27 1 9 Solar Cell N...

Page 383: ...om litweb pdf 5990 4428EN pdf Device Under Test Solar Cell Required Modules and Accessories Agilent B1520A MFCMU 1 unit Device Parameters Temp Temperature Area Area of the solar cell Es Relative permittivity of semiconductor Test Parameters IntegTime Integration time VppStart Peak to peak voltage Vpp start value VppStop Vpp stop value VppStep Vpp step value FREQ Measurement frequency Anode CMU con...

Page 384: ...est Output X Y Graph X axis Peak to peak voltage VPP LINEAR Y1 axis Anode Cathode capacitance parallel capacitance Cp LINEAR Y2 axis Conductance G LINEAR Test Output List Display Peak to peak voltage VPP Anode Cathode capacitance parallel capacitance Cp Conductance G Dissipation factor D Parallel resistance Rp Actual DC bias voltage VC Test Output Parameters Display Area Intercept of Cp Vac charac...

Page 385: ...re Test Parameters IntegTime Integration time Anode CMU connected between Anode and Cathode FreqStart Sweep start frequency NoOfDecade Number of decades for data collection OscLevel Measurement signal level Vdc Anode Cathode voltage constant voltage output Extended Test Parameters Hold_time Hold time Delay_time Delay time Cp_Min Minimum value of Cp axis for X Y graph Cp_Max Maximum value of Cp axi...

Page 386: ...Display Area Auto Analysis Test Output X Y Graph X axis Frequency FreqList LOG Y1 axis Anode Cathode capacitance parallel capacitance CpList LINEAR Y2 axis Conductance GList LINEAR Y3 axis Impedance ZList LOG Y4 axis Phase ThetaList LOG Test Output List Display Frequency FreqList Bias voltage VcList Anode Cathode capacitance parallel capacitance CpList Conductance GList Parallel resistance RpList ...

Page 387: ...uctor Test Parameters IntegTime Integration time FREQ Measurement frequency OscLevel Measurement signal level Anode CMU connected between Anode and Cathode CV sweep measurement VdcStart DC bias start voltage VdcStop DC bias stop voltage VdcStep DC bias step voltage Extended Test Parameters HoldTime Hold time DelayTime Delay time CpMin Minimum value of Cp axis for X Y graph CpMax Maximum value of C...

Page 388: ... Cp LINEAR Y2 axis Inverted value of the squared Cp LINEAR Y3 axis Conductance G LINEAR Y4 axis Carrier density N LOG Y5 axis Depletion width W LINEAR List Display Anode Cathode voltage Vdc Anode Cathode capacitance parallel capacitance Cp Conductance G Parallel resistance Rp Dissipation factor D Carrier density N Depletion width W Parameters Display Area Auto Analysis Agilent EasyEXPERT Applicati...

Page 389: ...0 4428EN pdf Device Under Test Solar Cell Required Modules and Accessories 1 unit of Agilent B1520A MFCMU Device Parameters Temp Temperature Area Area of the solar cell Es Relative permittivity of semiconductor Test Parameters IntegTime Integration time VppStart Peak to peak voltage Vpp start value VppStop Vpp stop voltage VppStep Vpp step voltage FREQ Measurement frequency Anode CMU connected bet...

Page 390: ...pacitance parallel capacitance cp Conductance g Parameters Display Area Auto Analysis Test Output X Y Graph X axis Depletion width W LINEAR Y1 axis Drive level density Ndl LOG Test Output List Display Drive level density Ndl Depletion width W Intercept of Cp Vac characteristics C0 Slope of Cp Vac characteristics C1 Peak to peak voltage VPP DC bias voltage setting VDC Actual DC bias voltage VDCACT ...

Page 391: ...urrent compliance Area Area of solar cell Test Parameters IntegTime Integration time Anode SMU connected to Anode terminal primary sweep voltage output VanodeStart Sweep start voltage for Anode terminal VanodeStop Sweep stop voltage for Anode terminal VanodeStep Sweep step voltage for Anode terminal Cathode SMU or GNDU connected to Cathode terminal constant voltage output 0V Extended Test Paramete...

Page 392: ...cell Power LINEAR Y3 axis Anode current density of the solar cell Jsolar LINEAR List Display Anode voltage of the solar cell Vsolar Anode current of the solar cell Isolar Power of the solar cell Power Anode current density of the solar cell Jsolar Parameters Display Area Auto Analysis Agilent EasyEXPERT Application Library Reference Edition 8 13 12 ...

Page 393: ...iance Area Area of solar cell E Input light irradiance Test Parameters IntegTime Integration time Anode SMU connected to Anode terminal primary sweep voltage output VanodeStart Sweep start voltage for Anode terminal VanodeStop Sweep stop voltage for Anode terminal VanodeStep Sweep step voltage for Anode terminal Cathode SMU or GNDU connected to Cathode terminal constant voltage output 0V Extended ...

Page 394: ...he solar cell Jsolar LINEAR List Display Anode voltage of the solar cell Vsolar Anode current of the solar cell Isolar Power of the solar cell Power Anode current density of the solar cell Jsolar Parameters Display Area Maximum power output of the cell Pmax Voltage at Pmax Vmax Current at Pmax Imax Short circuit current Isc Short circuit current density Jsc Open circuit voltage Voc Fill factor FF ...

Page 395: ...iance Area Area of Solar Cell V_rsh Voltatge to estimate Rsh from the slope of IV characteristics Test Parameters IntegTime Integration time Anode SMU connected to Anode terminal primary sweep voltage output VanodeStart Sweep start voltage for Anode terminal VanodeStop Sweep stop voltage for Anode terminal VanodeStep Sweep step voltage for Anode terminal Cathode SMU or GNDU connected to Cathode te...

Page 396: ...ty of the solar cell Jsolar LINEAR List Display Anode voltage of the solar cell Vsolar Anode current of the solar cell Isolar Anode current density of the solar cell Jsolar Parameters Display Area Shunt Resistance of the cell Rsh Auto Analysis Line1 Tangent line for Y1 at Vsolar V_rsh Agilent EasyEXPERT Application Library Reference Edition 8 13 16 ...

Page 397: ...vity of semiconductor Test Parameters IntegTime Integration time FREQ Measurement frequency OscLevel Measurement signal level Anode CMU connected between Anode and Cathode CV sweep measurement VdcStart DC bias start voltage VdcStop DC bias stop voltage VdcStep DC bias step voltage Extended Test Parameters HoldTime Hold time DelayTime Delay time NMin Minimum value of N axis for X Y graph NMax Maxmu...

Page 398: ...NEAR Y2 axis Anode Cathode capacitance parallel capacitance Cp LINEAR Y3 axis Inverted value of the squared Cp LINEAR List Display Depletion width W Carrier density N Anode Cathode voltage Vdc Anode Cathode capacitance parallel capacitance Cp Conductance G Parallel resistance Rp Dissipation factor D Parameter Display Area Auto Analysis Agilent EasyEXPERT Application Library Reference Edition 8 13 ...

Page 399: ...Device Parameters Temp Temperature Test Parameters IntegTime Integration time Anode CMU connected between Anode and Cathode FreqStart Sweep start frequency NoOfDecade Number of decades for data collection OscLevel Measurement signal level Vdc Anode Cathode voltage constant voltage output Extended Test Parameters Hold_time Hold time Delay_time Delay time Z1_Max Maximum value of Z1 axis for X Y grap...

Page 400: ... Z2 Parameters Display Area Auto Analysis Test Output X Y Graph X axis Real part of the impedance Z1List LINEAR Y1 axis Imaginary part of the impedance Z2List LINEAR Test Output List Display Frequency FreqList Bias voltage VcList Anode Cathode capacitance parallel capacitance CpList Conductance GList Parallel resistance RpList Dissipation factor DList Real part of the impedance Z1List Imaginary pa...

Page 401: ...14 SPGU_PLSDIV ...

Page 402: ...SDIV A 05 03 2013 0124_2013 02 27 1 2 SPGU PLSDIV Id Vd SPGU PLSDIV Id Vd A 05 03 2013 0124_2013 02 27 1 3 SPGU PLSDIV Id Vg SPGU PLSDIV Id Vg A 05 03 2013 0124_2013 02 27 1 Agilent EasyEXPERT Application Library Reference Edition 8 14 2 ...

Page 403: ...1 and SPGU2 SPGU SPGU channel to use SPGU1 Primary sweep SPGU2 Secondary sweep Delay Pulse delay time Width Pulse width Transition Pulse transition leading trailing time Start Start voltage Stop Stop voltage Step Step voltage Base Pulse base voltage Meas MeasCh Measurement SPGU channel MeasDelay Delay till start of measurement MeasInterval Measuring interval NumOfAverage Measurement repetitions Me...

Page 404: ...tage 0 of measurement adjustment Damper Damper coefficient of measurement adjustment VbOption1 Select the SPGU1 base voltage will be Base1 or Peak1 3 VbOption2 Select the SPGU2 base voltage will be Base2 or Peak2 3 3 If you select Peak for VbOption the pulse base voltage is same as Peak and the output waveform will be kind of pseudo DC bias Agilent EasyEXPERT Application Library Reference Edition ...

Page 405: ...sating the actual period You have to monitor the actual waveform by an oscilloscope to tune it The default value is tuned for B1500A A 05 02 on Windows 7 Gate Gate terminal definition VgStart Gate start voltage VgStop Gate stop voltage VgStep Gate step voltage VgBase Gate pulse base voltage GateDelay Gate pulse delay time GateWidth Gate pulse width GateTransition Gate pulse transition leading trai...

Page 406: ...rget voltage 0 of measurement adjustment Damper Damper coefficient of measurement adjustment VgBaseOption Select the gate base voltage will be VgBase or VgPeak 2 VdBaseOption Select the drain base voltage will be VdBase or VdPeak 2 2 If you select VxPeak for VxBaseOption the pulse base voltage is same as Peak and the output waveform will be kind of pseudo DC bias Agilent EasyEXPERT Application Lib...

Page 407: ...al period You have to monitor the actual waveform by an oscilloscope to tune it The default value is tuned for B1500A A 05 02 on Windows 7 Gate Gate terminal definition VgStart Gate start voltage VgStop Gate stop voltage VgStep Gate step voltage VgBase Gate pulse base voltage GateDelay Gate pulse delay time GateWidth Gate pulse width GateTransition Gate pulse transition leading trailing time Drain...

