Chapter 2 - Site Preparation
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MNL000623.doc
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06/25/2019
Chemical Equipment
© Versum Materials US, LLC. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Versum Materials Confidential
2.2.1
Environmental Requirements
The customer is responsible for compliance with applicable environmental laws and
regulations, including local governing agencies and state/local laws (i.e. Clean Water Act,
Clean Air Act, Hazardous Waste Laws).
Table 2-2:
Environmental Requirements
CONDITION
RANGE
Environmental
Operating Temperature: 0ºC to 40ºC
Humidity: 5% to 95% RH, non-condensing
Temperature must be compatible with chemical used.
Lighting
Minimum of 300 lux of illumination
2.2.2
Electrical Requirements
Versum Materials, Inc. recommends connection to an Uninterrupted Power Supply (UPS) and
a Ground-Fault circuit Interrupter (GFCI). Versum Materials, Inc. recommends that customer
electrically ground the ChemGuard® CG050 cabinet and plumbing.
SEMI S2 requires a lockout type circuit breaker setup for the AC power. OSHA standards
require customer to install lockout-type, 10K interrupt current (AIC) circuit breaker for AC
power. Recommend placement of breaker 1
– 10 meters (3 – 32 ft.) from BCD.
Per SEMI S2 requirements, all electrical work for ChemGuard® CG050 GEN III is Type 1 and
Type 2.
Type 1 = Equipment fully de-energized
Type 2 = Equipment is energized
S2 requires a lockout type circuit breaker setup for the AC power.
WARNING:
Live circuits are covered and/or insulated, Lockout / Tagout is required while work is performed at a remote
location to preclude accidental shock.
