Addendum A
– LPE 14 Liter Bubbler Change
MNL000629.doc
Revision 0
06/25/2019
Chemical Equipment
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
AD A-
5
The Change Bubbler operation continues to run until one of the following
conditions occurs:
•
Operator terminates operation by selecting STOP CHANGE BLK from the
CHEM ON menu
•
A shutdown alarm occurs
3.
NOTE:
If a shutdown alarm occurs, all automatic operations
are terminated. For any reason if Change Bubbler operation is
terminated before its completion, the operator must restart the
Change Bubbler operation to prevent exposure to chemical if not
yet purged from pigtails.
Start Change BLK
1.
When t
aping on the main screen, the “Password” window is displayed.
Enter a valid password, level 2 or level 3 and click on “OK”.
2.
Select “CHEM ON” from the pull-down menu. If CHEM.ON or EXTERNAL
FILL is enabled, select Stop CHEM ON and Stop EXT Fill operations.
3.
Select START CHANGE BLK to start the Bubbler change operation.
1.
NOTE:
At any time, the operation can be terminated by selecting
STOP CHANGE BLK from the Main Menu. If the Bubbler change operation
is stopped before its completion, it must be restarted and run thru
completion before any of the other operations can be started, CHEM ON
and External Fill.
4.
First a supply pressure test and Venturi Vacuum test will be performed
followed by an operator prompt to close the inlet valve of the Bubbler, VB1.
5.
Next a LINE CLEAR function is performed to pushing liquid chemical back
into the Bubbler from the external refill line.
6.
The operator is then prompted to close the outlet valve and refill valve, VB2
and VB3 on the Bubbler, open the purge crossover valve, VB4 on the
bubbler and close the H2 supply valve, MV1 on the main manifold.
7.
The system performs a series of Venturi vacuum purge cycles to ensure
chemical is removed from the pigtail lines and valve connections.
8.
After completion of the purge cycles a Leak Check, Vacuum Rate of Rise
test is performed. Once leak check passes the operator is prompted to
close VB4 purge crossover valve.
