Installation
SiEN34-705
42
General Information
4. Calibration method
1. Connect a Pirani vacuum gauge and the gauge manifold vacuum gauge (0 - 760 mmHg) to
the vacuum pump at the same time, and run the pump for about 3 minutes.
2. Make sure the reading of the Pirani vacuum gauge is 5 Torr (667 Pa) or less. The reading of
conventional vacuum pumps lowers to about 0.2 Torr.
If the reading is not 5 Torr or less, check the vacuum pump oil. (Oil is low in many cases.)
3. Check the attached gauge on the gauge manifold. Adjust the gauge if the reading is not
exactly correct.
4. Adjust the gauge manifold valve so that the Pirani vacuum gauge reads 5 Torr.
5. Mark the position indicated by the gauge manifold gauge with an oil based ink pen.
6. Use the mark of the gauge manifold as a target when vacuuming in the field.
(Reference) Types of vacuum pump with respective maximum degree of vacuum
Type
Maximum Degree of Vacuum
Use
Expulsion Capacity Vacuum Drying
Air Expulsion
Oil Rotary
(Oil Using)
0.02 mmHg
100 l/min
Suitable
Suitable
Oilless Rotary
(No Need of Oil)
10 mmHg
50 l/min
Unsuitable
Suitable
0.02 mmHg
40 l/min
Suitable
Suitable
←
Many handy
pumps fall into this
category
Gauge manifold
Pirani vacuum gauge
Vacuum pump
Indicator
Pressure detection section
Fig. 1
Содержание RXYQ5PY1
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