Chapter 6
– System Operation
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MNL000627
Revision 0
06/25/2019
Chemical Equipment
© Versum Materials US, LLC. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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The external fill operation will start when all of the following conditions are met:
•
The X-FILL ON input signal is present at DI38, T1 pins 3 and 4 on the Tool IO board,
AP1614
•
Liquid level in the Bubbler falls below the BUBLR START LEVEL set-point defined in
User Setpoints of Configuration Menu, as shown below
Note, Once liquid level in the Bubbler reaches the BUBLR STOP LEVEL set-point
External fill will end and go back to the enable mode until liquid level again drops below
the BUBLR START LEVEL set-point
•
There are no shutdown alarms that prohibit external fill operation
