Chapter 3 - Installation
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Chemical Equipment
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3.12.2
Bubbler Regulator Creep Test
1. After PT1/PT2 tested and R1 set to user selected pressure setting, open V4 and V1.
Wait 5 mins for pressure to stabilize
2. Document PT1 pressure reading = _________ psig
3. Let CG sit for 1 hours = _________start time _________ stop time
4. The pressure reading should not drift by more than +/-2 psig
5. Record final reading = _________ psig
3.13 Finishing the ChemGuard® Installation
Refer to chapter 4 for the installation and leak test of the 38 Liter bubbler and pigtails.
Refer to addendum A for the installation and Change BLK of the 14 Lit er LPE bubbler
3.13.1
Chemical Delivery Line Certification
1. Verify and confirm the Chemical Delivery Lines have been completed and certified, i.e.
leak check and vacuum purged for a minimum of eight (8) hours to remove any
atmospheric moisture before starting the chemical fill.
2. To perform system vacuum purge, refer to chapter 4
NOTE:
I
t is the end user’s responsibility to purge and evacuate the delivery line from the
Process Tool to the ChemGuard®
cabinet’s output manifold.
3.13.2
Chem On (Bulk Fill) Operation
Confirm with the end user that the ChemGuard® is ready to be placed system in Chem
On and process tool(s) ready to receive chemical
1. To place the Bulk container into fill operation, from the main menu, select BULK.
2.
Select “Start Chem On”. The Controller status box for Bulk will change from white to
green indicating Chem On is enabled and in a Bulk fill, Bulk valves are on, in red and
dash line activated showing chemical flow.
3.
Chem On terminates either by operator selecting “Stop Chem On” or a life safety
shutdown alarm terminates Bulk Fill.
3.13.3
Chemical Fill Out to Tool
NOTE:
Verify the end user has completed the evacuate of the chemical delivery line from
the ChemGuard®
cabinet’s output manifold to the Process Tool.
Recommend the Process Tool(s) controls the Chemical Output Valves V11, V12, V13
and V14 enabling the input signals on the AP1614 Tool Interface PCB, refer to Table
3-4 and 3-5.
