Versum Materials Chemguard Genlll 050 Installation, Operation & Maintenance Manual Download Page 4

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mnl000621

Revision 0

06/27/2019

Confidential and Proprietary Data

Page C

Versum Materials Confidential

Revision Control Summary

Chapter

Revision

File Name

Chapter 1 – Delivery and Inspection

Rev-0

MNL000622.doc



Initial Release.

Chapter 2 – Site Preparation

Rev-0

MNL000623.doc



Initial Release.

Chapter 3 – Installation

Rev-0

MNL000624.doc



Initial Release.

Chapter 4 – 38 Liter Bubbler Installation

Rev-0

MNL000625.doc



Initial Release.

Chapter 5 – Features and Components

Rev-0

MNL000626.doc



Initial Release.

Chapter 6 – System Operation

Rev-0

MNL000627.doc



Initial Release.

Chapter 7 – Maintenance and Calibration Procedure

Rev-0

MNL000628.doc



Initial Release.

Addendum A – LPE 14 Liter Bubbler Change Procedure

Rev-0

MNL000629.doc



Initial Release.

Addendum B – Gas Filter Setup

Rev-2

MNL000108.doc



AP to Versum update.

Appendix F – Gas Sensor Instruction

Rev-2

MNL000112.doc



AP to Versum update.

Summary of Contents for Chemguard Genlll 050

Page 1: ...the revision and date shown All rights reserved Confidential and Proprietary Data Versum Materials Confidential Installation Operation Maintenance Manual CHEMGUARD GenIII 050 Chemical Equipment Manual Part Number 477444 Edition Rev 0 ...

Page 2: ...or in part without prior written consent of Versum Materials Inc The information and data should be available only to those with a need to know Versum Materials Inc makes no representation that the information and data is appropriate for the recipient and each recipient needs to independently evaluate the appropriateness of the information and data for its use This Installation and Operation Manua...

Page 3: ... and periodic calibration In no event shall Versum Materials be liable for any incidental indirect or consequential damages in connection with the purchase or use of any Versum Materials product This warranty shall not apply to and Versum Materials shall not be responsible for any loss arising in connection with the purchase or use of any Versum Materials product which has been repaired by anyone ...

Page 4: ...ite Preparation Rev 0 MNL000623 doc Initial Release Chapter 3 Installation Rev 0 MNL000624 doc Initial Release Chapter 4 38 Liter Bubbler Installation Rev 0 MNL000625 doc Initial Release Chapter 5 Features and Components Rev 0 MNL000626 doc Initial Release Chapter 6 System Operation Rev 0 MNL000627 doc Initial Release Chapter 7 Maintenance and Calibration Procedure Rev 0 MNL000628 doc Initial Rele...

Page 5: ...nstalling ChemGuard Bulk Scale 3 16 Section 8 Communications 3 17 Section 9 Start up and Initialization 3 23 Section 10 System Configuration 3 28 Section 11 Manual Mode 3 30 Section 12 Regulator Adjustment 3 33 Section 13 Finishing the ChemGuard Installation 3 34 Chapter 4 38 Liter Bubbler Installation Section 1 38 Liter Bubbler Installation 4 2 Section 2 Bubbler Valves 4 2 Section 3 Installation ...

Page 6: ...Chapter 6 System Operation Section 1 Theory of Operation 6 2 Section 2 Description of Menu and Operations 6 4 Section 3 Operating Menu 6 5 Section 4 Alarm Types 6 19 Chapter 7 Maintenance Calibration Procedures Section 1 Introduction 7 2 Section 2 Calibration and Testing 7 2 Addendum A LPE 14 Liter Bubbler Change Section 1 Safety Notes A 2 Section 2 Removing and Replacing the Bubbler A 3 Section 3...

Page 7: ...__________________________________ MNL000622 doc Revision 0 6 17 2019 Chemical Equipment Versum Materials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 1 1 Versum Materials Confidential Chapter 1 Delivery and Inspection Section 1 Delivery Section 2 Inspection ...

Page 8: ...s This shipment includes one empty bubbler chemical container You will need to order a container or containers containing chemical The contents of the packing boxes are The ChemGuard Gen III Cabinet One 1 empty bubbler chemical container Start up kit See Packing Checklist included with shipment Shipping Identification Sheet packing checklist ChemGuard Gen III Quality Inspection Records NOTE Save a...

Page 9: ...rials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 1 Versum Materials Confidential Chapter 2 Site Preparation Section 1 Facility Preparation Section 2 Facility Requirements Section 3 Tag and Lockout Routine Section 4 Spill Cleanup Routine ...

Page 10: ...e local laws i e Clean Water Act Clean Air Act and Hazardous Waste Laws The information and data contained herein are proprietary to Versum Materials Inc and are not to be copied reproduced duplicated or disclosed to others in whole or in part without prior written consent of Versum Materials Inc The information and data should be available only to those with a need to know Versum Materials Inc ma...

Page 11: ...or closed 21 in 533 mm 2 1 1 Bolt Down and Ground Cabinet Requirements Set the ChemGuard CG050 cabinet over the bolt down points and attach securely Verify ChemGuard CG050 is in a level location where it can be serviced easily and is out of the main thoroughfare Per current United States UBC and SEMI S2 STANDARD requirements floor bolts must be at least Grade 5 metric Grade 8 8 at a recommended mi...

Page 12: ...terials Confidential Figure 2 1 Earthquake Bolt Down Pattern with Front Door Clearances 2 2 Facility Requirements When selecting a location for the unit ensure that the following facilities are available to make connections on top of the cabinet Environmental Electrical Supply gases Venturi Vacuum Supply Exhaust and Vent Chemical Delivery Line Bulk Chemical Refill Line from BCD200 CG010 or CG310 C...

Page 13: ...________________________________________ MNL000623 doc Revision 0 06 25 2019 Chemical Equipment Versum Materials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 5 Versum Materials Confidential Figure 2 2 CG050 GEN III Cabinet Connections Top View ...

Page 14: ...____________________________________ MNL000623 doc Revision 0 06 25 2019 Chemical Equipment Versum Materials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 6 Versum Materials Confidential Figure 2 3 CG050 GEN III Cabinet Connections Right Side View ...

