Chapter 2 - Site Preparation
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MNL000623.doc
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06/25/2019
Chemical Equipment
© Versum Materials US, LLC. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Versum Materials Confidential
Table 2-7:
Chemical Delivery Line Requirements
CHEMICAL
DELIVERY
#1:
Vapor Flow
out to Tool
6.35 mm (¼ in.) male VCR connection
316L stainless steel, electro-polished line.
Connects to Chem Delivery #1 port (See Figure 2-2)
Bends should meet SEMATECH standards for bend radius. Versum Materials, Inc.
recommends inside electro-polish rating 10RA maximum.
Chemical Line should be Helium leak-checked, purged, and cleaned before installing
ChemGuard.
Optional Outer Coaxial Line (if required by customer or local regulations): 12.7 mm (½
in.) stainless steel.
Optional
Outer Coaxial
Line
Optional Outer Coaxial Line (if required by customer or local regulations): 12.7 mm (½ in.)
stainless steel.
Bends should meet SEMATECH standards for bend radius.
Specification for Outer Lines
•
Stainless steel line
•
The line should be welded
•
Sharp edges should be removed and de-burred at breaks in the line to prevent stainless
steel inner line from being scratched or torn when routing through the outer line.
2.2.7
Installing the Optional Coaxial Chemical Delivery Lines
The Optional Coaxial Chemical Delivery Lines comprised of:
•
Outer line, 12.7 mm (1/2 in.) stainless steel line.
•
Inner line, 6.35 mm (1/4 in.) stainless steel line.
Specification for outer lines
•
Stainless steel line
•
The line should be welded
•
Sharp edges should be removed and de-burred at breaks in the line to prevent
stainless steel inner line from being scratched or torn when routing through the outer
line.
2.2.8
Chemical Bulk Refill Line (from BCD200, CG010 or CG310)
The chemical refill line is an additional line, routed on top of the ChemGuard® CG050. It
allows the BULK reservoir container to be filled from an external source (i.e., ChemGuard®
BCD200, CG010 or CG310 cabinet).
