Chapter 2 - Site Preparation
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06/25/2019
Chemical Equipment
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Confidential and Proprietary Data
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Versum Materials Confidential
Table 2-6:
Exhaust and Vent Requirements
EXHAUST
101.6 mm (4 in.) diameter circular duct
Cabinet Exhaust Flow/Pressure Set Point: 850 Liter/minute (30 CFM) minimum
recommended
Connect to the appropriate abatement system for chemical used.
It is recommended to install the Exhaust line perpendicular and/or above the main
abatement duct. DO NOT ENTER BELOW THE MAIN ABATEMENT DUCT TO AVOID
LIQUID TRAP
VENT:
Venturi
Vacuum
Exhaust
Connect to the appropriate abatement system for chemical used
Cabinet 12.70 mm (½ in.) female VCR connection
Connects to
VENT port (See Figure 2-2)
Vent line is to be connected directly to the main abatement duct and not the
ChemGuard exhaust duct.
It is recommended to install the Vent line perpendicular and/or above the main
abatement duct. DO NOT ENTER BELOW THE MAIN ABATEMENT DUCT TO AVOID
LIQUID TRAP
2.2.6
Chemical Vapor Delivery Line Requirements
The end user must have knowledge of process flow requirements, prepare flow calculations
for sufficient flow and have a carefully designed layout plan for the installation of the
ChemGuard® CG050 cabinet
– preferably at a central location where the facilities will meet the
process tool requirements. Proper facilitation and installation will reduce and avoid potential
failures, tool downtime and rework costs.
Chemical delivery line to each process tool(s) should be designed and install with minimum
distance in vertical rise (height) and horizontal length between ChemGuard® CG050 cabinet
and the process tool (s) to meet process operating pressure and flow rate required of the
process tool (s). Refer to Chemical Delivery Line Requirements Postion paper _ DOC000140
NOTE:
All che
mical delivery line requirements are the customer’s responsibility. Versum
Materials, Inc. recommends installing coaxial Chemical Delivery Lines. Versum
Materials, Inc. recommends customer install a lockable shutoff valve on the
chemical delivery line, to comply with OSHA lockout/tagout requirements.
The customer provides the chemical delivery line. All bends should meet SEMATECH
standards for bend radius.
The chemical line should be helium leak-checked, purged, cleaned and certified prior to
installing and chemical introduction.
The chemical delivery line is connected to the chemical output manifold and is then directed
to the Process Tool’s chemical input manifold.
