Chapter 6
– System Operation
MNL000627
Revision 0
06/25/2019
Chemical Equipment
© Versum Materials US, LLC. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page 6
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Versum Materials Confidential
6.1 Theory of Operation
6.1.1 Overview
The ChemGuard® CG050 is designed to deliver vapor mixture from the Bulk bubbler
to the OEM Process Tool by means of bubbling through chemical with process gas,
typically Hydrogen gas. It provides a constant outlet pressure and a constant flow of
mixture without the downtime.
The chemical gas mixture is supplied in either a 14 L third party bubbler (not available
thru Versum Materials) or a Versum materials 38 Liter Bubbler. It is installed in the
area designated Bulk reservoir.
To form the gaseous mixture, gas is introduced through a dip tube to the bottom of the
Bubbler. At the end of the dip tube, a sparer nozzle creates a fine dispersion of gas
bubbles. The Bubbler enhances liquid evaporation by increasing the contact surface
area between the liquid and the gas. The evaporation process depletes the liquid
inventory in the Bubbler which is then automatically refilled.
When the liquid level in the Bubbler goes low the Bubbler is externally refilled from a
Bulk Chemical Delivery System, BCD200, CG010 or CG310. When the liquid level in
the bubbler drops below the Bubbler Start Refill Level which is fo
und in “User
Setpoints” of the Configuration Menu external refill starts and continues until the
Bubbler liquid level reaches Bubbler Stop Refill Level set-point.
While flowing the vapor mixture from the Bubbler to the process tool a constant outlet
pressure must be provided. This is accomplished by the adjustment of regulator R1.
Input pressure is monitored by PT1 and the vapor outlet mixture is monitored by PT2.
When the outlet pressure exceeds the PT2 HP Vent setpoint found in
“User Setpoints”
of the Configuration Menu
a “Vent Pulse” routine will be activated.
A constant pressure must be maintained, to within 5psig of R1 regulator setpoint.
When in the external refill mode the refill pressure from the BCD200, CG010 or
CG310 will exceed the PT2 HP Vent
setpoint and will “Vent Pulse”, refer to figure 6-1.