Page 15: ..._______________________________________ MNL000623 doc Revision 0 06 25 2019 Chemical Equipment Versum Materials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 7 Versum Materials Confidential Figure 2 4 CG050 GEN III Cabinet Connections Back View ...

Page 16: ...ble with chemical used Lighting Minimum of 300 lux of illumination 2 2 2 Electrical Requirements Versum Materials Inc recommends connection to an Uninterrupted Power Supply UPS and a Ground Fault circuit Interrupter GFCI Versum Materials Inc recommends that customer electrically ground the ChemGuard CG050 cabinet and plumbing SEMI S2 requires a lockout type circuit breaker setup for the AC power O...

Page 17: ...irs 14 20 conductors per interface Table 2 4 Digital I O DIGITAL INPUTS DIGITAL OUTPUTS Input current On 4 07 mA min 5 3 mA max Resistive Load 1 0 A 30 VDC 0 5 A 120 VDC Input voltage On 24 0 VDC 20 Switching Power 30 W max Input current Off 100 µA max Contact material Silver alloy gold etched clad Input voltage Off 1 0 VDC max Protection 36V Zener 2 2 4 Supply Gases The customer is required to su...

Page 18: ...es and isolation valves which have been properly sized to meet the pressure and flow requirements of the process tool s A gas filter is required on the houseline supplying the ChemGuard CG050 push gas Failure to install a filter will void regulator and valve warranty if failed component found to have particles embedded on the seat See Addendum B for recommended setup Minimum filter specifications ...

Page 19: ...e ChemGuard installation site WARNING DO NOT connect high pressure gas cylinder directly to the cabinet process purge gas ports N2 IN Process Purge Supply Gas Nitrogen gas is Ultra High Pure semiconductor grade recommended Water content 10 ppb and O2 content 2ppm Recommended to use Inert Gas Purifier model SS2500KFI4RR or equivalent Required to install a 0 003 micron gas filter Install regulator a...

Page 20: ...ximity to the ChemGuard installation site NOTE The Output Manifold allows the cabinet to feed the gas mixture to the process tool as well as a sample purge IN port simultaneously Manual sample purge port is also available The house line can be plumb and ready to use by opening either of the manual valves PNEUMATIC SUPPLY Nitrogen gas is semiconductor grade or better is recommended Regulated to 620...

Page 21: ...rvoir Container The vent should be connected to the appropriate abatement system for chemical used Ventilation measurements should be made at a distance of four 4 duct diameters from the cabinet Versum Materials Inc recommends that ducting be made from zinc plated steel with operation at static pressure of 0 7 in of water NOTE If your installation has the combustible lower explosion limit LEL vapo...

Page 22: ... user must have knowledge of process flow requirements prepare flow calculations for sufficient flow and have a carefully designed layout plan for the installation of the ChemGuard CG050 cabinet preferably at a central location where the facilities will meet the process tool requirements Proper facilitation and installation will reduce and avoid potential failures tool downtime and rework costs Ch...

Page 23: ... Outer Coaxial Line if required by customer or local regulations 12 7 mm in stainless steel Bends should meet SEMATECH standards for bend radius Specification for Outer Lines Stainless steel line The line should be welded Sharp edges should be removed and de burred at breaks in the line to prevent stainless steel inner line from being scratched or torn when routing through the outer line 2 2 7 Ins...

Page 24: ... Output Manifold allows the cabinet to feed the gas mixture to the process tool as well as a sample purge port simultaneously Manual sample purge port is also available The house line can be plumb and ready to use by opening either of the manual valves 2 2 10 Coolant Supply Return optional The ChemGuard CG050 is configured with a standard coolant supply and return lines with overpressure protectio...

Page 25: ...s such as repositioning blocking bleeding down etc Type s of stored energy methods to dissipate or restrain 4 Lockout and or tagout the energy isolating devices with assigned individual lock s or tag s Method s selected i e locks tags additional safety measures etc 5 After ensuring that no personnel are exposed and as a check on having disconnected the energy sources operate the push button or oth...

Page 26: ...as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 18 Versum Materials Confidential information It is the responsibility of the customer to follow their EH S procedures for hazardous material cleanup In addition consult your company s environmental hazard safety procedures for specific instructions to be followed in the event of a chemical spill from Che...

Page 27: ... Section 1 Introduction Section 2 Reference Documents Section 3 Installation Section 4 Installing the ChemGuard CG050 Cabinet Section 5 Connecting ChemGuard Gas Lines Section 6 Chemical Delivery Line Requirements Section 7 Installing ChemGuard Bulk Scale Section 8 Communications Section 9 Start Up and Initialization Section 10 System Configuration Section 11 Manual Mode Section 12 Regulator Adjust...

Page 28: ...G050 comes pre calibrated and cabinet tested The ChemGuard Bulk Scale dual float spill detector combustible vapor detector option and UVIR option are setup prior to leaving the factory These items should not require calibration during installation Please contact Versum Materials Inc if any of these components do not function properly NOTE When highly flammable chemicals are used and present within...

Page 29: ...process tool s to meet process operating pressure and flow rate required of the process tool s The maximum range that a standard ChemGuard can deliver chemical is dependent on the chemical and the pressure of the push gas Contact Versum Materials Inc for any specific delivery requirements beyond 250 meters of horizontal run and 10 meters of vertical run These distances could be increased contingen...

Page 30: ...tions The ChemGuard CG050 GEN III cabinet is used in an epitaxial process Hydrogen gas is bubbled thru an onboard container typically containing Trichlorosilane TCS and vapor is then delivered to a Process Tool This application is limited to one ChemGuard per tool or chamber 3 4 Installing the ChemGuard CG050 Cabinet Verify that the cabinet is in a level location with enough clearance around it so...

Page 31: ...type circuit breaker for AC power Versum Materials Inc recommends an over current protection of 10 000 Ampere Interrupt Capacity AIC be provided in close proximity to the unit WARNING WARNING Electrical connections should be made by a qualified electrician AC power junction box requires Lock out Tag out ON OFF capability AC power conduit hole exits top of cabinet WARNUNG Elektrische Anschlüsse sol...