Page 408: ...ent of measurement adjustment VgBaseOption Select the gate base voltage will be VgBase or VgPeak 2 VdBaseOption Select the drain base voltage will be VdBase or VdPeak 2 2 If you select VxPeak for VxBaseOption the pulse base voltage is same as Peak and the output waveform will be kind of pseudo DC bias Agilent EasyEXPERT Application Library Reference Edition 8 14 8 ...

Page 409: ...15 Structure ...

Page 410: ...11 14 Junction BV Junction device breakdown voltage A 01 20 15 Junction DcParam Junction device DC parameters Is N Rs A 01 20 16 Junction IV Fwd Diode forward bias characteristics A 01 20 17 Junction IV Rev Diode reverse bias characteristics A 01 20 18 QSCV 2 C Vg Ig Vg 2 terminal A 03 00 19 QSCV C Offset Meas Offset capacitance measurement 20 Rdiff I kelvin Diffusion resistor R I characteristics ...

Page 411: ...ime Integration time Gate SMU connected to Gate primary sweep voltage output VgStart Pulse peak start value VgStop Pulse peak stop value VgStep Pulse peak step value VgLow Pulse base value primary sweep start value IgLimit Gate current compliance Subs SMU connected to Substrate constant voltage output Vsubs Substrate voltage VgStart VgStop VgStep values are used to calculate the primary sweep stop...

Page 412: ...t X Y Graph X axis Gate voltage V_gate LINEAR Y1 axis Gate current I_gate LOG Y2 axis Gate current at pulse base voltage I_gate LowVg LOG Test Output List Display Gate voltage V_gate Gate current I_gate Gate current at pulse base voltage I_gate LowVg Gate current per Gate unit area I_gatePerArea I_gate LowVg per Gate unit area I_gate LowVgPerArea Agilent EasyEXPERT Application Library Reference Ed...

Page 413: ...tage for Gate VgStop Sweep stop voltage for Gate VgStep Sweep step voltage for Gate Subs SMU connected to Substrate constant voltage output Vsubs Substrate voltage Extended Test Parameters HoldTime Hold time DelayTime Delay time GateMinRng Minimum rabge for the gate current measurement Measurement Parameters Gate current Igate For the all terminals the SMU current compliance is set to Ig BVgb 1 1 ...

Page 414: ...minals Connect CMU High and CMU Low to the substrate and gate respectively Required Modules and Accessories Agilent B1520A MFCMU 1 unit Device Parameters Polarity Nch CMU forces the specified value or Pch CMU forces the negative specified value Lg Gate length Wg Gate width Temp Temperature deg C Test Parameters IntegTime Integration time FreqStart Sweep start frequency LOG sweep NoOfDecade Number ...

Page 415: ...resistance Rp Dissipation factor D Reactance X Impedance Z Phase Theta Substrate voltage Vsubs Test Output X Y Graph X axis Frequency list FreqList LOG Y1 axis Gate capacitance parallel capacitance list CpList LINEAR Y2 axis Conductance list GList LINEAR Test Output List Display Frequency FreqList Gate capacitance parallel capacitance CpList Conductance GList Series capacitance CsList Series resis...

Page 416: ...t the measurement frequency on the Frequency area of the Advanced Options for CMU Calibration window Default frequencies 1 k 2 k 5 k 10 k 20 k 50 k 100 k 200 k 500 k 1 M 1 2 M 1 5 M 2 M 2 5 M 2 7 M 3 M 3 2 M 3 5 M 3 7 M 4 M 4 2 M 4 5 M 5 MHz Device Under Test MOS capacitor Connect Gate to the CMU Low and Substrate to the CMU High Device Parameters Polarity Nch CMU forces the specified value or Pch...

Page 417: ...Output X Y Graph X axis Gate voltage VGB LINEAR Y1 axis Gate capacitance parallel capacitance Cgb LINEAR Y2 axis Gate capacitance parallel capacitance Cp_FREQ1 LINEAR Y3 axis Gate capacitance parallel capacitance Cp_FREQ2 LINEAR Test Output List Display Gate voltage VGB Gate capacitance parallel capacitance Cgb Gate capacitance parallel capacitance Cp_FREQ1 Gate capacitance parallel capacitance Cp...

Page 418: ... M 1 2 M 1 5 M 2 M 2 5 M 2 7 M 3 M 3 2 M 3 5 M 3 7 M 4 M 4 2 M 4 5 M 5 MHz Device Under Test MOS capacitor Connect Gate to the CMU Low and Substrate to the CMU High Device Parameters Polarity Nch CMU forces the specified value or Pch CMU forces the negative specified value Lg Gate length Wg Gate width Temp Temperature Test Parameters IntegTime Integration time FREQ Measurement frequency OscLevel M...

Page 419: ... List Display Gate voltage Vgate Gate capacitance parallel capacitance Cp Conductance G Series capacitance Cs Series resistance Rs Parallel resistance Rp Dissipation factor D Reactance X Impedance Z Phase Theta Gate Substrate capacitance per Gate unit area CpPerArea Gate Substrate capacitance per Gate unit width CpPerWg Agilent EasyEXPERT Application Library Reference Edition 8 15 11 ...

Page 420: ... 20 k 50 k 100 k 200 k 500 k 1 M 1 2 M 1 5 M 2 M 2 5 M 2 7 M 3 M 3 2 M 3 5 M 3 7 M 4 M 4 2 M 4 5 M 5 MHz Required Modules and Accessories Agilent B1520A MFCMU 1 unit Device Parameters L Junction length W Junction width Temp Temperature deg C Test Parameters IntegTime Integration time FreqStart Sweep start frequency LOG sweep NoOfDecade Number of decades for data collection OscLevel Measurement sig...

Page 421: ...e Rs Parallel resistance Rp Dissipation factor D Reactance X Impedance Z Phase Theta Test Output X Y Graph X axis Frequency list FreqList LOG Y1 axis Gate capacitance parallel capacitance list CpList LINEAR Y2 axis Conductance list GList LINEAR Test Output List Display Frequency FreqList Anode voltage VaList Gate capacitance parallel capacitance CpList Conductance GList Series capacitance CsList S...

Page 422: ...500 k 1 M 1 2 M 1 5 M 2 M 2 5 M 2 7 M 3 M 3 2 M 3 5 M 3 7 M 4 M 4 2 M 4 5 M 5 MHz Device Under Test Junction device diode Device Parameters L Junction length W Junction width Temp Temperature Test Parameters IntegTime Integration time FREQ Measurement frequency OscLevel Measurement signal level Anode CMU connected between Anode and Cathode CV sweep measurement VacStart DC bias start voltage VacSto...

Page 423: ...ay Anode voltage Vanode Junction capacitance parallel capacitance Cp Conductance G Series capacitance Cs Series resistance Rs Parallel resistance Rp Dissipation factor D Reactance X Impedance Z Phase Theta Junction capacitance per unit area CpPerArea Junction capacitance per unit width CpPerWg Agilent EasyEXPERT Application Library Reference Edition 8 15 15 ...

Page 424: ...HRSMU ASU are required ASU 1 connections Output anode SMU HRSMU AUX MFCMU High ASU 2 connections Output cathode SMU HRSMU AUX MFCMU Low Connection wire must be connected between the CMU Return terminals of ASUs Setting of ASU I O Path ASU tab Configuration window AUX Device Parameters L Diode length W Diode width Temp Temperature Test Parameters IntegTime Integration time Test Parameters for Junct...

Page 425: ...allel resistance Rp Dissipation factor D Reactance X Capacitance per junction unit area Cp_S Junction Capacitance Measurements Parameters Display Area Zero bias capacitance value Cj0 Breakdown Voltage Measurements Measurement Parameters Anode current For the anode terminal the SMU current compliance is set to Ianode BD 1 1 Breakdown Voltage Measurements User Function Anode current per junction uni...

Page 426: ... module two SMU modules and a set of SCUU GSWU are required SCUU connections Output1 anode Output2 cathode Connection wire must be connected between the GSWU and the DUT interface High Low guard lines for the capacitance measurements Device Parameters L Diode length W Diode width Temp Temperature Test Parameters IntegTime Integration time Test Parameters for Junction Capacitance Measurements Anode...

Page 427: ...nce Rp Dissipation factor D Reactance X Capacitance per junction unit area Cp_S Junction Capacitance Measurements Parameters Display Area Zero bias capacitance value Cj0 Breakdown Voltage Measurements Measurement Parameters Anode current For the anode terminal the SMU current compliance is set to Ianode BD 1 1 Breakdown Voltage Measurements User Function Anode current per junction unit area Ianode...

Page 428: ...ry sweep current output IgStart Sweep start current for Gate terminal IgStop Sweep stop current for Gate terminal VgLimit Gate voltage compliance Subs SMU connected to Substrate constant voltage output Vsubs Substrate voltage Extended Test Parameters HoldTime Hold time DelayTime Delay time SubsMinRng Minimum range for the substrate current measurement Measurement Parameters Gate voltage Vgate Subs...

Page 429: ...voltage for Gate terminal VgStep Sweep step voltage for Gate terminal IgLimit Gate current compliance Subs SMU connected to Substrate constant voltage output Vsubs Substrate voltage Extended Test Parameters HoldTime Hold time DelayTime Delay time GateMinRng Minimum range for the gate current measurement SubsMinRng Minimum range for the substrate current measurement Measurement Parameters Gate curr...

Page 430: ...1 M 1 2 M 1 5 M 2 M 2 5 M 2 7 M 3 M 3 2 M 3 5 M 3 7 M 4 M 4 2 M 4 5 M 5 MHz Device Under Test Capacitor generated between two interconnections in the same layer Device Parameters L Metal length Temp Temperature Test Parameters IntegTime Integration time FREQ Measurement frequency OscLevel Measurement signal level MetalA CMU connected between MetalA and MetalB CV sweep measurement Vstart DC bias st...

Page 431: ...AR List Display Measurement frequency Freq DC bias VmetalA Interconnection capacitance parallel capacitance Cp Conductance G Series capacitance Cs Series resistance Rs Parallel resistance Rp Dissipation factor D Reactance X Impedance Z Phase Theta Cs per unit length CpPerLength Cp per unit length CpPerLength Agilent EasyEXPERT Application Library Reference Edition 8 15 23 ...

Page 432: ... k 200 k 500 k 1 M 1 2 M 1 5 M 2 M 2 5 M 2 7 M 3 M 3 2 M 3 5 M 3 7 M 4 M 4 2 M 4 5 M 5 MHz Device Under Test Film capacitor generated between two interconnection layers Device Parameters L Metal length W Metal width Temp Temperature Test Parameters IntegTime Integration time FREQ Measurement frequency OscLevel Measurement signal level MetalA CMU connected between MetalA and MetalB CV sweep measure...

