Chapter 6
– System Operation
MNL000627
Revision 0
06/25/2019
Chemical Equipment
© Versum Materials US, LLC. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Versum Materials Confidential
6.3.2 Alarm and Controller Status Boxes
Shutdown alarms in the cabinet appear on the SHUTDOWN ALARM box, located in
the top left hand corner of the screen. Fault alarms appear on the FAULT ALARM
box, located in the top right hand corner of the screen. If <NONE> is displayed, no
alarm conditions are present in the cabinet. A time stamp of when the alarm
occurred will be displayed with each alarm. Alarms can be acknowledged and the
alarm buzzer can be muted by clicking once anywhere on the alarm box. Double
clicking on the alarm text box will clear the alarm.
Figure 6-2: Alarm and Controller Status Box
6.3.3 System Status LEDs
Additionally, LEDs that display ChemGuard® CG050 functions are located to the
right of the LED display. The table below describes these LEDs and their functions.
The fault alarms are indicated by a yellow color and the shutdown alarm is identified
by red.
Figure 6-3: Alarm and Controller Status Box
LED
FUNCTION
SHUTDOWN
ALARM
This LED flashes red on Shutdown alarm.
Once acknowledged, the LED stops flashing
but remains red until it is reset.
FAULT ALARM
This LED flashes yellow on Fault alarm. Once
acknowledged, the LED stops flashing but
remains yellow until it is reset.
CHEMICAL
FLOWING
This LED lights green when Process Fill is
enabled and tool inputs are satisfied.
ARS
– Auto-
Restart
This blue LED lit and in steady state indicates
Auto-Restart option enabled and monitoring
system status. LED flashing blue indicates
Auto-Restart was activated.
POWER
This LED indicates that there is +5 VDC power
to the unit.
