Agilent Technologies EasyEXPERT, Manual, Page: 112 / 610

2 CMOS
2.31 VthAndCgg-Vg SCUU: Cgg-Vg, Id-Vg, using SCUU (A.01.20)
[Supported Analyzer]
B1500A
[Description]
Measures the gate capacitance vs gate voltage characteristics, the drain current vs gate voltage measurement
by using one MFCMU, three SMUs, and a set of SCUU/GSWU.
For a more accurate measurement, perform correction data measurement at the measurement frequency before
starting the capacitance measurement.
If the measurement frequency is not included in the list of default frequencies below, click the Advanced
Options... button and set the measurement frequency on the Frequency area of the Advanced Options for CMU
Calibration window.
Default frequencies:
1 k, 2 k, 5 k, 10 k, 20 k, 50 k, 100 k, 200 k, 500 k, 1 M, 1.2 M, 1.5 M, 2 M, 2.5 M, 2.7 M, 3 M, 3.2 M, 3.5 M,
3.7 M, 4 M, 4.2 M, 4.5 M, 5 MHz
[Device Under Test]
MOSFET, 4 terminals
[Required Modules and Accessories]
One MFCMU module, three SMU modules, and a set of SCUU/GSWU are required.
SCUU connections (Cgg-Vg): Output1: terminals other than Gate, Output2: Gate
SCUU connections (Id-Vg): Output1: Source and Substrate, Output2: Gate
Connection wire must be connected between the GSWU and the DUT interface High/Low guard lines for the
capacitance measurements.
[Device Parameters]
Polarity: Nch (CMU/SMU forces the specified value) or Pch (CMU/SMU forces the negative specified value).
Lg: Gate length
Wg: Gate width
Temp: Temperature
[Test Parameters]
GateAC: CMU connected to Gate terminal (CV sweep measurement)
GateDC: SMU connected to Gate terminal (primary sweep, voltage output)
SourceDC: SMU connected to Source and Substrate terminal (constant voltage output)
Drain: SMU connected to Drain terminal (constant voltage output)
Vd: Drain current
IntegTime: Integration time
IgLimit: Gate current compliance
IdLimit: Drain current compliance
IsLimit: Source current compliance
HoldTime: Hold time
DelayTime: Delay time
VgsBiasStart: Cgg-Vg measurement start voltage
VgsBiasStop: Cgg-Vg measurement stop voltage
VgsBiasStep: Cgg-Vg measurement step voltage
OscLevel: Cgg-Vg measurement signal level
FREQ: Cgg-Vg measurement frequency
VgsStartDC: Id-Vg measurement start voltage
VgsStopDC: Id-Vg measurement stop voltage
VgsStepDC: Id-Vg measurement step voltage
Agilent EasyEXPERT Application Library Reference, Edition 8
2-50