Chapter 3 - Installation
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MNL000624.doc
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06/25/2019
Chemical Equipment
© Versum Materials US, LLC. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Table 3-6:
Tool Input
– Chem On
Digital
Input #
Input Label
AP1614
DB25 Bulkhead
Connector
TB1-TB4
CONFIGURATION
37
Process Tool
– (V11) Chemical
Vapor Flow enable
TB1; 1&2
Dry Contact
J1; 20&22
NOTE:
Input 37 must be closed in order to enable Process Tool, Chemical Vapor Flow
enable. If input not present “Waiting On Tool Signal” prompt will be generated and
prevent Process Flow
Table 3-7:
External Refill
Digital
Input #
Input Label
AP1614
TB1
CONFIGURATION
38
XFILL ON
– from BCD200, CG010 or CG310
Input must be closed to enable/start XFILL
operation to refill Bubbler or a “WAITING ON
X_FILL SIGNAL” prompt will be displayed
TB1; 3&4
Dry Contact
3.8.3
Connecting Digital Outputs
Outputs; max. 1A @ 24vdc
Table 3-8:
Life Safety Outputs
Digital
Output #
Output Label
AP1614
TB15
CONFIGURATION
9
Exhaust
1
N/O
2
Common
3
N/C
10
Cabinet Spill
– Dual Floats
4
N/O
5
Common
6
N/C
11
FIRE
• Heat ROR
• UVIR (option)
7
N/O
8
Common
9
N/C
12
Door Open
10
N/O
11
Common
12
N/C