Page 433: ...nductance G LINEAR List Display Measurement frequency Freq DC bias VmetalA Film capacitance parallel capacitance Cp Conductance G Series capacitance Cs Series resistance Rs Parallel resistance Rp Dissipation factor D Reactance X Impedance Z Phase Theta Agilent EasyEXPERT Application Library Reference Edition 8 15 25 ...

Page 434: ...anodeStop Sweep stop voltage for Anode terminal VanodeStep Sweep step voltage for Anode terminal Cathode SMU connected to Cathode terminal constant voltage output Extended Test Parameters Vcathode Cathode voltage HoldTime Hold time DelayTime Delay time AnodeMinRng Minimum range for the anode current meausrement Measurement Parameters Anode current Ianode Cathode current Icathode User Function Iano...

Page 435: ...r unit area IanodePerArea Cathode current Icathode Cathode current per unit area IcathodePerArea Parameters Display Area Junction breakdown voltage BV Auto Analysis Line1 Vertical line through Y1 data at Ianode Ianode BV Agilent EasyEXPERT Application Library Reference Edition 8 15 27 ...

Page 436: ...e terminal VanodeStop Sweep stop voltage for Anode terminal VanodeStep Sweep step voltage for Anode terminal Cathode SMU connected to Cathode terminal constant voltage output Extended Test Parameters Vcathode Cathode voltage HoldTime Hold time DelayTime Delay time AnodeMinRng Minimum range for the anode current measurement Measurement Parameters Anode current Ianode Cathode current Icathode User F...

Page 437: ... Slope N LINEAR Parameters Display Area Slope minimum value N_Min Reverse direction saturation current minimum value IsMin Reverse direction saturation current minimum value IsMin2 Series resistance Rs Auto Analysis Line1 Tangent line through Y1 data at Slope max Slope Agilent EasyEXPERT Application Library Reference Edition 8 15 29 ...

Page 438: ...t Sweep start voltage for Anode terminal VanodeStop Sweep stop voltage for Anode terminal VanodeStep Sweep step voltage for Anode terminal Cathode SMU connected to Cathode terminal constant voltage output Extended Test Parameters Vcathode Cathode voltage HoldTime Hold time DelayTime Delay time AnodeMinRng Minimum range for the anode current measurement Measurement Parameters Anode current Ianode C...

Page 439: ... terminal VanodeStop Sweep stop voltage for Anode terminal VanodeStep Sweep step voltage for Anode terminal IanodeLimit Anode current compliance Cathode SMU connected to Cathode terminal constant voltage output Extended Test Parameters Vcathode Cathode voltage HoldTime Hold time DelayTime Delay time AnodeMinRng Minimum range for the anode current measurement Measurement Parameters Anode current Ia...

Page 440: ...CV measurement voltage I_Comp Current compliance LeakCompen Leakage current compensation on off MeasRange Current measurement range used for the QSCV measurement fixed range Integ_C Integration time for the capacitance measurement Integ_L Integration time for the leakage current measurement HoldTime Hold time DelayTime Delay time IOffsetCancel QSCV smart operation enable disable IOffsetSink SMU to...

Page 441: ...Leakage current IgLeak X Y Graph X axis Gate Voltage Vg LINEAR Y1 axis Capacitance C LINEAR Y2 axis Leakage current Ig LINEAR List Display Gate voltage Vg Capacitance C Leakage current Ig Agilent EasyEXPERT Application Library Reference Edition 8 15 33 ...

Page 442: ...negative specified value Lg Gate length Wg Gate width Temp Temperature Test Parameters IMeasSMU SMU to measure current and capacitance connected to Gate terminal or Substrate terminal MeasRange Current measurement range used for the QSCV measurement fixed range Integ_C Integration time for the capacitance measurement Integ_L Integration time for the leakage current measurement HoldTime Hold time D...

Page 443: ...p current I1Step Primary sweep step current V1Limit Port1 voltage compliance Subs SMU connected to substrate secondary sweep voltage output VsubsStart Secondary sweep start voltage VsubsStop Secondary sweep stop voltage VsubsStep Secondary sweep step voltage IsubsLimit Subs current compliance Port2 SMU connected to resistor constant voltage output VM1 SMU connected to resistor constant current out...

Page 444: ...AR Y2 axis Voltage between terminals DeltaV LINEAR List Display Port1 output current I1 Port1 measurement voltage V1 Subs output voltage Vsubs Voltage between terminals DeltaV Resistance R Sheet resistance Rsheet Agilent EasyEXPERT Application Library Reference Edition 8 15 36 ...

Page 445: ...ep step current V1Limit Port1 voltage compliance Subs SMU connected to substrate secondary sweep voltage output VsubsStart Secondary sweep start voltage VsubsStop Secondary sweep stop voltage VsubsStep Secondary sweep step voltage IsubsLimit Subs current compliance Port2 SMU connected to resistor constant voltage output Extended Test Parameters V2 Port2 output voltage HoldTime Hold time DelayTime ...

Page 446: ...sweep step voltage I1Limit Port1 current compliance Subs SMU connected to substrate secondary sweep voltage output VsubsStart Secondary sweep start voltage VsubsStop Secondary sweep stop voltage VsubsStep Secondary sweep step voltage IsubsLimit Subs current compliance Port2 SMU connected to resistor constant voltage output VM1 SMU connected to resistor constant current output VM2 SMU connected to ...

Page 447: ...is Port1 measurement current I1 LINEAR Y2 axis Resistance R LINEAR List Display Port1 output voltage V1 Voltage between terminals DeltaV Port1 measurement current I1 Resistance R Sheet resistance Rsheet Agilent EasyEXPERT Application Library Reference Edition 8 15 39 ...

Page 448: ...current compliance Subs SMU connected to substrate secondary sweep voltage output VsubsStart Secondary sweep start voltage VsubsStop Secondary sweep stop voltage VsubsStep Secondary sweep step voltage IsubsLimit Subs current compliance Port2 SMU connected to resistor constant voltage output Extended Test Parameters V2 Port2 output voltage HoldTime Hold time DelayTime Delay time Port1MinRng Minimum...

Page 449: ...meter 1 unit GPIB cable Required Test Definition Measure Diff V Device Parameters L Resistor length W Resistor width Temp Temperature deg C Test Parameters IntegTime Integration time Port1 SMU connected to resistor current output I1 Applied current V1Limit Port1 voltage compliance Port2 SMU connected to resistor constant voltage output GPIB_Adr GPIB address of DVM Extended Test Parameters V2 Port2...

Page 450: ...rt2 Measured voltage Vport2 Test Output X Y Graph X axis Applied current IsmuList LINEAR Y1 axis DVM measurement result voltage VdvmList LINEAR Y2 axis Measured voltage VsmuList LINEAR Y3 axis Resistance value LINEAR Test Output List Display IsmuList Applied current VsmuList Measured voltage VdvmList DVM measured voltage RList Resistance value Test Output Parameters Rav Average resistance value of...

Page 451: ...p current I1Step Sweep step current V1Limit Port1 voltage compliance Port2 SMU connected to resistor constant voltage output VM1 SMU connected to resistor constant current output VM2 SMU connected to resistor constant current output Extended Test Parameters V2 Port2 output voltage IM1 VM1 output current IM2 VM2 output current HoldTime Hold time DelayTime Delay time Measurement Parameters Port1 mea...

Page 452: ...15 Structure List Display Port1 output current I1 Port1 measurement voltage V1 Resistance R Voltage between terminals DeltaV Agilent EasyEXPERT Application Library Reference Edition 8 15 44 ...

Page 453: ... I1Stop Sweep stop current I1Step Sweep step current V1Limit Port1 voltage compliance Port2 SMU connected to resistor constant voltage output Extended Test Parameters V2 Port2 output voltage HoldTime Hold time DelayTime Delay time Measurement Parameters Port1 measurement voltage V1 User Function Resistance R V1 I1 Sheet resistance Rsheet R W L X Y Graph X axis Port1 output current I1 LINEAR Y1 axi...

Page 454: ...timeter 1 unit GPIB cable Required Test Definition Measure Diff V Device Parameters L Resistor length W Resistor width Temp Temperature deg C Test Parameters IntegTime Integration time Port1 SMU connected to resistor voltage output V1 Applied voltage I1Limit Port1 current compliance Port2 SMU connected to resistor constant voltage output GPIB Adr GPIB address of DVM Extended Test Parameters V2 Out...

Page 455: ...ed voltage Vport2 Measured current Iport1 Test Output X Y Graph X axis Applied voltage VsmuList LINEAR Y1 axis DVM measurement result voltage VdvmList LINEAR Y2 axis Measured current IsmuList LINEAR Y3 axis Resistance value RList LINEAR Test Output List Display VdvmList DVM measured voltage IsmuList Measured current RList Resistance value Test Output Parameters Rav Average resistance value of 2 me...

Page 456: ...stor constant voltage output VM1 SMU connected to resistor constant current output VM2 SMU connected to resistor constant current output Extended Test Parameters V2 Port2 output voltage IM1 VM1 output current IM2 VM2 output current HoldTime Hold time DelayTime Delay time Port1MinRng Minimum range for the port1 current measurement Measurement Parameters Port1 measurement current I1 VM1 measurement ...

Page 457: ...tep Sweep step voltage I1Limit Port1 current compliance Port2 SMU connected to resistor constant voltage output Extended Test Parameters V2 Port2 output voltage HoldTime Hold time DelayTime Delay time Port1MinRng Minimum range for the port1 current measurement Measurement Parameters Port1 measurement current I1 User Function Resistance R V1 I1 Sheet resistance Rsheet R W L X Y Graph X axis Port1 o...

Page 458: ...ort2 SMU connected to pattern constant voltage output VM1 SMU connected to pattern constant current output VM2 SMU connected to pattern constant current output Extended Test Parameters V2 Port2 output voltage IM1 VM1 output current IM2 VM2 output current HoldTime Hold time DelayTime Delay time Measurement Parameters VM1 measurement voltage Vm1 VM2 measurement voltage Vm2 User Function Voltage betw...

Page 459: ...16 TFT ...

Page 460: ...16 TFT 1 TFT Id Vd TFT Id Vd characteristics A 01 20 2 TFT Id Vg TFT Id Vg characteristics A 01 20 Agilent EasyEXPERT Application Library Reference Edition 8 16 2 ...

