Chapter 4 - 38 Liter Bubbler Installation
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MNL000625.doc
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06/25/2019
Chemical Equipment
© Versum Materials US, LLC. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Versum Materials Confidential
4.1 38 Liter Bubbler Installation
Confirm the 38 Liter Bubbler is available along with the 3 valve pigtail spools, VB1, VB2
and VB3. Once the Bubbler is installed it will remain in the cabinet unless removed for
maintenance or system de-commission.
NOTE
:
The Change BLK operation is not available for the 38 Liter Bubbler option.
The 38 Liter Bubbler is not designed for routine removal. Should the 38 Liter
Bubbler require removal for maintenance purposes, contact your Versum
Materials representative for instructions.
4.2
Bubbler Valves
NOTE
:
Before installing the 38 Liter Bubbler the Technician should be familiar with
the Bubbler valves prior to opening and closing the manual valves and during
software prompts.
Software prompts to OPEN and/or CLOSE during operation.
38 Liter Bubbler Valves
VB1
Manual Inlet Valve on Dip-tube/Bubbling port
VB2
Manual Outlet Valve on Headspace/Vapor Out port
VB3
Manual external Refill Valve on non Dip-tube port
NOTE:
The 38 Liter Bubbler does not have valves installed onto the Bubbler prior to
shipment. These valves are integrated as part of the pigtails and ship separa tely with the
CG050 cabinet.
