LS ELECTRIC L7NHF Series, User Manual

Page: 106 / 409

4. CiA402 Drive Profile
4-38
4.7
Touch Probe Function
The touch probe is a function that rapidly captures the position value of the encoder with external input
(PROBE 1 and 2) signals or the index (Z) pulse of the encoder.

Example of Touch Probe
Wafer mapper system of wafer transfer robot (WTR)
When wafers are piled up on a wafer stack, the presence of wafers can be determined by scanning
the stack once using a mapping sensor. At this time, any unnecessary movement by the robot can be
prevented using the value of the wafer loading position, which has been captured rapidly.
Sensor
Motor
Wafer Stack
Touch
Probe
Function
Touch Probe Function(0x60B8)
Touch Probe 1
Touch Probe 2
Index(Z) Pulse
Touch Probe 1 Negative edge position
value (0x60BB)
Touch Probe 2 Positive edge position
value (0x60BC)
Touch Probe 2 Negative edge position
value (0x60BD)
Touch Probe 1 Positive edge position
value (0x60BA)
Touch Probe Status (0x60B9)
The position value of the encoder (Position Actual Value, 0x6064) is latched by the following trigger
events according to the setting value. At the same time, 2 channel inputs can be latched independently
at the positive/negative edges.

Triggered by touch probe 1 (I/O, PROBE1)

Triggered by touch probe 2 (I/O, PROBE2)

Triggered by the encoder index (Z) pulse