Chapter 2 - Site Preparation
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Chemical Equipment
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cables. The presence of oxygen enhances the corrosion effect and may result in deterioration
of controller performance.
Table 2-5:
Supply Gases
H2 IN:
Process Supply
Gas
Hydrogen gas is Ultra High Pure semiconductor-grade recommended. Water
content < 10 ppb and O2 content < 2ppm.
Recommended to use Inert Gas Purifier model # SS2500KFI4RR or equivalent.
Required to install a 0.003 micron gas filter.
Regulated to 620
70 kPa (90
10 psig, 105 psiA)
Cabinet 6.35 mm ( ¼ in.) male VCR connection
Connects to H2 IN port (See Figure 2-2)
For moisture sensitive chemicals, gas requirements are as follows:
Recommended the Water content < 10 ppb and O2 content < 2ppm.
The customer is required to supply all gases with shut-off valves, regulators,
check-valves, filters and/or gas purifier in-line feeding the ChemGuard. Ensure
the required gases are available in close proximity to the ChemGuard installation
site.
WARNING:
DO NOT connect high pressure gas cylinder directly to the cabinet
process/purge gas ports.
N2 IN:
Process Purge
Supply Gas
Nitrogen gas is Ultra High Pure semiconductor-grade recommended. Water
content < 10 ppb and O2 content < 2ppm.
Recommended to use Inert Gas Purifier model # SS2500KFI4RR or equivalent.
Required to install a 0.003 micron gas filter.
Install regulator at N2 IN supply port and regulate to 620
70 kPa (90
10 psig,
105 psiA)
Cabinet 6.35 mm ( ¼ in.) male VCR connection
Connects to N2 IN port (See Figure 2-2)
For moisture sensitive chemicals, gas requirements are as follows:
Recommended the Water content < 10 ppb and O2 content < 2ppm.
The customer is required to supply all gases with shut-off valves, regulators,
check-valves, filters and/or gas purifier in-line feeding the ChemGuard. Ensure
the required gases are available in close proximity to the ChemGuard installation
site.
WARNING:
DO NOT connect high pressure gas cylinder directly to the cabinet
process/purge gas ports.
80 PSI 60 SLPM:
Venturi Vacuum
Supply Gas
Recommended teeing off the N2 Process Purge Gas Supply, see specifications
above
I
nstall regulator at 80 PSI 60 SLPM supply port and regulate to 551 kPa (80 psig,
95 psiA) at 60 liters per minute
Cabinet 6.35 mm ( ¼ in.) female VCR connection
Connect to
80 PSI 60 SLPM
port (See Figure 2-2)
NOTE: N
2
@ 551 kPA results in 100 Torr vacuum with a, minimum 9.4 mm
