Chapter 5 - Features and Components
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MNL000626.doc
Revision 0
06/25/2019
Chemical Equipment
© Versum Materials US, LLC. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page 5
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Versum Materials Confidential
NOTE
: System power will remain on to the ChemGuard® allowing continual monitoring of
system conditions
Figure 5-3: Color Touch Display Screen
NOTE
: The above figure is a typical display screen of the ChemGuard® CG050 Gen III with
a 38 liter bubbler
5.2.2 Liquid Bubbler
The two liquid bubblers are available for use with the CG050:
•
Versum Materia
l’s 38 liter bubbler, PN 477700
The 38 liter bubbler is equipped with a level overfill probe. The overfill probe is
interfaced to the cabinet controller to prevent an overfill condition due to the result
of a component failure, i.e. bubbler scale or the failure of the external fill operation
•
LPE 14 liter bubbler, customer provided
Table 5-1:
ChemGuard
®
CG050 Stainless Steel Reservoir Container Specifications
MODEL
38 LITER (~10.0 GALLONS)
– PN 477700
Chemistry -specific Containers
BULK Container: (manual valves)
14 LITER -
Third Party Bulk Container (manual valves)