Page 461: ...Drain terminal Gate SMU connected to Gate terminal secondary sweep voltage output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Source SMU connected to Source terminal constant voltage output Extended Test Parameters Vs Source voltage IgLimit Gate current compliance HoldTime Hold time DelayTime Delay time Drain...

Page 462: ...Sweep start voltage for Drain terminal VdStop Sweep stop voltage for Drain terminal VdStep Sweep step voltage for Drain terminal Source SMU connected to Source terminal constant voltage output Extended Test Parameters Vs Source voltage HoldTime Hold time DelayTime Delay time DrainMinRng Minimum range for the drain current measurement Measurement Parameters Drain current Idrain User Function Idrain...

Page 463: ...17 Utility ...

Page 464: ...01 20 7 Measure Diff V Voltage measurement by 3458A A 01 20 8 QSCV C Offset Meas Offset capacitance measurement 9 ResetPG PG reset A 01 20 10 Subsite move Probing next subsite A 02 00 11 CVSweep4284_a C V measurement by 4284A E4980A A 03 10 12 CV Curve Parameter Calculator Calculates CMOS transistor parameters from capacitance versus voltage sweeps A 01 02 Agilent EasyEXPERT Application Library Re...

Page 465: ...ulse Generator and triggers it Input Parameters Address GPIB address of the Agilent 81110A Pulse Generator Period1 Output1 pulse period s Delay1 Output1 delay time s Dcyc1 Output1 duty cycle Level1 Output1 pulse level V Base1 Output1 base level V TrigCount Number of output pulses 1 to 65536 Agilent EasyEXPERT Application Library Reference Edition 8 17 3 ...

Page 466: ...ulse Generator and triggers it Input Parameters Address GPIB address of the Agilent 81110A Pulse Generator Period2 Output2 pulse period s Delay2 Output2 delay time s Dcyc2 Output2 duty cycle Level2 Output2 pulse level V Base2 Output2 base level V TrigCount Number of output pulses 1 to 65536 Agilent EasyEXPERT Application Library Reference Edition 8 17 4 ...

Page 467: ... 1 Delay1 Pulse delay time s for port 1 Width1 Pulse width s for port 1 LeadTime1 Pulse leading edge transition time s for port 1 TrailTime1 Pulse trailing edge transition time s for port 1 Level1 Pulse High level V for port 1 Base1 Pulse Low level V for port 1 ExtImp1 Load impedance ohm for port 1 Period2 Pulse period s for port 2 Delay2 Pulse delay time s for port 2 Width2 Pulse width s for port...

Page 468: ...Period1 Output1 pulse period s Delay1 Output1 delay time s Dcyc1 Output1 duty cycle LeadTime1 Output1 pulse leading edge transition time s TrailTime1 Output1 pulse trailing edge transition time s Level1 Output1 pulse high level V Base1 Output1 pulse low level V ExtImp1 Output1 load impedance ohm NoOfPulse12 Number of output pulses 1 to 65536 Period2 Output2 pulse period s Delay2 Output2 delay time...

Page 469: ...red Modules and Accessories Agilent 81110A Pulse Generator 2 output PGU1 and PGU2 GPIB cable Test Parameters Address GPIB address of Agilent 81110A Pulse Generator SelectPort Pulse output port Period Pulse period s Delay Pulse delay time s Width Pulse width s LeadTime Pulse leading edge transition time s TrailTime Pulse trailing edge transition time s Level Pulse High level V Base Pulse Low level ...

Page 470: ...efore the specified pulses are applied Required Modules and Accessories Agilent 81110A Pulse Generator 2 output PGU1 and PGU2 GPIB cable Test Parameters Address GPIB address of Agilent 81110A Pulse Generator Period1 Pulse period s Delay1 Pulse delay time s Dcyc1 Duty cycle LeadTime1 Pulse leading edge transition time s TrailTime1 Pulse trailing edge transition time s Level1 Pulse High level V Base...

Page 471: ... terminals by using Agilent 3458A Digital Multimeter Measurement data is stored to DVM_Val variable Required Modules and Accessories Agilent 3458A Digital Multimeter GPIB cable Input Parameters Adrs GPIB address of Agilent 3458A Digital Multimeter Test Output Analaysis Parameters DVM_Val Voltage measurement data V Agilent EasyEXPERT Application Library Reference Edition 8 17 9 ...

Page 472: ...gative specified value Lg Gate length Wg Gate width Temp Temperature Test Parameters IMeasSMU SMU to measure current and capacitance connected to Gate terminal or Substrate terminal MeasRange Current measurement range used for the QSCV measurement fixed range Integ_C Integration time for the capacitance measurement Integ_L Integration time for the leakage current measurement HoldTime Hold time Del...

Page 473: ...4156B 4156C Description Resets Agilent 81110A Pulse Generator Required Modules and Accessories Agilent 81110A Pulse Generator 2 output PGU1 and PGU2 GPIB cable Input Parameter GPIB address of Agilent 81110A Pulse Generator Agilent EasyEXPERT Application Library Reference Edition 8 17 11 ...

Page 474: ...this application test supports Cascade Microtech SUSS MicroTec and Vector Semiconductor wafer prober drivers as standard basis you may specify a command path name into the CustomProber entry field to operate with a non standard wafer prober driver Test Parameters ProberType Type of wafer prober CustomProber Command path name for non standard wafer probers If CustomProber is not blank ProberType fi...

Page 475: ...CR meter Osc_Level Measurement signal level Frequency Measurement frequency Integ_Time Integration time Vstart C V measurement start voltage Vstop C V measurement stop voltage Sweep_Pts Number of sweep points Cmax Maximum value of graph axis for plotting capacitance Extended Test Parameters Delay_Time Delay time Hold_Time Hold time Real_Time_Display Run time automatic update of graph display Measu...

Page 476: ...eter such as a 4284A E4980A or 4294A that is being controlled by an application test Device Parameters Area Area of the transistor gate cm 2 TempC Ambient temperature degrees Celsius Pm Work function of the gate material Volts Device Device type NMOS 1 PMOS 1 Test Parameters Vsweep Vector containing a minimum of 3 and a maximum of 1001 points representing the voltage applied to the transistor gate...

Page 477: ...ariable within EasyEXPERT Note 2 Sample QSCV and HFCV measurement data for a device is included with this application test Clicking on the input box for Cmeas will make softkey entries for these two data sets appear The other default parameters for this application test are correct for this data Agilent EasyEXPERT Application Library Reference Edition 8 17 15 ...

Page 478: ...17 Utility Agilent EasyEXPERT Application Library Reference Edition 8 17 16 ...

Page 479: ...18 WGFMU ...

Page 480: ...st BTI AC stress Id Vg Bias Temperature Instability Test using WGFMU A 03 20 4 Fast BTI DC stress Id Vg Bias Temperature Instability Test using WGFMU A 03 20 5 TRANSIV DC IdVd Id Vd characteristics using RSU A 03 20 6 TRANSIV DC IdVg Id Vg characteristics using RSU A 03 20 7 WGFMU Pattern Editor WGFMU Pattern Editor A 03 20 Agilent EasyEXPERT Application Library Reference Edition 8 18 2 ...

Page 481: ...annel connected to Gate terminal DrainCh WGFMU channel connected to Drain terminal IdMeasRange Drain current measurement range for Id measurement IdStressRange Drain current measurement range for AC stress RangeChangeHold Wait time at the transition from stress to measurement RangeChangeHold must be set to minimize the impact of the range change Stress Setup VgStress AC stress peak voltage for Gat...

Page 482: ...data used for result data plot Device delay time must be set to avoid that the high voltage is applied to the drain and gate terminals simultaneously at the transition between stress and measurement The value depends on the device under test TransEdge value and such PointToPlot must be 1 to MeasPoints PointToPlot 1 specifies the first measurement data Device_ID_Setup Device_ID_Override Y sets the ...

Page 483: ...rent measurement range for Id measurement IdStressRange Drain current measurement range for DC stress RangeChangeHold Wait time at the transition from stress to measurement RangeChangeHold must be set to minimize the impact of the range change Stress Setup VgStress Stress voltage for Gate terminal VdStress Stress voltage for Drain terminal Accumlated_Stress_Time Accumulated stress time Accumulated...

Page 484: ...stress and measurement The value depends on the device under test TransEdge value and such PointToPlot must be 1 to MeasPoints PointToPlot 1 specifies the first measurement data Device_ID_Setup Device_ID_Override Y sets the New_Device_ID value to the Device ID or N does not set New_Device_ID Device ID Extended Test Parameters VgForceRange Gate voltage output range VdForceRange Drain voltage output...

Page 485: ...l DrainCh WGFMU channel connected to Drain terminal IdMeasRange Drain current measurement range for Id Vg measurement IdStressRange Drain current measurement range for AC stress RangeChangeHold Wait time at the transition from stress to measurement RangeChangeHold must be set to minimize the impact of the range change Stress Setup VgStress AC stress peak voltage for Gate terminal VgStressBase AC s...

Page 486: ...s defined as the time from the step output start to the step measurement start Hold time is defined as the time from the measurement voltage output start to the sweep operation start For the Dual slope the hold time is taken at the sweep start of both forward sweep and reverse sweep Device_ID_Setup Device_ID_Override Y sets the New_Device_ID value to the Device ID or N does not set New_Device_ID D...

Page 487: ...nel connected to Drain terminal IdMeasRange Drain current measurement range for Id Vg measurement IdStressRange Drain current measurement range for DC stress RangeChangeHold Wait time at the transition from stress to measurement RangeChangeHold must be set to minimize the impact of the range change Stress Setup VgStress Stress voltage for Gate terminal VdStress Stress voltage for Drain terminal Ac...

Page 488: ...efined as the time from the measurement voltage output start to the sweep operation start For the Dual slope the hold time is taken at the sweep start of both forward sweep and reverse sweep Device_ID_Setup Device_ID_Override Y sets the New_Device_ID value to the Device ID or N does not set New_Device_ID Device ID Extended Test Parameters VgForceRange Gate voltage output range VdForceRange Drain v...

Page 489: ...arameters Gate SMU connected to Gate terminal secondary sweep voltage output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Drain SMU connected to Drain terminal primary sweep voltage output VdStart Sweep start voltage for Drain terminal VdStop Sweep stop voltage for Drain terminal VdStep Sweep step voltage for ...

