Chapter 5 - Features and Components
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MNL000626.doc
Revision 0
06/25/2019
Chemical Equipment
© Versum Materials US, LLC. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Versum Materials Confidential
5.1
Overview
NOTE:
Only spare parts that meet the
manufacturer’s specifications should be used in the
ChemGuard® GenIII product line.
5.1.1 Operational Features
The ChemGuard® CG050 GEN III i
s used in an epitaxial process. Hydrogen gas is “bubbled”
thru an onboard container typically containing Trichlorosilane, (TCS) and vapor is then
delivered to a Process Tool. This application is limited to one ChemGuard® per tool or
chamber.
The ChemGuard® CG050 GEN III uses is a high-volume bubbler with auto-refillable
capability and is capable of saturated vapor gas flow rates of 20-30 CFM with correct chiller /
remote refill system.
•
Continuously delivers uninterrupted supply of chemical vapor from the onboard
bubbler to a process tool.
•
The bubbler maintained at a constant level supplied by the remote refill from an
external source (i.e., ChemGuard® BCD200, CG010 or CG310 cabinet).
•
Display shows all operating parameters, current status of bubbler, chemical level and
system setup information.
•
All purge, process gas lines, exhaust line and pneumatic lines can be monitored
continuously for pressure.
•
Programmable bubbler refill level and pressure alarm parameters.
•
All alarms are displayed on the LED HMI color touch display.
•
System alarm displayed for ease of troubleshooting and include Life Safety, system
pressure, system level, system status and venturi vacuum status.
NOTE:
Change Bulk operation is not available when using the standard Versum
Materials 38 liter bubbler. In order to remove/replace the 38 liter bubbler a
manual procedure is used. Contact Versum Materials Technical Support for
additional information.
NOTE:
Refer to addendum A for instructions on performing Change Bulk operation
when a customer provided 14 liter LPE bubbler is used