Page 32: ...rd cabinet must be earth grounded Electrical connections should be made only by a qualified electrician WARNUNG Um elektrische Schläge zu vermeiden muß der Schrank des ChemGuard geerdet werden Elektrische Anschlüsse sollten nur durch qualifizierte Elektriker hergestellt werden AVERTISSEMENT Pour éviter tout choque électrique la boîte ChemGuard doit être reliée à la masse Les raccords électriques d...

Page 33: ...roprietary Data Page 3 7 Versum Materials Confidential Figure 3 1 Rear view of conduit power entrance WARNING WARNING ELECTRICAL HAZARD A conduit hole is supplied for connecting the 100 240 VAC AC line to the cabinet The conduit hole is located on the upper back wall of the controller enclosure red arrow The power input must be wired to the terminals shown below in red box ...

Page 34: ...t 75C rated wiring for the mains supply In NEC Class I Division 2 areas only in the U S A a conduit seal pour fitting or equivalent must be installed between each electrical connection point on the cabinet and the electrical source Liquid tight flexible conduit can be installed between the ChemGuard connectors and the conduit seals to facilitate these connections A maximum length of 18 457 mm is a...

Page 35: ... face of the controller The USB port allows a USB connection to be made without having to open the controller door Electrical devices should never be operated connected to or disconnected from the USB port unless the area surrounding the equipment is known to be free of flammable material The USB port on the face of the controller will also have a warning label Figure 3 3 for operation in a flamma...

Page 36: ... 2019 Chemical Equipment Versum Materials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 3 10 Versum Materials Confidential Figure 3 3 Electrical Warning Label Figure 3 4 Lindy USB Port Blocker and Key ...

Page 37: ...SSEMENT Les pressions du système dépassent l échelle des récipients Versum Materials Inc au delà de 120 psig 827 76 kg cm2 3 6 Chemical Delivery Line Requirements NOTE All chemical delivery line requirements are the customer s responsibility 3 6 1 Chemical Vapor Delivery Line The Output Manifold allows the ChemGuard cabinet to deliver the process vapor and gas mixture to the process tool through p...

Page 38: ...n MNL000624 doc Revision 0 06 25 2019 Chemical Equipment Versum Materials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 3 12 Versum Materials Confidential manual valves ...

Page 39: ...equirements refer to chapter 2 3 6 5 Connecting ChemGuard Exhaust 1 Connect Exhaust line to the 101 6 mm 4 in Exhaust port on ChemGuard cabinet Figure 2 2 2 The ChemGuard cabinet also requires exhaust for venting of the bulk container During system operation the bulk container will relieve excess push gas to the vent connection on ChemGuard Figure 2 2 3 6 6 Hazardous Gas Vapor Leak Detection Syste...

Page 40: ...s located within the cabinet There is one switch in the controller housing one in the upper cabinet door and one in the interface box to ensure adequate pressure 0 1 H2O during the Z purging Low Z purge alarms will be triggered if pressure falls below the pressure adjustment in the pressure switches The nitrogen flow must be increased until the alarms can be reset The Z purge pressure is controlle...

Page 41: ...emical Equipment Versum Materials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 3 15 Versum Materials Confidential Figure 3 4 Controller Z Purge Pressure Switch Figure 3 5 Display Panel Z Purge Pressure Switch ...

Page 42: ...on 0 06 25 2019 Chemical Equipment Versum Materials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 3 16 Versum Materials Confidential 3 6 9 Figure 3 6 Interface Module Z Purge Pressure Switch ...

Page 43: ...r 7 3 7 1 Bulk Scale Installation Carefully remove the bulk scale assembly from its shipping carton This is a precision instrument that can be damaged if mishandled CAUTION CAUTION Do not drop ChemGuard Reservoir Scale while installing This may cause damage VORSICHT Die Waage beim Einsetzen nicht aufschlagen lassen da sie dadurch baschadigt warden kann ATTENTION Ne pas faire tomber la balance lors...

Page 44: ...uts Outputs The Process Tool Interface Connection enables the Process Tool to automatically control the main functions of ChemGuard It also provides alarms used by the Process Tool to automate the interface with ChemGuard See Table 3 2 for connector and signal identification Refer to Chapter 2 for general cable specification For all field terminations on the DB25 customer connections connectors th...

Page 45: ...rsum Materials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 3 19 Versum Materials Confidential 22 V11 Control TB5 11 12 Dry Contact J1 to A position J1 pin 1 2 J1 12 13 Table 3 5 Tool Input Valve Control Sinking Inputs Digital Input Input Label AP1614 DB25 Bulkhead Connector TB1 TB4 CONFIGURATION 22 V11 Control TB1 11 12 Sinking J1 12 13 ...

Page 46: ...37 must be closed in order to enable Process Tool Chemical Vapor Flow enable If input not present Waiting On Tool Signal prompt will be generated and prevent Process Flow Table 3 7 External Refill Digital Input Input Label AP1614 TB1 CONFIGURATION 38 XFILL ON from BCD200 CG010 or CG310 Input must be closed to enable start XFILL operation to refill Bubbler or a WAITING ON X_FILL SIGNAL prompt will ...

Page 47: ...l AP1614 TB13 CONFIGURATION 16 Vapor Detect 10 N O 11 Common 12 N C Table 3 9 Output Valve Acknowledgement Digital Output Output Label AP1614 TB14 CONFIGURATION 21 V11 Chem On 1 N O 2 Common 3 N C Table 3 10 Bulk Refill Request Output Digital Output Output Label AP1614 TB16 CONFIGURATION 18 XFill Request 4 N O 5 Common 6 N C Table 3 11 Alarm Outputs Digital Output Output Label AP1614 DB25 Bulkhead...

Page 48: ...ion and date shown All rights reserved Confidential and Proprietary Data Page 3 22 Versum Materials Confidential Table 3 12 Connecting ChemGuard to Monitoring System ChemGuard cabinets can be connected to a Global Communication System GCS that provides continuous 24 hour on line monitoring of the status of all connected ChemGuard cabinet The connection should be made with a 10BaseT Ethernet cable ...

