Chapter 6
– System Operation
MNL000627
Revision 0
06/25/2019
Chemical Equipment
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Confidential and Proprietary Data
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Versum Materials Confidential
Figure 6-5: ChemGuard
®
CG050 Bulk Vent Mode
Bubbler Process Line Purge Operation (Start PRC PURGE)
Bubbler Process Line Purge operation removes chemical vapor from the CG050 main
process panel and out thru the vapor output line to the process tool. This operation is
primarily used during maintenance operation and should be done before the vapor output
line is disconnected or when the 38 Liter Bubbler needs to be replaced, refer to Figure 6-7.
