Chapter 3 - Installation
MNL000624.doc
Revision 0
06/25/2019
Chemical Equipment
© Versum Materials US, LLC. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Versum Materials Confidential
3.5 Connecting ChemGuard® Gas Lines
The customer is required to supply all gases with shut-off valves, regulators,
check-valves, filters and/or gas purifier. (See Chapter 2 for further details.)
Ensure there are shutoff valves and filters for gas lines feeding the ChemGuard®
cabinet. See Figure 2-2 for ChemGuard® cabinet connections.
WARNING
WARNING: System pressures
above 120 psig exceed the
rating of Versum Materials,
Inc. chemical containers.
WARNUNG: Bei
Systemdrücken über 120 psig
werden die Nennwerte für die
Chemikalienbehälter der Fa.
Versum Materials, Inc.
überschritten.
AVERTISSEMENT: Les
pressions du système
dépassent l’échelle des
récipients Versum Materials,
Inc. au delà de 120 psig
(827,76 kg/cm2).
3.6 Chemical Delivery Line Requirements
NOTE:
All
chemical
delivery
line
requirements
are
th
e customer’s
responsibility.
3.6.1
Chemical Vapor Delivery Line
The Output Manifold allows the ChemGuard® cabinet to deliver the process vapor
and gas mixture to the process tool through pneumatic valve V11.
NOTE:
Only with the 38L Bubbler option can CHEM ON operate simultaneously
while in Refill enable (from the BCD200, CG010 or CG310 cabinet).
Table 3-1:
Chemical Vapor Delivery Line Connection
VAPOR DELIVERY LINE
CONNECTS
TO VALVE
VALVE CONTROL
Chemical Delivery #1
Valve V11
Electrically controlled by Process Tool. Table 3-4/5
3.6.2
Sample/Purge Port
The Output Manifold allows the cabinet to feed the gas mixture to the process tool
as well as a sample/purge port simultaneously. Manual sample/purge port is also
available. The house line can be plumb and ready to use by opening either of the