Page 49: ...to the ON position Verify power LED lit Refer to Figure 3 4 3 Verify power is on to the CG The CG Display will light and go to boot up display 4 Acknowledge any alarms and log into the main menu to verify the Display is working properly 3 9 2 ChemGuard Display The ChemGuard has a color VGA LED screen on the front face of the cabinet that shows a graphical display of the Bulk and Process reservoir ...

Page 50: ...MNL000624 doc Revision 0 06 25 2019 Chemical Equipment Versum Materials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 3 24 Versum Materials Confidential NOTE A legend for the color code is on the side of the LCD for reference Figure 3 10 ChemGuard CG050 Controller VGA Display Screen ...

Page 51: ... levels of password protection in the ChemGuard controller Each password level allows a user more access to the features and operation of the controller From the Main Menu enter Config Menu 1st Security List default 11234 2nd Security List default 25678 3rd Security List default 39999 LED FUNCTION SHUTDOWN ALARM This LED flashes red on Shutdown alarm Once acknowledged the LED stops flashing but re...

Page 52: ... and date shown All rights reserved Confidential and Proprietary Data Page 3 26 Versum Materials Confidential 3 9 5 Main Menu and Configuration Selection Window Once a password is successfully entered the selection window will display on the right side of the screen to show prompts and menu selections It will remain displayed for a configurable amount of time or until the LOGOUT key is pressed Fig...

Page 53: ...mode touch the words Main Menu at the top of the window To return the Main Menu to its normal size simply touch the words Main Menu again 3 9 7 Alarm and Controller Status Boxes Shutdown alarms will appear on the SHUTDOWN ALARM box located in the top left hand corner of the screen Fault alarms will appear on the FAULT ALARM box located in the top right hand corner of the screen A time stamp of whe...

Page 54: ...idle Chem On and External Fill in systems with a Bulk refill option The screen saver will de activate if a new alarm appears To manually de activate the screen saver touch anywhere on the display screen The screen saver function will not be active while a fault or shutdown alarm is present an active prompt is displayed or during any mode sequence other than idle and Chem On Chem On or External Fil...

Page 55: ...k Push PT1 and PT2 Pressure Alarm setpoints From the Main Menu enter Config Menu User Setpoints PT1 Note values shown are recommended Table 3 15 User Setpoints PT1 Num Alarm Label Setpoint 1 LOW PUSH PRESSURE 22 2 HI PUSH PRES PRESSURE 45 3 LOW PUSH PRESSURE 22 4 BULK VENT FAILED 22 5 PUMPDOWN CHECK 10 6 BASE VAC CHECK 5 7 GROSS LEAK PT1 22 8 PT1 HP VENT 28 From the Main Menu enter Config Menu Use...

Page 56: ...uld not be used for normal daily operation Manual mode provides a means of flowing purge gas through the purge and process gas panels during cabinet installation and pre start up procedures It also provides a means of flowing purge gas while maintenance or repairs are being performed or when performing leak checks Vacuum Rate of Rise or Pressure Decay tests 3 11 1 How to Operate Manual Mode Operat...

Page 57: ...sum Materials Confidential 3 11 2 Selecting Manual Mode 1 Select anywhere on the Color Touch 2 Display to bring up Main Menu screen and enter the password 3 Press OK 4 From the Main Menu screen select MANUAL MODE 5 The MANUAL MODE window will be displayed refer to Figure 3 12 Figure 3 12 Manual Mode Display 1 Controller Status box changes to Violet for operation selected CHEM ON EXT Fill 2 Yellow ...

Page 58: ...ay will be highlighted with a yellow box 2 The valve confirmation window will appear asking you to confirm that you want to open the valve by pressing OPEN VALVE Pressing CANCEL will close the window leaving valve closed refer to Figure 3 13 3 11 4 How to Close Valve in Manual Mode 1 To close a valve 2 Touch the valve you want to close by selecting the valve on the display Figure 3 13 Manual Mode ...

Page 59: ...PT1 PT2 and R1 Test and Adjustment Test Bubbler PT1 and PT2 while adjusting Regulator R1 together at same time 1 Turn main supply gas off to the CG050 0psig 2 Slowly open regulator R1 by turning R1 fully clockwise 3 Step to CHEM ON Menu 4 Step to Manual Mode and open V4 V1 and V6 Verify valve indicator switches from green to red 5 Vent off pressure to PT1 by opening V5 6 Confirm PT1 PT2 pressure d...

Page 60: ...i e leak check and vacuum purged for a minimum of eight 8 hours to remove any atmospheric moisture before starting the chemical fill 2 To perform system vacuum purge refer to chapter 4 NOTE It is the end user s responsibility to purge and evacuate the delivery line from the Process Tool to the ChemGuard cabinet s output manifold 3 13 2 Chem On Bulk Fill Operation Confirm with the end user that the...

Page 61: ...Liter Bubbler Installation Section 1 38 Liter Bubbler Installation Section 2 Bubbler Valves Section 3 Installation of the Bubbler and Valves Section 4 Bubbler and System Leak test Setup Section 5 Leak Test main Manifold Pressure Decay Section 6 Leak Test Vapor Out Pressure Decay Section 7 Leak Test Sample Out Purge Line Pressure Decay Section 8 Leak Test 38L Bubbler Outer Cooling Jacket Pressure D...

Page 62: ...ailable for the 38 Liter Bubbler option The 38 Liter Bubbler is not designed for routine removal Should the 38 Liter Bubbler require removal for maintenance purposes contact your Versum Materials representative for instructions 4 2 Bubbler Valves NOTE Before installing the 38 Liter Bubbler the Technician should be familiar with the Bubbler valves prior to opening and closing the manual valves and ...

Page 63: ...er to figures 4 1 and 4 2 are 3 Carefully place the bubbler on the bulk scale Secure the bubbler using the cylinder strap provided on the back bracket 4 Attached the 3 valve pigtail assemblies VB1 VB2 and VB3 to the appropriate port on the bubbler using new VCR gaskets Finger tighten only at this time 5 Connect the opposite end of each pigtail assembly to the main manifold using new 1 4 VCR gasket...

