4-3
Positional Deviation Measurement
4
NO
±15°
±30°
±45°
360°
REGISTER NO.
15
14
13
12
11
10
09
08
07
06
05
04
03
02
01
00
×
S
× × × × × ×
× × × × × × × ×
STANDARD
HIGH
NO
1P-SCH
2P-SCH
1P-EDGE
2P-EDGE
1P-SCH+1P-EDGE
F C1 BRT
MEAS CND
SCREEN
COND
SAVE
BLUE
SET=SELECT A MENU FOR ESC=BACK SEL=CHNG IMG TRG=FUNC
1
DTECT PRECISION STANDARD
2
REGISTER NO.
0(0
〜
7)
3
MODE
1P-SCH
4
DTECT ANGL
±
15
°
5
ANGLE UNIT
10
6
MDL 0
7
MDL 1
DTECT PRECISION
Select detection precision. You can select one of
two levels (standard/high), according to your
conditions, the desired precision level for
detection results, and the detection speed.
For details, see page 3-20.
REGISTER NO.
Enter a register number. When making positional
deviation measurements, you can select any
register from 0 to 7 (a total of 8 registers).
MODE
Select a mode for detection.
The details of each mode are as follows.
Gray search
See page 3-20.
Edge detection
See page 3-25.
DTECT ANGL and
ANGLE UNIT
When the "1P-SCH" or "1P-SCH + 1P-EDGE" is selected in "
MODE," you can specify angle
detection.
For details about angle detection, see page 4-12.
Select a detection range on the "
DTECT ANGL" line and select the units at "
ANGLE UNIT."
REGISTER NO. (
MDL 0,
MDL 1)
The specified modes are displayed for each register number on these lines. When a 1-point search
or 1-point edge is specified, only "
MDL 0" will be available. When a 2-point search, 2-point edge,
or 1-point search and 1-point edge is specified, "
MDL 1" is also available.
The "S" in the table indicates a gray search, and the "E" indicates edge detection. "X" means not
used.
• An example of mode settings
00 01 02 03 04 05 06 07 08 09 10 11 12 13 14 15
S S S E E × × ×
S × E E × × × ×
REGISTER NO.
3
MDL0
4
MDL1
S
:
Gray search
E
:
Edge detection
×
:
No setting
REGISTER0 : 2P-SCH
REGISTER1 : 1P-SCH
REGISTER2 : 1P-SCH + 1P-EDGE
REGISTER3 : 2P-EDGE
REGISTER4 : 1P-EDGE
Detection Mode
Details
Usable models
NO (None)
Does not detect.
1P-SCH
(1-point search)
Detect the positional deviation of one point in the
scanned image compared to a single reference image,
after performing a gray search.
Model 0 only
2P-SCH
(2-point search)
Detect the positional deviation of two points in the
scanned image compared to two reference images,
after performing a gray search.
Model 0 and 1
1P-EDGE
(1-point edge)
Detect the positional deviation of one point in the
scanned image compared to a single reference image,
after performing edge detection.
Model 0 only
2P-EDGE
(2-point edge)
Detect the positional deviation of two points in the
scanned image compared to two reference images,
after performing edge detection.
Model 0 and 1
1P-SCH + 1P-EDGE
(1-point search and
1-point edge)
Detect the positional deviation of two points, one point
after performing a gray search and one point after
performing edge detection.
Model 0 and 1