Chapter 3 - Installation
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06/25/2019
Chemical Equipment
© Versum Materials US, LLC. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Versum Materials Confidential
for the venturi vacuum to completely remove all chemical vapors from the
lines during maintenance operations.
•
The ChemGuard® requires an exhaust flow of 30 CFM. In addition to
cabinet exhaust, ChemGuard® contains a reservoir vent function that
permits the removal of pressure from the reservoir container. This vent
should be connected to the appropriate abatement system for the chemical
used.
•
Coaxial chemical delivery lines are recommended for all process chemicals.
In the event that a leak or rupture occurs in the main delivery line, the liquid
will be contained and be prevented from entering the environment.
•
The liquid from any leak will be contained in the ChemGuard® cabinet and
be detected by the spill detector, and container then relieved to prevent any
further spillage.
3.3.2
Available Configurations
The ChemGuard® CG050 GEN III cabinet is used in an epitaxial process.
Hydrogen gas is “bubbled” thru an onboard container typically containing
Trichlorosilane, (TCS) and vapor is then delivered to a Process Tool. This
application is limited to one ChemGuard® per tool or chamber.
3.4 Installing the ChemGuard® CG050 Cabinet
Verify that the cabinet is in a level location with enough clearance around it so that
its doors can be fully opened and so that it can be serviced easily.
Set the ChemGuard® cabinet over the bolt-down points and attach securely.
Per current United States UBC and SEMI requirements, floor bolts must be at
least Grade 5 (metric Grade 8.8), at a recommended minimum length of 2.5 in.
(6.35 cm).
The ChemGuard® must be grounded in accordance with Article 250 - Grounding,
The National Electrical Code 1993. See Figure 2-1 for the location of the
grounding lug. Versum Materials, Inc. recommends a ground resistance of <1
Ohms.
3.4.1
Electrical Connections
Versum Materials, Inc. recommends that the customer electrically ground
ChemGuard® cabinet and plumbing. OSHA standards require customer to install
lockout-type circuit breaker for AC power. Per SEMI S2-93A requirements, all
electrical work for ChemGuard® GEN III is Type 1 and Type 2.
