3-32
INTEGRA Operations Revision A
7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
MEGASONIC HI FLOW
(second or right icon
position)
Flow Sensor (same sensor as Low
Flow):
On the floor, bottom level of
the machine, next to the regulator
valve panel. Settings are made in a
control box for both high and low
flow.
Icon is
green
when the DI water
flow to the megasonic arm is too
high to sustain proper cleaning.
Generates Alarm 89 (may be
Alarm 69 if this follows an
emergency stop).
MEG Z TOP SENSOR
Optical Interrupt, Flag Sensor
:
At the
rear of the system next to the spin
bowl. Located on the upper end of
the spindle plate mounted to the Z-
axis (vertical) spindle.
Screen icon is
green
when the
Megasonic arm’s Z-axis is in the
up position.
MEG Z BOTTOM SENSOR
Optical Interrupt, Flag Sensor
:
At the
rear of the system next to the spin
bowl. Located on the lower end of
the spindle plate mounted to the Z-
axis (vertical) spindle.
Screen icon is
green
when the
Megasonic arm’s Z-axis is in the
down/process position.
MEG Z EXTEND SENSOR
Hall Effect (magnetic) Sensor:
At the
rear of the system, next to the spin
bowl, adjacent to the wall of Brush
Station #2. Horizontally mounted
on the megasonic air cylinder.
Screen icon is
green
when the Z-
axis is extended. When the
Megasonic arm moves from the
drip tray, out to the edge of the
wafer, the arm is in the extend
position.
FINGER OPEN SENSOR
Optical Interrupt, Flag Sensor
:
Under the Spin Station, attached
to the pneumatic cylinder which
controls the fingers. Detects the
positional status of the spindle
fingers.
Screen icon is
green
when the
spindle fingers are OPEN and
red
when the fingers are not
OPEN.
FINGER CLOSED
SENSOR
Optical Interrupt, Flag Sensor
:
Under the Spin Station, attached
to the pneumatic cylinder which
controls the fingers. Detects the
positional status of the spindle
fingers.
Screen icon is
green
when the
spindle fingers are CLOSED,
indicating that a wafer is not
present. Icon is
red
when the
fingers are not
CLOSED
When a wafer is present, the
flag is between the FINGER
OPEN and CLOSED sensors
and both sensor icons are
red
.
CARRIAGE RETRACT
SENSOR
Optical Interrupt, Flag Sensor:
On the
swing arm assembly attached to the
carriage moment motor. Sensor is
on front of motor mount in the flag
travel path. Sensor detects the
position of the carriage.
Icon is
green
when the carriage is
completely retracted from over
the catch cup (so the wafer can
be lowered) and
red
when the
carriage is not completely
retracted.
SENSOR NAME
TYPE AND LOCATION
FUNCTION
Содержание Synergy Integra
Страница 8: ......
Страница 24: ...1 4 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Страница 38: ...2 14 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Страница 222: ...9 62 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...
Страница 314: ...10 76 INTEGRA Operations Revision A 7 26 00 20 0200 231 CR 20 0200 232 Std 20 0200 251 CD...