Chapter 6
– System Operation
MNL000627
Revision 0
06/25/2019
Chemical Equipment
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Confidential and Proprietary Data
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and contains 110% spill containment. All power sources capable of providing shocks
or sparks have been isolated and contained completely outside of the chemical
cabinet.
Communication to the Process Tool is provided via the input/outputs from the Tool IO
board, AP1614, refer to Chapter 3.
The main system power supply is 100 - 240VAC, auto-switched, for use in all
countries.
The Emergency Manual Off (EMO) circuit provides emergency shutdown, including
standard red emergency OFF switch (see Chapter 5 section). If the EMERGENCY
MANUAL OFF (EMO) switch is pressed, it will disrupt the pneumatic air pressure to
the solenoids, which return the valve actuators to normal status.
Password protection prevents unauthorized personnel from attempting key tasks.
Operating modes are displayed to simplify operation.
6.2 Description of Menus and Operations
2 Operations performed by the ChemGuard
®
CG050
▪
CHEM ON
▪
EXTERNAL FILL
6.2.1 CHEM ON
Vapor pressure accurately maintained within in +/- 5 psig. This is accomplished by
the following;
▪
Bubbler gas regulator, R1 set to required vapor bubbling pressure, i.e. 25 psig
▪
High and Low PT1 Push Pressure alarm set for +/- 5 psig from R1 setpoint
▪
PT2 “Vent-Pulses” by momentarily opening the Venturi vacuum line when
pressure from output of bubbler, monitored by PT2 increases above PT2 HP
Vent setpoint found in
“User Setpoints” of the Configuration Menu.
6.2.2 External Fill
Bubbler automatically calls for refill from a bulk refill system, BCD200, CG010 or
CG310 without affecting vapor flow delivery or vapor flow pressure to the process
tool.
▪
Bulk refill system remains in Idle mode until CG050 requests a refill
