Chapter 3 - Installation
MNL000624.doc
Revision 0
06/25/2019
Chemical Equipment
© Versum Materials US, LLC. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page 3
-
3
Versum Materials Confidential
3.3 Installation
3.3.1
Pre-installation
This chapter describes items that should be identified and resolved prior to
installing ChemGuard®.
The end user must have knowledge of process flow requirements, prepare flow
calculations for sufficient flow and have a carefully designed layout plan for the
installation of the ChemGuard® cabinet
– preferably at a central location where
the facilities will meet the process tool requirements. Proper facilitation and
installation will reduce and avoid potential failures, tool downtime and rework
costs.
Chemical delivery line to each process tool(s) should be designed and install with
minimum distance in vertical rise (height) and horizontal length between
ChemGuard® cabinet and the process tool (s) to meet process operating pressure
and flow rate required of the process tool (s).
•
The maximum range that a standard ChemGuard® can deliver chemical is
dependent on the chemical and the pressure of the push gas. Contact
Versum Materials, Inc. for any specific delivery requirements beyond 250
meters of horizontal run and 10 meters of vertical run. These distances
could be increased contingent on bends and valve count in the system.
•
Install ChemGuard® using the earthquake bolt down points. Verify that the
location has the stability and strength to permit the installation of support
bolts.
•
Verify AC power is available for ChemGuard
®
. Power requirements are
described in Chapter 2.
•
Verify all required gases are delivered to an area near the final position of
ChemGuard
®
. Refer to Chapter 2.
NOTE
:
All chemical delivery line requirements are the customer’s
responsibility.
•
Gases required for ChemGuard® cabinet operation are described in
Chapter 2.
•
The ChemGuard® CG050 GEN III cabinet uses venturi vacuum as the
vacuum source so no vacuum pump is required. The vapor pressure of the
chemical used in the ChemGuard® CG050 GEN III cabinet is high enough
