Chapter 3 - Installation
MNL000624.doc
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06/25/2019
Chemical Equipment
© Versum Materials US, LLC. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Table 3-2:
Sample Out/Purge In on Chemical Delivery Line
NOTE:
This valve is normally closed during normal vapor flow of chemical to the
Tool.
SAMPLE OUT/PURGE IN
CONNECTS
TO VALVE
VALVE CONTROL
Sample Purge Port
MV10
Manually operate.
3.6.3
Remote Chem IN Line (from BCD200, CG010 or CG310)
The Remote Chem IN line is the bubbler refill line, routed on top of the
ChemGuard® CG050. It allows the bubbler to be filled from an external source
(i.e., ChemGuard® BCD200, CG010 or CG310 cabinet).
NOTE:
The Primary valve to operate External Fill is V8.
3.6.4
Exhaust and Vent Requirements
For Exhaust and Vent installation requirements refer to chapter 2.
3.6.5
Connecting ChemGuard® Exhaust
1. Connect Exhaust line to the 101.6 mm (4 in.) Exhaust port on ChemGuard®
cabinet (Figure 2-2).
2. The ChemGuard® cabinet also requires exhaust for venting of the bulk
container. During system operation, the bulk container will relieve excess
push-gas to the vent connection on ChemGuard® (Figure 2-2).
3.6.6
Hazardous Gas/Vapor Leak Detection System
A gas/vapor leak detection system must be installed by the customer for all toxic
gases used in the ChemGuard® cabinet. The detection points must include the
interior of the chemical cabinet. If a leak is detected, the system must provide
signals that will shut down the chemical cabinet.
3.6.7
ChemGuard® Z-Purge
According to NFPA 497 and SEMI S6, if adequate reduction of flammable gas
cannot be achieved, special electrical designs or purging may be used to address
potential ignition sources.
The ChemGuard® cabinet was evaluated and the 1) Controller, 2) VGA LED
display panel 3) CG IO Interface Module was identified as the only components