Page 64: ...___________________________________________________________ MNL000625 doc Revision 0 06 25 2019 Chemical Equipment Versum Materials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 4 4 Versum Materials Confidential Figure 4 1 38 Liter Bubbler ...

Page 65: ...blish pressure decay base reading for all Leak Check test steps below Record pressure decay base reading below 1 At the Main Menu enter Config Menu System Setup and select Disable Valve Locks 2 At Main Display step to CHEM ON Menu and enter Manual Mode Select and open valve V4 and V1 3 Set R1 to maximum setting 60 80 psig Refer to BUBBLER PT1 AND R1 TEST SETUP in above section 4 Set PTI High Push ...

Page 66: ...w 4 5 Leak Test Main Manifold Pressure Decay 1 Confirm Close MV1 MV10 MV15 2 Go to Main Menu CHEM On and select Manual Mode 3 Open V5 and V6 At Bubbler open VB2 4 Wait 15 minutes 5 Close V5 V6 and Bubbler valve VB2 6 Open V4 V1 V9 V6 V2 and V3 V11 closed 7 Place Manual Mode in Secure Mode 8 Go to Main Menu EXT Fill and select Manual Mode 9 Open V10 10 Place Manual Mode in Secure Mode 11 Wait 5 min...

Page 67: ...tion 7 Cancel out of Manual Mode 4 7 Leak Test Sample Out Purge Line Pressure Decay 1 Confirm Close MV1 MV15 2 Open MV10 3 Enter Manual Mode open V4 V1 V6 and V3 Note Confirm Sample Out Purge line from MV10 is connected and is closed at tool 4 Wait 15 minutes and then close V1 5 Place Manual Mode in Secure Mode 6 Wait 30 minutes 7 Return to System Test Test Analog In Compare PT1 pressure from valu...

Page 68: ...mpare PT1 pressure from values recorded in step 8 above Confirm change in pressure Pressure decay is less than 1psig 0 2mA ____________PSIG ___________mA Note if pressure drop is greater than specified troubleshoot until pressure decay meets this specification 13 Cancel out of Manual Mode 4 9 Leak Test External Refill Line Pressure Decay 1 Confirm Close MV1 MV10 MV15 2 Confirm External Refill line...

Page 69: ...talled and cooling water off Note Do not purge while cooling water is on 1 Open confirm manual shutoff valve on venture vacuum gas supply line to V7 is open 2 At Main Display step to CHEM ON Menu and enter Manual Mode 3 Select and open V7 and V5 4 Confirm pressure readout of PT1 begins to decrease Once pressure stabilizes and is no longer decreasing Record value ____________PSIG 5 Confirm value en...

Page 70: ...ter on 4 Verify with facilities that coolant water is circulating 5 Visually inspect all coolant water connections at CG cabinet and chiller connections at outer coolant jacket of bubbler is leak free no water leak observed 6 Once Bubbler installed and coolant water on and circulating enter Bubbler Net and Current liquid weight 4 12 Entering Bubbler Liquid Weight From the Main Menu enter Config Me...

Page 71: ...______________ MNL000626 doc Revision 0 06 25 2019 Chemical Equipment Versum Materials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 5 1 Versum Materials Confidential Chapter 5 Features and Components Section 1 Overview Section 2 Component Description Section 3 Available Options ...

Page 72: ...ct chiller remote refill system Continuously delivers uninterrupted supply of chemical vapor from the onboard bubbler to a process tool The bubbler maintained at a constant level supplied by the remote refill from an external source i e ChemGuard BCD200 CG010 or CG310 cabinet Display shows all operating parameters current status of bubbler chemical level and system setup information All purge proc...

Page 73: ...nd users responsibility and is not included with the system 5 1 3 Safety and Security Features No spark sources in chemical storage area of cabinet for inherently safe design Built in seismic safety bolts down points per S2 Standard Refer to chapter 2 for bolt down dimensions Specially designed scale for accurate weight detection of the bubbler 150 grams 0 1 of full scale 110 primary spill contain...

Page 74: ...uire a flow rate of approximately 5 5 LPM 5 1 5 Z Purge Setup and Procedure The Z purge pressure is controlled by a needle valve at rear of controller After opening the controller in a suspected hazardous area it is necessary to use the following procedure to re establish the Z purge before operating the controller 1 Close the controller door and secure latch completely 2 Open the needle valve 4 t...

Page 75: ..._____________________________________________________ MNL000626 doc Revision 0 06 25 2019 Chemical Equipment Versum Materials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 5 5 Versum Materials Confidential Figure 5 1 ChemGuard CG050 GenIII ...

Page 76: ...ard microprocessor and redundant ARS automated restart microprocessor 3 Tool IO board AP1614 Cabinet IO Interface with Life Safety and Process Tools 4 Master Solenoid Controls main pneumatic air supply to ChemGuard cabinet Closes to isolate pneumatic supply hardware interlock in a life safety alarm condition 5 Solenoid Manifold Main manifold for all pneumatic control valves in the ChemGuard cabine...

Page 77: ...ical display screen of the ChemGuard CG050 Gen III with a 38 liter bubbler 5 2 2 Liquid Bubbler The two liquid bubblers are available for use with the CG050 Versum Material s 38 liter bubbler PN 477700 The 38 liter bubbler is equipped with a level overfill probe The overfill probe is interfaced to the cabinet controller to prevent an overfill condition due to the result of a component failure i e ...

Page 78: ...y PN 239613 has inch male VCR connection Connects to bubbler carrier gas IN port on dip tube port side of bubbler VB2 Vapor OUT Valve Assembly PN 239614 has inch male VCR connection Connects to bubbler vapor OUT port on headspace side of bubbler VB3 Refill IN Valve Assembly PN 239615 has inch male VCR connection Connects to the bubbler refill IN port on dip tube port side of bubbler NOTE Refill IN...

Page 79: ..._______________________________________ MNL000626 doc Revision 0 06 25 2019 Chemical Equipment Versum Materials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 5 9 Versum Materials Confidential Figure 5 5 38 liter Bubbler with Coolant Plumbing Connections ...