Page 490: ...arameters Gate SMU connected to Gate terminal primary sweep voltage output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Drain SMU connected to Drain terminal secondary sweep voltage output VdStart Sweep start voltage for Drain terminal VdStop Sweep stop voltage for Drain terminal VdStep Sweep step voltage for ...

Page 491: ...nd measurement event data WaveformCh1 Channel1 waveform data WaveformCh2 Channel2 waveform data MeasurementEvent Measurement event data Waveform data and measurement event data can be defined by using the Define vector data dialog box To open the Define vector data dialog box click the left button of each field Clicking the button on the dialog box increases the row Waveform data Column 1 Time abs...

Page 492: ...eform during measurement Enable_Waveform_MeasTiming displays Waveform and MeasTiming during measurement DataDisplay_Mode Data Display window display mode x time _y meas Time for X axis and measurement data for Y axis x meas1 _y meas2 Ch1 measurement data for X axis and Ch2 measurement data for Y axis Extended Test Parameters LogToFile Enable or Disable Enable logs error and warning Disable does no...

Page 493: ...19 WGFMU_IV ...

Page 494: ...6 1 3 WGFMU Id Vd pulse WGFMU Id Vd pulse A 05 03 2013 0124_2013 03 26 1 4 WGFMU Id Vg DC WGFMU Id Vg DC A 05 03 2013 0124_2013 03 26 1 5 WGFMU Id Vg pulse WGFMU Id Vg pulse A 05 03 2013 0124_2013 03 26 1 6 WGFMU PLSDIV WGFMU PLSDIV A 05 03 2013 0124_2013 03 26 1 Agilent EasyEXPERT Application Library Reference Edition 8 19 2 ...

Page 495: ...Start Sweep start voltage Ch1VStop Sweep stop voltage Ch1VStep Sweep step voltage Ch2VConst Constant voltage RiseTime Rise time of each step Hold Hold time MeasDelay Measurement delay time AveragingTime Measurement averaging time For detailed timing information please scroll down to the bottom of Test Parameters window Extended Test Parameters DataDisplay_PatternValidation PatternValidation data d...

Page 496: ...weep step voltage for Gate MeasRange Measurement range for drain current RiseTime Rise time of each step Hold Hold time MeasDelay Measurement delay time AveragingTime Measurement averaging time Extended Test Parameters DataDisplay_PatternValidation PatternValidation data display mode Not effective for Pattern Validation mode Disable does not display PatternValidation data during measurement Enable...

Page 497: ...19 WGFMU_IV Id Drain current Vg gate voltage Agilent EasyEXPERT Application Library Reference Edition 8 19 5 ...

Page 498: ...oltage output VgStart Sweep start voltage of pulse top for Gate VgStop Sweep stop voltage of pulse top for Gate VgStep Sweep step voltage of pulse top for Gate VgPulseBase Pulse base voltage for Gate VgPulseDelay Pulse delay for Gate VgPulseRiseTime Pulse rise time for Gate VgPulseWidth Pulse width for Gate VgPulseFallTime Pulse fall time for Gate MeasRange Measurement range for drain current Hold...

Page 499: ...Parameters Id Drain current X Y Plot X axis Vd Drain voltage LINEAR Y1 axis Id Drain current LINEAR List Display Vd Drain voltage Id Drain current Vg gate voltage Agilent EasyEXPERT Application Library Reference Edition 8 19 7 ...

Page 500: ...weep step voltage for Gate MeasRange Measurement range for drain current RiseTime Rise time of each step Hold Hold time MeasDelay Measurement delay time AveragingTime Measurement averaging time Extended Test Parameters DataDisplay_PatternValidation PatternValidation data display mode Not effective for Pattern Validation mode Disable does not display PatternValidation data during measurement Enable...

Page 501: ...19 WGFMU_IV Id Drain current Vd Drain voltage Agilent EasyEXPERT Application Library Reference Edition 8 19 9 ...

Page 502: ...ltage output VgStart Sweep start voltage of pulse top for Gate VgStop Sweep stop voltage of pulse top for Gate VgStep Sweep step voltage of pulse top for Gate VgPulseBase Pulse base voltage for Gate VgPulseDelay Pulse delay for Gate VgPulseRiseTime Pulse rise time for Gate VgPulseWidth Pulse width for Gate VgPulseFallTime Pulse fall time for Gate MeasRange Measurement range for drain current Hold ...

Page 503: ...Parameters Id Drain current X Y Plot X axis Vg Gate voltage LINEAR Y1 axis Id Drain current LINEAR List Display Vg gate voltage Id Drain current Vd Drain voltage Agilent EasyEXPERT Application Library Reference Edition 8 19 11 ...

Page 504: ... Pulse Rise Time ChXPulseWidth Pulse width ChXPulseFallTime Pulse Fall Time Ch1VStart Sweep start voltage of pulse top Ch1VStop Sweep stop voltage of pulse top Ch1VStep Sweep step voltage of pulse top Ch2VConst Constant voltage of pulse top Hold Hold time MeasDelay Measurement delay time AveragingTime Measurement averaging time For detailed timing information please scroll down to the bottom of Te...

Page 505: ...20 GaN Diode ...

Page 506: ...t Sampling GaN Diode Current Collapse characteristics using N1267A A 05 02 2 Diode Current Collapse Signal Monitor GaN Diode Current Collapse characteristics using N1267A A 05 03 Agilent EasyEXPERT Application Library Reference Edition 8 20 2 ...

Page 507: ... applied while on state Voltage drops inside of N1267A according to on state current IOnLimit Current compliance for on state OffStressTime Duration of VOff application SamplingInterval Sampling interval NumberOfSamples Number of samples Extended Test Parameters SamplingMode Options for linear or log sampling SamplingStartTime Time offset from turning DUT on to starting sampling MaxPlottingTime Ma...

Page 508: ...SMU R Resistance V I Ta Temperature Temp X Y Plot X axis Time Y1 axis R Y2 axis V Y3 axis I List Display Time R V I V_HCSMU I_HCSMU V_HVSMU I_HVSMU V_SwitchControl I_SwitchControl Parameter Display Area Ta Agilent EasyEXPERT Application Library Reference Edition 8 20 4 ...

Page 509: ...athode voltage applied while off state VOn Cathode voltage applied while on state Voltage drops insIe of N1267A according to on state current IOnLimit Current compliance for on state OffStressTime Duration of VOff application OnTime Duration of VOn application Extended Test Parameters MonitorStartTime Time offset from turning DUT on to starting signal monitor MonitorDuration Duration of signal mon...

Page 510: ...ce resistance V I Ta Temperature Temp X Y Plot X axis Time Y1 axis R Y2 axis V Y3 axis I Y4 axis Vsw List Display Time R V I Vsw V_HCSMU I_HCSMU I_HVSMU I_SwitchControl Parameter Display Area Ta Agilent EasyEXPERT Application Library Reference Edition 8 20 6 ...

Page 511: ...21 GaN FET ...

Page 512: ...eristics using N1267A A 05 02 3 FET Current Collapse Signal Monitor I Force GaN FET Current Collapse characteristics using N1267A A 05 03 4 FET Current Collapse Signal Monitor GaN FET Current Collapse characteristics using N1267A A 05 03 5 Id Vds Current Collapse GaN FET Current Collapse characteristics using N1267A A 05 02 Agilent EasyEXPERT Application Library Reference Edition 8 21 2 ...

Page 513: ...ate VgOff Gate off voltage VgOn Gate on voltage VdOff Drain voltage applied while off state VdOnLimit Drain voltage compliance for on state Voltage drops inside of N1267A according to on state current IdOn Drain current applied while on state OffStressTime Duration of VdOff application SamplingInterval Sampling interval NumberOfSamples Number of samples Extended Test Parameters SamplingMode Option...

Page 514: ... Control MCSMU V_Gate Gate voltage I_Gate Gate current User Function Vds Drain Source voltage V_HVSMU Id Drain current I_HCSMU I_HVSMU Rds Drain Source resistance Vds Id Vgs Gate Source voltage V_Gate Ig Gate current I_Gate Ta Temperature Temp X Y Plot X axis Time Y1 axis Rds Y2 axis Vds Y3 axis Id List Display Time Rds Vds Id Vgs Ig V_HCSMU I_HCSMU V_HVSMU I_HVSMU V_SwitchControl I_SwitchControl ...

Page 515: ...ff voltage VgOn Gate on voltage VdOff Drain voltage applied while off state VdOn Drain voltage applied while on state Voltage drops inside of N1267A according to on state current IdOnLimit Drain current compliance for on state OffStressTime Duration of VdOff application SamplingInterval Sampling interval NumberOfSamples Number of samples Extended Test Parameters SamplingMode Options for linear or ...

Page 516: ...SMU V_Gate Gate voltage I_Gate Gate current User Function Vds Drain Source voltage V_HVSMU Id Drain current I_HCSMU I_HVSMU Rds Drain Source resistance Vds Id Vgs Gate Source voltage V_Gate Ig Gate current I_Gate Ta Temperature Temp X Y Plot X axis Time Y1 axis Rds Y2 axis Vds Y3 axis Id List Display Time Rds Vds Id Vgs Ig V_HCSMU I_HCSMU V_HVSMU I_HVSMU V_SwitchControl I_SwitchControl Parameter D...

Page 517: ...VgOn Gate on voltage VdOff Drain voltage applied while off state VdOnLimit Drain voltage compliance for on state Voltage drops inside of N1267A according to on state current IdOn Drain current applied while on state OffStressTime Duration of VdOff application OnTime Duration of VdOn application Extended Test Parameters MonitorStartTime Time offset from turning DUT on to starting signal monitor Mon...

Page 518: ... I_SwitchControl Current measured by Switch Control MCSMU Vgs Gate voltage Ig Gate current User Function Id Drain current I_HCSMU I_HVSMU Rds Drain Source resistance Vds Id Ta Temperature Temp X Y Plot X axis Time Y1 axis Rds Y2 axis Vds Y3 axis Id Y4 axis Vgs List Display Time Rds Vds Id Vgs Ig V_HCSMU I_HCSMU I_HVSMU V_SwitchControl I_SwitchControl Parameter Display Area Ta Agilent EasyEXPERT Ap...

Page 519: ...tage VdOff Drain voltage applied while off state VdOn Drain voltage applied while on state Voltage drops inside of N1267A according to on state current IdOnLimit Drain current compliance for on state OffStressTime Duration of VdOff application OnTime Duration of VdOn application Extended Test Parameters MonitorStartTime Time offset from turning DUT on to starting signal monitor MonitorDuration Dur...

