Chapter 2 - Site Preparation
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MNL000623.doc
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06/25/2019
Chemical Equipment
© Versum Materials US, LLC. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Versum Materials Confidential
(3/8 in.) vent line
The customer is required to supply all gases with shut-off valves, regulators,
check-valves, filters and/or gas purifier in-line feeding the ChemGuard. Ensure
the required gases are available in close proximity to the ChemGuard installation
site.
SAMPLE
OUT/PURGE IN:
Purge Gas for
Outlet Manifold
Recommended teeing off the N2 Process Purge Gas Supply, see specifications
above
Install regulator at SAMPLE OUT/PURGE IN port and regulate to 140-275 kPa
(20-40 psig)
Cabinet 6.35 mm (¼ in.) female VCR connection
Connects to SAMPLE OUT/PURGE IN port (See Figure 2-2)
The customer is required to supply all gases with shut-off valves, regulators,
check-valves, filters and/or gas purifier in-line feeding the ChemGuard. Ensure
the required gases are available in close proximity to the ChemGuard installation
site.
NOTE: The Output Manifold allows the cabinet to feed the gas mixture to the
process tool as well as a sample/purge IN port simultaneously. Manual
sample/purge port is also available. The house line can be plumb and ready to
use by opening either of the manual valves
PNEUMATIC
SUPPLY
Nitrogen gas is semiconductor-grade or better is recommended.
Regulated to 620
70 kPa (90
10 psig)
Cabinet 6.35 mm ( ¼ in.) Swagelok connection
Connects to PNEUMATIC port, coarse filter recommended (See Figure 3-2)
A pneumatic supply of inert gas without oxygen is recommended for our
controllers.
It is strongly advised to not use clean dry air for pneumatic
supply.
The pneumatic supply may be shared in the controller between the
pneumatic solenoids and the enclosure inerting/pressurizing service (Z-purge).
Based on results from DC power harness testing, clean dry air may promote the
corrosion of electrical connectors for interconnecting power cables. The presence
of oxygen enhances the corrosion effect and may result in deterioration of
controller performance.
The customer is required to supply all gases with shut-off valves, regulators,
check-valves, filters and/or gas purifier in-line feeding the ChemGuard. Ensure
the required gases are available in close proximity to the ChemGuard installation
site.