Page 80: ...Connections Carrier Gas IN pigtail has inch male VCR connection Connects to bubbler carrier gas IN valve VB1 on dip tube port side of bubbler Vapor OUT pigtail has inch female VCR connection Connects to bubbler vapor OUT valve VB2 on the headspace side of bubbler Refill IN pigtail has female VCR connection Connects to the bubbler refill IN valve VBBL on the headspace side of bubbler NOTE Refill IN...

Page 81: ...______________________________________________________ MNL000626 doc Revision 0 06 25 2019 Chemical Equipment Versum Materials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 5 11 Versum Materials Confidential Figure 5 7 LPE 14 liter Bubbler ...

Page 82: ...__________________________________________________ MNL000626 doc Revision 0 06 25 2019 Chemical Equipment Versum Materials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 5 12 Versum Materials Confidential Figure 5 8 LPE 14 liter Bubbler Drawing ...

Page 83: ...hemGuard and the model ChemGuard required Some of these chemicals require specially configured ChemGuard cabinets For physical hazards and hazard thresholds associated with these chemicals contact Versum Materials Inc for SDS information for each chemical type It is the customer s responsibility to comply with OSHA Hazard Communication Standards regarding chemical container labeling and cabinet la...

Page 84: ...TCS Trichlorosilane 43 4kg 15 4kg 5 3 Available Options 5 3 1 Cabinet Spill Detection Sump Spill Dual Float Sensors The ChemGuard CG050 is equipped with dual float switches as standard offering for spill detection When a single float detects a spill a fault alarm is displayed If both float switches detect a spill a shutdown alarm will be generated and will terminate all operations and return the c...

Page 85: ...oo low to be in their flammable combustible ranges However most are air sensitive chemicals that will develop byproducts detectable by the combustible vapor detection system NOTE The combustible vapor detection system is not designed for use in detecting Threshold Limit Value TLV concentrations of process chemical The customer is responsible for determining whether such protection is required and ...

Page 86: ...ion Switch optional A temperature switch mounted on the exhaust sensor assembly will alarm if temperature inside the ChemGuard cabinet rises above 45 52 C A High Temp alarm will be generated and will terminate all operations and return the cabinet to IDEL state Refer to Chapter 7 for testing of the sensor 5 3 5 Fire Suppression System optional The Fire Suppression System is an independent system e...

Page 87: ...system authorized personnel should always review the manufacturers operation manual prior to install or service WARNING The system must be independently powered down and locked out at the circuit breaker prior to any work WARNING Hazardous energy present includes stored pressurized CO2 Always wear proper PPE and follow manufacturer s instruction manual NOTE The CG Fire option is an external and in...

Page 88: ...erials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 6 1 Versum Materials Confidential Chapter 6 System Operation Section 1 Theory of Operation Section 2 Description of Menu and Operations Section 3 Operating Menu Section 4 Alarm Types ...

Page 89: ...act surface area between the liquid and the gas The evaporation process depletes the liquid inventory in the Bubbler which is then automatically refilled When the liquid level in the Bubbler goes low the Bubbler is externally refilled from a Bulk Chemical Delivery System BCD200 CG010 or CG310 When the liquid level in the bubbler drops below the Bubbler Start Refill Level which is found in User Set...

Page 90: ...ost of ownership through improved efficiencies footprint exhaust MTBF MTBR Automated Bubbler Refill functions are incorporated providing 100 uptime preventing interruption to the process tool NOTE The Bulk Reservoir Change operation is not available for the 38 Liter Bubbler option The 38 Liter Bubbler is not designed for routine removal Should the 38 Liter Bubbler require removal for maintenance p...

Page 91: ... to the solenoids which return the valve actuators to normal status Password protection prevents unauthorized personnel from attempting key tasks Operating modes are displayed to simplify operation 6 2 Description of Menus and Operations 2 Operations performed by the ChemGuard CG050 CHEM ON EXTERNAL FILL 6 2 1 CHEM ON Vapor pressure accurately maintained within in 5 psig This is accomplished by th...

Page 92: ...emain in an external refill mode until Bubbler level reaches Bubbler Stop Refill setpoint 70 6 3 Operating Menu 6 3 1 Display Screen Located on the front face of the controller the display screen is an LED color touch display that contains a graphical display of the Bubbler and External Refill Shutdown and Fault alarm boxes a controller status box and selection window The LED display provides a li...

Page 93: ...tem Operation MNL000627 Revision 0 06 25 2019 Chemical Equipment Versum Materials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 6 6 Versum Materials Confidential ...

Page 94: ... alarm Figure 6 2 Alarm and Controller Status Box 6 3 3 System Status LEDs Additionally LEDs that display ChemGuard CG050 functions are located to the right of the LED display The table below describes these LEDs and their functions The fault alarms are indicated by a yellow color and the shutdown alarm is identified by red Figure 6 3 Alarm and Controller Status Box LED FUNCTION SHUTDOWN ALARM Thi...

Page 95: ... with two options Chem On and External Fill Any operation associated with the Bubbler should be selected by choosing Chem On from the pull down menu To enable External refill select the Ext Fill from the pull down menu It is possible to minimize the Main Menu without logging out To minimize touch the top right corner of the Main Menu window To open fully again touch the top right corner to open th...

Page 96: ...hem On from the pull down menu of Main Menu to gain access to the Bubbler Main Menu Start CHEM ON This option allows vapor mixture to flow from the Bubbler to the process tool In this option Select Start Chem On to enable the Bubbler s vapor flow Then when the process tool provides the Process Tool flow signal bubbling gas will begin to flow from the Bubbler and vapor mixture will flow to the proc...

Page 97: ...ts reserved Confidential and Proprietary Data Page 6 10 Versum Materials Confidential CHEM ON operation remains enabled until one of the following occurs The operator terminates the operation by selecting Stop CHEM ON A Life Safety or Process shutdown alarm occurs Process Tool input signal at Digital Input 37 is removed and the input goes open ...

Page 98: ...uum This allows for any head pressure to be vented from the Bubbler refer to Figure 6 6 To start Bubbler Vent operation 1 Select CHEM ON from the pull down menu of Main Menu and click Start BULK VENT The Controller status box for Bubbler CHEM ON will change to BULK VENT in blue 2 Once line clear operation is started the Stop BULK VENT button will be enabled on the CHEM ON Main Menu Click on Stop B...

