Chapter 5 - Features and Components
_______________________________________________________________________________________________________________
MNL000626.doc
Revision 0
06/25/2019
Chemical Equipment
© Versum Materials US, LLC. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page 5
-
8
Versum Materials Confidential
5.2.3 38 liter Bubbler (Installation is described in Chapter 4)
Bubbler Valve Connections:
•
VB1 Carrier Gas IN Valve Assembly, PN 239613 has ½ inch male VCR connection. Connects
to bubbler carrier gas IN port on dip tube port side of bubbler.
•
VB2 Vapor OUT Valve Assembly, PN 239614 has ½ inch male VCR connection. Connects to
bubbler vapor OUT port on headspace side of bubbler.
•
VB3 Refill IN Valve Assembly, PN 239615 has ½ inch male VCR connection. Connects to the
bubbler refill IN port on dip tube port side of bubbler.
NOTE:
Refill IN port connects to a dip tube in the bubbler that goes to bottom of the
bubbler. This allows for manual back fill of the chemical from the bubbler to
the external refill system should the bubbler need to be maintenance or
removed.
Figure 5-4: Bubbler Valve Assembly Connections
