Chapter 2 - Site Preparation
MNL000623.doc
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06/25/2019
Chemical Equipment
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Confidential and Proprietary Data
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Versum Materials Confidential
Ensure that there is ample space to allow the cabinet doors to open completely and that there is
proper clearance around the unit. (See Table 2-1 for required cabinet clearances.) If an optional
fire extinguisher is installed, additional clearance may be required.
Table 2-1:
Cabinet Clearances
PLACEMENT
CLEARANCES
Height
87 in. (2.209 meters)
Width
18 in. (457 mm)
Depth
Door open: 37 in. (940 mm)
Door closed: 21 in. (533 mm)
2.1.1
Bolt-Down and Ground Cabinet Requirements
Set the ChemGuard® CG050 cabinet over the bolt-down points and attach
securely. Verify ChemGuard® CG050 is in a level location where it can be
serviced easily, and is out of the main thoroughfare.
Per current United States UBC and SEMI S2-STANDARD requirements, floor
bolts must be at least Grade 5 (metric Grade 8.8), at a recommended minimum
length of 2.5 in. (6.35 cm).
1. Place the cabinet at the designated location.
2. Verify that there is enough room around the cabinet to fully open the door, or
perform maintenance tasks.
3. The ChemGuard® CG050 must be grounded in accordance with Article 250 -
Grounding, The National Electrical Code 2003. Refer to Figure 2-1 for the
location of the grounding lug. Versum Materials, Inc. recommends a ground
resistance of <1.0 Ohms.
