Setting the Conditions for Each Object Type
3-7
3
4. After selecting the color filter, press the ESC
key and return to the "MEASUREMENT 1"
screen. Now, specify details of the measure-
ment program.
* In this example, select "POSI-DEVIATION"
(positional deviation measurement).
For details about positional deviation
measurement, see page 4-1.
Ex.: When "1P-SCH" (one point search) is selected on the "
MODE."
1. On the "MEAS CND" screen, select
"
MODE" and from the popup menu, select
"1P-SCH."
2. On the "
MLD 0" line, move the cursor to a
cell on the "REGISTER NO 00" row and press
the SET key to enter "REG COND" screen.
1
COLOR MODE
2
COLOR FILTER SET
3
MEAS SELECTION
SET
=SELECT A MENU ESC=BACK SEL=CHNG IMG TRG=FUNC
RED F C1 BRT
MEASUREMENT1 SCREEN COND SAVE
COLOR FILTER
(TO NEXT SUB-MENU)
POSI-DEVIATION
NO
POSI-DEVIATION *
CHK-DEG-MATCH
INSPECT-LEAD
INSPECT-BAG/CSP
MEAS-BIN-AREA
CNT-BIN-OBJ
LABEL-BIN-OBJ
POINT-MEAS
MULTI-POSI
MULTI MATCHES
INSPECT NG
15
14
13
12
11
10
09
08
07
06
05
04
03
02
01
00
×
S
× × × × × ×
× × × × × × × ×
1
DTECT PRECISION STANDARD
2
REGISTER NO.
0 (0
〜
7)
3
MODE
1P-SCH
4
DTECT ANGL
NO
REGISTER NO.
5
MDL 0
6
MDL 1
RED F C1 BRT
MEAS CND
SCREEN COND SAVE
NO
1P-SCH
1P-EDGE
2P-EDGE
1P-SCH+1P-EDGE
15
14
13
12
11
10
09
08
07
06
05
04
03
02
01
00
×
S
× × × × × ×
× × × × × × × ×
1
DTECT PRECISION STANDARD
2
REGISTER NO.
0 (0
〜
7)
3
MODE
1P-SCH
4
DTECT ANGL
NO
REGISTER NO.
5
MDL 0
6
MDL 1
SET
=SELECT A MENU ESC=BACK SEL=CHNG IMG TRG=FUNC
RED F C1 BRT
MEAS CND
SCREEN COND SAVE