Chapter 2 - Site Preparation
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06/25/2019
Chemical Equipment
© Versum Materials US, LLC. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Versum Materials Confidential
2.2.5
Exhaust and Vent Requirements
NOTE:
Vent line can be installed to the facility exhaust if exhaust is connected to the
appropriate abatement system for the chemical used. Versum Materials, Inc.
recommends facility exhaust controls/abatement in lieu of on-board (localized)
controls/abatement system.
The reservoir vent function allows removal of pressure from the Reservoir Container. The
vent should be connected to the appropriate abatement system for chemical used. Ventilation
measurements should be made at a distance of four (4) duct diameters from the cabinet.
Versum Materials, Inc. recommends that ducting be made from zinc-plated steel, with
operation at static pressure of 0.7 in. of water.
NOTE:
If your installation has the combustible, lower explosion limit (LEL) vapor-detector
option, see facilities requirements and Appendix F.
W
ARNING: Venturi exhaust
contains chemical vapor. Exhaust
must be connected to the
appropriate abatement system for
chemical used
.
WARNUNG: Die Abgase
enthalten chemische Dämpfe.
Pumpenabgase müssen über ein
für das jeweilig Chemikal
geeignetes Abgassystem
abgeführt warden.
AVERTISSEMENT: Le tuyau
d’échappement de la pompe
contient des vapeurs chimiques.
Le tuyau d’échappement doit être
connecté à un système de
réduction adéquat au produit
chimique utilize
