Mitsubishi Electric MR-J4W2, Instruction Manual

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17. APPLICATION OF FUNCTIONS
17 - 51
(8) Compliance with SEMI-F47 standard
POINT
The control circuit power supply of the MR-J4W_-_B 200 W or more servo
amplifier can comply with SEMI-F47 standard. However, a back-up capacitor
may be necessary for instantaneous power failure in the main circuit power
supply depending on the power supply impedance and operating situation. Be
sure to check them by testing the entire equipment using actual machines.
Use a 3-phase for the input power supply of the servo amplifier. Using a 1-
phase 200 V AC for the input power supply will not comply with SEMI-F47
standard.
The MR-J4W2-0303B6 servo amplifier is not compatible with SEMI-F47
standard.
The following explains the compliance with "SEMI-F47 semiconductor process equipment voltage sag
immunity test" of MR-J4 series.
This function enables to avoid triggering [AL. 10 Undervoltage] using the electrical energy charged in the
capacitor in case that an instantaneous power failure occurs during operation.
(a) Parameter setting
Setting [Pr. PX25] and [Pr. PX28] as follows will enable SEMI-F47 function.
Parameter
Setting
value
Description
PX25 _ 1 _ _ SEMI-F47 function selection
PX28 200
Set the time [ms] until the occurrence of [AL. 10.1 Voltage drop in the control
circuit power].
Enabling SEMI-F47 function will change operation as follows.
1) The voltage will drop in the control circuit power at "Rated voltage × 50% or less". After 200 ms,
[AL. 10.1 Voltage drop in the control circuit power] will occur.
2) [AL. 10.2 Voltage drop in the main circuit power] will occur with 158 V DC or less in bus voltage.
3) MBR (Electromagnetic brake interlock) will turn off when [AL. 10.1 Voltage drop in the control
circuit power] occurs.
(b) Requirement of SEMI-F47 standard
Table 17.6 shows the permissible time of instantaneous power failure for instantaneous power
failure of SEMI-F47 standard.
Table 17.6 Requirement of SEMI-F47 standard
Instantaneous power
failure voltage
Permissible time of
instantaneous power
failure [s]
Rated voltage × 80% 1
Rated voltage × 70% 0.5
Rated voltage × 50% 0.2