Page 99: ...re 6 5 ChemGuard CG050 Bulk Vent Mode Bubbler Process Line Purge Operation Start PRC PURGE Bubbler Process Line Purge operation removes chemical vapor from the CG050 main process panel and out thru the vapor output line to the process tool This operation is primarily used during maintenance operation and should be done before the vapor output line is disconnected or when the 38 Liter Bubbler needs...

Page 100: ...e Purge operation 1 Select CHEM ON from the pull down menu of the Main Menu and click Start PRC PURGE The Controller status box for Bubbler CHEM ON will change to PRC PURGE in blue 2 Once PRC PURGE operation is started the Stop PRC PURGE button will be enabled on the CHEM ON Main Menu Click Stop PRC PURGE at any time to Bubbler Line Purge operation 3 Bubbler Line Purge operation can be started unl...

Page 101: ... shown All rights reserved Confidential and Proprietary Data Page 6 14 Versum Materials Confidential Figure 6 6 ChemGuard CG050 PRC PURGE Bubbler Manual Mode Operation START Manual Mode The Bubbler Manual Mode operation is a function to operate individual valves during startup or maintenance mode as well as for troubleshooting NOTE Only qualified operators and maintenance technicians should access...

Page 102: ... shown All rights reserved Confidential and Proprietary Data Page 6 15 Versum Materials Confidential To start Bubbler Manual Mode operation select MANUAL MODE from the CHEM ON Main Menu Select desired valve on touch screen to be actuated and confirm by pressing OK For desired valves to remain actuated then select the SECURE box before changing to different screen At any time all valves can return ...

Page 103: ...sum Materials Confidential Figure 6 7 Manual Mode Display Screen NOTE Yellow box symbol around all valves allowed to be controller in manual mode 6 3 7 External Fill Main Menu External Fill operation allows the Bubbler to be refilled from an external source i e BCD200 CG010 or CG310 An external refill line connects to a dip tube valve on the 38 Liter Bubbler allowing connection of an external refi...

Page 104: ...ll down menu of Main Menu and click Start EXT FILL Then when the external refill system provides the X FILL ON signal and the liquid level is below Bubbler Start Level the CG050 will be placed in an external refill mode EXT FILL requires an X FILL ON input signal on Digital Input 38 If X FILL ON input not present a display prompt Waiting On X_Fill Signal will be displayed Once Start EXT FILL is se...

Page 105: ...l operation will start when all of the following conditions are met The X FILL ON input signal is present at DI38 T1 pins 3 and 4 on the Tool IO board AP1614 Liquid level in the Bubbler falls below the BUBLR START LEVEL set point defined in User Setpoints of Configuration Menu as shown below Note Once liquid level in the Bubbler reaches the BUBLR STOP LEVEL set point External fill will end and go ...

Page 106: ...op left hand corner of the screen Fault alarms appear on the FAULT ALARM box in YELLOW located in the top right hand corner of the screen If NONE is displayed no alarm conditions are present A time stamp of when the alarm occurred will be displayed with each alarm Any alarm that occurs in ChemGuard CG050 is displayed along with date and time stamp indicating date and time of alarm occurrence In ad...

Page 107: ...LED stops flashing but remains yellow until it is reset If multiple alarms are present alarms will scroll in the alarm box with an index and number of alarms present in the cabinet at that time The CG050 can be configured so that when the power at the CG050 is powered off all alarms are activated at the I O which in turn alerts the process tool of a loss of power on the CG050 Unacknowledged alarms...

Page 108: ...ials Confidential 6 4 3 Alarm History Menu A time stamp of when the alarm occurred will be displayed with each alarm Hundreds of alarms and user log in out times can be reviewed in System Information Alarm History Menu refer to figure 6 12 1 Tab anywhere on the lower task bar System Information menu will be displayed 2 Select Alarm History tab 3 Alarm History Read Only menu will be displayed 4 Usi...

Page 109: ...________________________________________________ MNL000627 Revision 0 06 25 2019 Chemical Equipment Versum Materials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 6 22 Versum Materials Confidential Figure 6 12 Accessing Alarm History Menu ...

Page 110: ...__________________________ MNL000628 doc Revision 0 06 25 2019 Chemical Equipment Versum Materials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 1 Versum Materials Confidential Chapter 7 Maintenance and Calibration Procedures Section 1 Introduction Section 2 Calibration and Testing ...

Page 111: ...ollowed to ensure that power is disconnected from the electronic enclosure before any work is performed on this equipment 7 2 Calibration and Testing Calibration and testing and any resulting maintenance should be performed at regular intervals Refer to recommended inspection table below Only qualified personnel trained on the Operation and Maintenance of the ChemGuard CG050 GEN III should attempt...

Page 112: ...l and Proprietary Data Page 7 3 Versum Materials Confidential 7 2 1 Power Supply Verification 1 Select the lower task bar at bottom of the display screen 2 System information screen will be displayed Select the top tab on the far right labeled Status 3 While monitoring Carrier 24V adjust Power Supply 1 or 2 for 24V 2 vdc 4 When Dual Power Supply option used turn power off at Power Supply 2 to adju...

Page 113: ...scale Once the 38 Liter Bubbler is installed and the scale calibrated re calibration is not required unless the scale or Bubbler is replaced Bubbler Scale Perform Bubbler Scale calibration when replacing the scale or 38 Liter Bubbler 1 Once 38 Liter Bubbler is removed step to the Net Product menu Bulk Scale in the Configuration Menu 1 Enter 0 for Current Liquid Weight 2 Step to Configuration Menu ...

Page 114: ...5 Place calibrated weight s on scale surface and verify the weight reading against the actual gram value of the calibrated weight Note if calibrated weight not available use the empty 38 Liter Bubbler that will be installed reference 11 5 kg 6 Adjust the span right side pot on front edge of scale as required so the weight is within 0 05 kg of the actual calibrated weight 7 Remove weight s and veri...