Page 520: ...trol Current measured by Switch Control MCSMU Vgs Gate voltage Ig Gate current User Function Id Drain current I_HCSMU I_HVSMU Rds Drain Source resistance Vds Id Ta Temperature Temp X Y Plot X axis Time Y1 axis Rds Y2 axis Vds Y3 axis Id Y4 axis Vgs List Display Time Rds Vds Id Vgs Ig V_HCSMU I_HCSMU I_HVSMU V_SwitchControl I_SwitchControl Parameter Display Area Ta Agilent EasyEXPERT Application Li...

Page 521: ...tart value of drain voltage sweep for on state Voltage drops inside of N1267A according to on state current VdStop Stop value of drain voltage sweep for on state Voltage drops inside of N1267A according to on state current IdOnLimit Drain current compliance for on state OffStressTime Duration of VdOff application StepTime Step time of drain voltage sweep NOS Number of steps of drain voltage sweep ...

Page 522: ... Gate voltage I_Gate Gate current User Function Vds Drain Source voltage V_HVSMU Id Drain current I_HCSMU I_HVSMU Vgs Gate Source voltage V_Gate Ig Gate current I_Gate Ta Temperature Temp X Y Plot X axis Vds Y1 axis Id List Display Vds Id Vgs Ig V_HCSMU I_HCSMU V_HVSMU I_HVSMU V_SwitchControl I_SwitchControl Parameter Display Area Ta Agilent EasyEXPERT Application Library Reference Edition 8 21 12...

Page 523: ...22 IGBT ...

Page 524: ...GBT Ic Vce characteristics SMU Pulse A 05 00 7 Ic Vge IGBT Ic Vge characteristics SMU Pulse A 04 00 8 TDDB Constant V Constant voltage TDDB A 04 00 9 Vce sat IGBT Vce sat characteristics SMU Pulse A 04 00 10 Vth Vge off IGBT Vth or Vge off measurement A 04 00 11 Ic Vge for Expanders Ic Vge for Expanders A 05 01 2012 07 31 12 Vce Vge IGBT Vce Vge characteristics SMU Pulse A 05 00 Agilent EasyEXPERT...

Page 525: ... common respectively Required Modules and Accessories Agilent B1520A MFCMU 1 unit Agilent N1260A High Voltage Bias T or Agilent N1259A Test Fixture with the option N1259A 020 Device Parameters Polarity Nch SMU forces the specified value or Pch SMU forces the negative specified value Temp Temperature YAxisCceMin Y axis Cce minimum value YAxisCceMax Y axis Cce maximum value Test Parameters Memo Memo...

Page 526: ...pacitance Cce LOG For Scale LOG10 LOG25 or LOG50 X axis Collector voltage Vcollector LOG Y1 axis Collector Emitter capacitance Cce LOG List Display Collector voltage Vdrain Collector Emitter capacitance Cce Collector Emitter current Ice Parameters Display Area Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 22 4 ...

Page 527: ... respectively Required Modules and Accessories Agilent B1520A MFCMU 1 unit Agilent N1260A High Voltage Bias T or Agilent N1259A Test Fixture with the option N1259A 020 Device Parameters Polarity Nch SMU forces the specified value or Pch SMU forces the negative specified value Temp Temperature YAxisCgcMin Y axis Cgc minimum value YAxisCgcMax Y axis Cgc maximum value Test Parameters Memo Memorandum ...

Page 528: ...ce Cgc LOG For Scale LOG10 LOG25 or LOG50 X axis Collector voltage Vcollector LOG Y1 axis Gate Collector capacitance Cgc LOG List Display Collector voltage Vcollector Gate Collecotr capacitance Cgc Collector current Icollector Parameters Display Area Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 22 6 ...

Page 529: ... N1259A Test Fixture with the option N1259A 020 Device Parameters Polarity Nch SMU forces the specified value or Pch SMU forces the negative specified value Temp Temperature YAxisCgeMin Y axis Cge minimum value YAxisCgeMax Y axis Cge maximum value Test Parameters Memo Memorandum IntegTime Integration time Frequency Measurement frequency OscLevel Measurement signal level Scale Scale of DC bias swee...

Page 530: ...cale LOG10 LOG25 or LOG50 X axis Collector voltage Vcollector LOG Y1 axis Gate Emitter capacitance Cge LOG List Display Collector voltage Vcollector Gate Emitter capacitance Cge Collector Emitter current Ice Parameters Display Area Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 22 8 ...

Page 531: ...Hz Device Under Test IGBT 3 terminals Device Parameters Polarity Nch SMU forces the specified value or Pch SMU forces the negative specified value Temp Temperature YAxisCgeMin Y axis Cge minimum value YAxisCgeMax Y axis Cge maximum value Test Parameters Memo Memorandum IntegTime Integration time Frequency Measurement frequency OscLevel Measurement signal level Gate CMU used for the capacitance mea...

Page 532: ...ter capacitance Cge LINEAR List Display Gate voltage Vgate Gate Emitter capacitance Cge Gate Emitter conductance Gge Parameter Display Area Gate Emitter capacitance for zero bias Cge0 Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 22 10 ...

Page 533: ... BVces VcStart Sweep start voltage for Collector terminal VcStop Sweep stop voltage for Collector terminal VcStep Sweep step voltage for Collector terminal Gate SMU connected to Gate terminal constant voltage output Vg Gate voltage Emitter GNDU connected to Emitter terminal IcLimit Collector current compliance Extended Test Parameters IgLimit Gate current compliance HoldTime Hold time DelayTime De...

Page 534: ...rrent Icollector LOG List Display Collector voltage Vcollector Collector current Icollector Gate voltage Vgate Gate current Igate Parameter Display Area Collector Emitter breakdown voltage BVces Collector Emitter cutoff current Ices Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 22 12 ...

Page 535: ...eWidth Pulse width Gate SMU connection to Gate terminal secondary sweep voltage output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Emitter GNDU connected to Emitter terminal Scale Scale of sweep LINEAR LOG10 LOG25 or LOG50 IcLimit Collector current compliance PcLimit Collector power compliance Extended Test P...

Page 536: ...llector LOG Y axis Collector current Icollector LOG List Display Collector voltage Vcollector Collector current Icollector Gate voltage Vgate Gate current Igate Parameter Display Area Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 22 14 ...

Page 537: ...ulse period effective if PulsePeriodMode MANUAL PulseWidth Pulse width Collector SMU connected to Collector terminal secondary sweep voltage output VcStart Sweep start voltage for Collector terminal VcStop Sweep stop voltage for Collector terminal VcPoint Number of collector voltage sweep steps Emitter GNDU connected to Emitter terminal IcLimit Collector current compliance Extended Test Parameters...

Page 538: ...collector LINEAR List Display Collector voltage Vcollector Collector current Icollector Gate voltage Vgate Gate current Igate Forward transconductance gfe Parameter Display Temperature Ta Maximum value of forward transconductance gfeMax Threshold voltage Vth Agilent EasyEXPERT Application Library Reference Edition 8 22 16 ...

Page 539: ...mber of samples for one decade Interval Sampling interval Port1 SMU connected to Port1 terminal VStress Stress voltage Port2 SMU connected to Port2 terminal Extended Test Parameters ILimit Current compliance HoldTime Hold time MinRange Minimum current measurement range StoringRuntimeData Data save during stress output Yes or No IStressZero Minimum value of IStress for Y axis Measurement Parameters...

Page 540: ... IStressList LOG Test Output List Display Stress time TimeList Stress current IStressList Charge for device failure QbdList Parameter Display Area Device failure time Timebd Device failure charge Qbd Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 22 18 ...

Page 541: ...sePeriod Pulse period effective if PulsePeriodMode MANUAL PulseWidth Pulse width Gate SMU connected to Gate terminal secondary sweep voltage output Vg Gate voltage Emitter GNDU connected to Emitter terminal VcLimit Collector voltage compliance Scale Scale of sweep LINEAR LOG10 LOG25 or LOG50 Extended Test Parameters PulseBase Pulse base current PulseAvgCnt Pulse averaging count IgLimit Gate curren...

Page 542: ...t Display Collector current Icollector Collector voltage Vcollector Gate voltage Vgate Gate current IGate Parameter Display Area Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 22 20 ...

Page 543: ...or voltage Emitter GNDU connected to Emitter terminal Ic Vth_Vgeoff Collector current to decide Vth or Vge off MeasMode Measurement parameter Vth or Vgeoff IntegTime Integration time IcLimit Collector current compliance Extended Test Parameters IgLimit Gate current compliance HoldTime Hold time DelayTime Delay time IcZero Y axis Icollector minimum value IcMinRange Minimum range for the collector c...

Page 544: ...rent Icollector LOG List Display Collector voltage Vcollector Collector current Icollector Gate voltage Vgate Gate current Igate Parameter Display Area Temperature Ta Temp For MeasMode Vth Threshold voltage Vth For MeasMode Vgeoff Cutoff voltage Vgeoff Agilent EasyEXPERT Application Library Reference Edition 8 22 22 ...

Page 545: ...te current VgeBase Gate pulse baseline voltage Vgewidth Gate pulse width VgeDElay Gate pulse delay time Collector SMU connected to Collector terminal Constant voltage output Vce Collector voltage IcLimit Upper limit of collector current VceBase Collector pulse base line voltage VceWidth Collector pulse width VceDelay Collector pulse delay time Emitter GNDU connected to Emittor terminal PulsePeriod...

Page 546: ...lector current IC LINEAR Y2 axis Forward transconductance Gfs LINEAR List Display Gate voltage VGE Collector current IC Forward transconductance Gfs Collector voltage VCE SearchStat Status of search termination 1 Search target is found 1 Outout voltage over its limit 2 Measured voltage over its limit 3 Measured current over its limit 4 Oscillation or ohter abnormal status is detected 5 Search loop...

Page 547: ...or SMU connected to Collector terminal secondary sweep current output IcStart Sweep start current for Collector terminal IcStep Sweep current step for Collector terminal IcPoint Number of collector current sweep steps Emitter GNDU connected to Emitter terminal VcLimit Collector voltage compliance PcLimit Collector power compliance Extended Test Parameters PulseBase Pulse base current PulseAvgCnt P...

Page 548: ...22 IGBT Collector current Ic Collector voltage Vce Gate voltage Vge Gate current Ig Parameter Display Temperature Ta Agilent EasyEXPERT Application Library Reference Edition 8 22 26 ...

