Chapter 2 - Site Preparation
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MNL000623.doc
Revision 0
06/25/2019
Chemical Equipment
© Versum Materials US, LLC. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Versum Materials Confidential
To avoid potential process failures here are some guidelines the end users should consider
when facilitate ChemGuard® CG050 cabinets at central location.
•
ChemGuard® CG050 cabinets centrally located and within close proximity to the
process tool (s) to minimize the vertical and horizontal length of the chemical delivery
lines.
•
The incoming main gas supply to multiple ChemGuard® CG050 cabinets should be
properly sized to provide adequate pressure and flow before branching out to multiple
ChemGuard® CG050 cabinet connection points.
•
After the main gas supply has been branched off to the individual ChemGuard®
CG050 cabinets, Individual gas supply lines are equipped with individual regulators,
check valves and isolation valves which have been properly sized to meet the
pressure and flow requirements of the process tool (s).
A gas filter is required on the houseline supplying the ChemGuard® CG050 push gas.
Failure to install a filter will void regulator and valve warranty if failed component found to
have particles embedded on the seat. See Addendum B for recommended setup.
Minimum filter specifications:
•
Filter = 0.003 micron.
•
Flow = 50 slpm.
•
Material = Electropolished 316L Stainless Steel.
•
Membrane = 316L Stainless Steel or PTFE.
•
Leak Tested = 100% Helium leak tested to 5x10
-9
atm cc/sec (3.8x10
-9
Torr L/sec).
WARNING:
DO NOT deliver process/purge gases from a high pressure gas cylinder source. The supply gases must be
delivered from the house line gas source regulated to no more than 120 psig with flow not greater than
250 slpm.
A pneumatic supply of inert gas without oxygen is recommended for the controller. It is
strongly advised to not use clean dry air for pneumatic supply. The pneumatic supply may be
shared in the controller between the pneumatic solenoids and the enclosure
inerting/pressurizing service (Z-purge). Based on results from DC power harness testing,
clean dry air may promote the corrosion of electrical connectors for interconnecting power
