SiEN34-705
Installation
General Information
41
(2) Degree of vacuum
Ultimate vacuum varies largely according to use of the vacuum pump. Vacuum pumps used
for vacuum forming cannot be used for vacuum drying. (A vacuum pump with a high degree
of vacuum is required.)
When selecting a vacuum, you should select one which is capable of achieving 0.2 Torr of
ultimate vacuum.
Degree of vacuum is expressed in Torr, micron, mmHg, and Pascal (Pa). The units correlate
as follows:
2. Vacuum pump maintenance
Because of their nature, most vacuum pumps contain large amounts of oil which lubricates
bearings, etc., and functions to enhance airtightness of pistons. When using a vacuum pump to
discharge air from refrigerant piping, moisture in the air tends to get mixed in with the oil. You
must therefore change oil periodically and make sure the proper oil level is maintained.
(Perform periodic inspections in accordance with the operating instructions.)
3. Degree of vacuum measurement
An extremely accurate vacuum gauge is required to test degree of vacuum. You cannot
accurately measure degree of vacuum with the compound gauge on the gauge manifold. A
Pirani vacuum gauge is required to measure degree of vacuum accurately. Because Pirani
gauges are very sensitive and require extreme care when using, they are not very suitable for
use in the field. You should therefore use the Pirani gauge to calibrate the attached vacuum
gauge on the gauge manifold and the degree of vacuum of the vacuum pump.
Unit
Standard atmospheric pressure
Perfect vacuum
Gauge Pressure
kg/cm2
0
–1.033
Absolute Pressure
kg/cm2 abs
1.033
0
Torr
Torr
760
0
Micron
Micron
760000
0
∗
mmHg
mmHg
0
760
Pa
hPa
1013.33
0
(V0992)
760 Torr
1013.33 hPa
0 mmHg
Standard atmospheric pressure760
5 Torr
667 Pa
755 mmHg
Vacuum target value5
0 Torr
0 Pa
760 mmHg
Perfect vacuum0 Torr
Degree of vacuum must be within the range expressed by
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