Page 549: ...23 Interconnection ...

Page 550: ...23 Interconnection 1 Residual R R I characteristics of interconnection residual resistance SMU Pulse A 04 00 Agilent EasyEXPERT Application Library Reference Edition 8 23 2 ...

Page 551: ... terminal effective if Scale LINEAR VLimit Voltage compliance PulsePeriodMode Pluse period mode AUTO or MANUAL ManualPulsePeriod Pulse period effective if PulsePeriodMode MANUAL PulseWidth Pulse width Port2 GNDU connected to Port2 terminal Scale Scale of sweep LINEAR LOG10 LOG25 or LOG50 Extended Test Parameters PulseBase Pulse base current PulseAvgCnt Pulse averaging count HoldTime Hold time Meas...

Page 552: ...23 Interconnection Force current If Measure voltage Vm Residual resistance ResidualR Parameter Display Area Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 23 4 ...

Page 553: ...24 MISCAP ...

Page 554: ...akdown voltage measurement A 04 00 2 C MISCAP MISCAP C V characteristics A 04 00 3 Ileak V MISCAP I V characteristics A 04 00 4 TDDB Constant V Constant voltage TDDB A 04 00 Agilent EasyEXPERT Application Library Reference Edition 8 24 2 ...

Page 555: ...op Sweep stop current for Gate terminal IgStep Sweep step current for Gate terminal Body GNDU connected to Body terminal Ileak BV Gate current to decide breakdown voltage BV VgLimit Gate voltage compliance Extended Test Parameters HoldTime Hold time DelayTime Delay time VgMinRange Minimum range for gate voltage measurement Measurement Parameters Gate voltage Vgate User Function Ta Temperature Ta T...

Page 556: ... and Body to CMU Low and CMU High respectively Device Parameters Polarity Nch CMU forces the specified value or Pch CMU forces the negative specified value Temp Temperature YAxisCMin Y1 axis C minimum value YAxisCMax Y1 axis C maximum value YAxisGMin Y2 axis G minimum value YAxisGMax Y2 axis G maximum value Test Parameters Memo Memorandum IntegTime Integration time Frequency Measurement frequency ...

Page 557: ...24 MISCAP List Display Gate voltage Vgate Gate Body capacitance C Gate Body conductance G Parameter Display Area Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 24 5 ...

Page 558: ...p step voltage for Gate terminal Body GNDU connected to Body terminal Ileak BV Gate current to decide breakdown voltage BV IgLimit Gate current compliance Extended Test Parameters HoldTime Hold time DelayTime Delay time IgZero Y axis Ig minimum value IgMinRange Minimum range for gate current measurement Measurement Parameters Gate current Igate User Function Ta Temperature Ta Temp Analysis Functio...

Page 559: ...umber of samples for one decade Interval Sampling interval Port1 SMU connected to Port1 terminal VStress Stress voltage Port2 SMU connected to Port2 terminal Extended Test Parameters ILimit Current compliance HoldTime Hold time MinRange Minimum current measurement range StoringRuntimeData Data save during stress output Yes or No IStressZero Minimum value of IStress for Y axis Measurement Parameter...

Page 560: ...nt IStressList LOG Test Output List Display Stress time TimeList Stress current IStressList Charge for device failure QbdList Parameter Display Area Device failure time Timebd Device failure charge Qbd Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 24 8 ...

Page 561: ...25 PowerBJT ...

Page 562: ... Vceo characteristics A 04 10 4 Ic Vces Ic Vces characteristics A 04 10 5 Ie Vebo Ie Vebo characteristics A 04 10 6 Vce sat Ic Vce sat Ic characteristics A 05 00 7 G Plot for Expanders G Plot for Expanders A 05 03 8 Ic Ib for Expanders Ic Ib for Expanders A 05 03 Agilent EasyEXPERT Application Library Reference Edition 8 25 2 ...

Page 563: ...ctor terminal Base GNDU connected to Base terminal Ic BVcbo Collector current to decide Collector Base breakdown voltage BVcbo IcLimit Collector current compliance Extended Test Parameters HoldTime Hold time DelayTime Delay time IcZero Y axis Icollector minimum value IcMinRange Minimum range for collector current measurement Measurement Parameters Collector current Icollector User Function Ta Temp...

Page 564: ...width of Base current Base SMU connection to Base terminal secondary sweep current output IbStart Sweep start current for Base terminal IbStop Sweep stop current for Base terminal VgStep Sweep step current for Base terminal Emitter GNDU connected to Emitter terminal IcLimit Collector current compliance PcLimit Collector power compliance Extended Test Parameters VcPulseBase Pulse base voltage for C...

Page 565: ... axis Collector current Icollector LINEAR List Display Collector voltage Vcollector Collector current Icollector Base voltage Vbase Base current Ibase Parameter Display Area Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 25 5 ...

Page 566: ... Emitter GNDU connected to Emitter terminal Ic BVceo Collector current to decide Collector Emitter breakdown voltage BVceo IcLimit Collector current compliance Extended Test Parameters HoldTime Hold time DelayTime Delay time IcZero Y axis Icollector minimum value IcMinRange Minimum range for collector current measurement Measurement Parameters Collector current Icollector User Function Ta Temperat...

Page 567: ... terminal Emitter GNDU connected to Emitter terminal Base SMU connected to Base terminal voltage output Vb Base voltage Ic BVces Collector current to decide Collector Emitter breakdown voltage BVces IcLimit Collector current compliance Extended Test Parameters HoldTime Hold time DelayTime Delay time IcZero Y axis Icollector minimum value IcMinRange Minimum range for collector current measurement I...

Page 568: ... voltage Vcollector Collector current Icollector Base voltage Vbase Base current Ibase Parameter Display Area Collector Emitter breakdown voltage BVces Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 25 8 ...

Page 569: ...Emitter terminal Base GNDU connected to Base terminal Ie BVebo Emitter current to decide Emitter Base breakdown voltage BVebo IeLimit Emitter current compliance Extended Test Parameters HoldTime Hold time DelayTime Delay time IeZero Y axis Icollector minimum value IeMinRange Minimum range for emitter current measurement Measurement Parameters Emitter current Iemitter User Function Ta Temperature T...

Page 570: ...or MANUAL ManualPulsePeriod Pulse period effective if PulsePeriodMode MANUAL IcPulseWidth Pulse width of Collector current IbPulseWidth Pulse width of Base current Base SMU connection to Base terminal synchronous sweep current output Emitter GNDU connected to Emitter terminal VcLimit Collector voltage compliance Extended Test Parameters IcPulseBase Pulse base current for Collector terminal IbPulse...

Page 571: ... For Scale LOG10 LOG25 or LOG50 X axis Collector current Icollector LOG Y1 axis Collector voltage Vcollector LOG Y2 axis Base voltage Vbase LOG List Display Collector voltage Vcollector Collector current Icollector Base voltage Vbase Base current Ibase Parameter Display Area Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 25 11 ...

Page 572: ...f gate current VbeBase Base pulse baseline voltage Vbewidth Base pulse width VbeDElay Base pulse delay time Collector SMU connected to drain terminal constant voltage output Vce Collector voltage IcLimit Upper limit of drain current VceBase Collector pulse base line voltage VceWidth Collector pulse width VceDelay Collector pulse delay time Emitter GNDU connected to emitter terminal PulsePeriodMode...

Page 573: ...nt IC LINEAR Y2 axis DC current gain hFE LINEAR List Display Base voltage VBE Collector current IC DC current gain hFE Base current IB Collector voltage VCE SearchStat Status of search termination 1 Search target is found 1 Outout voltage over its limit 2 Measured voltage over its limit 3 Measured current over its limit 4 Oscillation or ohter abnormal status is detected 5 Search loop count over it...

Page 574: ...f gate voltage IbBase Base pulse baseline current Ibwidth Base pulse width IbDElay Base pulse delay time Collector SMU connected to drain terminal constant voltage output Vce Collector voltage IcLimit Upper limit of drain current VceBase Collector pulse base line voltage VceWidth Collector pulse width VceDelay Collector pulse delay time Emitter GNDU connected to emitter terminal PulsePeriodMode Pl...

Page 575: ...t IC LINEAR Y2 axis DC current gain hFE LINEAR List Display Base voltage VBE Collector current IC DC current gain hFE Base current IB Collector voltage VCE SearchStat Status of search termination 1 Search target is found 1 Outout voltage over its limit 2 Measured voltage over its limit 3 Measured current over its limit 4 Oscillation or ohter abnormal status is detected 5 Search loop count over its...

Page 576: ...25 PowerBJT Agilent EasyEXPERT Application Library Reference Edition 8 25 16 ...

Page 577: ...26 PowerDiode ...

Page 578: ...tics A 05 50 2 If Vf Diode forward bias characteristics SMU voltage pulse A 05 00 3 Ir Vr Diode reverse bias characteristics A 05 00 4 Vf Diode forward bias characteristics SMU current pulse A 05 00 Agilent EasyEXPERT Application Library Reference Edition 8 26 2 ...

Page 579: ...he Test Fixture MFCMU High and MFCMU Low respectively Required Modules and Accessories Agilent B1520A MFCMU 1 unit Agilent N1260A High Voltage Bias T or Agilent N1259A Test Fixture with the option N1259A 020 Device Parameters Temp Temperature YAxisCjMin Y1 Y2 axis Cj minimum value YAxisCjMax Y1 Y2 axis Cj maximum value Test Parameters Memo Memorandum IntegTime Integration time Frequency Measuremen...

Page 580: ... LOG Y3 axis Reverse current Ir LOG For Scale LOG10 LOG25 or LOG50 X axis Reverse bias Vr LOG Y1 axis Junction capacitance Cj LINEAR Y2 axis Junction capacitance Cj LOG Y3 axis Reverse current Ir LOG List Display Reverse bias Vr Junction Capacitance Cj Reverse current Ir Parameter Display Area Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 26 4 ...

Page 581: ...ode AUTO or MANUAL ManualPulsePeriod Pulse period effective if PulsePeriodMode MANUAL PulseWidth Pulse width IfLimit Current compliance Scale Scale of sweep LINEAR LOG10 LOG25 or LOG50 Extended Test Parameters PulseBase Pulse base voltage PulseAvgCnt Pulse averaging count HoldTime Hold time IfZero Y axis If minimum value MeasurementTime Actural measurement time for a pulse period Measurement Param...

