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ii.
Click any selection you want.
iii.
Select stage model number you use among stage list.
Selecting stage model number, its Initial value of stage appears.
※ When need different value, input any value you want directly.
iv.
Repeat ⅱ~ⅲ, select any axis and value.
v.
Click [Apply].
Saving screen of parameter appears.
Summary of Contents for DS102MS
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