Chapter 2 - Site Preparation
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06/25/2019
Chemical Equipment
© Versum Materials US, LLC. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Versum Materials Confidential
Chapter 2: Site Preparation
This chapter describes the space and clearances required to install ChemGuard®
CG050 systems along with specifications for power, gas, vacuum, cabinet
exhaust, reservoir vent and chemical delivery line.
Before the ChemGuard® CG050 unit can be installed, the customer must prepare
the location site as detailed in the following section to provide sufficient space and
clearance around the unit. Ensure the AC power, vacuum and gas sources are
available in close proximity to the unit. Please read the information in this chapter
carefully to avoid problems later.
The user of this product is responsible for compliance with all applicable
environmental laws and regulations including local governing agencies and
state/local laws (i.e., Clean Water Act, Clean Air Act, and Hazardous Waste
Laws).
The information and data contained herein are proprietary to Versum Materials,
Inc. and are not to be copied, reproduced, duplicated, or disclosed to others, in
whole or in part, without prior written consent of Versum Materials, Inc. The
information and data should be available only to those with a need to know.
Versum Materials, Inc. makes no representation that the information and data is
appropriate for the recipient, and each recipient needs to independently evaluate
the appropriateness of the information and data for its use. This information and
data were originally written in English.
ChemGuard® CG050 hazard location groups include Class I, Division II Groups B,
C, D (United States) and Group 2, Category 3 ATEX (Europe)
If the equipment is used in a manner not specified by the manufacturer, the
protection provided by the equipment may be impaired.
2.1 Facility Preparation
Determine a suitable location for ChemGuard® CG050 cabinet. Versum Materials,
Inc. recommends installing the cabinet in close proximity to:
•
Your AC power source
•
Your vacuum supply
•
Your helium push gas and nitrogen purge gas supplies