Page 582: ...U connected to Cathode terminal primary sweep voltage output IrLimit Current compliance VrSpec Ir Voltage to decide reverse current Ir VrSpec Extended Test Parameters HoldTime Hold time DelayTime Delay time IrZero Y axis Ir minimum value IrMinRange Minimum range for Ir measurement Measurement Parameters Reverse current Ir User Function Ta Temperature Ta Temp Analysis Function Ir VrSpec MY Y coordi...

Page 583: ...athode terminal PulsePeriodMode Pluse period mode AUTO or MANUAL ManualPulsePeriod Pulse period effective if PulsePeriodMode MANUAL PulseWidth Pulse width IfSpec Vf Current to decide forward voltage Vf IfSpec VfLimit Voltage compliance Extended Test Parameters PulseBase Pulse base current PulseAvgCnt Pulse averaging count HoldTime Hold time MeasurementTime Actural measurement time for a pulse peri...

Page 584: ...26 PowerDiode Parameter Display Area Forward voltage Vf IfSpec Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 26 8 ...

Page 585: ...27 PowerMOSFET PMIC SiC ...

Page 586: ...teristics A 05 00 6 Id Vds Id Vds characteristics SMU Pulse A 05 00 7 Id Vgs Id Vgs characteristics SMU Pulse A 05 00 8 Rds Id Rds Id characteristics SMU Pulse A 05 00 9 TDDB Constant V Constant voltage TDDB A 04 10 10 Vth Vgs off Vth or Vgs off measurement A 05 00 11 Ic Vge for Expanders Ic Vge for Expanders A 05 01 12 Vds Vgs Vds Vgs characteristics Rds Vgs characteristics SMU Pulse A 05 00 Agil...

Page 587: ...Low and AUX circuit common respectively Required Modules and Accessories Agilent B1520A MFCMU 1 unit Agilent N1260A High Voltage Bias T or Agilent N1259A Test Fixture with the option N1259A 020 Device Parameters Polarity Nch SMU forces the specified value or Pch SMU forces the negative specified value Temp Temperature YAxisCdsMin Y axis Cds minimum value YAxisCdsMax Y axis Cds maximum value Test P...

Page 588: ...Drain Source capacitance Cds LOG For Scale LOG10 LOG25 or LOG50 X axis Drain voltage Vdrain LOG Y1 axis Drain Source capacitance Cds LOG List Display Drain voltage Vdrain Drain Source capacitance Cds Drain Source current Ids Parameters Display Area Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 27 4 ...

Page 589: ...U Low and AUX circuit common respectively Required Modules and Accessories Agilent B1520A MFCMU 1 unit Agilent N1260A High Voltage Bias T or Agilent N1259A Test Fixture with the option N1259A 020 Device Parameters Polarity Nch SMU forces the specified value or Pch SMU forces the negative specified value Temp Temperature YAxisCgdMin Y axis Cgd minimum value YAxisCgdMax Y axis Cgd maximum value Test...

Page 590: ...axis Gate Drain capacitance Cgd LOG For Scale LOG10 LOG25 or LOG50 X axis Drain voltage Vdrain LOG Y1 axis Gate Drain capacitance Cgd LOG List Display Drain voltage Vdrain Gate Drain capacitance Cgd Drain current Idrain Parameters Display Area Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 27 6 ...

Page 591: ...h Voltage Bias T or Agilent N1259A Test Fixture with the option N1259A 020 Device Parameters Polarity Nch SMU forces the specified value or Pch SMU forces the negative specified value Temp Temperature YAxisCgsMin Y axis Cgs minimum value YAxisCgsMax Y axis Cgs maximum value Test Parameters Memo Memorandum IntegTime Integration time Frequency Measurement frequency OscLevel Measurement signal level ...

Page 592: ...itance Cgs LOG For Scale LOG10 LOG25 or LOG50 X axis Drain voltage Vdrain LOG Y1 axis Gate Source capacitance Cgs LOG List Display Drain voltage Vdrain Gate Source capacitance Cgs Drain Source current Ids Parameters Display Area Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 27 8 ...

Page 593: ...4 5 M 5 MHz Device Under Test Power MOSFET 3 terminals Device Parameters Polarity Nch CMU forces the specified value or Pch CMU forces the negative specified value Temp Temperature YAxisCgsMin Y axis Cgs minimum value YAxisCgsMax Y axis Cgs maximum value Test Parameters Memo Memorandum IntegTime Integration time Frequency Measurement frequency OscLevel Measurement signal level Gate CMU used for th...

Page 594: ...s Gate Source capacitance Cgs LINEAR List Display Gate voltage Vgate Gate Source capacitance Cgs Gate Source conductance Ggs Parameter Display Area Gate Source capacitance at zero bias Cgs0 Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 27 10 ...

Page 595: ...ltage BVdss VdStart Sweep start voltage for Drain terminal VdStop Sweep stop voltage for Drain terminal VdStep Sweep step voltage for Drain terminal Gate SMU connected to Gate terminal constant voltage output Vg Gate voltage Source GNDU connected to Source terminal IdLimit Drain current compliance Extended Test Parameters IgLimit Gate current compliance HoldTime Hold time DelayTime Delay time IdZe...

Page 596: ...axis Drain current Idrain LOG List Display Drain voltage Vdrain Drain current Idrain Gate voltage Vgate Gate current Igate Parameter Display Area Drain Source breakdown voltage BVdss Drain Source cutoff current Idss Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 27 12 ...

Page 597: ... PulsePeriodMode MANUAL PulseWidth Pulse width Gate SMU connection to Gate terminal secondary sweep voltage output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Source GNDU connected to Source terminal Scale Scale of sweep LINEAR LOG10 LOG25 or LOG50 IdLimit Drain current compliance PdLimit Drain power complian...

Page 598: ...is Drain voltage Vdrain LOG Y axis Drain current Idrain LOG List Display Drain voltage Vdrain Drain current Idrain Gate voltage Vgate Gate current Igate Parameter Display Area Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 27 14 ...

Page 599: ...de AUTO or MANUAL ManualPulsePeriod Pulse period effective if PulsePeriodMode MANUAL PulseWidth Pulse width Drain SMU connected to Drain terminal secondary sweep voltage output VdStart Sweep start voltage for Drain terminal VdStop Sweep stop voltage for Drain terminal VdPoint Number of drain voltage sweep steps Source GNDU connected to Source terminal IdLimit Drain current compliance Extended Test...

Page 600: ...n current Idrain LINEAR List Display Drain voltage Vdrain Drain current Idrain Gate voltage Vgate Gate current Igate Forward transconductance gfs Parameter Display Area Temperature Ta Temp Maximum value of forward transconductance gfsMax Threshold voltage Vth Agilent EasyEXPERT Application Library Reference Edition 8 27 16 ...

Page 601: ...ctive if PulsePeriodMode MANUAL PulseWidth Pulse width Gate SMU connection to Gate terminal secondary sweep voltage output VgStart Sweep start voltage for Gate terminal VgStop Sweep stop voltage for Gate terminal VgStep Sweep step voltage for Gate terminal Source GNDU connected to Source terminal Scale Scale of sweep LINEAR LOG10 LOG25 or LOG50 VdLimit Drain voltage compliance Extended Test Parame...

Page 602: ...X axis Drain current Idrain LOG Y axis Drain Source resistance Rds LOG List Display Drain voltage Vdrain Drain current Idrain Gate voltage Vgate Gate current IGate Drain Source resistance Rds Parameter Display Area Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 27 18 ...

Page 603: ...ecade Number of samples for one decade Interval Sampling interval Port1 SMU connected to Port1 terminal VStress Stress voltage Port2 SMU connected to Port2 terminal Extended Test Parameters ILimit Current compliance HoldTime Hold time MinRange Minimum current measurement range StoringRuntimeData Data save during stress output Yes or No IStressZero Minimum value of IStress for Y axis Measurement Pa...

Page 604: ... current IStressList LOG Test Output List Display Stress time TimeList Stress current IStressList Charge for device failure QbdList Parameter Display Area Device failure time Timebd Device failure charge Qbd Temperature Ta Temp Agilent EasyEXPERT Application Library Reference Edition 8 27 20 ...

Page 605: ...nal Drain SMU connected to Drain terminal Vd Drain voltage Source GNDU connected to Source terminal Id Vth_Vgsoff Drain current to decide Vth or Vgs off MeasMode Measurement parameter Vth or Vgsoff IntegTime Integration time IdLimit Drain current compliance Extended Test Parameters IgLimit Gate current compliance HoldTime Hold time DelayTime Delay time IdZero Y axis Idrain minimum value IdMinRange...

Page 606: ...is Drain current Idrain LOG List Display Drain voltage Vdrain Drain current Idrain Gate voltage Vgate Gate current Igate Parameter Display Area Temperature Ta Temp For MeasMode Vth Threshold voltage Vth For MeasMode Vgsoff Cutoff voltage Vgsoff Agilent EasyEXPERT Application Library Reference Edition 8 27 22 ...

Page 607: ... gate current VgeBase Gate pulse baseline voltage Vgewidth Gate pulse width VgeDElay Gate pulse delay time Collector SMU connected to Collector terminal Constant voltage output Vce Collector voltage IcLimit Upper limit of collector current VceBase Collector pulse base line voltage VceWidth Collector pulse width VceDelay Collector pulse delay time Emitter GNDU connected to Emittor terminal PulsePer...

Page 608: ...axis Collector current IC LINEAR Y2 axis Forward transconductance Gfs LINEAR List Display Gate voltage VGE Collector current IC Forward transconductance Gfs Collector voltage VCE SearchStat Status of search termination 1 Search target is found 1 Outout voltage over its limit 2 Measured voltage over its limit 3 Measured current over its limit 4 Oscillation or ohter abnormal status is detected 5 Sea...

Page 609: ...se width Drain SMU connected to Drain terminal secondary sweep current output IdStart Sweep start current for Drain terminal IdStep Sweep current step for Drain terminal IdPoint Number of Drain current sweep steps Source GNDU connected to Source terminal VdLimit Drain voltage compliance PdLimit Drain power compliance Extended Test Parameters PulseBase Pulse base current PulseAvgCnt Pulse averaging...

Page 610: ...LINEAR Y1 axis Drain voltage Vds LINEAR LOG Y2 axis Drain Source resistance Rds LINEAR LOG List Display Drain current Id Drain voltage Vds Drain Source resistance Rds Gate voltage Vgs Gate current Ig Parameter Display Temperature Ta Agilent EasyEXPERT Application Library Reference Edition 8 27 26 ...

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