1-27
Setting and Operating Outline
1
No
No
No
Yes
Yes
No
Yes
Yes
(*2)
The window coordinates are
corrected within the range set for
each type of measurement,
based on the correction value
determined in the steps marked with
*2.
Was an error detected?
Was an error detected?
Was an error detected?
Executing measurement 1
Executing measurement 2
Executing measurement 3
Setting the coordinate correction
values (X, Y,
q
)
Positional correction
[Measurement programs that can be
selected]
- Positional deviation measurement
- Degree of match inspection
- Lead inspection
- BGA/CSP inspection
- Area measurement by binary
conversion
- Counting by binary conversion
- Object identification by binary
conversion
- Color evaluation
- Color unevenness inspection
- Color positional measurement
- Point measurement
- Multiple positional measurements
- Multiple degree of match inspection
- Fault inspection
1
(From the preceding page)
2
(From the preceding page)
Yes
Yes
Yes
No
No
Yes
No
No
Message display
PC calculation
Displaying the measurement results
(values, decisions etc.)
Message display
Error display
Display pattern after correction
Pattern display
Positional correction yes
Display pattern when setting
No
Yes
Was an error detected?
Executing measurement 4
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