Page 115: ...ing on the operation mode During the Dual Float Sensors verification the CG050 should be in an idle condition as a Bubbler shutdown will occur and stop delivering the vapor mixture to the process tool NOTE The Dual Float Sensors do not require calibration It is recommended to verify the floats move freely by lifting each one up and it should freely fall down Verify there is no build up of debris o...

Page 116: ... Source Above V7 ULS3 NOTE Bulk Empty Sensor ULS1 mounted on the external refill line is not used 2 To verify the alarm activates for each remove each sensor one at a time to verify the alarms appear on Main Display and changes states Sensor wet shown as LIQ in red Sensor dry shown as GAS in white 3 Carefully replaced sensor and press the alarm field on the Main Display to verify the alarm clears ...

Page 117: ..._________________________________ MNL000628 doc Revision 0 06 25 2019 Chemical Equipment Versum Materials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 7 8 Versum Materials Confidential Figure 7 3 Ultrasonic Sensor Test Figure 7 4 Ultrasonic Sensor Location Res Overfull ULS2 ...

Page 118: ...ion Liq In Vac Line ULS3 7 2 5 Ultrasonic Clamp On Sensor Maintenance 1 Turn off all operations Chem On and External Refill 2 Open the cabinet door 3 Remove the ultrasonic sensors one at a time to avoid mounting them in the wrong location 4 Use a clean wipe to remove any of the gel tape or vacuum grease from the stainless tubing Make sure all sides of the tubing are clean 5 Clean the gel tape or v...

Page 119: ...ll of the ultrasonic sensors on the Main Display refer to UltraSonic Liquid Detector test in this section Note If the signal toggles from OPEN to CLOSED even briefly the vacuum grease should be replaced on the applicable sensor 7 2 6 Sierra Vapor Detector Verification Calibration System Requirement This procedure is used to verify calibrate the detection limit of the Sierra Vapor Detector Failure ...

Page 120: ...ion DO NOT USE LIQUID 3 The detector should trip and the red LED will be on 4 A Combust Vapor Detect alarm will be displayed on the Shutdown RED Alarm Field on the Main Display 5 Verify the Bulk and Process Container valves are open to vent Vents head pressure of containers 6 If the detector does not trip after 60 seconds place additional IPA on the clean room wipe and test for another 60 seconds ...

Page 121: ...ctor 7 2 7 High Temperature Sensor Verification System Option This test can be used on both the exhaust high temp sensor assembly or the Rate of Rise temp sensor installed when the fire suppression system is ordered NOTE Do not point the heat gun at anything other than the high temp sensor 1 Using Heat Gun apply heat directly to the sensor but not more than 1 minute 2 An alarm message Fire Detecte...

Page 122: ...aterials US LLC as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 7 13 Versum Materials Confidential Figure 7 7 High Temp Sensor 7 2 8 Other Tests Other tests that should be performed on a periodic basis include Triggering the E Stop switch on front door of cabinet to verify system shutdown Verification of cabinet exhaust Verification of all system parame...

Page 123: ...emical Equipment Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data AD A 1 Addendum A LPE 14 Liter Bubbler Change Section 1 Safety Notes Section 2 Removing and Replacing the Bubbler Section 3 Change BULK Bubbler Operation ...

Page 124: ...mungen und betriebsinternen Sicherheitsverfahren revidieren Alle mit Chemikalien umgehenden Personen sollten mit den in den Sicherheitsdatenblättern SDS aufgeführten Verfahren über die jeweils verwendete Chemikalie vertraut sein Ein Zweitbehälter und Reinigungsmittel sollten bereitstehen falls Chemikalien verschüttet werden AVERTISSEMENT Réexaminer les règles de sécurité instituées à votre entrepr...

Page 125: ...sen zuerst die Druckluftleitungen getrennt werden bevor die Anschlüsse am Behälter entfernt werden AVERTISSEMENT Avant de débrancher la ligne s assurer que les soupapes de manoeuvre se trouvant sur le réservoir soient fermées Si les valves pneumatiques sont utilisées sur le réservoir alors déconnecter les tubes pneumatiques avant de débrancher les connexions du récipient CAUTION CAUTION Do not all...

Page 126: ...able for 38L Bubbler option Changing the Bubbler This option guides the operator through steps to remove and replace 14 Liter LPE Bubbler Change BLK operation must be performed any time to remove or install the Bubbler To start Change BLK operations At Main Menu scroll to CHEM ON Select START CHANGE BLK button Confirm Sequence Start confirmation button will be displayed Select the Confirmation but...

Page 127: ...rations 3 Select START CHANGE BLK to start the Bubbler change operation 1 NOTE At any time the operation can be terminated by selecting STOP CHANGE BLK from the Main Menu If the Bubbler change operation is stopped before its completion it must be restarted and run thru completion before any of the other operations can be started CHEM ON and External Fill 4 First a supply pressure test and Venturi ...

Page 128: ... coolant ports 13 Disconnect the VCR valve connections on top of the Bubbler 14 Remove empty Bubbler 15 Install new Bubbler and reconnect VCR fittings 16 Connect the coolant lines to the new Bubbler 17 The system will perform an automatic pressure decay leak test check 18 Next post Venturi vacuum purge cycles will be performed followed by a Leak Check Vacuum Rate of Rise test 19 The operator is ne...

Page 129: ...ll rights reserved Confidential and Proprietary Data AD A 7 Bubbler Diagnostics WARNING WARNING Do NOT disconnect any fittings until all chemical has been removed WARNUNG KEINE Verschraubungen lösen bis nicht alle Chemikalien entfernt worden sind AVERTISSEMENT NE PAS détacher les raccords de tuyauterie avant que tout produit chimique no soit extrait ...

Page 130: ...aterials Confidential Table 4 1 Bubbler Change Diagnostics The following are errors that could occur during the Change Bubbler Operation ERROR POSSIBLE CAUSES REMEDY Base Vac Timeout Vacuum Venturi failure Loose VCR connection Check N2 pressure Replace gaskets and re tighten fittings Leak Check Failure Loose VCR fitting Failed valve Replace gaskets and re tighten fitting Replace container Low Push...

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Versum Materials Chemguard Genlll 050, Installation, Operation & Maintenance Manual

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